JP2718553B2 - Pressurizing medium gas supply method of hot isostatic pressurizing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to the pressure of a hot isostatic press (hereinafter abbreviated as HIP) apparatus used for pressure sintering of powder, removal of casting defects, and the like. The present invention relates to a medium gas supply method.

[Conventional technology]

The HIP technology is a technology in which a processing material is subjected to pressure processing by applying a high-pressure gas at a high temperature. The processing temperature range is 20
0 ° C to 2600 ° C, and the processing pressure range is usually several hundreds
from kgf / cm ² is 2600kgf / cm ² about. As the pressure medium, since the temperature is high as described above, an inert gas such as an argon gas is used.

FIG. 10 shows an outline of a pressure vessel used for such HIP processing. FIG. 10 is a sectional view of a general pressure vessel used for HIP processing.

In the figure, reference numeral (02) denotes a high-pressure cylinder, and an upper opening of the high-pressure cylinder (02) is provided with a sealing material (06) therebetween.
An upper lid (03) having a pressure medium gas inlet (04) is fitted therein, and a lower lid (05) is fitted into a lower opening of the high-pressure cylinder (02) via a sealing material (07). Have been combined. Also,
In a space formed by the high-pressure cylinder (02), the upper lid (03) and the lower lid (05), an inverted cup-shaped heat insulating layer (09) is arranged. Inside the heat insulating layer (09), a cylinder is provided. Heater (10)
And further inside the heater (10). A processing material (11) is provided, and the processing material (11) is mounted on a support (08) mounted on the lower lid (05), and the pressure vessel (01) is , And the elements described above.

To perform HIP processing in this pressure vessel (01), the processing material (1
After disposing 1) in the container, the pressure medium gas is introduced through the pressure medium gas introduction port (04) to increase the pressure, and the heater (10) is energized to raise the temperature.

As the operation method of the HIP processing, there are a pre-pressurization type, a pre-heating type, and a simultaneous pre-heating and pressurization type.

Fig. 11a shows the operation system of the pre-heating type, Fig. 11b shows the operation system of the pre-heating type, and Fig.
As shown in FIG. 11A to 11C are graphs in which time is plotted on the horizontal axis, temperature and pressure are plotted on the vertical axis, and the temperature is represented by a broken line and the pressure is represented by a solid line. In FIGS. The processing temperature, t _{1 to} t ₃ , indicates the time until the processing pressure P and the processing temperature T are reached.

First, the boost type will be described with reference to FIG. 11A. The pre-pressurization type is a method in which the pressure is raised to a predetermined processing pressure at room temperature, and then the temperature is raised. In this method, a pressure increase due to gas expansion at the time of temperature rise (the period indicated by (a) in FIG. 11A) can be used for pressure increase, so that a compressor with a discharge pressure much lower than the processing pressure P can be used. It has advantages and is the most used.

Next, the preheating type will be described with reference to FIG. 11b. The pre-heating type is a method in which the temperature is increased to a predetermined processing temperature and then increased. This method is one example of a sintering / HIP process in which a processing material is sintered under a pressure near a vacuum or an atmospheric pressure before the HIP processing, and then the pressure is continuously increased. This method is also used for treating a capsule-containing treatment material that breaks when pressed at room temperature, such as a glass capsule. The preheating type has a disadvantage that a compressor having a discharge pressure equal to or higher than the processing pressure P is required, and thus is mainly used in the above case.

Further, in order to shorten the t _2, there is also a method as shown in the first 11 one-dot chain line in FIG b to start boosting before reaching the treatment temperature T.

Finally, the simultaneous heating and pressurizing type will be described with reference to FIG. 11C. Heating boost co form a heating is performed boost simultaneously, there is an advantage that the time t ₃ to reach the treatment temperature T process pressure P shortest _{(t 3 <t 1 <t} 2). However, there is a disadvantage that a compressor having a discharge pressure equal to or higher than the processing pressure P is required, as in the case of the preheating type.

Next, a description will be given of a control method of an operation method relating to the temperature increase / pressure increase. The pressure increase is performed by supplying a pressure medium gas to the pressure vessel by a compressor, and the temperature increase is performed by energizing a heater.

