JP2682304B2 - Amorphous coating method - Google Patents
Amorphous coating methodInfo
- Publication number
- JP2682304B2 JP2682304B2 JP3281278A JP28127891A JP2682304B2 JP 2682304 B2 JP2682304 B2 JP 2682304B2 JP 3281278 A JP3281278 A JP 3281278A JP 28127891 A JP28127891 A JP 28127891A JP 2682304 B2 JP2682304 B2 JP 2682304B2
- Authority
- JP
- Japan
- Prior art keywords
- amorphous alloy
- max
- amorphous
- coating
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Description
【０００１】[0001]
【産業上の利用分野】本発明はアモルファスコーティン
グ法に係り、特に、高耐食アモルファス合金のコーティ
ング膜を高い密着性にて形成することができるアモルフ
ァスコーティング法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an amorphous coating method, and more particularly to an amorphous coating method capable of forming a coating film of a highly corrosion resistant amorphous alloy with high adhesion.
【０００２】[0002]
【従来の技術】使用済み核燃料再処理施設の各種工程機
器や配管部材等は、腐食性の厳しい硝酸系溶液環境にお
かれる為、装置材料の耐食信頼性を向上させることが、
重要な課題である。この課題に対処するための手段の一
つとして、耐食性の優れたアモルファス合金をスパッタ
法にて部材表面にコーティングする技術がある。2. Description of the Related Art Since various process equipment and piping members of a spent nuclear fuel reprocessing facility are placed in a severely corrosive nitric acid solution environment, it is possible to improve the corrosion resistance reliability of equipment materials.
This is an important issue. As one of the means for dealing with this problem, there is a technique of coating the surface of a member with an amorphous alloy having excellent corrosion resistance by a sputtering method.
【０００３】一方、再処理工程に高耐食性新材料製機器
を設置する場合に必要となる配管継手として、固相接合
法による新材料（Ｔｉ系又はＺｒ系材料）とステンレス
鋼の異材継手を採用する場合、固相接合界面部の耐食性
の補強手段として、アモルファスコーティングが有効な
方法として検討がなされている。On the other hand, a dissimilar material joint made of a new material (Ti-based or Zr-based material) by a solid phase joining method and stainless steel is adopted as a pipe joint required when installing equipment made of a new material with high corrosion resistance in the reprocessing step. In this case, amorphous coating has been studied as an effective method for reinforcing the corrosion resistance of the solid-phase bonding interface.
【０００４】[0004]
【発明が解決しようとする課題】上述の如く、アモルフ
ァスコーティングは、厳しい腐食環境下において、部材
を確実に保護することが強く要求される施工対象に施さ
れる。従って、コーティングされたアモルファス合金膜
の基板への密着性についても極めて高度な密着性が要求
される。As described above, the amorphous coating is applied to a construction object which is strongly required to surely protect the member in a severe corrosive environment. Therefore, extremely high adhesion is required for the adhesion of the coated amorphous alloy film to the substrate.
【０００５】しかしながら、従来においては、アモルフ
ァス合金膜の密着性向上のためのコーティング処理条件
などについて十分な研究がなされておらず、アモルファ
ス合金膜の密着性についても十分な性能が得られていな
い。However, in the past, sufficient research has not been conducted on the coating treatment conditions and the like for improving the adhesion of the amorphous alloy film, and sufficient performance of the adhesion of the amorphous alloy film has not been obtained.
【０００６】本発明は上記従来の実情に鑑みてなされた
ものであって、高耐食アモルファス合金のコーティング
膜を高い密着性にて形成することができるアモルファス
コーティング法を提供することを目的とする。The present invention has been made in view of the above conventional circumstances, and an object thereof is to provide an amorphous coating method capable of forming a coating film of a highly corrosion-resistant amorphous alloy with high adhesion.
【０００７】[0007]
【課題を解決するための手段】本発明のアモルファスコ
ーティング法は、基板表面に高耐食アモルファス合金の
コーティング膜を形成するに先立って、複合電解研磨法
により、該表面をＪＩＳ Ｂ ０６０１表面粗さの最大
高さ０．８μｍ（０．８μｍＲmax ）以下に研磨処理す
ることを特徴とする。According to the amorphous coating method of the present invention, prior to forming a coating film of a highly corrosion resistant amorphous alloy on a substrate surface, a composite electrolytic polishing method is used.
