JP2773426B2 - Sample container for short wavelength light of microscope - Google Patents
Sample container for short wavelength light of microscopeInfo
- Publication number
- JP2773426B2 JP2773426B2 JP31701390A JP31701390A JP2773426B2 JP 2773426 B2 JP2773426 B2 JP 2773426B2 JP 31701390 A JP31701390 A JP 31701390A JP 31701390 A JP31701390 A JP 31701390A JP 2773426 B2 JP2773426 B2 JP 2773426B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- wavelength light
- short
- microscope
- sample container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Microscoopes, Condenser (AREA)
- Sampling And Sample Adjustment (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、照明光として短波長光例えば紫外線、軟Ｘ
線等を用いる顕微鏡の短波長光用試料容器に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an illumination light having a short wavelength such as ultraviolet light, soft X
The present invention relates to a sample container for short wavelength light of a microscope using a line or the like.
従来、顕微鏡で生体観察をする場合には光学顕微鏡が
一般に使用されている。しかしながら、光学顕微鏡の解
像力（Res.）は、Res＝0.61λ/Naで規定され、通常0.5
μｍ程度が限界である。そのために、高分解能を要求さ
れる生体観察においては、可視光よりはるかに短い波長
の光を使用することによって解像力を向上させている。
例えば、Ｘ線を使用すると、可視光学顕微鏡の数十倍の
解像力が得られる。Conventionally, when observing a living body with a microscope, an optical microscope is generally used. However, the resolving power (Res.) Of an optical microscope is defined by Res = 0.61λ / Na, and is usually 0.5
The limit is about μm. Therefore, in living body observation requiring high resolution, the resolution is improved by using light having a wavelength much shorter than visible light.
For example, when X-rays are used, a resolution several tens times higher than that of a visible light microscope can be obtained.
第２図にＸ線顕微鏡の光学系の一例を示す。 FIG. 2 shows an example of the optical system of the X-ray microscope.
Ｘ線源23を出た光は、照明用Ｘ線光学素子24によって
試料容器25に集光される。試料を透過したＸ線は結像用
Ｘ線光学素子26によって検出部27に結像される。The light emitted from the X-ray source 23 is collected on a sample container 25 by an X-ray optical element 24 for illumination. The X-ray transmitted through the sample is imaged on the detection unit 27 by the X-ray optical element 26 for imaging.
上記の光学系の照明手段として使用されるＸ線は、空
気によって吸収され、その強度が弱められるのでその対
策として光学系の光路を真空に保持する必要がある。こ
のため光路内に配置する被検物である生体試料を、その
真空から保護するために密封する必要があった。X-rays used as the illumination means of the above-mentioned optical system are absorbed by air and the intensity thereof is weakened. Therefore, it is necessary to maintain the optical path of the optical system in a vacuum as a countermeasure. For this reason, it is necessary to seal a biological sample, which is a test object, disposed in the optical path in order to protect the biological sample from the vacuum.
その密封は試料容器によって行なうのが通例であり、
その一例第３図によって説明する。The sealing is usually performed by a sample container,
An example will be described with reference to FIG.
第３図は試料容器の主要部の縦断面図である。第３図
において、窓材の一面に蒸着された透過薄膜１に更に積
層させてスペーサ材を蒸着した後に一面側からスペーサ
材をエッチング処理して生体試料４を入れる試料室４′
を設けるためのスペーサ２を形成すると共に他面側から
窓材をエッチング処理して前記の透過薄膜１を窓とする
窓枠３が作られる。これによって試料容器主要部の一片
（１、２、３）が作られる。FIG. 3 is a longitudinal sectional view of a main part of the sample container. In FIG. 3, a sample chamber 4 'into which a biological sample 4 is placed by further laminating the transparent thin film 1 deposited on one surface of the window material, depositing the spacer material, and etching the spacer material from one surface side.
Is formed and the window material is etched from the other side to form a window frame 3 having the transparent thin film 1 as a window. This produces one piece (1, 2, 3) of the main part of the sample container.
