JP2748839B2 - Manufacturing method of piezoelectric actuator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a piezoelectric actuator, and more particularly, to a method of manufacturing a piezoelectric actuator for efficiently producing a piezoelectric actuator composed of a plurality of laminated plate-shaped piezoelectric members. .

[0002]

2. Description of the Related Art The ink jet printing structure of a laminated piezoelectric element has already been disclosed in JP-A-63-295269. In such a conventional example, since the manufacturing is performed for each head, there is a disadvantage that the cost is increased.

On the other hand, Japanese Patent Application Laid-Open No. 4-45951 discloses a method in which a plurality of piezoelectric element blocks are arranged on the same substrate and a plurality of heads are manufactured by cutting or the like. The one described in this publication has the advantage that the density can be increased and a relatively inexpensive head can be manufactured.

[0004]

However, in the ink jet head obtained by the method disclosed in Japanese Patent Application Laid-Open No. 4-45951, a single piezoelectric element block is divided into n equal parts in the same direction. Although an array-shaped piezoelectric element head composed of piezoelectric element blocks provided with elements has been obtained, there has been a disadvantage that the process is complicated and productivity is poor.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method of manufacturing a piezoelectric actuator capable of improving the disadvantages of the prior art and simplifying the steps and improving the productivity. .

[0006]

According to the present invention, a plurality of piezoelectric element members formed in a rectangular plate shape are laminated,
A common electrode and an individual electrode are alternately and sequentially inserted and arranged between the respective piezoelectric element members. At the same time, an individual electrode is provided on one surface of the laminated piezoelectric element, and a common electrode is provided on the other surface. A first step of forming a large frame of the piezoelectric element block by incorporating the individual electrode and the common electrode so as to be positioned is provided.

[0007] Further, as each individual electrode, a plurality of cut grooved electrode members formed by cutting a plurality of cut grooves at equal intervals and symmetrically from both end edges toward the center line thereof are used. A second step of specifying the piezoelectric element block by incorporating each individual electrode into the piezoelectric element block such that each of the slits of the electrode member with a slit is arranged at the same position. I have.

Further, a third step of cutting the piezoelectric element block along the center line of the individual electrode and bisecting the same, and a part or a part of the bottom of the cut groove located on the cut surface side of the bisected piezoelectric element block And a fourth step of removing the whole.
The configuration is adopted. This aims to achieve the above-mentioned object.

[0009]

[Function] As a plurality of individual electrodes forming one electrode of a plurality of laminated piezoelectric element members, a plurality of cut grooves are cut at equal intervals and symmetrically from both end edges toward the center line. In addition to the use of the cut-out grooved electrode members, the cut-out grooves of the cut-out grooved electrode members are arranged at the same position, so that the width between the electrodes of the array-shaped piezoelectric element can be freely set. Since the pattern of the electrode member with the cut groove is made symmetrical, the production capacity can be doubled.

Each of the divided piezoelectric elements functions as a piezoelectric head that expands and contracts in the thickness direction by applying a predetermined voltage between the two external conductive electrodes of the individual piezoelectric element members.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS.

1 to 7, reference numeral 1 denotes a substrate made of an insulating member, and reference numeral 2 denotes a piezoelectric element block 2. The piezoelectric element block 2 forms a base of the piezoelectric actuator. By dividing the piezoelectric element block 2 into two, a prototype of the piezoelectric actuator is completed.

2 to 4 show a part of the manufacturing process of the piezoelectric element block 2. FIG. FIG. 2 is an explanatory view showing a unit body of a laminated member constituting the piezoelectric element block 2.
The unit body of the laminated member includes, from the top in FIG. 2, individual electrodes 3, a plate-shaped piezoelectric element member 4 formed in a rectangular plate shape, a common electrode 5 made of a plate-shaped conductive material, and a piezoelectric element member 4. Are sequentially laminated. Then, a plurality of the unit members of the laminated member formed in this manner are roughly sequentially laminated roughly to form the above-described piezoelectric element block 2, and the first step is completed.

[0014] In FIG. 1, a plate-like member 4 _n located plate-shaped member 4 ₀ and the least significant that at the top shows the insulating protective member. These insulating protection members 4 ₀ and 4 _n are:
In the present embodiment, it is formed of a piezoelectric element member, but may be formed of another insulating member.

In the present embodiment, the above-mentioned individual electrode 3 is an electrode with a cut groove formed by cutting a plurality of cut grooves 31 at equal intervals and symmetrically from both end edges toward the center line thereof. The components are used. Then, the constituent members of the piezoelectric element block 2 are arranged such that the cut grooves 31 of the cut groove electrode member are arranged at the same position, and the second step is completed.

