JP2681188B2 - Metal surface modification method - Google Patents

Metal surface modification method

Info

Publication number
JP2681188B2
JP2681188B2 JP63083529A JP8352988A JP2681188B2 JP 2681188 B2 JP2681188 B2 JP 2681188B2 JP 63083529 A JP63083529 A JP 63083529A JP 8352988 A JP8352988 A JP 8352988A JP 2681188 B2 JP2681188 B2 JP 2681188B2
Authority
JP
Japan
Prior art keywords
metal
copper
metal surface
electric field
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63083529A
Other languages
Japanese (ja)
Other versions
JPH01255687A (en
Inventor
猛雄 沖
克治 小寺
雅之 清水
直明 米沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP63083529A priority Critical patent/JP2681188B2/en
Publication of JPH01255687A publication Critical patent/JPH01255687A/en
Application granted granted Critical
Publication of JP2681188B2 publication Critical patent/JP2681188B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards

Landscapes

  • Chemical Treatment Of Metals (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、金属の酸化方法及び金属酸化物あるいは金
属硫化物の還元方法に関するものである。
TECHNICAL FIELD The present invention relates to a method for oxidizing a metal and a method for reducing a metal oxide or a metal sulfide.

例えば、銅表面に樹脂を接着する際、銅表面を安定的
に酸化させ、その表面形状を変えることなく安定的に還
元することにより、銅と樹脂との密着性を向上させるも
のである。
For example, when a resin is adhered to the copper surface, the copper surface is stably oxidized and stably reduced without changing the surface shape, thereby improving the adhesion between the copper and the resin.

本発明でいう金属とは金属合金を含むものである。 The metal in the present invention includes a metal alloy.

(従来の技術) 従来、銅と樹脂との接着に際しては、直接銅表面を接
着することでは十分な接着力が得られないため、銅表面
に接着力を向上させるための酸化物層を形成する方法が
知られていた。たとえば、プリント配線板に使用されて
いる銅張積層板においては、内層回路銅表面とプリプレ
グ等の樹脂との接着に際し、銅表面に適度な凹凸を有す
る粗面である酸化物層を形成する方法が知られていた。
しかしながら、この酸化物層の形成方法によれば、酸化
されない部分が島状に残ることがあり、樹脂との接着力
を不安定なものとしていた。さらに、この銅酸化物は、
酸性水溶液に接触すると容易に銅イオンとして溶解し
た。上述のプリント配線板を例にあげれば、銅と樹脂と
の接着後、スルーホール孔あけ工程で孔壁内に露出した
酸化物層が、スルーホールめっきの各種酸処理工程によ
り、その接着界面から酸が浸み込み、銅と樹脂の接着力
が低下してしまうのである。
(Prior Art) Conventionally, when bonding copper and resin, it is not possible to obtain a sufficient adhesive force by directly adhering the copper surface, so an oxide layer for improving the adhesive force is formed on the copper surface. The method was known. For example, in a copper-clad laminate used for a printed wiring board, a method of forming an oxide layer, which is a rough surface having appropriate unevenness on the copper surface, when bonding the inner layer circuit copper surface and a resin such as prepreg. Was known.
However, according to this method of forming an oxide layer, unoxidized portions may remain in an island shape, which makes the adhesive force with the resin unstable. Furthermore, this copper oxide
When it came into contact with an acidic aqueous solution, it easily dissolved as copper ions. Taking the above-mentioned printed wiring board as an example, after the copper and the resin are bonded, the oxide layer exposed in the hole wall in the through hole drilling step is removed from the bonding interface by various acid treatment steps of through hole plating. The acid permeates, and the adhesive force between the copper and the resin decreases.

