JP2702439B2 - Powder supply device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a powder supply device,
More specifically, the present invention relates to a powder supply device capable of smoothly discharging powder without forming a bridge or the like in the opening.

[0002]

2. Description of the Related Art Conventionally, a powder supply hopper arranged on a powder conveying surface which advances in one direction, such as a conveying belt surface of a belt conveyor, has been known. It has an opening that opens toward the transport surface.

[0003] From the opening of the powder supply hopper, the powder falls onto a powder transport surface that advances in one direction, and the powder is transported along with the powder transport surface.

[0004] In the conventional powder supply hopper, clogging of powder called a bridge often occurs at the opening. When this clogging occurs, powder is not supplied to the powder conveying surface.

[0005] Therefore, in order to prevent clogging in the powder supply hopper, for example, forced vibration is applied to the wall surface of the powder supply hopper, or a powder is inserted by inserting a nozzle into the powder supply hopper. In some cases, the airflow was forced to flow in the body supply hopper.

However, even if forced vibration is applied to the wall surface of the powder supply hopper, it is not always effective when the powder is fine particles or particles containing water or oil. In addition, forcibly applying vibration to the wall surface of the powder supply hopper or forcibly generating an airflow in the powder supply hopper may change the properties of the powder and granules, and may cause a problem. In some cases, the powder cannot be supplied to the powder conveying surface from the opening of the powder supply hopper at a predetermined supply speed. Further, forcibly applying vibration or forcibly generating airflow requires a considerably large-scale and complicated device, and it is not possible to achieve miniaturization and simplification of the device.

The present invention has been completed based on the above circumstances. An object of the present invention is to solve the above problems.
SUMMARY OF THE INVENTION An object of the present invention is to provide a powder supply device having a simple configuration capable of stably discharging powder from an opening onto a conveying surface.

[0008]

According to a first aspect of the present invention, there is provided a method for manufacturing a semiconductor device, comprising: And the leading edge in the direction of travel of the powder conveying surface extends in a direction orthogonal to the direction of travel of the powder transport surface, and the leading edge has a predetermined height from the powder transport surface. an opening are formed so as, powder definitive in the opening
It is placed on the transfer surface and rolls as the powder transfer surface advances
Free a powder supplying device, characterized in that it comprises a roller, an invention according to claim 2, wherein the free rollers, the powder transfer its axis length L of the tip edge of the opening For a length A in a direction perpendicular to the direction of travel of the surface, L =
The relationship of 0.9A to 0.6A is satisfied, and the roller diameter R satisfies the relationship of R = 0.5B to 2B with respect to the height B of the front end edge of the opening from the powder conveying surface. The powder supply device according to claim 1, wherein the powder supply device is formed as follows.

[0009]

In the powder supply device according to the present invention, the powder conveying surface advances in one direction. In the opening of the powder supply device, the free roller rolls on the powder conveying surface. Powder is accumulated above the opening in the powder supply device. Due to the rolling of the free roller, the powder accumulated above the opening falls on the powder conveying surface. The powder is transported to the falling powder transport surface.

[0010] The free roller promotes the drop of the powder accumulated above the opening onto the conveying surface in the opening, and prevents the powder from being clogged in the opening.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the powder supply apparatus of the present invention will be described with reference to the drawings.

As shown in FIG. 1, a powder supply device 1
It is arranged on the powder conveying surface 2. The powder conveying surface 2 is an upper surface of the endless track belt 3 and the like that are wound around a driving wheel (not shown) and a driven wheel (not shown). When the drive wheels are driven, the transport surface moves forward in one direction.

The powder supply device 1 is provided with such a powder conveying surface 2.
Is located on the rear wheel side on the powder conveying surface 2 when the drive wheel is the front wheel and the driven wheel is the rear wheel.

The opening 4 of the powder supply device 1 has a leading edge 5 extending toward the powder transport surface 2 and extending in a direction perpendicular to the direction of travel of the powder transport surface 2. A cylindrical free roller 6 is disposed in the opening 4 so that its axis coincides with the direction orthogonal to the traveling direction of the powder conveying surface 2 and can roll on the powder conveying surface 2. Is done. This free roller 6
Has no mechanical connection such as being mechanically attached to the powder supply device 1, and is merely placed on the powder conveying surface 2 in the opening 4.

The fact that the free roller 6 only needs to be disposed in the opening and on the powder conveying surface 2 means that the construction of the apparatus is greatly simplified, and that the merit of manufacturing the free roller 6 is great. Means

The free roller 6 is preferably designed to satisfy the following relationship. That is, the free roller 6 has an axial center length L that is equal to the leading edge 5 of the opening 4.
Satisfies the relationship of L = 0.9A to 0.6A with respect to the length A in the direction orthogonal to the traveling direction of the powder conveying surface 2, and the roller diameter R of the powder conveying surface 2 from the powder conveying surface 2 to the opening. It is preferable that the relationship of R = 0.5B to 2B is satisfied with respect to the height B of the tip end edge 5 of R4.

When the axial center length L of the free roller 6 is larger than 0.9 A, both ends of the free roller 6
However, the free roller 6 may hit the both ends in the direction orthogonal to the traveling direction of the powder conveying surface 2, and the smooth rotation of the free roller 6 may be alienated. Further, the axial center length L is 0.6
If it is smaller than A, the powder does not fall smoothly from the opening 4 despite the rotation of the free roller 6 and the powder transport surface 2
May not be supplied smoothly. If the roller particle diameter R of the free roller 6 is smaller than 0.5B, the effect of scraping off the powder in the opening 4 may be inferior, and if it is larger than 2B, an advantage corresponding to just increasing the diameter is expected. You may not be able to.

