JP2760181B2 - Narrow band laser device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a narrow band laser device.

[0002]

2. Description of the Related Art A conventional narrow-band laser device includes:
989, “Conference on Laser and Electrooptics Technical Digest Series (CONFERENCE ON LA)
SERS ANDELECTRO-OPTICS TE
CHNICAL DIGEST SERIES)
It is described in detail in the literature published in Volume 1, pages 336 to 337. FIG. 4 shows a conventional narrow band laser device described in this document.

This narrow-band laser device includes a laser medium 1 for exciting a laser beam, an etalon 9 for narrowing the bandwidth of the laser beam, a resonator 8 for oscillating the laser beam, and a reference beam for generating the reference beam. The reference light source 14 measures the absolute wavelength of the laser light by simultaneously inputting the reference light and the laser light, and the spectroscope 6 for detecting the deviation from the set wavelength, and the etalon 9 based on the input signal from the spectroscope 6. And an etalon driver 10 and a beam splitter 7 for controlling the wavelength shift and correcting the wavelength shift, and are arranged as shown in the figure.

In this narrow-band laser device, the wavelength of the narrow-band laser light is measured by simultaneously inputting the narrow-band laser light emitted from the resonator 8 and the reference light emitted from the reference light source 14 to the spectroscope 6. By detecting a shift from the set wavelength and sending an output signal to the etalon driver 10, the etalon 9 is controlled to correct the shift in the wavelength of the narrow band laser light, thereby stabilizing the wavelength.

[0005]

In the conventional narrow band laser device, however, a new reference light source is required for detecting a wavelength shift of the narrow band laser light, and the device becomes complicated. there were.

An object of the present invention is to provide a narrow-band laser device which can stabilize the wavelength of a narrow-band laser beam without requiring a new reference light source.

[0007]

A first narrow-band laser device according to the present invention is a narrow-band laser device using at least fluorine as a laser medium, and a first narrow-band laser device for oscillating a fluorine laser or an excimer laser beam. A resonator, a dispersion element for narrowing the band of the fluorine molecular laser or excimer laser light in the first resonator, and a dispersion element control mechanism for controlling the dispersion element; A second resonator for oscillating a fluorine atom laser beam on the optical axis of the device, and measuring an absolute wavelength of the fluorine molecule laser or excimer laser beam using the fluorine atom laser beam as a reference beam to detect a deviation from a set wavelength. A wavelength measurement mechanism for connecting the input signal to the dispersion element control mechanism.

A second narrow-band laser device according to the present invention is a narrow-band laser device using at least fluorine as a laser medium, and includes a resonator for oscillating a fluorine molecular laser or an excimer laser beam, and a resonator in the resonator. It has an etalon for narrowing the band of the fluorine molecular laser or excimer laser light and an etalon control mechanism for controlling the etalon, and causes the resonator to simultaneously oscillate the fluorine atom laser light and the fluorine molecular laser or excimer laser light. Using a dielectric multilayer mirror for, and equipped with a wavelength measurement mechanism for measuring the absolute wavelength of a fluorine molecular laser or excimer laser light using a fluorine atom laser light as reference light and detecting a deviation from a set wavelength, the wavelength The output signal of the measurement mechanism is connected to be input to the etalon control mechanism.

A third narrow-band laser device according to the present invention is a narrow-band laser device using at least fluorine as a laser medium, comprising: a first resonator for oscillating a fluorine molecular laser or an excimer laser beam; A dispersion element for narrowing the band of the fluorine molecular laser or excimer laser light and a dispersion element control mechanism for controlling the dispersion element in the vessel, for narrowing the band of the fluorine molecular laser or excimer laser light. A dispersive element and a dispersive element control mechanism for controlling the dispersive element, a second resonator for oscillating the fluorine atom laser light on the optical axis of the fluorine molecular laser or excimer laser light, and the dispersive element A detection mechanism is provided for measuring the position of the dispersed fluorine atom laser light and detecting the displacement of the dispersion element, and the output signal of the detection mechanism is used in advance. Characterized in that connected to the input to the dispersion element control mechanism.

[0010]

According to the first and second narrow band laser devices of the present invention, a fluorine atom laser beam having a visible wavelength can be oscillated simultaneously with a fluorine molecular laser or an excimer laser beam which is a narrow band laser beam. The fluorine atom laser light can be used as the reference light, and the wavelength can be stabilized without requiring a new reference light source.

In the third narrow band laser device of the present invention, a fluorine atom laser beam having a wavelength in the visible range is oscillated simultaneously with a fluorine molecular laser beam or an excimer laser beam as a narrow band laser beam. By measuring the position of the fluorine atom laser light dispersed in a different direction from the fluorine molecular laser light or excimer laser light,
Since the displacement of the dispersive element can be measured, the wavelength can be stabilized without using a complicated measuring instrument.

[0012]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows the first embodiment of the present invention.
1 is an embodiment of the narrow band laser device of the invention of the present invention).

FIG. 2 shows the second embodiment (hereinafter referred to as the second embodiment).
1 is an embodiment of the narrow band laser device of the invention of the present invention).

FIG. 3 shows the third embodiment (hereinafter referred to as the third embodiment).
1 is an embodiment of the narrow band laser device of the invention of the present invention).

The narrow-band laser device using the first invention shown in FIG. 1 has a laser medium 1 using fluorine, a diffraction grating 3 for narrowing the band of the fluorine molecular laser beam, and oscillating the fluorine molecule laser beam. A first resonator 2 for oscillating the fluorine atom laser beam, a second resonator 5 for oscillating the fluorine atom laser beam, and measuring the absolute wavelength of the fluorine molecule laser beam by simultaneously inputting the fluorine molecule laser beam and the fluorine atom laser beam. A spectroscope 6 for detecting a shift from a set wavelength, a diffraction grating driver 4 for controlling the diffraction grating 3 based on an input signal from the spectroscope 6 and correcting a wavelength shift, and a beam splitter 7. And are arranged as shown.