この問題を解決するため、特開昭56−153797号公報で
は、内層回路板の回路銅表面に酸化第二銅を形成した
後、アルカリ性還元剤溶液に浸漬処理することにより、
表面の微細な凹凸形状を損なうことなく、耐酸性の高い
酸化第一銅の還元被膜を得る方法が開示されている。し
かしながら、発明者らが検討した結果によれば、前記酸
化第一銅では不充分であり、しかもこの方法では金属銅
にまで還元することは、通常条件下で困難であった。
In order to solve this problem, in Japanese Patent Laid-Open No. 56-153797, after forming cupric oxide on the circuit copper surface of the inner layer circuit board, by immersion treatment in an alkaline reducing agent solution,
A method of obtaining a reduced coating film of cuprous oxide having high acid resistance without damaging fine irregularities on the surface is disclosed. However, according to the results of studies conducted by the inventors, the above cuprous oxide was insufficient, and it was difficult to reduce it to metallic copper by this method under normal conditions.

例えば、A処理 亜塩素酸ナトリウム 30g/ 水酸化ナトリウム 12g/ リン酸ナトリウム 5g/ 温度 80℃ の溶液で処理して表面全体に銅酸化物を形成した銅箔
を、B処理 ホルマリン(37%) 50ml/ 水酸化ナトリウム 5g/ 温度 75℃ からなる水溶液に、30分以上浸漬しても、銅酸化物層の
金属銅への還元は観測されなかった。
For example, A-treated sodium chlorite 30g / sodium hydroxide 12g / sodium phosphate 5g / copper foil with copper oxide formed on the entire surface by treatment with a temperature of 80 ℃ is treated with B-formalin (37%) 50ml. / No reduction of the copper oxide layer to metallic copper was observed even after immersion for 30 minutes or more in an aqueous solution containing 5 g of sodium hydroxide / temperature of 75 ° C.

銅箔の表面はA処理により、酸化物特有の焦茶色を呈
し、B処理後においても、同様の焦茶色を呈した。また
A、Bの処理後これを、5%塩酸に浸漬すると急速に焦
茶色の酸化被膜は消失し金属銅特有の明るい肌色に変化
した。
The surface of the copper foil exhibited a dark brown color peculiar to the oxide by the A treatment, and the same dark brown color after the B treatment. Further, after the treatment of A and B, when this was immersed in 5% hydrochloric acid, the dark brown oxide film disappeared rapidly and changed to a bright skin color peculiar to metallic copper.

これらの結果は、上記手段では酸化物層が金属化され
ないので酸と接触し、溶解してしまうことを示してい
る。
These results indicate that the above-mentioned means does not metallize the oxide layer, so that the oxide layer is contacted with the acid and dissolved.

ホルムアルデヒドは、一般に強力な還元剤溶液として
利用され、熱力学的には、銅酸化物を金属銅に還元する
には十分卑な標準電極電位を持っている。それにもかか
わらず、銅表面に形成された酸化物層が金属銅にまで還
元しないのは、還元反応誘導期が極端に長いためであ
る。この誘導期をなくすためには、活性化処理が必要に
なると考えられていた。
Formaldehyde is generally used as a strong reducing agent solution and thermodynamically has a standard electrode potential sufficiently low to reduce copper oxide to metallic copper. Nevertheless, the reason why the oxide layer formed on the copper surface does not reduce to metallic copper is that the reduction reaction induction period is extremely long. It was thought that activation treatment was required to eliminate this induction period.

一方、一旦誘導期後の還元反応が進行し始めれば、金
属銅と酸化銅の酸化還元電位差により、還元溶液中で
は、還元反応が急速に進行すると考れられる。
On the other hand, it is considered that once the reduction reaction starts after the induction period, the reduction reaction rapidly proceeds in the reducing solution due to the redox potential difference between metallic copper and copper oxide.