更に前記の工程においてスペーサ材を有さない他片
（１、３）を作る。作り出された前記の一片（１、２、
３）と他片（１、３）とを、互いに有する透過薄膜１と
スペーサ２とによって短波長光を透過させる試料室10が
作り出される如く重ね合わせることによって試料容器の
主要部が製作される。Further, other pieces (1, 3) having no spacer material are formed in the above-mentioned process. The one piece (1,2,
The main part of the sample container is manufactured by overlapping 3) with the other pieces (1, 3) so that a sample chamber 10 for transmitting short-wavelength light is created by the transmissive thin film 1 and the spacer 2 having the other.
生体試料観察時には、主要部の重ね合せを外した後
に、前記の試料室４′に培養液又は水を含む生体試料が
充填された後に再度重ね合せ、不図示の押圧部材によっ
て試料室４′が外部より密閉されて、観察光路上の所定
位置に配置される。At the time of biological sample observation, after the superposition of the main part is removed, the sample chamber 4 'is filled with a biological sample containing a culture solution or water and then superimposed again, and the sample chamber 4' is moved by a pressing member (not shown). It is sealed from the outside and placed at a predetermined position on the observation optical path.
上記の如き従来の技術に於いては、真空と生体試料を
隔離させ、しかも短波長光を透過させる窓材として使用
される透過薄膜には、短波長の透過率が良好であること
が要求される。したがって、短波長光の透過率の高い透
過薄膜を選択することはもとより、更に透過率を増加さ
せしめるために、透過薄膜を可能な限り薄く加工する必
要があり、例えば0.1μｍ程度が要求されている。In the conventional techniques as described above, the transmission thin film used as a window material for separating a vacuum from a biological sample and transmitting short-wavelength light is required to have good short-wavelength transmittance. You. Therefore, in addition to selecting a high transmittance thin film having a short wavelength light transmittance, it is necessary to process the transmittance thin film as thin as possible in order to further increase the transmittance, for example, about 0.1 μm is required. I have.
しかしながら、上記の如き要求に対応した透過薄膜は
機械的強度が非常に弱く、生体試料を含む試料培養液を
試料室に充填する際に透過薄膜がふくらんで短波長光の
試料室での光路が長くなり、そのために透過光量が減衰
するという問題点があった。また場合によっては破壊す
るという問題点もあった。However, the transmission thin film corresponding to the above requirements has a very low mechanical strength, and when the sample culture solution including the biological sample is filled in the sample chamber, the transmission thin film swells and the optical path of the short-wavelength light in the sample chamber is reduced. However, there is a problem that the amount of transmitted light is attenuated. In some cases, there is a problem of destruction.
本発明はこのような従来の問題点に鑑みてなされたも
のであり、その目的とするところは、良好なる透過光量
が得られ且つ、透過薄膜の破壊がない短波長光用試料容
器を提供することにある。The present invention has been made in view of such conventional problems, and an object of the present invention is to provide a sample container for short-wavelength light that can obtain a good amount of transmitted light and does not break down a transmission thin film. It is in.
上記目的のために、本発明は、短波長光学系の光路上
に配置され、短波長光を通過させるための窓となる一対
の短波長光透過薄膜１、１と該透過薄膜間の周辺部にス
ペーサ２を介することによって、密閉された試料室10と
なした顕微鏡の短波長光用試料容器において、 前記試料室10にとって余剰な試料液を前記試料容器の
外部に排出する排出穴12と排出後に排出穴12を封鎖する
部材９とを有する排出手段12、９と、 前記試料室10を減圧するための減圧手段11、８、７
と、 を設けたものである。To this end, the present invention provides a pair of short-wavelength light-transmitting thin films 1, 1 disposed on the optical path of a short-wavelength optical system and serving as a window for transmitting short-wavelength light, and a peripheral portion between the thin-films. In a sample container for short-wavelength light of a microscope, which is formed as a closed sample chamber 10 by interposing a spacer 2, a discharge hole 12 for discharging excess sample liquid for the sample chamber 10 to the outside of the sample container is formed. Discharge means 12, 9 having a member 9 for closing the discharge hole 12 later; and decompression means 11, 8, 7 for decompressing the sample chamber 10.
