JP2771162B2 - Manufacturing method of optical waveguide - Google Patents
Manufacturing method of optical waveguideInfo
- Publication number
- JP2771162B2 JP2771162B2 JP62114695A JP11469587A JP2771162B2 JP 2771162 B2 JP2771162 B2 JP 2771162B2 JP 62114695 A JP62114695 A JP 62114695A JP 11469587 A JP11469587 A JP 11469587A JP 2771162 B2 JP2771162 B2 JP 2771162B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- optical
- waveguide
- manufacturing
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光導波路の製造方法に係わり、特に製造容
易な光導波路の製造方法に関する。
〔従来の技術〕
従来、光スイッチ等の光導波路においては、光導波路
が単一モード導波路のものが数多く存在する（たとえ
ば、アイ・イー・イー・イージャーナル・オブ・クアン
タム・エレクトロニクス，第QE−17巻，（1981年）第94
6頁から第956頁（IEEE J.Quantum Electron,QE−17,pp9
46〜956（1981）参照）。
〔発明が解決しようとする問題点〕
しかし、従来の単一モード光導波路は、その導波路幅
が数ミクロン以下と非常に狭く、作製上その制御性に問
題があった。
本発明の目的は、生産歩留まりを向上させることの可
能な光導波路の製造方法を提供することにある。
〔問題点を解決するための手段〕
本発明の要旨は、光の入力部分および光の出力部分を
有する光導波路の製造方法において、前記光導波路を形
成するための部材を準備し、前記光導波路の光入出力部
分およびその近傍部分の前記光導波路の幅を他の部分の
前記光導波路の幅よりも狭く形成し、かつ、前記光導波
路の光入出力部分およびその近傍部分の幅を所要に形成
することを特徴とする光導波路の製造方法にある。
〔実施例〕
従来の単一モード光導波路はその導波路幅が数ミクロ
ン以下と非常に狭く、作製上その制御性に問題があっ
た。
そこで、例えば、第１図の光スイッチを形成する導波
路のように光の入出力端１のみを単一モード光導波路に
し、他の大部分は導波路幅の広い多モード導波路２とす
ることによりこの問題は解決され得る。このようにすれ
ば、これらの光スイッチを作製する際、導波路幅が大き
いために、作製上の制御性および製造歩留が大幅に向上
するからである。光の入出力端は、導波路幅の狭い単一
モード導波路であるが、その占める面積が非常に狭いた
め、作製の制御性があまり問題にならない。
以下、本発明の実施例を説明する。
実施例１
第2,3図を用いて説明する。InP基板上に第２図に示す
ようなリッヂ型導波路５（第３図にその断面構造を示
す。）からなる４×４マトリックス光スイッチ（スイッ
チ部３は電流注入型全反射光スイッチ）を形成した。こ
の導波路幅Ｗは８μｍと大きく、容易にウエットエッチ
ング等により作製できた。このマトリックス光スイッチ
の入出力部は、幅４μｍの単一モード光導波路とした。
この部分は、他の導波路部と同じくウエットエッチング
により作製されたが、その占める面積が小さいため、作
製の歩留まり等を劣化させることはなかった。このよう
にして、入出力部のみ単一モード光導波路としたことに
より、単一モード光ファイバ７との結合効率が80％と、
従来の多モード光導波路のみ使用した場合の20％に比べ
て大幅に向上した。
実施例２
実姉例１における入出力部を幅６μｍと擬似単一モー
ド光導波路としても、単一モード光ファイバとの結合効
率70％を得た。
実施例３
実施例１の４×４マトリックス光スイッチおいて、各
光スイッチの入出力端すべてを幅４μｍの単一モード光
スイッチにしても、実施例１と同様、80％の単一モード
光ファイバとの結合効率が得られた。
本発明の実施例によれば、大部分の光導波路の幅を大
きくし、光入力端近傍の光導波路の幅を狭くしたので、
光導波路の性能を低下させることなく生産歩留まりが向
上し、光導波路の安定性が向上する。
〔発明の効果〕
本発明によれば、光導波路の生産歩留まりを向上させ
ることが可能である。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing an optical waveguide, and more particularly to a method for manufacturing an optical waveguide that is easy to manufacture. 2. Description of the Related Art Conventionally, in optical waveguides such as optical switches, there are many optical waveguides having a single mode waveguide (for example, IEEJ Journal of Quantum Electronics, QE −17, (1981) 94
Pages 6 to 956 (IEEE J. Quantum Electron, QE-17 , pp9
46-956 (1981)). [Problems to be Solved by the Invention] However, the conventional single-mode optical waveguide has a very narrow waveguide width of several microns or less, and has a problem in controllability in manufacturing. An object of the present invention is to provide a method for manufacturing an optical waveguide that can improve the production yield. [Means for Solving the Problems] The gist of the present invention is to provide a method for manufacturing an optical waveguide having a light input portion and a light output portion, wherein a member for forming the light guide is prepared, and the light guide is provided. The width of the optical waveguide in the light input / output portion and the vicinity thereof is formed to be smaller than the width of the optical waveguide in the other portion, and the width of the light input / output portion of the optical waveguide and the vicinity thereof is required. The method is for