The most primitive method of controlling the temperature rise and pressure increase is a method in which an operator controls ON / OFF of a compressor and a heater while monitoring a pressure gauge and a thermometer. However, this method, depending on the intuition of the operator, causes an excessive increase in pressure, an excessive increase in temperature, and the like, which not only inevitably causes a decrease in product quality and energy loss, but also causes the operator to monitor for a long time. Is a problem in itself.

For this reason, it is necessary to automate this control, and the most frequently used method of this automatic control is a method of increasing the pressure to a predetermined pressure (P _r in FIGS. 11A to 11C) (hereinafter referred to as “P _r” ). , Pressure setting method).
FIG. 13 is a conceptual diagram of an apparatus for performing this control method, in which a solid line indicates a high-pressure gas system, and an alternate long and short dash line indicates an electric system. In the figure, reference numeral (01) denotes a pressure vessel, and a pipe (21) is connected to a pressure medium gas inlet (04) of the pressure vessel (01). The pipe (21) is connected to a compressor ( twenty two)
Reaches the cylinder (24) of the pressurized medium gas. Also,
A pressure gauge (23) is connected to a pipe (21) between the pressure vessel (01) and the compressor (22), and the pressure gauge (23) is connected to a control device (26) by an electric system. )It is connected to the. The control device (26) is also connected to the electric motor (25) of the compressor (22) by an electric system. In this device configuration, the control method uses the pipe (21) to transfer the pressure from the cylinder (24) to the pressure vessel (01).
The pressurized medium gas is supplied under pressure by a compressor (22), and the pressure in the pressure vessel (01) is measured by a pressure gauge (23), and the measured pressure is a constant value (FIGS. 11a to 11a). in c
The control device (26) detects the time point at which P _r ) has been reached, and at that time the motor (25) is turned off.

Then, as a method advanced from the above-mentioned pressure setting method,
A method using a program controller (hereinafter, referred to as a PC method) will be described. FIG. 14 is a conceptual diagram of an apparatus for performing this control method. 13, the same reference numerals as those in FIG. 13 denote the same parts, and a description thereof will be omitted. (27) is a control device having a program controller, which is connected to a pressure gauge (23) and an electric motor (25) by an electric system, and is connected to a gas recovery line (28) that bypasses the compressor (22). The high pressure valve (29) is also connected. According to this PC system, in such an apparatus configuration, a boosting pattern is set as a ramp function in a program controller in a control device (27), and a compressor (22) is set by a pressure value measured by a pressure gauge (23) according to this pattern. The electric motor (25) is turned ON / OFF and the high pressure valve (29) is opened and closed to control the pressure. According to this PC method, the heater is similarly controlled by the PC method, so that
As shown in Fig. 12, it is possible to terminate the temperature rise and pressure rise simultaneously. FIG. 12 is a graph showing a case where the temperature is raised and raised by the PC method, in which time is plotted on the horizontal axis and pressure and temperature are plotted on the vertical axis, as in FIG.

[Problems to be Solved by the Invention] The pressure setting method described above includes an operation method having a period in which the temperature raising process and the pressure raising process are simultaneously performed (simultaneous heating and pressure raising type in FIG. 11c, a dashed line in FIG. 11b). And the case of performing a so-called reheating process), there is a problem that it is difficult to determine the pressure to be set.

That is, in such an operation system, it is necessary to set a pressure (for example, Pr in FIG. _11c ) after the temperature is raised to some extent. By the way, since the pressure depends on the temperature as shown by Boyle-Charles law, when determining the set pressure of this method, the temperature of the pressure medium gas must be taken into consideration. And the pressure increase process is not necessarily the ramp coefficient as shown in Fig. 12, so the temperature when reaching the set pressure differs for each HIP process . Further, after the temperature of the pressure medium gas is increased, the temperature is not constant but greatly varies depending on the location in the pressure vessel (01). This is because the argon gas used as the pressurizing gas is a high-density, low-viscosity, and highly adiabatic fluid at high temperatures, so that a strong natural convection occurs due to the temperature difference, and the heated gas This is because the heat easily accumulates and the heat conductivity is low, so that the heat is difficult to be transmitted downward, so that a vertical temperature distribution occurs in which the upper part has a high temperature and the lower part has a low temperature. That is, the tenth
The temperature of the part B is much lower than that of the part A in the figure. Also, because it is insulated by the heat insulation layer (09),
The part C has a lower temperature than the part B.