In the second step, as described above, the outer edge of the individual electrode 3 on the side of the cut groove 31 is set on the same plane as the outer edge of the piezoelectric element member. I have.
Further, as shown in FIGS. 3 and 4, the outer edge of the common electrode 5 in this portion is disposed inside the outer edge of the cut groove 31 of each individual electrode 3. Thereby, each individual electrode 3 is easily conducted to the corresponding external conducting electrode 6 and the common electrode 5 is reliably prevented from touching the external conducting electrode 6 of the individual electrode 3.

FIG. 5 shows external conductive electrodes 6, 6,.
7, ... shows an example. Of these external conducting electrodes 6 and 7,
One external conductive electrode 6 is connected to each individual electrode 3 as described above.
It is fixedly installed at the position where it is conducted to. Further, the other external conductive electrodes 7 are fixedly provided at positions where only the above-mentioned respective common electrodes 5 are electrically connected.

FIG. 6 is a partial longitudinal sectional view including one external conductive electrode 6 and each individual electrode 3. FIG. 7 shows a partial longitudinal sectional view including the other external conductive electrode 7 and each common electrode 5. 6 and 7, reference numeral 8 denotes a conductive adhesive, and reference numeral 9 denotes an insulating adhesive. Thus, independent electrodes can be formed without the individual electrodes 3 and the common electrode 5 intersecting with each other.

Further, the piezoelectric element block 2 is then cut and bisected along the center line K of each individual electrode in a third step, and then the piezoelectric element block 2 is placed on each cut surface side of the bisected piezoelectric element block 2. Part or all of the bottom of each of the above-described cut grooves 31 is cut off in the fourth step. Symbol C indicates a cutting position of each cutting groove 31.

Specifically, the piezoelectric element block 2 is placed on the insulating member 1 and then cut at the cut surface K so that the piezoelectric element block 2 is divided into two parts. It is cut together with the other members located, thereby forming two piezoelectric elements in an array.

As described above, in the above-described embodiment, the plurality of individual electrodes 3 forming one electrode of the plurality of stacked piezoelectric element members 4 are formed as the plurality of cut grooves 31 from both end edges toward the center line thereof. Are used, and the slits 31 of each of the cut-out grooved electrode members are arranged at the same position. The width between the electrodes can be freely set, and the pattern of the cut grooved electrode members is made symmetrical, so that the production capacity can be doubled.

Each of the divided piezoelectric elements becomes a piezoelectric head which expands and contracts in the direction A by applying a predetermined voltage between the external conductive electrodes 6 and 7 of the individual piezoelectric element members.

[0023]

As described above, according to the present invention, a piezoelectric element block is formed on the same substrate by laminating a common conductive material and an individual conductive material in a special shape when forming a piezoelectric element block. Since two rows of a plurality of piezoelectric heads can be obtained, and at the same time, two rows can be produced by the same piezoelectric element block, a high-precision, low-cost, high-precision head with good precision can be obtained. It is possible to provide an excellent method of manufacturing a piezoelectric actuator that has never been achieved before.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a piezoelectric element block formed in first and second steps in an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a configuration of a unit body of a piezoelectric element showing a part of the piezoelectric element block of FIG. 1;

FIG. 3 is a partial perspective view showing a part of the piezoelectric element block of FIG.

FIG. 4 is a plan view of FIG. 3;

FIG. 5 is a partially omitted perspective view showing an example of a case where an external conductive electrode is attached to the piezoelectric element block of FIG. 1;

FIG. 6 is a partial longitudinal sectional view including one external conductive electrode and each individual electrode in FIG. 5;

FIG. 7 is a partial longitudinal sectional view including the other external conductive electrode and each common electrode in FIG. 5;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Piezoelectric element block 3 Individual electrode 4 Piezoelectric element member 5 Common electrode 6 One external conduction electrode 7 The other external conduction electrode 8 Conductive adhesive 9 Insulating adhesive 31 Cut groove K Cutting line C Cut groove Cutting line for bottom

Claims (1)

(57) [Claims] 1. A plurality of piezoelectric element members formed in a rectangular plate shape are laminated, and a common electrode and an individual electrode are alternately and sequentially inserted and arranged between the respective piezoelectric element members. A first step of forming a large frame of the piezoelectric element block by incorporating the individual electrodes and the common electrode so that the individual electrodes are located on one surface and the common electrode is located on the other surface of the entire piezoelectric element. Using, as the individual electrodes, a plurality of electrode members with cut grooves formed by cutting a plurality of cut grooves at equal intervals and symmetrically from both end edges toward the center line thereof; A second step of specifying the piezoelectric element block by incorporating each individual electrode into the piezoelectric element block so that each of the slits of the electrode member with a cut groove is arranged at the same position; Block A third step of cutting along the center line of the individual electrode and bisecting it; and a fourth step of cutting off a part or the entirety of the bottom of the cut groove located on the cut surface side of the bisected piezoelectric element block And a method of manufacturing a piezoelectric actuator.