According to the above, the surface is polished to a maximum height of 0.8 μm (0.8 μm R max ) of JIS B 0601 surface roughness.
【０００８】以下に本発明を詳細に説明する。本発明に
おいて、アモルファスコーティングを施す基板材料とし
ては特に制限はなく、ステンレス鋼、Ｔｉ系、Ｚｒ系等
各種の合金、或はこれらの複合材、即ち、固相接合材等
が挙げられる。Hereinafter, the present invention will be described in detail. In the present invention, the substrate material on which the amorphous coating is applied is not particularly limited, and examples thereof include various alloys such as stainless steel, Ti-based and Zr-based materials, or composite materials thereof, that is, solid-phase bonding materials and the like.
【０００９】また、これらの基板に形成するコーティン
グ膜の高耐食アモルファス合金の種類としても特に制限
はなく、Ｆｅ−Ｔｉ系、Ｆｅ−Ｔａ系、Ｎｉ−Ｔａ系、
Ｃｕ−Ｔａ系等各種の高耐食アモルファス合金を採用す
ることができる。また、その膜厚についても特に制限は
なく、施工対象に応じて適宜決定される。Further, there is no particular limitation on the kind of the high corrosion resistant amorphous alloy of the coating film formed on these substrates, and Fe--Ti series, Fe--Ta series, Ni--Ta series,
Various high corrosion resistant amorphous alloys such as Cu-Ta system can be adopted. The film thickness is also not particularly limited, and is appropriately determined according to the construction target.
【００１０】本発明において、基板表面をＪＩＳ Ｂ
０６０１表面粗さの最大高さ０．８μｍ（０．８μｍＲ
max ）以下に研磨する方法としては、複合電解研磨法を
採用する。Ｒmax は基板の使用目的等によっても異なる
が、特に０．４μｍＲmax 以下とすることにより、より
一層良好な効果が得られる。In the present invention, the surface of the substrate is JIS B
0601 Maximum surface roughness 0.8 μm (0.8 μmR
as a method of polishing to max) The following is a multi-case electrolytic Research Migakuho
Adopt . Although R max varies depending on the purpose of use of the substrate and the like, a better effect can be obtained by setting R max to 0.4 μm R max or less.
【００１１】[0011]
【作用】基板表面の表面研磨仕上げが、ＪＩＳ Ｂ ０
６０１表面粗さの最大高さ６．３μｍを超え２５μｍ以
下（６．３μｍＲmax を超え２５μｍＲmax 以下，三角
記号▽▽）或いは０．８μｍを超え６．３μｍ以下
（０．８μｍＲmax を超え６．３μｍＲmax 以下，三角
記号▽▽▽）では、基板表面に研磨痕が存在する。この
ような表面に研磨痕を有する基板にアモルファスコーテ
ィングを行なうと、高耐食アモルファス合金膜は研磨痕
の凹凸に沿って成長する。このため、形成された高耐食
アモルファス合金膜は、その成長点である研磨痕に沿っ
て亀裂が入り易く、これが膜剥離の原因となる。[Function] The surface polishing finish of the substrate surface is JIS B 0
The maximum height of surface roughness 601 exceeds 6.3 μm and 25 μm or less (6.3 μm R max or more and 25 μm R max or less, triangular symbol ▽▽) or 0.8 μm or more and 6.3 μm or less (0.8 μm R max or more. With 3 μm R max or less and triangular symbol ▽▽▽, there are polishing marks on the substrate surface. When amorphous coating is applied to a substrate having polishing marks on its surface, the highly corrosion-resistant amorphous alloy film grows along the unevenness of the polishing marks. Therefore, the formed high-corrosion-resistant amorphous alloy film is likely to be cracked along the polishing mark which is the growth point thereof, which causes film peeling.