And are provided.
本発明では、試料室に試料培養液を充填する際に排出
手段によって余剰の試料液を試料室外へ排出する如くな
したので透過薄膜がふくらんで破壊される如き従来の問
題点は解消する。In the present invention, when the sample chamber is filled with the sample culture solution, the excess means is discharged to the outside of the sample chamber by the discharging means, so that the conventional problem that the permeable thin film bulges and is destroyed is solved.
また、排出後更に減圧手段によって、試料室に存する
試料液の所定量減圧室に吸収するようにしたので、試料
室内が減圧してその光路方向の厚みが薄くなり短波長光
の試料内での光路を短くすることができる。そのため透
過光量の減衰を防止出来る。従って良好な透過光量を得
ることが出来る。In addition, a predetermined amount of the sample liquid existing in the sample chamber is absorbed by the decompression chamber by the decompression means after the discharge, so that the pressure in the sample chamber is reduced, the thickness in the optical path direction becomes thinner, and short-wavelength light in the sample is reduced. The optical path can be shortened. Therefore, attenuation of the amount of transmitted light can be prevented. Therefore, a good transmitted light amount can be obtained.
次に本発明の実施例を図面を参照して説明する。 Next, an embodiment of the present invention will be described with reference to the drawings.
第１図、第４図、第５図は本発明における実施例をそ
れぞれ説明する図であり、同一部材は同一符号を付して
重複する説明は省略する。FIGS. 1, 4, and 5 are views for explaining embodiments of the present invention, respectively, and the same members are denoted by the same reference numerals, and redundant description will be omitted.
第１図は本発明における短波長光用試料容器の第１の
実施例であって、その説明の前にまず窓枠３、透過薄膜
１、スペーサ２によって構成される試料４の保持部材の
製作について説明する。FIG. 1 shows a first embodiment of a sample container for short-wavelength light according to the present invention. Before the description thereof, first, a holding member for a sample 4 constituted by a window frame 3, a transparent thin film 1, and a spacer 2 is manufactured. Will be described.
シリコンウェハの窓枠材の一面にSi3N4の透過薄膜１
を厚さｔ＝0.1μｍまで蒸着し、更にその上にAlをｔ＝1
0μｍ蒸着する。その後透過薄膜１を残す如くしてエッ
チング処理により、一面側においてはAl蒸着部を、他面
側においてはシリコンウェハを所定の窓が得られる形状
にエッチングして除去することによって窓枠３とスペー
サ２と透過薄膜１による窓が形成される。これによって
試料４の保持部材の一片１、２、３が作られる。更に前
記の工程においてAl膜即ちスペーサを有さない他片１、
２を作る。Si 3 N 4 transparent thin film 1 on one surface of window frame material of silicon wafer
Was deposited to a thickness of t = 0.1 μm, and Al was further deposited thereon for t = 1.
Deposit 0 μm. Thereafter, the window frame 3 and the spacer are removed by etching the aluminum film on one surface side and etching the silicon wafer on the other surface side so as to obtain a predetermined window by etching to leave the transmission thin film 1. 2 and a transparent thin film 1 form a window. Thus, pieces 1, 2, and 3 of the holding member for the sample 4 are formed. Further, in the above step, the other piece 1 having no Al film, that is, no spacer,
Make 2.
作り出された前記の一片（１、２、３）と他片（１、
３）とを、互いに有する透過薄膜１とスペーサ２とによ
って短波長光を透過させる試料室10が作り出せる如く重
ね合わせることによって試料４の保持部材が得られる。The one piece (1, 2, 3) and the other piece (1,
3) is overlapped so that a sample chamber 10 that transmits short-wavelength light can be created by the transmissive thin film 1 and the spacer 2 that are provided with each other, whereby a holding member for the sample 4 is obtained.
