JP2690658B2 - Electron tube - Google Patents
Electron tubeInfo
- Publication number
- JP2690658B2 JP2690658B2 JP4130752A JP13075292A JP2690658B2 JP 2690658 B2 JP2690658 B2 JP 2690658B2 JP 4130752 A JP4130752 A JP 4130752A JP 13075292 A JP13075292 A JP 13075292A JP 2690658 B2 JP2690658 B2 JP 2690658B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- cylinder
- electron tube
- photocathode
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Measurement Of Radiation (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は光電子増倍管等の電子管
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron tube such as a photomultiplier tube.
【０００２】[0002]
【従来の技術】光電面を有する電子管は、受光面板と筒
体およびステム材を含んで構成される。ここで、ステム
材には外部端子（ピン材）を貫通させるために、例えば
硼硅酸ガラスなどが使用される。一方、受光面板には石
英板を用いることが多く、したがってこれらを貼り合せ
ることが必要になる。2. Description of the Related Art An electron tube having a photocathode includes a light-receiving face plate, a cylinder and a stem material. Here, for example, borosilicate glass or the like is used for the stem material in order to penetrate the external terminal (pin material). On the other hand, a quartz plate is often used as the light-receiving face plate, and therefore it is necessary to bond these.
【０００３】このような場合、従来は石英板と筒体との
熱膨張率の差を考慮して、熱膨張率の異なるガラスリン
グを何枚か重ねてシールしている。また、石英板（受光
面板）と金属筒体との間を、Ｉｎ（インジウム）により
シールすることも考えられる。この場合、金属筒体の材
料としては、筒体を短くし、かつステム材とのマッチン
グを考慮すると、コバール金属を用いるのが好ましい。In such a case, conventionally, in consideration of the difference in coefficient of thermal expansion between the quartz plate and the cylinder, several glass rings having different coefficients of thermal expansion are stacked and sealed. It is also possible to seal the space between the quartz plate (light receiving face plate) and the metal cylinder with In (indium). In this case, it is preferable to use Kovar metal as the material of the metal tubular body in consideration of shortening the tubular body and matching with the stem material.
【０００４】[0004]
【発明が解決しようとする課題】しかし、コバールの筒
体と石英板をＩｎでシールすると、光電面を形成した後
の気密性が低下し、あるいは変形する欠点があった。こ
れは、Ｉｎが比較的低温（１５６℃）で軟化するのに対
し、光電面の作製では２００〜３００℃の温度にするこ
とが必要になるからである。However, if the Kovar cylinder and the quartz plate are sealed with In, the airtightness after forming the photocathode is lowered or deformed. This is because In softens at a relatively low temperature (156 ° C.), while it is necessary to set the temperature to 200 to 300 ° C. in the production of the photocathode.
【０００５】一方、硼硅酸ガラスの筒体と石英の受光面
板を、熱膨張率が中間のガラスで接着すると、全体のサ
イズを短くするのが難しい。また、プロセスの困難性か
ら、コスト高になる欠点もある。On the other hand, if the glass body of borosilicate glass and the light-receiving face plate of quartz are bonded with glass having an intermediate coefficient of thermal expansion, it is difficult to reduce the overall size. Further, there is a drawback that the cost becomes high due to the difficulty of the process.
【０００６】本発明は、このような従来技術の欠点を克
服するためになされたもので、小型で気密性の高いシー
ルが可能な電子管を提供することを目的とする。The present invention has been made to overcome such drawbacks of the prior art, and an object of the present invention is to provide an electron tube which is small in size and can be hermetically sealed.
【０００７】[0007]
【課題を解決するための手段】本発明に係る電子管は、
内面に光電面が形成された石英製の受光面板と、真空容
器の側壁をなすコバール金属製の筒体と、受光面板と筒
体との間に介在するアルミニウム製のシールリングとを
備えることを特徴とする。The electron tube according to the present invention comprises:
It is provided with a quartz light-receiving face plate having a photocathode formed on the inner surface thereof, a Kovar metal cylinder forming a side wall of the vacuum container, and an aluminum seal ring interposed between the light-receiving face plate and the cylinder. Characterize.
【０００８】[0008]
【作用】本発明の電子管によれば、融点の高いアルミニ
ウム製のシールリングを石英製の受光面板とコバール金
属製の筒体との間に介在させてシールする。本発明によ
れば、石英製の受光面板、アルミニウム製のシールリン
グ及びコバール金属製の筒体を用いているため、これら
の熱膨張率の差に基づく変形及び応力等が抑制され、ま
た、気密の信頼性の低下が生じないため、光電面の作製
において、高温で加熱することができ、量子効率を増加
させ、且つ、ガラスリングを用いた電子管と比較してこ
れを小型化することができる。According to the electron tube of the present invention, a seal ring made of aluminum having a high melting point is interposed between the quartz light-receiving face plate and the cylindrical body made of Kovar metal for sealing. According to the present invention, since the quartz light-receiving face plate, the aluminum seal ring, and the Kovar metal cylinder are used, deformation and stress due to the difference in thermal expansion coefficient between them are suppressed, and the airtightness is improved. Since it does not cause a decrease in reliability, it can be heated at a high temperature in the production of the photocathode, the quantum efficiency can be increased, and it can be downsized as compared with the electron tube using the glass ring. .