【００１２】これに対して、ＪＩＳ Ｂ ０６０１表面
粗さの最大高さ０．８μｍ（０．８μｍＲmax ）以下
（三角記号▽▽▽▽）であれば、基板表面に研磨痕は殆
ど存在せず、表面は極めて滑らかである。このため、形
成された高耐食アモルファス合金膜に膜剥離の原因とな
る亀裂が入るおそれはない。従って、高耐食アモルファ
ス合金膜と基板との密着性は著しく高いものとなる。し
かも、本発明では、研磨を複合電解研磨法で行うため、
良好な研磨面を形成することができる。即ち、複合電解
研磨法であれば、機械研磨に比較してＲ max が同等であ
っても、電解による効果で、凸部が鋭角とならず、滑ら
かなものとなる。しかも、この方法では、ミクロ領域に
わたり研磨ムラがなく均一加工が可能である。これらの
効果により、膜の連続性を損なうような欠陥の発生を防
止して、良好なアモルファス合金膜を形成することが可
能となる。 On the other hand, if the maximum height of JIS B 0601 surface roughness is 0.8 μm (0.8 μm R max ) or less (triangle symbol ▽▽▽▽), there are almost no polishing marks on the substrate surface. , The surface is extremely smooth. For this reason, there is no possibility that the formed high-corrosion-resistant amorphous alloy film is cracked, which causes film peeling. Therefore, the adhesion between the highly corrosion-resistant amorphous alloy film and the substrate becomes extremely high. I
However, in the present invention, since the polishing is performed by the composite electrolytic polishing method,
A good polished surface can be formed. That is, composite electrolysis
If the polishing method is used, R max is equivalent to that of mechanical polishing.
However, due to the effect of electrolysis, the convex part does not form an acute angle and slips.
It will be a kana thing. Moreover, with this method,
Uniform processing is possible without uneven polishing. these
The effect prevents the occurrence of defects that impair the continuity of the film.
It is possible to stop and form a good amorphous alloy film.
It works.
【００１３】（なお、本明細書において、三角記号の▽
は間隔をあけて記載されているが、実際には、隣接する
▽の間隔はなく、▽同志は連続している。）(In the present specification, the triangle symbol ▽
Are listed at intervals, in reality, there is no interval between adjacent ▽, and ▽ comrades are continuous. )
【００１４】[0014]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明するが、本発明はその要旨を超えない限
り、以下の実施例に限定されるものではない。The present invention will be described more specifically with reference to examples and comparative examples, but the present invention is not limited to the following examples unless it exceeds the gist.
【００１５】実施例１、比較例１，２ ３６ｍｍ×３０ｍｍ×２ｍｍ厚さのＳＵＳ３０４Ｌ製基
板表面を、表１に示す方法にて、表１に示すＪＩＳ Ｂ
０６０１表面粗さの最大高さ（Ｒmax）に表面仕上げ
処理した後、Ｆｅ−Ｔａ系アモルファス合金膜をスパッ
タリングにより２０μｍの厚さに形成した。Example 1, Comparative Examples 1 and 2 The surface of a SUS304L substrate having a thickness of 36 mm × 30 mm × 2 mm was measured according to the method shown in Table 1 and JIS B shown in Table 1 was used.
After performing surface finishing treatment to the maximum height (R max ) of 0601 surface roughness, an Fe—Ta based amorphous alloy film was formed to a thickness of 20 μm by sputtering.
【００１６】各基板を沸点（１１０〜１１５℃）に保持
した８Ｎ硝酸溶液に７２０時間浸漬し、アモルファス合
金膜の状態を観察し、結果を表１に示した。Each substrate was immersed in an 8N nitric acid solution having a boiling point (110 to 115 ° C.) for 720 hours, and the state of the amorphous alloy film was observed. The results are shown in Table 1.
【００１７】[0017]
【表１】 [Table 1]
【００１８】実施例２、比較例３，４ 外径６０．５ｍｍ、内径５４．９ｍｍ、長さ５０ｍｍの
ＳＵＳ３０４Ｌ製パイプの内表面を、表２に示す方法に
て、表２に示すＪＩＳ Ｂ ０６０１表面粗さの最大高
さ（Ｒmax ）に表面仕上げ処理した後、Ｆｅ−Ｔａ系ア
モルファス合金膜をスパッタリングにより１μｍの厚さ
に形成した。Example 2, Comparative Examples 3 and 4 JIS B 0601 shown in Table 2 was used for the inner surface of a SUS304L pipe having an outer diameter of 60.5 mm, an inner diameter of 54.9 mm and a length of 50 mm. After finishing the surface to the maximum height of surface roughness (R max ), an Fe—Ta based amorphous alloy film was formed to a thickness of 1 μm by sputtering.