When the pressure setting method is applied to an operation method having a period in which the temperature increasing process and the pressure increasing process are performed at the same time, not only the temperature when the pressure value to be set is reached is not constant, but also such a complicated temperature. Due to the distribution, Boyle-Charles' law can not be applied practically, and an approximate value must be set as the set pressure.Overshoot occurs due to too high pressure, resulting in deterioration of product quality and energy loss. There was a problem that was inevitable.

On the other hand, although the PC method is a very good control method in terms of product quality, not only is the program controller itself expensive, but also it is necessary to operate the compressor at high pressure, and the discharge pressure is much lower than the processing pressure P. There was a problem that it was not possible to complete with a compressor of this type. In other words, the PC system, the take temperature operation method of performing boosted by an increase as FIG. 11 c, similarly to the pressure setting method described above, is the need to determine the set pressure P _r.

The present invention has been made in view of the problems of the related art, and has a simple and inexpensive device configuration in an operation system having a period in which a temperature raising process and a pressure raising process are simultaneously performed.
It is an object of the present invention to provide a method of supplying a pressurized medium gas of a hot isostatic pressurizing apparatus with high accuracy without overshoot or the like due to excessive pressure increase.

[Means for solving the problem]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and the features of the invention according to claim 1 include an operation system having a period in which the temperature raising process and the pressure raising process are simultaneously performed. In the method of supplying a pressurized gas of a hot isostatic pressurizing apparatus, the volume of the pressurized gas at a predetermined reference temperature and a predetermined reference pressure required to achieve a predetermined processing temperature and a predetermined processing pressure is reduced. Preset as an integrated flow rate, between the cylinder of the compressor gas and the compressor, measure the temperature and pressure of the compressor gas to be supplied to the hot isostatic pressurizing device, the discharge amount in one step of the compressor The measured temperature and pressure values are corrected to the discharge amount under the predetermined reference temperature and the predetermined reference pressure, the corrected discharge amount is integrated, and the integrated discharge value and the pressure medium gas integrated flow rate set value are Compare the previous When the integrated discharged value exceeds the pressure medium gas accumulated flow setpoint is to stop the supply of the pressure medium gas.

The feature of the invention according to claim (2) is that, in the above-mentioned method for supplying a pressurized medium gas, the pressure medium gas at a predetermined reference temperature and a predetermined reference pressure required to achieve a predetermined processing temperature and a predetermined processing pressure is obtained. The volume is set in advance as the pressure medium gas integrated flow rate, and between the cylinder of the pressure medium gas and the compressor, the temperature and pressure of the pressure medium gas supplied to the hot isostatic pressurizing device are measured, and the pressure medium gas is measured. The integrated flow rate of the pressurized gas is measured by an integrating flow meter provided between the cylinder and the compressor, and the measured integrated flow rate value is calculated based on the measured temperature and pressure values. And to correct the integrated flow value under a predetermined reference pressure, comparing the integrated flow value and the pressure medium gas integrated flow set value, when the integrated flow value exceeds the pressure medium gas integrated flow set value, Stop supply of pressurized gas In the door.

The feature of the invention according to claim (3) is that, in the above-mentioned method for supplying a pressurized medium gas, the pressure medium gas at a predetermined reference temperature and a predetermined reference pressure required to achieve a predetermined processing temperature and a predetermined processing pressure is obtained. The volume is set in advance as a pressure medium gas integrated flow rate, and between the cylinder of the pressure medium gas and the compressor, the temperature and pressure of the pressure medium gas supplied to the hot hydrostatic pressurizing device are measured and the pressure medium gas is measured. The flow rate per unit time is measured, the flow rate value in each sampling cycle is calculated every predetermined sampling cycle from the measured flow rate value, and the calculated flow rate value in each sampling cycle is the measured temperature and pressure values. By the above, the flow rate value in each sampling cycle under a predetermined reference temperature and a predetermined reference pressure is corrected, the flow rate value in each corrected sampling cycle is integrated, and the product Compared flow value and said medium gas accumulated flow setpoint, when the integrated flow rate value exceeds the pressure medium gas accumulated flow setpoint is to stop the supply of the pressure medium gas.

