JP2785598B2 - Reverse mechanism for thin plate transport - Google Patents

Reverse mechanism for thin plate transport

Info

Publication number
JP2785598B2
JP2785598B2 JP20765892A JP20765892A JP2785598B2 JP 2785598 B2 JP2785598 B2 JP 2785598B2 JP 20765892 A JP20765892 A JP 20765892A JP 20765892 A JP20765892 A JP 20765892A JP 2785598 B2 JP2785598 B2 JP 2785598B2
Authority
JP
Japan
Prior art keywords
transport
thin plate
rotation
pair
pinion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20765892A
Other languages
Japanese (ja)
Other versions
JPH0661275A (en
Inventor
雅美 合田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP20765892A priority Critical patent/JP2785598B2/en
Publication of JPH0661275A publication Critical patent/JPH0661275A/en
Application granted granted Critical
Publication of JP2785598B2 publication Critical patent/JP2785598B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は薄板搬送機構に関し、特
に短冊状の薄板をベルト搬送し且つ表裏反転させる機能
を兼ね備えた機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin plate transport mechanism and, more particularly, to a mechanism having a function of transporting a strip-shaped thin plate with a belt and reversing the front and back.

【0002】[0002]

【従来の技術】従来の薄板搬送における表裏反転機構
は、図3に示すように、搬送ラインL上をA部からB1
部に搬送した薄板をB1部にて真空吸着または把持し、
L軸とは異なるL1軸を回転中心とするハンドラーで1
80度回転させて表裏反転後、L2軸状のB2部に乗せ
換える機構であった。
2. Description of the Related Art Conventionally, as shown in FIG.
The thin plate conveyed to the part is vacuum-sucked or gripped in part B1,
Handler with L1 axis different from L axis as rotation center is 1
The mechanism was such that it was turned 80 degrees, turned over, and then replaced on the L2 axis-shaped B2 portion.

【0003】[0003]

【発明が解決しようとする課題】この従来の表裏反転機
構では、薄板を吸着または把持するハンドリング移載機
構が必要であり、このハンドリング移載機構の回転軸が
搬送ラインと異なるため、B1部からB2部への移載が
必ず行なわれ、搬送ラインがL軸とL2軸で異なってし
まう。また、反転・移載が必然的に行われてしまい、表
裏反転の実施を任意に選択することが困難である、など
の問題点があった。
In the conventional reversing mechanism, a handling transfer mechanism for sucking or gripping the thin plate is required, and since the rotation axis of the handling transfer mechanism is different from that of the transport line, the handling transfer mechanism is moved from the position B1. The transfer to the part B2 is always performed, and the transport line is different between the L axis and the L2 axis. In addition, there has been a problem that inversion / transfer is inevitably performed, and it is difficult to arbitrarily select to perform the inversion.

【0004】[0004]

【課題を解決するための手段】本発明の薄板搬送におけ
る表裏反転機構は、搬送ライン上に設けられ搬送対象で
ある薄板をベルトによって上下に挟む左右1対の搬送機
構と、この1対の搬送機構を前記搬送ラインの中心軸上
にて180度回転させるピニオン部と、このピニオン部
の回転を案内する軸受部と、前記ピニオン部に噛み合い
往復運動して前記ピニオン部の回転運動を惹起するラッ
ク部と、このラック部を往復運動させるべく駆動する駆
動源とを備えており、また前記左右1対の搬送機構の相
互間の間隔を調節自在とする幅調整機構を有していても
よいし、更に前記前記搬送機構の回転動作の要・不要を
任意に選択できる構成となっていてもよい。
According to the present invention, a sheet reversing mechanism for transferring a thin plate comprises a pair of right and left transfer mechanisms provided on a transfer line and vertically sandwiching a thin plate to be transferred by a belt, and the pair of transfer mechanisms. A pinion portion for rotating a mechanism by 180 degrees on the center axis of the transport line, a bearing portion for guiding the rotation of the pinion portion, and a rack meshing with the pinion portion to reciprocate to cause the pinion portion to rotate; And a drive source for driving the rack unit to reciprocate the rack unit, and may have a width adjusting mechanism that can adjust a distance between the pair of right and left transport mechanisms. Further, the configuration may be such that the necessity / unnecessity of the rotation operation of the transport mechanism can be arbitrarily selected.

