JP2757045B2 - Manufacturing method of optical isolator - Google Patents

Manufacturing method of optical isolator

Info

Publication number
JP2757045B2
JP2757045B2 JP27631489A JP27631489A JP2757045B2 JP 2757045 B2 JP2757045 B2 JP 2757045B2 JP 27631489 A JP27631489 A JP 27631489A JP 27631489 A JP27631489 A JP 27631489A JP 2757045 B2 JP2757045 B2 JP 2757045B2
Authority
JP
Japan
Prior art keywords
wafer
polarizer
optical isolator
optical
faraday rotator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27631489A
Other languages
Japanese (ja)
Other versions
JPH03137615A (en
Inventor
次雄 徳増
猶子 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FDK Corp
Original Assignee
FDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FDK Corp filed Critical FDK Corp
Priority to JP27631489A priority Critical patent/JP2757045B2/en
Publication of JPH03137615A publication Critical patent/JPH03137615A/en
Application granted granted Critical
Publication of JP2757045B2 publication Critical patent/JP2757045B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、ファラデー回転子の両側に偏光子を配置し
た光アイソレータの製造方法に関するものである。光ア
イソレータは、一方向への光の通過は許容するが逆方向
への光の通過は阻止する機能を持つ非相反光デバイスで
あり、光通信や光計測等の分野で用いられる。本発明は
特に小型の光アイソレータの量産に適した方法である。
Description: TECHNICAL FIELD The present invention relates to a method for manufacturing an optical isolator in which polarizers are arranged on both sides of a Faraday rotator. An optical isolator is a non-reciprocal optical device having a function of permitting light to pass in one direction but blocking light in the opposite direction, and is used in fields such as optical communication and optical measurement. The present invention is a method particularly suitable for mass production of small optical isolators.

[従来の技術] 光アイソレータの代表的な構造としては、永久磁石内
に磁気光学結晶を装着したファラデー回転子の両側に、
プリズムホルダ内にプリズムを装着した偏光子を配置し
たものがある。ファラデー回転子は、入射光の偏波面を
45度回転させるものであり、その両側に位置する偏光子
はそれぞれ通過偏波面が45度異なる向きで組み合わせら
れる。
[Prior art] As a typical structure of an optical isolator, a Faraday rotator in which a magneto-optical crystal is mounted in a permanent magnet is provided on both sides.
There is a prism holder in which a polarizer with a prism is arranged in a prism holder. The Faraday rotator changes the plane of polarization of the incident light.
The polarizers are rotated by 45 degrees, and the polarizers located on both sides of the polarizers are combined in directions in which the planes of polarization of polarization pass by 45 degrees.

ファラデー回転子としてYIG(イットリウム−鉄ガー
ネット)単結晶のブロックが用いられているが、近年、
LPE(液相エピタキシャル)法によるビスマス置換ガー
ネット単結晶の厚膜が実用化されている。
As a Faraday rotator, a block of YIG (yttrium-iron garnet) single crystal is used.
A thick film of bismuth-substituted garnet single crystal by the LPE (liquid phase epitaxial) method has been put to practical use.

[発明が解決しようとする課題] 従来技術では偏光子やファラデー回転子等の部品を、
一台一台その相対的な角度や寸法を調節しながら組み立
てており、生産効率が非常に悪い欠点があった。特に光
アイソレータを組み込む機器を小型化するのに伴い、光
アイソレータも一層の小型化が要求されるが、従来構造
ではそれが難しかった。
[Problems to be Solved by the Invention] In the related art, components such as a polarizer and a Faraday rotator are used.
Each of them is assembled while adjusting the relative angles and dimensions thereof, which has a drawback that production efficiency is very poor. In particular, with the miniaturization of devices incorporating the optical isolator, the optical isolator is required to be further miniaturized, but this has been difficult with the conventional structure.

本発明の目的は、光アイソレータを効率良く安価に大
量生産でき、特に小型化に適した製造方法を提供するこ
とにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a manufacturing method that can efficiently and inexpensively mass-produce optical isolators and is particularly suitable for miniaturization.

[課題を解決するための手段] 上記の目的を達成できる本発明は、基板上に磁気光学
結晶を成膜したウエハ状のファラデー回転子の両面に接
着剤の層を介してウエハ状の偏光子を配置し、それを磁
界中に設置して一方からレーザ光を入力し、透過光の光
量が最小になるように偏光子角度を調整した状態で前記
接着剤により結合一体化し、次いでその結合体を切断し
てチップ状の非相反素子部を得、その非相反素子部をそ
れぞれ筒状の永久磁石内に挿入固定する光アイソレータ
の製造方法である。
Means for Solving the Problems According to the present invention, which can achieve the above object, a wafer-like polarizer is provided on both surfaces of a wafer-like Faraday rotator in which a magneto-optical crystal is formed on a substrate via an adhesive layer. Is placed in a magnetic field, a laser beam is input from one side, and the polarizer angle is adjusted so that the amount of transmitted light is minimized. To obtain a chip-shaped non-reciprocal element portion, and insert and fix each of the non-reciprocal element portions into a cylindrical permanent magnet.