[Action]

In the present invention, since the pressure medium gas integrated flow rate set value is used for the supply control of the pressure medium gas resulting in the pressure increase control,
Since the control accuracy does not decrease due to the temperature as in the pressure setting method, high-precision control is performed even when an operation method having a period in which the temperature increasing process and the pressure increasing process are simultaneously performed is employed. be able to. Also PC
Compared with the method, a compressor having a discharge pressure much lower than the processing pressure P can be used.

Further, in the present invention, the temperature and pressure are measured, and the integrated flow rate of the pressure medium gas supplied to the HIP device, which is directly measured or indirectly obtained by calculation, is corrected based on the measured temperature and pressure. Control can be further improved. That is, accurate control can be performed without being affected by a change in the primary pressure due to a change in the remaining amount of the cylinder of the pressurized medium gas, and without being affected by a temperature change of the outside air or a temperature change due to the pressure increase.

Further, according to the present invention, it is not necessary to use an expensive program controller, so that a cheaper and simpler configuration can be adopted as compared with the PC system.

Finally, in the invention according to claim (2), since the integrating flow meter is connected between the cylinder of the pressurized gas and the compressor, the integrating flow meter can be of a low pressure specification. In the invention according to claim (3), since the flow meter is connected between the cylinder of the pressurized gas and the compressor, the flow meter can be of a low pressure specification.

〔Example〕

An embodiment of the invention according to claim (1) will be described with reference to FIGS.

FIG. 1 is a system diagram showing a configuration of an embodiment of the invention according to claim (1), in which (01) is a pressure vessel, and a pressure medium gas is introduced into the pressure vessel (01). A pipe (31) is connected to the port (04), and the pipe (31) finally communicates with a cylinder (38) of a pressurized gas. The piping (3
Between the pressure vessel (01) of 1) and the cylinder of the pressurized medium gas (38), a pressure gauge (32), a first valve (33), and a first reverse A stop valve (34), a second check valve (35), a second valve (37), a pressure gauge (39) and a thermometer (40) are provided, and the first check valve (34) is provided. ) And the pipe (31) between the second check valve (35) and the compressor (36)
Is connected. Further, a pipe between the first valve (33) and the first check valve (34) and the second valve (3
A bypass pipe (31a) is provided between the pipe between (7) and the second check valve (35).
1a) is provided with a third valve (41) and a throttle (42).

The compressor (36) is a single-acting compressor that performs hydraulic or pneumatic operation. The compression chamber (43) on the high-pressure gas side has a first check valve (34) and a second check valve. It is connected to the pipe between the valve (35). Also, a hydraulic or pneumatic pipeline is connected to the hydraulic or pneumatic compression chamber, and the pipeline is
It is connected to a three-port two-position solenoid-operated switching valve (44) for switching the connection between the pump (45) and the tank, and the pump (45) (can be a hydraulic pump or a pneumatic pump) is connected to the tank. I have. Further, on the outer surface of the compression chamber (43) on the high-pressure gas side of the compressor (36), a pair of piston detection proximity switches (46) for detecting the operation of the piston of the compressor (36) in one step, (47) is provided, the first piston detection proximity switch (46) detects the end of one step of the piston, and the second piston detection proximity switch (4
7) detects the beginning of one step of the piston. By the way, the pair of piston detection proximity switches (46), (4
7), the pressure gauge (39), the thermometer (40) and the pump (45) are connected to a control device (48) by an electric system.

Here, the details of the control device (48) will be described with reference to FIG.

FIG. 2 is a block diagram showing functions of the control device (48). In the figure, reference numeral (101) denotes a pressure detecting means constituted by an operational amplifier, an A / D converter, etc., and amplifies and appropriately amplifies an analog signal corresponding to the pressure value measured by the pressure gauge (39).
The data is filtered, converted into a digital value, and output to the correction means (103) as the measured pressure _Pn . Further, (102) is a temperature detecting means composed of an operational amplifier and an A / D converter, which amplifies and filtrates an analog signal corresponding to the temperature value measured by the thermometer (40) as appropriate to obtain a digital value. and outputs to the correcting unit converts to (103) as a measured temperature T _n.