In the narrow band laser according to the first aspect of the invention, the fluorine atom laser beam having a wavelength in the visible region can be oscillated simultaneously with the fluorine molecule laser which is the narrow band laser beam. Since it can be used, the wavelength can be stabilized without requiring a new reference light source.

A narrow-band laser device using the second invention shown in FIG. 2 includes a laser medium 1 using fluorine, an etalon 9 for narrowing the band of the fluorine molecular laser beam, a fluorine molecular laser element and a fluorine atom. A resonator 8 using a dielectric multilayer mirror for simultaneously oscillating a laser term, a fluorine molecule laser beam and a fluorine atom laser beam are simultaneously incident to measure the absolute wavelength of the fluorine molecule laser beam, A spectroscope 6 for detecting a shift, an etalon driver 10 for controlling an etalon 9 based on an input signal from the spectrometer 6 and correcting a wavelength shift, and a beam splitter 7 are provided, and are arranged as illustrated. ing.

In the narrow-band laser device according to the second aspect of the present invention, a single-cavity can oscillate a fluorine molecular laser which is a narrow-band laser beam and a fluorine-atom laser beam having a wavelength in a visible region, and a new reference The wavelength can be stabilized without the need for a light source.

A narrow-band laser device using the third invention shown in FIG. 3 has a laser medium 1 using fluorine, a prism 11 for narrowing the band of fluorine molecular laser light, and oscillating fluorine molecular laser light. Resonator 2, a second resonator 5 for oscillating a fluorine atom laser beam, a CCD for measuring the position of the fluorine atom laser beam dispersed by the prism 11, and detecting the displacement of the prism 11. A prism driver 12 and a beam splicer 7 for controlling the prism 11 and correcting the displacement of the prism 11 based on input signals from the array 13 and the CCD array 13 are provided, and are arranged as shown in the figure.

In the narrow-band laser device according to the third aspect of the present invention, a fluorine atom laser beam having a wavelength in the visible range is oscillated simultaneously with the fluorine molecule laser which is a narrow-band laser beam. The displacement of the prism 11 is measured by detecting the positions of the fluorine atom laser beams dispersed in different directions by the CCD array 13, and the prism driver 12 can correct the displacement of the prism 11. The wavelength can be stabilized without using it.

[0022]

As described above, according to the present invention, by detecting and correcting the wavelength shift of the narrow band laser beam or the shift of the dispersion element without requiring a new reference light source, A narrow-band laser device capable of obtaining a narrow-band laser beam with a stable wavelength can be provided.

[Brief description of the drawings]

FIG. 1 is a diagram showing one embodiment of a narrow-band laser device according to the first invention.

FIG. 2 is a diagram showing one embodiment of a narrow band laser device according to the second invention.

FIG. 3 is a diagram showing an embodiment of a narrow band laser device according to the third invention.

FIG. 4 is a diagram showing a conventional narrow band excimer laser device.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 laser medium 2 first resonator 3 diffraction grating 4 diffraction grating driver 5 second resonator 6 spectroscope 7 beam splitter 8 resonator (dielectric multilayer film mirror) 9 etalon 10 etalon driver 11 prism 12 prism driver 13 CCD array

Claims (3)

(57) [Claims] 1. A narrow-band laser device using at least fluorine as a laser medium, comprising: a first resonator for oscillating fluorine molecule or excimer laser light; and a fluorine molecule laser or excimer laser in the first resonator. A dispersion element for narrowing the band of the laser light and a dispersion element control mechanism for controlling the dispersion element; a second element for oscillating the fluorine atom laser light on the optical axis of the fluorine molecular laser or excimer laser light; A resonator, comprising a wavelength measuring mechanism for measuring an absolute wavelength of a fluorine molecular laser or excimer laser light using the fluorine atom laser light as reference light, and detecting a deviation from a set wavelength, and outputting an output signal of the wavelength measuring mechanism. A narrow-band laser device, which is connected so as to be input to the dispersive element control mechanism. 2. A narrow band laser device using at least fluorine as a laser medium, comprising: a resonator for oscillating a fluorine molecular laser or excimer laser light; An etalon and an etalon control mechanism for controlling the etalon for turning, using a dielectric multilayer mirror for simultaneously oscillating fluorine atom laser light and fluorine molecular laser or excimer laser light in the resonator, And a wavelength measurement mechanism for measuring the absolute wavelength of the fluorine molecular laser or excimer laser light using the fluorine atom laser light as reference light and detecting a deviation from a set wavelength, and controlling the output signal of the wavelength measurement mechanism to the etalon control. A narrow-band laser device connected to the mechanism for input. 3. A narrow band laser device using at least fluorine as a laser medium, comprising: a first resonator for oscillating a fluorine molecular laser or an excimer laser beam;
A dispersion element for narrowing the band of the fluorine molecular laser or excimer laser light in the resonator and a dispersion element control mechanism for controlling the dispersion element are provided on the optical axis of the fluorine molecular laser or excimer laser light. A second resonator for oscillating the fluorine atom laser light, and a detection mechanism for measuring the position of the fluorine atom laser light dispersed by the dispersion element and detecting a shift of the dispersion element, and an output of the detection mechanism. A narrow-band laser device connected to input a signal to the dispersive element control mechanism.