【０００９】[0009]
【実施例】以下、添付図面により、本発明の実施例に係
る光電子増倍管を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A photomultiplier tube according to an embodiment of the present invention will be described below with reference to the accompanying drawings.
【００１０】実施例の光電子増倍管は、いわゆる反射型
のダイノードを有するものであり、図１（ａ）の一部破
砕面図のように構成される。図示の通り、コバール（Ｋ
ＯＶ）金属からなる筒体１は上部筒体１１と下部筒体１
２で構成され、これらは一体化されている。下部筒体１
２の下面開口部には硼硅酸ガラスからなるステム板２が
固着され、このステム板２にはピン（外部端子）３が貫
通している。The photomultiplier tube of the embodiment has a so-called reflection type dynode, and is constructed as shown in the partially fragmented plan view of FIG. 1 (a). As shown, Kovar (K
OV) The metal cylinder 1 is composed of an upper cylinder 11 and a lower cylinder 1.
It is composed of two, and these are integrated. Lower cylinder 1
A stem plate 2 made of borosilicate glass is fixed to the lower surface opening of 2, and a pin (external terminal) 3 penetrates through the stem plate 2.
【００１１】上部筒体１１の上面開口部には、アルミニ
ウム製のシールリング４を挟んで、石英製の受光面板５
が熱圧着されている。そして、受光面板５の内面にはア
ルカリ金属などからなる光電面６が形成され、上部筒体
１１の内部にはピン３に接続されたダイノード７と、ア
ノード８とが設けられている。A quartz-made light-receiving face plate 5 is sandwiched by an aluminum seal ring 4 in the upper opening of the upper cylindrical body 11.
Are thermocompression bonded. A photocathode 6 made of an alkali metal or the like is formed on the inner surface of the light-receiving surface plate 5, and a dynode 7 connected to the pin 3 and an anode 8 are provided inside the upper cylinder 11.
【００１２】なお、上記の光電子増倍管の動作を簡単に
説明すると、次のようになる。まず、受光面板５を通し
て測定光が光電面６に入射されると、これに対応した光
電子が内部の真空中に放出される。この光電子は、加速
されてダイノード７に衝突し、多量の二次電子が放出さ
れる。そして、この二次電子はアノード８に検出され、
ピン３を経由して外部に出力される。The operation of the above photomultiplier tube will be briefly described as follows. First, when the measurement light is incident on the photocathode 6 through the light-receiving surface plate 5, photoelectrons corresponding to the measurement light are emitted into the vacuum inside. The photoelectrons are accelerated and collide with the dynode 7, and a large amount of secondary electrons are emitted. Then, this secondary electron is detected by the anode 8,
It is output to the outside via pin 3.
【００１３】上記実施例におけるシールリング４による
熱圧着は、図１（ｂ）および図２のようにしてなされ
る。まず、上部筒体１１と受光面板５が用意され、これ
らの間にシールリング４が介在される（図１（ｂ）参
照）。次に、図２のように熱圧着装置にセットされる。
ここで、熱圧着装置は電気炉９１と、一対の押圧治具９
２ａ，９２ｂと、これに連結された一対の加圧機構９３
ａ，９３ｂとを有している。The thermocompression bonding by the seal ring 4 in the above embodiment is performed as shown in FIGS. 1 (b) and 2. First, the upper cylinder 11 and the light-receiving face plate 5 are prepared, and the seal ring 4 is interposed between them (see FIG. 1B). Next, as shown in FIG. 2, the thermocompression bonding apparatus is set.
Here, the thermocompression bonding apparatus includes an electric furnace 91 and a pair of pressing jigs 9.
2a, 92b and a pair of pressurizing mechanisms 93 connected to them
a and 93b.
【００１４】熱圧着プロセスにおいては、まず常温から
４７０℃まで加熱され、２５分間程度そのまま保持され
る。次に、２ｋｇ／ｃｍ2 程度の圧力でシールリング４
を挟んだまま加圧し、２５分間程度そのまま保持され
る。しかる後、徐々に圧力が低下されて、室温近傍まで
冷却される。In the thermocompression bonding process, first, the temperature is heated from room temperature to 470 ° C., and is kept as it is for about 25 minutes. Next, the seal ring 4 is pressed at a pressure of about 2 kg / cm 2.
It is pressurized while sandwiching it, and held as it is for about 25 minutes. After that, the pressure is gradually reduced and the temperature is cooled to near room temperature.