The one-step detection means (104) is connected to the pair of piston detection proximity switches (46) and (47), and the compressor is turned on / off by the pair of piston detection proximity switches (46) and (47). Is detected, and at that time, the discharge amount C in a predetermined compressor process is corrected (103)
Output to The correction means (103) determines the discharge amount C in one step of the compressor by using the measured pressure _Pn and the measured temperature _Tn.
And outputs the corrected discharge amount V _n ′ under the predetermined reference temperature and predetermined reference pressure to the integrating means (105). The accumulating means (105) integrates the integrated discharge amount from the compressed gas supply start time point, and outputs the accumulated discharge amount V _s to the comparison means (106). Said comparison means (106) compares the pressure medium gas accumulated flow setpoint V _o predetermined by the pressure medium gas accumulated flow setting means comprises a digital switch or the like (107), and said accumulated discharge amount, hydraulic When the integrated discharge amount exceeds the gas integrated flow rate set value, a pressure medium gas supply stop signal is output to the interface means (108). The interface means (108) comprises a relay, an electromagnetic switch, and the like.
A pressure medium gas supply stop signal is output to the port 2 position electromagnetic switching valve (44) and the pump (45).

The correcting means (103), the one-step detecting means (104), the integrating means (105) and the comparing means (106) are components of the microprocessor (109).

Here, the pressure medium gas integrated flow rate set value is the volume of the pressure medium gas required to obtain the HIP processing temperature and the processing pressure,
It is converted into a volume under a predetermined reference temperature and a predetermined reference temperature and pressure used for the correction calculation.

In the present embodiment, a single-acting compressor is used as a compressor, but it goes without saying that the present invention can be similarly implemented using other compressors such as a double-acting compressor or a diaphragm compressor. . In the present invention, the proximity switch is used to detect one process of the compressor. However, the proximity switch may be replaced by a switching signal of the solenoid valve (44) or the like.

Next, the operation of the invention according to claim (1) will be described with reference to the flowchart of FIG. 3 and also to FIG. 1 and FIG. First, the first valve (33) and the second valve (37) for supplying the pressure medium gas from the cylinder (38) to the pressure vessel (01) are opened, and the compressor (36) is operated. At this time, the third valve (41) is closed. The compressor (36) has a three-port two
Since the position switching valve (44) is directly connected to the oil tank, the piston of the compressor (36) is pushed by the pressure of the cylinder (38), and the pressure medium gas is discharged to the second check valve (35). ) And flows into the compression chamber (43). On the other hand, in the discharge step, the three-port two-position solenoid-operated directional control valve (44) operates the pump (4).
5), the piston in the compressor (36) is pushed by the pressure of the pump (45), and the compression chamber (43)
The pressure medium gas inside is supplied to the pressure vessel (01) via the first check valve (34). The operation of this piston in one process,
A pair of piston detection proximity switches (46) and (47) are used for detection, and a point in time when the discharge process is completed is detected by the one process detection means (104) of the control device (48).

This operation is the step 2 in FIG. 3 (S2, hereinafter abbreviated steps n and Sn.) A and, at this point, performs measurement of the temperature T _n by the temperature detection means (102), pressure detecting means (101) To measure the pressure _Pn [S3]. Subsequently, the discharge amount C per compressor process is calculated by the following equation (a).
The discharge amount per process V _n ′ under the predetermined reference temperature T ₀ and the predetermined reference pressure P ₀ is corrected [S4].

V _n ′ = C × (P ₀ × T _n ) / (P _n × T ₀ ) Equation (a) Next, the discharge amount per process after this correction is calculated by the integrating means (105) using the following equation (b). ) Is calculated by the formula [S5].

The _{V s = V s + V n} '...... (b) Formula The cumulative discharge quantity V _s, as compared to the set pressure medium gas accumulated flow setpoint V _o in advance medium gas accumulated flow setting means (107), When V _o <V _s , a pressure medium gas supply stop signal is output to the interface means (108) [S6]. On the other hand, V _o
> Between V _s is repeated work each compressor one step S2 to S6.

When this pressure medium gas supply stop signal is output, the interface means (108) outputs a stop signal to the 3-port 2-position electromagnetic switching valve (44) and the pump (45) to stop the operation of the pressure medium gas supply. . Finally, after the end of the HIP processing, the third valve (41) is opened and the bypass pipe (31) is opened.
Collect the pressurized gas into the cylinder (38) through a). At this time, the pressure reduction speed is adjusted by the aperture (42).

Here, as a method of obtaining the discharge amount C in one step of the compressor in the present embodiment, the capacity of the compression chamber (43) may be obtained by calculation, or the discharge amount of one step may be sampled and measured by a test operation. You may ask for it.