The free roller 6 is preferably made of metal. This is because the metal free roller 6 is heavier than the free roller formed of another material, for example, plastic, so that the metal free roller 6 rolls well on the advancing powder conveying surface 2 and Roller that accumulates powder in free rollers 6
This makes it possible to scrape off the powder and satisfactorily drop the powder on the powder conveying surface 2, thereby effectively preventing clogging of the powder in the opening 4.

The powder supply device 1 having the above configuration operates as follows.

In the powder supply device 1, the powder is accumulated on the upper part of the opening 4. The powder transport surface 2 is advanced in one direction. The free roller 6 placed on the powder conveying surface 2 and arranged in the opening 4 rolls on the powder conveying surface 2 as the powder conveying surface 2 advances. By the rolling of the free roller 6, the powder accumulated above the opening 4 is scraped off,
The scraped powder is transported on the powder transport surface 2. As long as the powder transport surface 2 advances, the free roller 6 rolls in the opening 4, so that the powder accumulated above the opening 4 smoothly falls onto the powder transport surface 2 and is transported. .

When the roller diameter R of the free roller 6 is smaller than the height B of the distal end edge 5 of the opening 4 from the powder conveying surface 2, the free roller 6 is in contact with the powder conveying surface 2 and the opening. From the gap between the leading end edge 5 of the part 4 and the powder conveying surface 2
As shown in FIG. 3, shafts 7 provided at both ends of the free roller 6 are connected to both sides of the opening 4 so as to surely roll in the opening 4 so as not to be conveyed together. It is also preferred to be rotatably mounted on the wall of the wing.

The powder supply device 1 having the above configuration can supply the powder having an average particle size in the range of 0.1 to 500 μm to the powder transfer surface 2 in a particularly stable manner.

Another example of the powder supply apparatus of the present invention will be described below.

The major difference between this powder supply device and the powder supply device shown in FIGS. 1 to 3 is a free roller. As shown in FIGS. 4 and 5, the free roller 8 includes a flange 9 and a body 10, and the flange 9 is formed at both ends of the body 10. The axial length L of the free roller 8, the outer diameter R of the flange 9, and the outer diameter R 'of the body 10 are L = 0.9A to 0.6A, respectively.
It is preferable that the free roller is configured to satisfy the relationship of R = 0.5B to 2B and R> R ′ ≧ 0.5R. However, A is, as shown in FIGS. 1 and 2,
B is the length of the leading edge 5 of the opening 4 in the powder supply device in the direction perpendicular to the direction of travel of the powder conveying surface 2;
Represents the height from the powder conveying surface 2 to the edge 5 of the tip of the opening 4.

As described above, the free roller 8 is connected to the flange 9
As shown in FIG. 6, the rotation of the free roller 8 allows the powder 11 accumulated on the opening to be easily removed from the gap between the powder conveying surface 2 and the body 10. Can be carried out. Also, since it has the flange portion 9,
The rotation of the free roller 8 causes the flange portion 9 to cut and scrape the powder 11 accumulated on the free roller 8, thereby preventing the formation of a bridge of the powder.

In the present invention, in addition to the flange portions being formed at both ends of the body portion, two or more flange portions are provided in the middle of the body portion 10 as shown in FIG. 9 may be formed.

[0027]

According to the present invention, the powder accumulated above the opening can be smoothly dropped from the opening onto the powder conveying surface, and the clogging of the powder in the opening can be effectively prevented.

[0028]

[Brief description of the drawings]

FIG. 1 is a plan view showing a powder supply device according to one embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing a powder supply device according to one embodiment of the present invention.

FIG. 3 is a plan view showing a powder supply device according to another embodiment of the present invention.

FIG. 4 is a side view showing a free roller used in a powder supply device according to another embodiment of the present invention.

FIG. 5 is a front view showing a free roller used in a powder supply device according to another embodiment of the present invention.

FIG. 6 is an explanatory sectional view showing a powder supply device according to another embodiment of the present invention.

FIG. 7 is a front view showing a free roller used in a powder supply device according to still another embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Powder supply apparatus, 2 ... Powder conveyance surface, 3 ...
Endless track belt, 4 ... opening, 5 ... tip, 6
... Free roller, 7 ... Shaft, 8 ... Free roller, 9 ... Flange part, 10 ... Body part, 11 ...
powder.

Continued on the front page (72) Inventor Keisuke Kato 2-16-2 Noguchicho, Higashimurayama-shi, Tokyo Nikkiso Co., Ltd. Higashimurayama Works (72) Inventor Jun Tsutsumi 2-16-2 Noguchicho, Higashimurayama-shi, Tokyo Nikki (56) References JP-A-3-143821 (JP, A) JP-A-62-181181 (JP, U) JP-A-3-113329 (JP, U) JP-A-3-75102 (JP, U)

Claims (2)

(57) [Claims] An opening is formed on a powder conveying surface that advances in one direction and close to the powder conveying surface, and a leading edge of the powder conveying surface in a traveling direction is a powder conveying surface. traveling direction extends in a direction perpendicular, and an opening thereof tip end is formed so as to have a predetermined height from the powder conveying surface, placing the powder transfer surface definitive in the opening of Placed
And a free roller that rolls with the progress of the powder conveying surface . 2. The free roller has an axial center length L with respect to a length A in a direction perpendicular to a traveling direction of a powder conveying surface at a tip end edge of the opening, and L = 0.9A to 0.6A, and the roller diameter R is R = 0.5B to 2 with respect to the height B of the edge of the opening from the powder conveying surface.
2. The powder supply device according to claim 1, wherein the powder supply device is formed so as to satisfy the relationship of B.