【００１５】本発明の有用性を確認するため、本発明者
は下記の試作を行なった。まず、光電子増倍管の寸法は
外径が１．５インチとし、長さを２０ｍｍとした。な
お、この長さは通常の約５０％であって、十分に小型化
されている。シールのための温度および加圧条件は前述
と同様にした。なお、上部筒体１１と下部筒体１２の接
合は、プラズマアーク溶接で行なった。そして、Ｋ−Ｃ
ｓ−Ｔｅトライオードタイプの光電面を形成した。In order to confirm the usefulness of the present invention, the present inventor made the following prototype. First, the photomultiplier tube had an outer diameter of 1.5 inches and a length of 20 mm. It should be noted that this length is about 50% of the normal length, and is sufficiently miniaturized. The temperature and pressure conditions for sealing were the same as described above. The upper cylinder 11 and the lower cylinder 12 were joined by plasma arc welding. And K-C
An s-Te triode type photocathode was formed.
【００１６】上記の試作品について、量子効率および利
得を測定したところ、量子効率で通常の約１．３倍、利
得で通常の約２倍の結果が得られた。そして、本発明に
よれば量産性に優れていること、従来にはない小型化が
可能であること、製造コストおよび部品コストを大幅に
低減できることが確認された。When the quantum efficiency and the gain of the above prototype were measured, the quantum efficiency was about 1.3 times the usual value, and the gain was about twice the normal value. Then, it was confirmed that the present invention is excellent in mass productivity, can be made smaller than ever, and can significantly reduce manufacturing cost and component cost.
【００１７】なお、本発明は光電子増倍管に限定される
ものではなく、光電面を有する電子管に広く適用でき
る。また、筒体１の材料については、コバールに特に限
られるものではない。The present invention is not limited to photomultiplier tubes, but can be widely applied to electron tubes having a photocathode. Further, the material of the cylindrical body 1 is not particularly limited to Kovar.
【００１８】[0018]
【発明の効果】以上の通り、本発明の電子管では、融点
の高いアルミニウムを用いてシールがされているので、
光電面の形成工程で加熱されても、変形したり気密の信
頼性が低下したりすることがない。また、熱膨張率の差
にもとづく変形、応力等も吸収される。このため、小型
で信頼性の高い電子管、低コストで実現できる。As described above, since the electron tube of the present invention is sealed by using aluminum having a high melting point,
Even if it is heated in the process of forming the photocathode, it does not deform or the reliability of airtightness does not deteriorate. Further, deformation and stress due to the difference in the coefficient of thermal expansion are also absorbed. Therefore, a small and highly reliable electron tube can be realized at low cost.
【図１】実施例に係る光電子増倍管の構成図。FIG. 1 is a configuration diagram of a photomultiplier tube according to an embodiment.
【図２】実施例に係る光電子増倍管の製造装置の説明
図。FIG. 2 is an explanatory view of a photomultiplier tube manufacturing apparatus according to an embodiment.
１…筒体、１１…上部筒体、１２…下部筒体、２…ステ
ム板、４…シールリング、５…受光面板、６…光電面、
７…ダイノード、８…アノード、９１…電気炉、９２…
押圧治具、９３…加圧機構。DESCRIPTION OF SYMBOLS 1 ... Cylindrical body, 11 ... Upper cylinder body, 12 ... Lower cylinder body, 2 ... Stem plate, 4 ... Seal ring, 5 ... Light receiving surface plate, 6 ... Photoelectric surface,
7 ... dynode, 8 ... anode, 91 ... electric furnace, 92 ...
Pressing jig, 93 ... Pressurizing mechanism.
Claims (1)
面板と、真空容器の側壁をなすコバール金属製の筒体
と、前記受光面板と前記筒体との間に介在するアルミニ
ウム製のシールリングと、を備えることを特徴とする電
子管。1. A quartz light-receiving surface plate having a photocathode formed on an inner surface thereof, a Kovar metal cylinder forming a side wall of a vacuum container, and an aluminum-made cylinder interposed between the light-receiving surface plate and the cylinder. An electron tube, comprising: a seal ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4130752A JP2690658B2 (en) | 1992-05-22 | 1992-05-22 | Electron tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4130752A JP2690658B2 (en) | 1992-05-22 | 1992-05-22 | Electron tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05325880A JPH05325880A (en) | 1993-12-10 |
| JP2690658B2 true JP2690658B2 (en) | 1997-12-10 |
Family
ID=15041799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4130752A Expired - Lifetime JP2690658B2 (en) | 1992-05-22 | 1992-05-22 | Electron tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2690658B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5883466A (en) * | 1996-07-16 | 1999-03-16 | Hamamatsu Photonics K.K. | Electron tube |
| US6198221B1 (en) | 1996-07-16 | 2001-03-06 | Hamamatsu Photonics K.K. | Electron tube |
| JP2003014849A (en) * | 2001-06-28 | 2003-01-15 | Hamamatsu Photonics Kk | Electron tube |
| JP4926392B2 (en) * | 2004-10-29 | 2012-05-09 | 浜松ホトニクス株式会社 | Photomultiplier tube and radiation detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4987227A (en) * | 1972-12-23 | 1974-08-21 |
-
1992
- 1992-05-22 JP JP4130752A patent/JP2690658B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05325880A (en) | 1993-12-10 |
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