An embodiment of the invention according to claim (2) will be described with reference to FIGS.

FIG. 4 is a system diagram showing the configuration of an embodiment of the invention according to claim (2), FIG. 5 is a block diagram conceptually showing the function of the control device, and FIG. It is a flowchart which shows the method of the invention concerning 2). Fig. 4 ~
In FIG. 6, the same reference numerals as those in FIGS. 1 to 3 denote the same components, and a description thereof will be omitted.

In the present embodiment, instead of detecting one step of the compressor in the embodiment of the invention according to claim (1), the integration between the second valve (37) of the pipe (31) and the cylinder (38) is performed. A flow meter (52) is provided, and the output of the integrating flow meter (52) is connected to a control device (53) by an electric system. The integrated flow rate value measured by the integrated flow meter (52) is output to the integrated flow rate detection means (110) of the control device (53), which includes an operational amplifier and an A / D converter. Outputs (V _s , T _n , P _n ) of the integrated flow rate detecting means (110), the pressure detecting means (101) and the temperature detecting means (102) are output to the correcting means (111), and are output to the correcting means (111). 111), the predetermined reference temperature T
_{0 The} flow rate is corrected to the integrated flow value V _s ′ under the predetermined reference pressure P ₀ , and the corrected value V _s ′ is output to the comparison means (112). Said comparison means (112) is configured medium gas accumulated flow setpoint V _o and the integrated flow rate value by medium gas accumulated flow setting means (107)
'Compare, V _s' V _s and outputs a pressure medium gas supply stop signal to the interface means (108) at the time point when> V _o.

The comparing means (112) and the correcting means (111) are components of a microprocessor (113). In the present embodiment, since the load on the microprocessor (113) is small, it is possible to use an analog circuit or the like instead of using the microprocessor (113).

The operation of the invention according to claim (2) will be described with reference to the flowchart of FIG.

First, detects the pressure P _n by the pressure detector (101) detects the temperature T _n at a temperature detector (102) [S1
1]. Next, the integrated flow meter (52) and the integrated flow detecting means (1
By 10), measuring an integrated flow rate value V _s (S12). Then, the integrated flow rate value V _s, the correction means (111), following the equation (c) is corrected to a predetermined reference temperature T ₀ predetermined reference pressure P ₀ under the integrated flow rate value V _s' [S13].

V _s ′ = V _s × (P ₀ × T _n ) / (P _n × T ₀ ) Formula (c) Next, the corrected integrated flow value V _s ′ is converted to the pressure medium gas integrated flow set value V _o. When V _o <V _s ′, a pressure medium gas supply stop signal is output to the interface means (108) [S14]. On the other hand, while V _o > V _s ′, the operations of S11 to S14 are repeated. When this pressure medium gas supply stop signal is output, the interface means (108) stops the supply of the pressure medium gas [S15].

This series of sampling timings may be performed at regular intervals from the start of supply using a timer, or may be started at a certain pressure after the start of supply of the pressurized gas.

An embodiment of the invention according to claim (3) will be described with reference to FIGS.

FIG. 7 is a system diagram showing a configuration of an embodiment of the invention according to claim (3), FIG. 8 is a block diagram conceptually showing functions of the control device, and FIG. It is a flowchart which shows the method of the invention concerning 3). Fig. 7 ~
In FIG. 9, the components having the same reference numerals as those in FIGS. 1 to 3 are the same and will not be described.

In this embodiment, as shown in FIG. 7, in the embodiment of the invention according to claim (2), the integrating flow meter (52) is used.
Instead of using, a flow meter (49) is used, and the integrating operation is performed by a control device (50) connected to the flow meter (49) by an electric system.