すなわち、特開昭61−250036号公報では、還元処理の
際、部分的に銅素地を出す方法がとられ、特開昭61−26
6228号公報では、還元処理液中に、金属粉末を分散させ
る方法がとられた。しかしながら、本発明者らが検討し
た結果によれば、いずれの場合にせよ、還元反応が不安
定であったり、不完全であったりする。また、金属粉末
残留も起り、絶縁性不良の発生を起こした。
That is, in Japanese Unexamined Patent Publication No. 61-250036, a method of partially exposing the copper base during the reduction treatment is adopted.
In Japanese Patent No. 6228, a method of dispersing a metal powder in a reduction treatment liquid is adopted. However, according to the results examined by the present inventors, in any case, the reduction reaction is unstable or incomplete. In addition, residual metal powder also occurred, resulting in poor insulation.

(発明が解決しようとする課題) すなわち、従来技術は、 金属表面に目的とする酸化物層を形成する方法の不安
定さ及び不完全さ。
(Problems to be Solved by the Invention) That is, in the conventional technique, the instability and incompleteness of the method of forming the target oxide layer on the metal surface.

金属表面に形成された酸化物層を還元し、金属化する
方法の不安定さ及び不完全さ。
Instability and imperfections in the method of reducing and metallizing the oxide layer formed on the metal surface.

上記及びを原因として発生する、金属表面に樹脂
等を接着する際の密着性の不安定さ及び不完全さ。
Instability and incompleteness of adhesiveness when adhering a resin or the like to a metal surface, which is caused by the above and.

等の解決しなければならない課題を有するものである。Etc. have problems that must be solved.

(課題を解決するための手段及び作用) 本発明は以上のような実状に鑑みてなされたものであ
り、従来、不安定あるいは不完全であった金属酸化物の
形成方法と産業上利用できなかった、金属酸化物の還元
方法を改善し、安定的な酸化還元処理により形成された
金属表面、及びその金属表面と樹脂との安定的な密着性
を提供するものである。
(Means and Actions for Solving the Problem) The present invention has been made in view of the above circumstances, and cannot be industrially used with a method of forming a metal oxide that has been unstable or incomplete conventionally. Another object of the present invention is to improve the method for reducing a metal oxide and provide a metal surface formed by a stable redox treatment and stable adhesion between the metal surface and a resin.

本発明の要点は、金属を、熱力学的には当該金属を酸
化するに十分な標準電位を持った酸化剤溶液中に付与さ
れた電場の中に、かつ電極とは無接触で浸漬し、当該金
属の表面に酸化被膜をを形成した後、熱力学的には当該
酸化被膜を還元するに十分な標準電位を持った還元剤溶
液中に付与された電場の中に、かつ電極とは無接触で浸
漬させることにより、前記金属表面に酸化・還元された
被膜を形成する金属表面改質法であって、上記電場は、
上記金属表面における酸化膜あるいは酸化・還元膜の形
成反応開始までの間のみ付与する点にある。
The gist of the present invention is to immerse a metal in an electric field applied thermodynamically in an oxidant solution having a standard potential sufficient to oxidize the metal, and without contact with an electrode, After forming an oxide film on the surface of the metal, thermodynamically, in an electric field applied to a reducing agent solution having a standard potential sufficient to reduce the oxide film, and without an electrode. A metal surface modification method of forming a film oxidized and reduced on the metal surface by immersing in contact, wherein the electric field is
The point is that it is applied only until the formation reaction of the oxide film or the oxidation / reduction film on the metal surface is started.