保持部材は主ホルダー６に形成された保持部材嵌合部
６″に嵌入され、押えホルダー６′と押え環13によって
主ホルダー６内に固定される。また、主ホルダー６と窓
枠３との間、主ホルダー６と押えホルダー６′との間、
及び押えホルダー６′と窓枠との間にはそれぞれ０リン
グ５が配設されており試料室10からの試料液又は水の漏
れ出しを防止している。The holding member is fitted into a holding member fitting portion 6 ″ formed on the main holder 6, and is fixed in the main holder 6 by a holding holder 6 ′ and a holding ring 13. Further, the holding member 6 and the window frame 3 are connected to each other. Between the main holder 6 and the presser holder 6 ′,
O-rings 5 are provided between the holder 6 'and the window frame, respectively, to prevent leakage of the sample liquid or water from the sample chamber 10.
主ホルダー６には試料室10に生体試料４と共に充填さ
れる培養液又は水（試料液）の余剰分を抜くための主ホ
ルダー６の外部に通じるドレン穴12が形成されており、
その外部においてドレンキャップ９によって外部との関
係が遮断されている。またドレン穴12の反対側にはその
一部を試料室10に通じる如くなした円筒部を設け、その
外側端部には雌ネジが形成されている。円筒部には前記
雌ネジに螺合する雄ネジを設け、中腹部外周に０リング
７を埋設した減圧機構８が嵌入している。The main holder 6 is provided with a drain hole 12 communicating with the outside of the main holder 6 for removing an excess of culture solution or water (sample solution) filled in the sample chamber 10 together with the biological sample 4.
At the outside, the drain cap 9 shuts off the relationship with the outside. On the opposite side of the drain hole 12, a cylindrical portion is provided so that a part thereof communicates with the sample chamber 10, and a female screw is formed at an outer end thereof. A male screw threaded to the female screw is provided in the cylindrical portion, and a decompression mechanism 8 having an O-ring 7 embedded in the outer periphery of the middle abdomen is fitted.
上記の如く構成された第１の実施例の使用の仕方につ
いて以下説明する。まず押え環13を回転させて主ホルダ
ー６から取り外し、それによって固定から開放された押
えホルダー６′、保持部材１、２、３、１、２の他片
１、２を順次取り出す。また押えホルダー６′に埋設さ
れた０リング５は押えホルダー６′と一体に取り出され
る。How to use the first embodiment configured as described above will be described below. First, the presser ring 13 is rotated and removed from the main holder 6, and the presser holder 6 ′ and the other pieces 1, 2 of the holding members 1, 2, 3, 1, 2 which have been released from the fixing are sequentially taken out. The O-ring 5 embedded in the presser holder 6 'is taken out integrally with the presser holder 6'.
その後、ドレンキャップ９を取り外すと共に減圧機構
８も所定位置に設定する。Thereafter, the drain cap 9 is removed, and the pressure reducing mechanism 8 is set at a predetermined position.
以上の如く準備された試料室10に、培養液又は水を含
む生体試料液４を充填し、他片１、２を元の位置に戻
す。この時、試料室10から溢れる余剰な試料液をドレン
穴12を通して外部に排出させる。その後、押えホルダー
６′を所定位置に配置して押え環13によって保持部材を
主ホルダー６内に固定する。この時もドレン穴12を通し
て外部に試料液が排出出来るようにドレンキャップを外
しておく。The sample chamber 10 prepared as described above is filled with the biological sample solution 4 containing a culture solution or water, and the other pieces 1 and 2 are returned to their original positions. At this time, excess sample liquid overflowing from the sample chamber 10 is discharged to the outside through the drain hole 12. Thereafter, the holding member 6 ′ is arranged at a predetermined position, and the holding member is fixed in the main holder 6 by the holding ring 13. At this time, the drain cap is removed so that the sample solution can be discharged to the outside through the drain hole 12.
保持部材が主ホルダー６内に固定されたことを確認し
た後、ドレンキャップを閉じて試料室10と外部とを密閉
する。After confirming that the holding member is fixed in the main holder 6, the drain cap is closed to seal the sample chamber 10 from the outside.