FIG. 8 shows the configuration of the control device (50). In the figure, reference numeral (114) denotes a flow rate detecting means comprising an operational amplifier and an A / D converter, which appropriately converts an analog signal corresponding to the value of the flow rate per unit time measured by the flow meter (49). amplification·
Filtered and then converted into a digital value, and outputs the calculation means (116) as the measurement flow rate value upsilon _n. The arithmetic means (116) includes:
The addition to have a sampling period generator timer (115) is connected to the flow rate detecting means (114), the sampling period generator timer (115), a sampling signal generated every predetermined sampling period t _0, the calculating means ( 116). The computing means (116), for each sampling period, calculates the flow rate value V _n at each sampling period and outputs the correction means (117). The correction means (117) corrects the integrated flow value V _n 'in each sampling cycle under the predetermined reference temperature T _{0 and the} predetermined reference pressure P _{0 based on} the measured temperature T _n and pressure P _n , and Output. The integrating means (118) is provided with an integrated flow rate V from the start of the supply of the pressurized gas.
_s is integrated, and the integrated value is output to the comparing means (106). Said comparison means (106), said the integrated flow rate V _s, compared with a preset pressure medium gas accumulated flow setpoint V _o by medium gas accumulated flow setting means (107), and V _s> V _o At this point, a pressure medium gas supply stop signal is output to the interface means (108), and the interface means (108) stops the supply of the pressure medium gas by this signal.

Next, the operation of the embodiment according to claim (3) will be described with reference to the flowchart of FIG.

First, a sampling period generation timer having a period t ₀ (11
5) waits for the ON [S22], to detect the temperature T _n with sensing pressure P _n at the time of the ON [S23], for detecting a flow rate upsilon _n per unit time [S24]. Then, the following (d)
The equation to calculate the flow rate value V _n at each sampling period [S25].

V _n = υ _n × t ₀ (Equation (d)) Flow rate value V in each calculated sampling cycle
_n is corrected to an integrated flow value V _n ′ at a predetermined reference temperature T _{0 and a} predetermined reference pressure P _{0 by the} following equation (E) [S 26].

V _n ′ = V _n × (P ₀ × T _n ) / (P _n × T ₀ ) Equation (e) Then, the integrated flow rate value V _n ′ in each corrected sampling cycle is calculated by the following equation (f). Integration is performed [S27].

V _s = V _s + V _n ′ Equation (f) This integrated flow value V _s is compared with the pressure medium gas integrated flow set value V _o, and when V _o <V _s , the supply of the pressure medium gas is stopped. A signal is output [S28]. On the other hand, between the V _o> V _s is to repeat the operation of the S22~S28. When this pressure medium gas supply stop signal is output, the interface means (108) stops the supply of the pressure medium gas [S29].

The sampling period may be set using a timer as in the present embodiment, or as in the embodiment according to claim (1), detecting one process of the compressor and measuring the time required for the process. May be performed.

The predetermined reference temperature T ₀ and the predetermined reference pressure P ₀ used in the correction calculation of the present invention may be any values as long as they are certain constant values, for example, 0 ° C. and 1 kgf / cm ^2. , 20
° C and 100 kgf / cm ² .

As Determination of pressure medium gas accumulated flow setpoint V _o for use in the present invention, it is also theoretically possible to calculate the type of volume-treatment temperature and treatment pressure and medium gas in the processing chamber of the pressure vessel Because it is difficult as a matter of fact, once a given HIP
Perform a manual test exercise to reach the processing temperature and pressure, and measure the inflow at that time, or
After reaching the pressure, the discharge amount of the pressurized gas may be measured and converted into a volume at a predetermined reference temperature and a predetermined reference pressure used for the correction calculation.In this test operation, the pressurized gas should be filled. Since the volume occupied by the processing material is small relative to the volume of the space, there is no need to actually put the processing material in, but it goes without saying that it is better to actually put the processing material in a container during this test operation. No.

〔The invention's effect〕

According to the present invention, since the pressure medium gas integrated flow rate set value is used to control the supply of the pressure medium gas, a simple and inexpensive operation method having a period in which the temperature increase processing and the pressure increase processing are simultaneously performed is provided. With the device configuration, it is possible to accurately operate the hot isostatic pressurizing device without causing overshoot or the like due to excessively increasing the pressure.

In addition, since the boost control is not affected by the temperature rising condition, the boost control can be reliably performed regardless of any of the preceding type, the preceding type, and the simultaneous temperature rising / rising type.