第1図の如く、浴(1)中において、陽極(2)、陰
極(3)を配置し、その間の溶液中にパターン(4)付
プリント配線板(5)を浸漬し、電源(6)を用いて陽
極(2)と陰極(3)間に電位を与えるものである。酸
化剤溶液あるいは還元剤溶液の場合、この工程の初期に
電場を与えて反応を開始させれば、反応はすみやかに進
行するので、電場を与えるのは反応開始までの微小時間
でもよい。これは、陽極による還元剤の酸化あるいは陰
極による酸化剤の還元による液の分解を抑えるためにも
微小時間が望ましい。電場を与える際に用いる電極に
は、耐腐食性の高い白金等の不溶性電極(DSE)や、ス
テンレス等を用いるとよい。
As shown in FIG. 1, an anode (2) and a cathode (3) are placed in a bath (1), a printed wiring board (5) with a pattern (4) is immersed in a solution between them, and a power supply (6) is used. Is used to apply a potential between the anode (2) and the cathode (3). In the case of an oxidizing agent solution or a reducing agent solution, if an electric field is applied at the beginning of this step to start the reaction, the reaction will proceed promptly, so that the electric field may be applied for a very short time until the reaction starts. This is desirable for a minute time also in order to suppress the decomposition of the liquid due to the oxidation of the reducing agent by the anode or the reduction of the oxidizing agent by the cathode. An insoluble electrode (DSE) such as platinum having high corrosion resistance, stainless steel, or the like may be used as an electrode used when an electric field is applied.

ソルダーマスクと金属との接着においては、この表面
処理により金属表面を前述した様に一旦酸化させて、還
元することにより、ソルダーマスクと金属との物理的接
着性を一段と上げることを可能にした。
In the adhesion between the solder mask and the metal, the surface treatment once oxidizes and reduces the metal surface as described above, thereby further improving the physical adhesion between the solder mask and the metal.

さらに、本発明の還元方法によれば、リードフレーム
のワイヤボンディング用Ag端子表面に形成された硫化物
層を、容易に還元除去することを可能にした。
Furthermore, according to the reduction method of the present invention, it is possible to easily reduce and remove the sulfide layer formed on the surface of the Ag terminal for wire bonding of the lead frame.

当然のことではあるが、多層プリント配線板のビルド
アップ法に於いて、内層回路表面と層間絶縁層の接着に
も画期的な効果があった。
As a matter of course, in the build-up method of the multilayer printed wiring board, there was an epoch-making effect also in the adhesion between the inner layer circuit surface and the interlayer insulating layer.

(実施例) 以下、多層プリント配線板の製造工程を例にとって説
明する。
(Example) Hereinafter, a manufacturing process of a multilayer printed wiring board will be described as an example.

以下の工程により、多層プリント配線板を作成した。 A multilayer printed wiring board was created by the following steps.

本実施例の前処理は次の様である。 The pretreatment of this embodiment is as follows.

ガラスクロス−エポキシ樹脂銅張積層板の銅箔表面を
機械的に研磨した後、感光性レジストを用いて、回路パ
ターン部にレジストマスクを形成し、回路部以外の銅箔
をエッチングにより除去して、導体回路を形成した。
After mechanically polishing the copper foil surface of the glass cloth-epoxy resin copper clad laminate, a resist mask is formed on the circuit pattern portion using a photosensitive resist, and the copper foil other than the circuit portion is removed by etching. , A conductor circuit was formed.

銅箔表面を H2O2 15g/ H2SO4 200g/ 温度 40℃ の水溶液に2分間浸漬した後、水洗を行い、 H2SO4 100g/ の水溶液に1分間浸漬した。The copper foil surface was immersed in an aqueous solution of H 2 O 2 15 g / H 2 SO 4 200 g / temperature 40 ° C. for 2 minutes, washed with water, and immersed in an aqueous solution of H 2 SO 4 100 g / for 1 minute.

・酸化物形成の実施例 次に水洗を行なった後、 NaClO2 40g/ NaOH 17g/ Na3PO4・12H2O 10g/ 温度 90℃ の酸化浴(1)を用い、第1図の様な処理層に浸漬し、
電圧計(8)の読みが2Vで4分間処理し、表面に銅酸化
物層を安定的に形成した。
・ Example of oxide formation After washing with water, NaClO 2 40g / NaOH 17g / Na 3 PO 4・ 12H 2 O 10g / oxidizing bath (1) at a temperature of 90 ° C was used, as shown in Fig. 1. Soak in the treatment layer,
The voltage of the voltmeter (8) was treated with 2 V for 4 minutes, and a copper oxide layer was stably formed on the surface.