【００１９】各パイプ内に沸点（１１０〜１１５℃）温
度の８Ｎ硝酸溶液を１６８時間保持し、アモルファス合
金膜の状態を観察し、結果を表２に示した。An 8N nitric acid solution having a boiling point (110 to 115 ° C.) was held in each pipe for 168 hours, and the state of the amorphous alloy film was observed. The results are shown in Table 2.
【００２０】[0020]
【表２】 [Table 2]
【００２１】[0021]
【発明の効果】以上詳述した通り、本発明のアモルファ
スコーティング法によれば、基板表面に高耐食アモルフ
ァス合金膜を著しく高い密着性にて形成することができ
る。本発明の方法は、厳しい腐食環境下で使用される各
種の機器や配管や、各種接合界面にアモルファスコーテ
ィングを施してその耐食性を補強し、部材を長期間確実
に保護するための方法として工業的に極めて有用であ
る。As described above in detail, according to the amorphous coating method of the present invention, a highly corrosion-resistant amorphous alloy film can be formed on a substrate surface with extremely high adhesion. INDUSTRIAL APPLICABILITY The method of the present invention is an industrial method as a method for reliably protecting a member for a long period of time by applying an amorphous coating to various bonding interfaces and various equipment and pipes used in a severe corrosive environment to reinforce its corrosion resistance. Extremely useful for
───────────────────────────────────────────────────── フロントページの続き (72)発明者 奥山 元 千葉県市原市八幡海岸通１番地 三井造 船株式会社千葉事業所内 (72)発明者 松永 恒文 千葉県市原市八幡海岸通１番地 三井造 船株式会社千葉事業所内 (72)発明者 千葉 茂 千葉県市原市八幡海岸通１番地 三井造 船株式会社千葉事業所内 (56)参考文献 特開 平４−311557（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Moto Okuyama, No. 1 Yawata Kaigan Dori, Ichihara City, Chiba Mitsui & Co., Ltd. Chiba Works (72) Tsunefumi Matsunaga No. 1, Yawata Kaigan Dori, Ichihara, Chiba Prefecture Mitsui Ship Co., Ltd. Chiba Works (72) Inventor Shigeru Chiba 1 Yawata Kaigan Dori, Ichihara City, Chiba Mitsui & Co., Ltd. Chiba Works (56) Reference JP-A-4-311557 (JP, A)
Claims (1)
ーティング膜を形成するに先立って、複合電解研磨法に
より、該表面をＪＩＳ Ｂ ０６０１表面粗さの最大高
さ０．８μｍ（０．８μｍＲmax ）以下に研磨処理する
ことを特徴とするアモルファスコーティング法。1. A complex electropolishing method is applied prior to forming a coating film of a highly corrosion resistant amorphous alloy on a substrate surface.
The amorphous coating method is characterized in that the surface is subjected to polishing treatment so that the maximum height of JIS B 0601 surface roughness is 0.8 μm (0.8 μm R max ) or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3281278A JP2682304B2 (en) | 1991-10-28 | 1991-10-28 | Amorphous coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3281278A JP2682304B2 (en) | 1991-10-28 | 1991-10-28 | Amorphous coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05117838A JPH05117838A (en) | 1993-05-14 |
| JP2682304B2 true JP2682304B2 (en) | 1997-11-26 |
Family
ID=17636846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3281278A Expired - Lifetime JP2682304B2 (en) | 1991-10-28 | 1991-10-28 | Amorphous coating method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2682304B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1783789A1 (en) * | 2005-09-30 | 2007-05-09 | TDK Corporation | Thin film device and thin film inductor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60176928A (en) * | 1984-02-21 | 1985-09-11 | Matsushita Electric Ind Co Ltd | Mold for press molding glass lens |
| JPH07116592B2 (en) * | 1991-04-11 | 1995-12-13 | 株式会社ライムズ | Corrosion resistant coated composite material and method for producing the same |
-
1991
- 1991-10-28 JP JP3281278A patent/JP2682304B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05117838A (en) | 1993-05-14 |
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