【0005】[0005]

【実施例】次に、本発明について図面を参照して説明す
る。図1は本発明の一実施例を示し(a)は正面図、
(b)は部分断面を含む側面図、図2は本実施例による
薄板の搬送状態を概念的に示す図で、(a)は平面図、
(b)は側面図である。
Next, the present invention will be described with reference to the drawings. FIG. 1 shows an embodiment of the present invention, (a) is a front view,
FIG. 2B is a side view including a partial cross section, FIG. 2 is a view conceptually showing a state of transporting a thin plate according to the present embodiment, FIG.
(B) is a side view.

【0006】本実施例は半導体の製造工程において、搬
送ラインL上で短冊状の薄板であって搬送対象のリード
フレーム6を上下方向からエンドレスのベルト1a によ
って挟み、ベルト1a をスプロケット1b と電動モータ
c で駆動する左右1対の搬送機構1をリードフレーム
6の両側面に配置し、この1対の搬送機構1の相互の間
隔を任意のリードフレーム幅に対応するように副調整し
て位置決めする搬送機構幅調整機構5を介してピニオン
部2に結合する。ピニオン部2は搬送ラインLの中心軸
上にて180度回転するもので、その回転運動は軸受部
4で支持され、図示しない、アクチュエータに駆動され
て矢印F方向に動くラック部3の往復運動に連結して回
転運動が起る構成となっている。
[0006] The present embodiment in the semiconductor manufacturing process, sandwiched by the strip-shaped thin plate in a endless belt the lead frame 6 of the transport object the vertically 1 a on the conveying line L, and the belt 1 a sprocket 1 b electric motor 1 conveyance mechanism 1 a pair of left and right driven by c arranged on both sides of the lead frame 6, corresponding as auxiliary adjusting the mutual spacing of the conveying mechanism 1 of the pair to any of the lead frame width Then, it is connected to the pinion unit 2 via the transport mechanism width adjusting mechanism 5 for positioning. The pinion 2 rotates 180 degrees on the center axis of the transfer line L. The rotation of the pinion 2 is supported by a bearing 4, and the rack 3 moves in the direction of arrow F when driven by an actuator (not shown). And a rotational movement occurs.

【0007】図2に本実施例によるリードフレーム6の
搬送状態を示す。搬送ラインL上をA部からB部に搬送
したリードフレーム6は、B部において上述したピニオ
ン部2の回転運動による搬送機構1の回転によって18
0度回転し表裏反転後、A部・B部と同一の搬送ライン
L上を次工程のC部へと搬送される。なお、リードフレ
ーム6の表裏反転動作が不要なときには、B部における
搬送機構1の回転を実施しなければよく、従って表裏反
転動作は任意に選択することができる。
FIG. 2 shows a transport state of the lead frame 6 according to the present embodiment. The lead frame 6 transported from the portion A to the portion B on the transport line L is moved by the rotation of the transport mechanism 1 due to the rotation of the pinion portion 2 at the portion B.
After rotating by 0 degrees and turning over, the sheet is conveyed to the next step C section on the same conveyance line L as the A section and the B section. When the reversing operation of the lead frame 6 is unnecessary, the rotation of the transport mechanism 1 in the portion B is not required to be performed, and therefore, the reversing operation can be arbitrarily selected.

【0008】[0008]

【発明の効果】以上説明したように本発明は、搬送機構
全体を薄板の搬送中心軸に対して180度回転する構造
としたので、薄板のハンドリング機構を不要とし、かつ
一直線状の搬送を可能とする効果がある。さらに、表裏
反転動作を任意に選択することも可能となる。
As described above, according to the present invention, since the entire transport mechanism is configured to rotate by 180 degrees with respect to the transport center axis of the thin plate, a thin plate handling mechanism is not required, and a straight transport can be performed. Has the effect. Further, it is possible to arbitrarily select the front / back inversion operation.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示し、(a)は正面図、
(b)は部分断面を含む側面図である。
FIG. 1 shows an embodiment of the present invention, wherein (a) is a front view,
(B) is a side view including a partial cross section.