manufacturing an optical waveguide. Example A conventional single-mode optical waveguide has a very narrow waveguide width of several microns or less, and has a problem in controllability in manufacturing. Therefore, for example, only the light input / output end 1 is a single-mode optical waveguide like the waveguide forming the optical switch in FIG. 1, and the other majority is a multimode waveguide 2 having a wide waveguide width. This can solve this problem. This is because when such an optical switch is manufactured, the controllability in manufacturing and the manufacturing yield are greatly improved because the waveguide width is large. The light input / output end is a single mode waveguide having a narrow waveguide width, but the area occupied by the waveguide is very small, so that the controllability of fabrication does not cause much problem. Hereinafter, embodiments of the present invention will be described. Example 1 Example 1 will be described with reference to FIGS. A 4 × 4 matrix optical switch (switch section 3 is a current injection type total reflection optical switch) composed of a ridge waveguide 5 (the sectional structure is shown in FIG. 3) as shown in FIG. Formed. This waveguide width W was as large as 8 μm, and could be easily manufactured by wet etching or the like. The input / output part of this matrix optical switch was a single-mode optical waveguide having a width of 4 μm.
This portion was formed by wet etching similarly to the other waveguide portions, but the area occupied by the portion was small, so that the production yield and the like did not deteriorate. In this way, by using only the input / output section as the single mode optical waveguide, the coupling efficiency with the single mode optical fiber 7 becomes 80%,
Significantly improved compared to 20% when only the conventional multimode optical waveguide was used. Example 2 Even when the input / output section in the actual example 1 was 6 μm in width and a quasi-single mode optical waveguide, a coupling efficiency with a single mode optical fiber of 70% was obtained. Third Embodiment In the 4 × 4 matrix optical switch of the first embodiment, when all input / output terminals of each optical switch are single mode optical switches having a width of 4 μm, as in the first embodiment, 80% of the single mode optical switch is used. The coupling efficiency with the fiber was obtained. According to the embodiment of the present invention, the width of most of the optical waveguides is increased, and the width of the optical waveguide near the optical input end is reduced.
The production yield is improved without deteriorating the performance of the optical waveguide, and the stability of the optical waveguide is improved. [Effects of the Invention] According to the present invention, it is possible to improve the production yield of optical waveguides.
【図面の簡単な説明】
第１図は、４×４マトリックス光スイッチの構成を示す
図、第２図はリッジ型光導波路の平面図、および第３図
は、リッジ型光導波路の断面を示す図である。
１……光入出力近傍部（単一モード光導波路）、２……
多モード光導波路、４……基板、５……光導波路、６…
…光スイッチ部。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing the configuration of a 4 × 4 matrix optical switch, FIG. 2 is a plan view of a ridge-type optical waveguide, and FIG. 3 is a cross-section of the ridge-type optical waveguide. FIG. 1... Near light input / output (single mode optical waveguide), 2.
Multi-mode optical waveguide, 4 ... substrate, 5 ... optical waveguide, 6 ...