[Brief description of the drawings]

FIG. 1 is a system diagram illustrating the configuration of an embodiment of the invention according to claim (1), FIG. 2 is a block diagram conceptually showing the function of a control device according to claim (1), and FIG. Flow chart showing the method of the invention according to claim (1),
The figure is a system diagram for explaining the configuration of the embodiment of the invention according to claim (2), FIG. 5 is a block diagram conceptually showing the function of the control device according to claim (2), and FIG. FIG. 7 is a flowchart showing the method of the invention according to (2), FIG. 7 is a system diagram for explaining the configuration of the embodiment of the invention according to claim (3), and FIG. 8 is a function of the control device according to claim (3); FIG. 9 is a flow chart showing the method of the invention according to claim (3), FIG. 10 is a sectional view of a general pressure vessel used for HIP processing, and FIG. Fig. 11b is a graph that employs a pre-heating-type processing method, Fig. 11c is a graph that employs a simultaneous-heating-and-pressure processing method, and Fig. 12 is a graph that employs a heating-and-pressure simultaneous processing method. Fig. 13 is a conceptual diagram showing the device configuration of the pressure setting method, and Fig. 14 is the PC method. FIG. 2 is a conceptual diagram showing a device configuration of FIG. (01) pressure vessel, (31) pipeline, (36) compressor, (38) cylinder, (39) pressure gauge, (40) thermometer, (49) …… Flow meter, (52) …… Integrated flow meter.

Claims (3)

(57) [Claims] In a method for supplying a pressurized medium gas of a hot isostatic pressurizing apparatus employing an operation system having a period in which a temperature raising process and a pressure raising process are simultaneously performed, it is necessary to achieve a predetermined processing temperature and a predetermined processing pressure. The volume of the pressure medium gas at a predetermined reference temperature and a predetermined reference pressure is preset as a pressure medium gas integrated flow rate; between the cylinder of the pressure medium gas and the compressor, it is supplied to a hot isostatic pressurizing device. Measuring the temperature and pressure of the pressurized medium gas; correcting the discharge amount in one step of the compressor to the discharge amount under the predetermined reference temperature and the predetermined reference pressure by the measured temperature and pressure values; Integrating the discharge amount; comparing the integrated discharge value with the pressure medium gas integrated flow rate set value; stopping the supply of the pressure medium gas when the integrated discharge value exceeds the pressure medium gas integrated flow rate set value. Is characterized by Medium gas supply method that hot isostatic pressing apparatus. 2. A method for supplying a pressurized medium gas of a hot isostatic pressurizing apparatus employing an operation system having a period in which a temperature raising process and a pressure raising process are simultaneously performed, in order to achieve a predetermined processing temperature and a predetermined processing pressure. The volume of the pressure medium gas at a predetermined reference temperature and a predetermined reference pressure is preset as a pressure medium gas integrated flow rate; between the cylinder of the pressure medium gas and the compressor, it is supplied to a hot isostatic pressurizing device. Measuring the temperature and pressure of the pressurized gas; measuring the accumulated flow rate of the pressurized gas with an integrating flow meter provided between the cylinder of the pressurized gas and the compressor; Correcting the integrated flow value under the predetermined reference temperature and the predetermined reference pressure by the measured temperature and pressure values; comparing the integrated flow value with the integrated medium gas flow setting value; Is the pressure medium gas When exceeding the calculated flow setpoint, medium gas supply method of hot isostatic pressing apparatus characterized by stopping the supply of the pressure medium gas. 3. A method for supplying a pressurized medium gas of a hot isostatic pressurizing apparatus employing an operation mode having a period in which a temperature raising process and a pressure raising process are simultaneously performed, in order to achieve a predetermined process temperature and a predetermined process pressure. The volume of the pressure medium gas at a predetermined reference temperature and a predetermined reference pressure is preset as a pressure medium gas integrated flow rate; between the cylinder of the pressure medium gas and the compressor, it is supplied to a hot isostatic pressurizing device. Measuring the temperature and pressure of the pressure medium gas and measuring the flow rate of the pressure medium gas per unit time; calculating the flow rate value in each sampling cycle at predetermined sampling cycles from the measured flow rate value; Correcting the flow rate value in the sampling cycle to a flow rate value in each sampling cycle under a predetermined reference temperature and a predetermined reference pressure by the measured temperature and pressure values; Integrating the corrected flow rate values in each sampling cycle; comparing the integrated flow rate value with the pressure medium gas integrated flow rate set value; when the integrated flow value exceeds the pressure medium gas integrated flow rate set value, A method of supplying a pressurized medium gas for a hot isostatic pressurizing apparatus, comprising stopping supply of a medium gas.