【図2】本発明の実施例による薄板の搬送状態を概念的
に示す図で、(a)は平面図、(b)は側面図である。
FIGS. 2A and 2B are diagrams conceptually showing a transport state of a thin plate according to an embodiment of the present invention, wherein FIG. 2A is a plan view and FIG. 2B is a side view.

【図3】従来の薄板の搬送・表裏反転方式を概念的に示
す図で、(a)は平面図、(b)は側面図である。
3A and 3B are diagrams conceptually illustrating a conventional thin plate transport / front / reverse method, in which FIG. 3A is a plan view and FIG. 3B is a side view.

【符号の説明】[Explanation of symbols]

1 搬送機構 1a 搬送ベルト 1b スプロケット 1c 電動モーター 1d 搬送ガイド 2 ピニオン部 3 ラック部 4 軸受部 5 搬送機構幅調整機構 6 リードフレームReference Signs List 1 transport mechanism 1 a transport belt 1 b sprocket 1 c electric motor 1 d transport guide 2 pinion section 3 rack section 4 bearing section 5 transport mechanism width adjustment mechanism 6 lead frame

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 搬送ライン上に設けられ搬送対象である
薄板をベルトによって上下に挟む左右1対の搬送機構
と、この1対の搬送機構を前記搬送ラインの中心軸上に
て180度回転させるピニオン部と、このピニオン部の
回転を案内する軸受部と、前記ピニオン部に噛み合い往
復運動して前記ピニオン部の回転運動を惹起するラック
部と、このラック部を往復運動させるべく駆動する駆動
源とを備えることを特徴とする薄板搬送における表裏反
転機構。
1. A pair of left and right transport mechanisms provided on a transport line and sandwiching a thin plate to be transported vertically by a belt, and rotating the pair of transport mechanisms by 180 degrees on a central axis of the transport line. A pinion portion, a bearing portion that guides the rotation of the pinion portion, a rack portion that meshes with the pinion portion and reciprocates to cause the rotation of the pinion portion, and a drive source that drives the rack portion to reciprocate. And a reversing mechanism for thin sheet conveyance.
【請求項2】 前記左右1対の搬送機構の相互間の間隔
を調節自在とする幅調整機構を有するこを特徴とする請
求項1記載の薄板搬送における表裏反転機構。
2. The reversing mechanism according to claim 1, further comprising a width adjusting mechanism for adjusting an interval between the pair of right and left transfer mechanisms.
【請求項3】 前記搬送機構の回転動作の要・不要を任
意に選択できる構成となっていることを特徴とする請求
項1または2記載の薄板搬送における表裏反転機構。
3. The reverse mechanism according to claim 1, wherein the necessity / non-necessity of the rotation operation of the transport mechanism can be arbitrarily selected.
JP20765892A 1992-08-04 1992-08-04 Reverse mechanism for thin plate transport Expired - Lifetime JP2785598B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20765892A JP2785598B2 (en) 1992-08-04 1992-08-04 Reverse mechanism for thin plate transport

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20765892A JP2785598B2 (en) 1992-08-04 1992-08-04 Reverse mechanism for thin plate transport

Publications (2)

Publication Number Publication Date
JPH0661275A JPH0661275A (en) 1994-03-04
JP2785598B2 true JP2785598B2 (en) 1998-08-13

Family

ID=16543420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20765892A Expired - Lifetime JP2785598B2 (en) 1992-08-04 1992-08-04 Reverse mechanism for thin plate transport

Country Status (1)

Country Link
JP (1) JP2785598B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7520503B2 (en) * 2006-08-23 2009-04-21 Pitney Bowes Inc. Sheet material inverter
KR100775054B1 (en) * 2006-09-13 2007-11-08 (주) 인텍플러스 Apparatus for tray handling and inspecting method for semiconductor device of the same

Also Published As

Publication number Publication date
JPH0661275A (en) 1994-03-04

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A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19980428