... optical switch section.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 井上 宏明 国分寺市東恋ヶ窪１丁目280番地 株式 会社日立製作所中央研究所内 (72)発明者 中村 均 国分寺市東恋ヶ窪１丁目280番地 株式 会社日立製作所中央研究所内 (72)発明者 諸沢 健一 日立市日高町５丁目１番１号 日立電線 株式会社電線研究所内 (72)発明者 茅根 直樹 国分寺市東恋ヶ窪１丁目280番地 株式 会社日立製作所中央研究所内 (56)参考文献 特開 昭61−25062（ＪＰ，Ａ) 特開 昭62−69204（ＪＰ，Ａ) 特開 昭62−69205（ＪＰ，Ａ) 特開 昭62−183405（ＪＰ，Ａ) 特開 昭62−184332（ＪＰ，Ａ) ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Hiroaki Inoue 1-280 Higashi Koigabo, Kokubunji-shi Central Research Laboratory, Hitachi, Ltd. (72) Inventor Hitoshi Nakamura 1-280 Higashi Koigabo, Kokubunji-shi Central Research Laboratory, Hitachi, Ltd. (72) Inventor Kenichi Morosawa 5-1-1 Hidakacho, Hitachi City Hitachi Cable Inside the Electric Wire Research Laboratory Co., Ltd. (72) Inventor Naoki Chine 1-280 Higashi Koigabo, Kokubunji-shi Central Research Laboratory, Hitachi, Ltd. (56) References JP-A-61-25062 (JP, A) JP-A-62-69204 (JP, A) JP-A-62-69205 (JP, A) JP-A-62-183405 (JP, A) JP-A-62-184332 (JP, A)
Claims (1)
の製造方法において、前記光導波路を形成するための部
材を準備し、前記光導波路の光入出力部分およびその近
傍部分の前記光導波路の幅を他の部分の前記光導波路の
幅よりも狭く形成し、かつ、前記光導波路の光入出力部
分およびその近傍部分が単一モード光導波路となるよう
に前記光導波路の光入出力部分およびその近傍部分の幅
を所要に形成することを特徴とする光導波路の製造方
法。 ２．前記他の部分の前記光導波路が多モード光導波路と
なるように前記他の部分の前記光導波路の幅を所要に形
成することを特徴とする特許請求の範囲第１項記載の光
導波路の製造方法。 ３．光スイッチを形成する工程を有することを特徴とす
る特許請求の範囲第１項又は第２項記載の光導波路の製
造方法。(57) [Claims] In a method for manufacturing an optical waveguide having a light input portion and a light output portion, a member for forming the light guide is prepared, and the light input / output portion of the light guide and the width of the light guide in the vicinity thereof are reduced. The other portion is formed to be narrower than the width of the optical waveguide, and the optical input / output portion of the optical waveguide and its vicinity so that the optical input / output portion of the optical waveguide and the vicinity thereof become a single mode optical waveguide. A method for manufacturing an optical waveguide, wherein a width of a portion is formed as required. 2. 2. The optical waveguide according to claim 1, wherein a width of the optical waveguide in the other portion is formed so that the optical waveguide in the other portion becomes a multi-mode optical waveguide. Method. 3. 3. The method for manufacturing an optical waveguide according to claim 1, further comprising a step of forming an optical switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62114695A JP2771162B2 (en) | 1987-05-13 | 1987-05-13 | Manufacturing method of optical waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62114695A JP2771162B2 (en) | 1987-05-13 | 1987-05-13 | Manufacturing method of optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63280202A JPS63280202A (en) | 1988-11-17 |
| JP2771162B2 true JP2771162B2 (en) | 1998-07-02 |
Family
ID=14644317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62114695A Expired - Lifetime JP2771162B2 (en) | 1987-05-13 | 1987-05-13 | Manufacturing method of optical waveguide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2771162B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3766953B2 (en) | 2000-09-13 | 2006-04-19 | 日本電信電話株式会社 | Optical circuit |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61250627A (en) * | 1985-04-30 | 1986-11-07 | Omron Tateisi Electronics Co | Optical deflector |
| JPS6269205A (en) * | 1985-09-20 | 1987-03-30 | Mitsubishi Cable Ind Ltd | Branching and coupling device |
| JPS6269204A (en) * | 1985-09-20 | 1987-03-30 | Mitsubishi Cable Ind Ltd | Branching and coupling device |
| JPS62183405A (en) * | 1986-02-08 | 1987-08-11 | Agency Of Ind Science & Technol | Optical waveguide circuit with taper and its production |
| JPS62184332A (en) * | 1986-02-08 | 1987-08-12 | Agency Of Ind Science & Technol | Tapered waveguide type liquid detector |
-
1987
- 1987-05-13 JP JP62114695A patent/JP2771162B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63280202A (en) | 1988-11-17 |
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