このような状態においては試料水を外部に排出する圧
力で、試料室10の部分の透過薄膜１は室外に向けてふく
らんでいる。このふくらみを除くために減圧機構８を減
圧室11が大きくなる方向に回転させる。この操作によっ
て減圧機構８の動きによって大きくなった減圧室11の容
量に対応して試料室10の体積が減少して透過薄膜１に対
する試料室10外への応力を解消される。その後更に減圧
機構８によって試料室10の体積を小さくすることによっ
て透過薄膜１を室内方向に向けて変形させ、所望の生体
試料での透過距離を設定する。In such a state, the permeable thin film 1 in the sample chamber 10 is inflated to the outside by the pressure for discharging the sample water to the outside. In order to remove the swelling, the pressure reducing mechanism 8 is rotated in a direction in which the pressure reducing chamber 11 becomes larger. By this operation, the volume of the sample chamber 10 is reduced in accordance with the capacity of the decompression chamber 11 which has been increased by the movement of the decompression mechanism 8, and the stress on the transmission thin film 1 to the outside of the sample chamber 10 is eliminated. Thereafter, the volume of the sample chamber 10 is further reduced by the decompression mechanism 8 so that the permeable thin film 1 is deformed toward the room, and the desired transmission distance in the biological sample is set.
第４図は本発明の短波長光用試料容器の第２の実施例
であって減圧機構８と主ホルダー６とによって作り出さ
れる減圧室11に連結したドレン穴を設けることによって
減圧室全体溢れ出る試料液を満たすことによって残留空
気を出来る限り少なくなる如くしたものである。FIG. 4 shows a second embodiment of a sample container for short wavelength light according to the present invention, in which a drain hole connected to a decompression chamber 11 created by a decompression mechanism 8 and a main holder 6 is provided so that the entire decompression chamber overflows. By filling the sample liquid, the residual air is reduced as much as possible.
第５図は本発明の短波長光用試料容器の第３の実施例
であって、減圧機構８′の中にドレン穴12を形成し、構
造をより簡単にして、容易に製作出来るようにしたもの
である。FIG. 5 shows a third embodiment of a sample container for short wavelength light according to the present invention, in which a drain hole 12 is formed in a decompression mechanism 8 'so that the structure can be made simpler and easily manufactured. It was done.
以上の様に本発明によれば、生体試料を含む試料液を
試料室に充填する際にドレン穴よりその余剰分を排出す
る如くなしたので、余剰試料液による「サブミクロンの
厚さの短波長光透過薄膜」の破壊が防止される効果があ
る。As described above, according to the present invention, when a sample solution containing a biological sample is filled into a sample chamber, the excess is discharged from the drain hole. This has the effect of preventing the "wavelength light transmitting thin film" from being destroyed.
また、試料室を減圧することによって、試料室の厚み
を薄い方向に変化させることが出来るので、干渉計又は
顕微鏡で観察しながら厚さの補正が任意に行なえ、それ
によって透過光量を所望の値に設定出来る効果もある。In addition, by reducing the pressure in the sample chamber, the thickness of the sample chamber can be changed in a thin direction, so that the thickness can be arbitrarily corrected while observing with an interferometer or a microscope, thereby reducing the amount of transmitted light to a desired value. There is also an effect that can be set.
更に、必要に応じて減圧を最大にすることにより、試
料室の試料を短波長光透過膜によって挟持して固定する
ことが出来る利点もある。Further, by maximizing the reduced pressure as needed, there is an advantage that the sample in the sample chamber can be sandwiched and fixed by the short-wavelength light transmitting film.