磁気光学結晶としては例えばビスマス置換ガーネット
厚膜などがある。偏光子としては金属格子偏光子等を用
いうる。
Examples of the magneto-optical crystal include a bismuth-substituted garnet thick film. A metal grating polarizer or the like can be used as the polarizer.

[作用] 本発明ではウエハ状のファラデー回転子と偏光子とを
用い、それらを組み合わせて偏光子の角度を調節する。
そのため角度調節が完了し固定した後では、ウエハ結合
体を切断して得られる個々の非相反素子部は、既にそれ
ぞれ角度調節が完了したものとなる。つまり本発明によ
れば、非相反素子部を個々に角度調整しなくても既に角
度調節できたものが得られるため1ウエハ当たり1回の
角度調節で済み、その工程を著しく簡素化できる。従っ
て切断して得られたチップ状の非相反素子部を永久磁石
内に挿入固定するだけで良好なアイソレーション特性を
持つ光アイソレータが得られることになる。
[Operation] In the present invention, a wafer-like Faraday rotator and a polarizer are used, and the angle of the polarizer is adjusted by combining them.
For this reason, after the angle adjustment is completed and fixed, the individual non-reciprocal element portions obtained by cutting the wafer assembly have already completed the angle adjustment. In other words, according to the present invention, it is possible to adjust the angle without individually adjusting the non-reciprocal element portions, so that the angle can be adjusted only once per wafer, and the process can be greatly simplified. Accordingly, an optical isolator having good isolation characteristics can be obtained only by inserting and fixing the chip-shaped non-reciprocal element portion obtained by cutting into the permanent magnet.

[実施例] 第1図A〜Gは本発明に係る光アイソレータの製造工
程の一実施例を示している。先ず同図Aに示すように基
板上に磁気光学結晶を成膜したウエハ状のファラデー回
転子10と、同じくウエハ状の偏光子12,14とを用意す
る。それらは間に接着剤の層が介在するように、ファラ
デー回転子10の両面に偏光子12,14を配置する(同図B
参照)。ここでファラデー回転子10として基板上に成膜
する磁気光学結晶はLPE法により得られるビスマス置換
ガーネット単結晶厚膜である。最近、この種のウエハ
は、直径数インチの大きさのものが容易に入手できるよ
うになった。偏光子12,14としては同じく直径数インチ
の金属格子偏光子を用いる。この金属格子偏光子は板厚
数百μmで40dB程度の消光比があり、光アイソレータと
して十分使用可能である。接着剤は塗布など任意の方法
により層を作る。この状態では未だ接着剤の層は硬化し
ていない。
Embodiment FIGS. 1A to 1G show an embodiment of a manufacturing process of an optical isolator according to the present invention. First, as shown in FIG. 1A, a wafer-like Faraday rotator 10 having a magneto-optical crystal formed on a substrate, and wafer-like polarizers 12 and 14 are prepared. They are arranged with polarizers 12, 14 on both sides of the Faraday rotator 10 so that a layer of adhesive is interposed therebetween (FIG.
reference). Here, the magneto-optical crystal formed on the substrate as the Faraday rotator 10 is a bismuth-substituted garnet single crystal thick film obtained by the LPE method. Recently, wafers of this type have become readily available in the size of several inches in diameter. As the polarizers 12 and 14, metal lattice polarizers having a diameter of several inches are used. This metal grating polarizer has an extinction ratio of about 40 dB at a plate thickness of several hundred μm, and can be sufficiently used as an optical isolator. The adhesive forms a layer by any method such as coating. In this state, the adhesive layer has not yet been cured.

このようにして組み合わせた部材を同図Cに示すよう
にコイル16内に配置する。そして同図Dに示すようにコ
イル16に電流Iを流して磁界をかけ、一方からレーザ光
を入力し、その透過光を検出する。そしてその透過光量
が最小になるように偏光子12,14の相対角度を調節す
る。透過光量が最小になった状態で接着剤を硬化させて
一体化する。
The members combined in this manner are arranged in the coil 16 as shown in FIG. Then, as shown in FIG. 4D, a current I is applied to the coil 16 to apply a magnetic field, a laser beam is input from one side, and the transmitted light is detected. Then, the relative angles of the polarizers 12 and 14 are adjusted so that the amount of transmitted light is minimized. The adhesive is cured and integrated in a state where the amount of transmitted light is minimized.