第１図は本発明における短波長光用試料容器の第１実施
例の縦断面図、 第２図はＸ線顕微鏡の光学系の一例を説明する図、 第３図は従来の試料容器の主要部を説明する図、 第４図は本発明における短波長光用試料容器の第２実施
例の縦断面図、 第５図は本発明における短波長光用試料容器の第３実施
例の縦断面図である。 〔主要部分の符号の説明〕 １……透過薄膜、 ２……スペーサ、 ３……窓枠、 ４……生体試料、 ５……０リング、 ６……主ホルダー、 ６′……押えホルダー、 ７……０リング、 ８……減圧機構、 ９……ドレンキャップ、 10……試料室、 11……減圧室、 12……ドレン穴。FIG. 1 is a longitudinal sectional view of a first embodiment of a sample container for short wavelength light according to the present invention, FIG. 2 is a diagram for explaining an example of an optical system of an X-ray microscope, and FIG. FIG. 4 is a longitudinal sectional view of a second embodiment of the sample container for short wavelength light according to the present invention. FIG. 5 is a longitudinal section of a third embodiment of the sample container for short wavelength light according to the present invention. FIG. [Description of Signs of Main Parts] 1 ... Transparent thin film, 2 ... Spacer, 3 ... Window frame, 4 ... Biological sample, 5 ... 0 ring, 6 ... Main holder, 6 '... Holder, 7 ... 0 ring, 8 ... decompression mechanism, 9 ... drain cap, 10 ... sample chamber, 11 ... decompression chamber, 12 ... drain hole.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平３−197837（ＪＰ，Ａ) 特開 平３−295440（ＪＰ，Ａ) 特開 昭61−207954（ＪＰ，Ａ) 特開 平２−46281（ＪＰ，Ａ) 実開 昭58−186460（ＪＰ，Ｕ) 特公 平７−113680（ＪＰ，Ｂ２) 特公 平８−3560（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.6，ＤＢ名) G02B 21/00 - 21/36 G01N 1/28 W G21K 7/00──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-1977837 (JP, A) JP-A-3-295440 (JP, A) JP-A-61-207954 (JP, A) JP-A-2- 46281 (JP, A) Japanese Utility Model Showa 58-186460 (JP, U) JP-B 7-113680 (JP, B2) JP-B 8-3560 (JP, B2) (58) Fields surveyed (Int. Cl. 6 , DB name) G02B 21/00-21/36 G01N 1/28 W G21K 7/00
Claims (1)
の短波長光透過薄膜と該透過薄膜間の周辺部にスペーサ
を介することによって、密閉された試料室となした顕微
鏡の短波長光用試料容器において、 前記試料室にとって余剰な試料液を前記試料容器の外部
に排出する排出穴と排出後に排出穴を封鎖する部材とを
有する排出手段と、 前記試料室内を減圧する減圧手段と、 を設けたことを特徴とする顕微鏡の短波長光用試料容
器。A short-wavelength microscope having a closed sample chamber formed by interposing a spacer between a pair of short-wavelength light transmitting thin films serving as windows for transmitting short-wavelength light and a peripheral portion between the thin films. In the sample container for light, a discharge unit having a discharge hole for discharging the excess sample liquid for the sample chamber to the outside of the sample container and a member for closing the discharge hole after the discharge, a decompression unit for reducing the pressure in the sample chamber, A sample container for short-wavelength light of a microscope, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31701390A JP2773426B2 (en) | 1990-11-21 | 1990-11-21 | Sample container for short wavelength light of microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31701390A JP2773426B2 (en) | 1990-11-21 | 1990-11-21 | Sample container for short wavelength light of microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04186311A JPH04186311A (en) | 1992-07-03 |
| JP2773426B2 true JP2773426B2 (en) | 1998-07-09 |
Family
ID=18083442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31701390A Expired - Fee Related JP2773426B2 (en) | 1990-11-21 | 1990-11-21 | Sample container for short wavelength light of microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2773426B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109696403A (en) * | 2017-10-23 | 2019-04-30 | 中国科学院重庆绿色智能技术研究院 | A kind of sample room for immersion micro-imaging |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5665599A (en) * | 1994-12-01 | 1997-09-09 | Minuth; Will | Chamber for cultivating cells |
-
1990
- 1990-11-21 JP JP31701390A patent/JP2773426B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109696403A (en) * | 2017-10-23 | 2019-04-30 | 中国科学院重庆绿色智能技术研究院 | A kind of sample room for immersion micro-imaging |
| CN109696403B (en) * | 2017-10-23 | 2021-08-13 | 中国科学院重庆绿色智能技术研究院 | Sample chamber for immersed microscopic imaging |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04186311A (en) | 1992-07-03 |
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