次いで同図Eに示すようにその結合体を所定寸法で賽
の目状に切断しチップ状の非相反素子部18を得る。そし
て最後に同図F,Gに示すように筒状の永久磁石20内にそ
の非相反素子部18を挿入し接着剤により固定する。その
ため永久磁石20内には非相反素子部18が丁度嵌入するよ
うな角穴22を設けておく。このようにして光アイソレー
タが完成する。
Next, as shown in FIG. 8E, the combined body is cut into a dice shape at a predetermined size to obtain a chip-shaped non-reciprocal element portion 18. Finally, as shown in FIGS. F and G, the non-reciprocal element portion 18 is inserted into the cylindrical permanent magnet 20 and fixed with an adhesive. For this reason, a square hole 22 is provided in the permanent magnet 20 so that the non-reciprocal element portion 18 just fits therein. Thus, the optical isolator is completed.

ファラデー回転子を構成する磁気光学結晶やウエハ状
の偏光子は上記の材料に限定されるものではない。金属
格子偏光子に代えて例えばルチル結晶板等を用いること
も可能である。
The magneto-optical crystal and the wafer-shaped polarizer constituting the Faraday rotator are not limited to the above materials. For example, a rutile crystal plate or the like can be used instead of the metal lattice polarizer.

[発明の効果] 本発明は上記のように多数の非相反素子部を切り出す
ことができるウエハ結合体について、それら全体で一度
にウエハ状偏光子間の角度調節を行うため、光イアソレ
ータ台毎に調整を行う必要がなく、そのため生産効率が
極めて高くなり大量に且つ安価に製作することが可能と
なる。また生産設備や作業工数が必要以上に増大するこ
ともない。
[Effects of the Invention] The present invention relates to a wafer assembly capable of cutting out a large number of non-reciprocal element portions as described above. There is no need to make adjustments, so that the production efficiency is extremely high and it is possible to manufacture in large quantities and at low cost. Also, the production equipment and the number of man-hours do not increase more than necessary.

更に角度調節した非相反素子部が切断によって得られ
るため、その寸法を小さくでき、小型の光アイソレータ
を容易に製作することが可能となる。
Furthermore, since the non-reciprocal element portion whose angle has been adjusted is obtained by cutting, its size can be reduced, and a small optical isolator can be easily manufactured.

【図面の簡単な説明】[Brief description of the drawings]

第1図A〜Gは本発明に係る光アイソレータの製造方法
の一実施例の工程説明図である。 10…ウエハ状のファラデー回転子、12,14…ウエハ状の
偏光子、16…コイル、18…チップ状の非相反素子部、20
…筒状の永久磁石。
1A to 1G are process explanatory views of one embodiment of a method for manufacturing an optical isolator according to the present invention. 10: Wafer-shaped Faraday rotator, 12, 14: Wafer-shaped polarizer, 16: Coil, 18: Chip-shaped non-reciprocal element, 20
... A cylindrical permanent magnet.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】基板上に磁気光学結晶を成膜したウエハ状
のファラデー回転子の両面に接着剤の層を介してウエハ
状の偏光子を配置し、それを磁界中に設置して一方から
レーザ光を入力し、透過光の光量が最小になるように偏
光子角度を調整した状態で前記接着剤により結合一体化
し、次いでその結合体を切断してチップ状の非相反素子
部を得、その非相反素子部をそれぞれ筒状の永久磁石内
に挿入固定することを特徴とする光アイソレータの製造
方法。
1. A wafer-like polarizer is disposed on both sides of a wafer-like Faraday rotator having a magneto-optical crystal formed on a substrate via an adhesive layer, placed in a magnetic field, and placed on one side. Laser light is input and combined with the adhesive in a state where the polarizer angle is adjusted so that the amount of transmitted light is minimized, and then the combined body is cut to obtain a chip-shaped non-reciprocal element portion. A method for manufacturing an optical isolator, wherein the non-reciprocal element portions are inserted and fixed in respective cylindrical permanent magnets.
JP27631489A 1989-10-23 1989-10-23 Manufacturing method of optical isolator Expired - Fee Related JP2757045B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27631489A JP2757045B2 (en) 1989-10-23 1989-10-23 Manufacturing method of optical isolator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27631489A JP2757045B2 (en) 1989-10-23 1989-10-23 Manufacturing method of optical isolator

Publications (2)

Publication Number Publication Date
JPH03137615A JPH03137615A (en) 1991-06-12
JP2757045B2 true JP2757045B2 (en) 1998-05-25

Family

ID=17567728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27631489A Expired - Fee Related JP2757045B2 (en) 1989-10-23 1989-10-23 Manufacturing method of optical isolator

Country Status (1)

Country Link
JP (1) JP2757045B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171029A (en) * 1989-11-30 1991-07-24 Tokin Corp Production of optical isolator
JP2579572B2 (en) * 1992-03-03 1997-02-05 株式会社トーキン 3-terminal optical circulator

Also Published As

Publication number Publication date
JPH03137615A (en) 1991-06-12

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