・酸化物還元の実施例 水洗を行った後、 ホルムアルデヒド 15g/ NaOH 8g/ メタノール 10g/ 温度 70℃ の還元浴(1)を用い、第1図の様な処理槽に浸漬し、
電圧計(8)の読みが3Vで10秒間電場を与えた後、5分
間浴内に浸漬しておいた。
・ Examples of oxide reduction After washing with water, formaldehyde 15g / NaOH 8g / methanol 10g / reducing bath (1) at a temperature of 70 ° C was used and immersed in a treatment tank as shown in Fig. 1,
The voltmeter (8) reading was 3 V and an electric field was applied for 10 seconds, and then immersed in the bath for 5 minutes.

その後の処理は次の様である。 The subsequent processing is as follows.

次に水洗を行った後、100℃で1時間乾燥し、ガラス
クロスにエポキシ樹脂を含浸させたプリプレグを介して
積層し、170℃、40Kgf/cm2で120分間圧力をかけた。
Next, after washing with water, it was dried at 100 ° C. for 1 hour, laminated with a prepreg impregnated with epoxy resin on glass cloth, and pressure was applied at 170 ° C. and 40 Kgf / cm 2 for 120 minutes.

孔あけを行いスルーホール基板とした後、通常の無電
解銅めっきの前処理であるアルカリ脱脂、ソフトエッ
チ、酸処理、触媒付与処理を行い、次いで通常の無電解
銅めっき、電気銅めっきを行いスルーホールめっきを形
成した。
After making holes and making a through-hole substrate, perform alkali degreasing, soft etching, acid treatment, and catalyst application treatment, which are the pretreatments for ordinary electroless copper plating, and then perform ordinary electroless copper plating and electrolytic copper plating. Through-hole plating was formed.

感光性レジストとエッチングを用い、外層回路の形成
を行った。
The outer layer circuit was formed using a photosensitive resist and etching.

以上により作成した多層プリント配線板の、内層銅表
面とプリプレグ間のピール強度を測定した所、100シー
トで20ケ所/シートの全ての測定点で2.0Kgf/cm以上で
あり、工程の電場付与を除いた酸化銅層の形成方法で
は、酸化されない部分が島状に残るため、そのピール強
度は0.5〜1.9Kgf/cmの不安定でかつ不完全な接着力であ
った。また、工程における、スルーホール内壁からの
酸のしみ込みは同様の測定点で皆無であった。比較のた
め、工程を除いたスルーホール基板に同様な処理を行
った所、全ての測定点でスルーホールの周辺の内層銅が
酸のしみ込みにより200〜300μmの大きさで金属銅特有
の明るい肌色に変色する不完全なものでった。
When the peel strength between the inner layer copper surface and the prepreg of the multilayer printed wiring board created as described above was measured, it was 20 points for 100 sheets / 2.0 Kgf / cm or more at all measurement points of the sheet, and the electric field was applied in the process. In the method of forming the removed copper oxide layer, the non-oxidized portion remained in an island shape, so that the peel strength was unstable at 0.5 to 1.9 Kgf / cm and the adhesive strength was incomplete. Further, in the process, no acid soaked from the inner wall of the through hole was found at the same measurement point. For comparison, the same treatment was applied to the through-hole substrate excluding the steps. At all measurement points, the inner layer copper around the through-hole was 200 to 300 μm in size due to acid soaking, which is unique to metallic copper and bright. It was an imperfect one that turned into a complexion.

(発明の効果) 以上述べた如く、本発明によれば、金属表面に酸化膜
を形成しあるいは酸化・還元膜を形成するに際して、そ
の形成反応開始までの間、十分な標準電位を持った電場
を付与するので、金属表面の安定的な酸化と、従来技術
では産業上利用できなかった、表面粗度を変えずに酸化
物層を安定的に金属に還元することが可能となり、これ
により例えば多層基板のスルーホール部においては、飛
躍的に耐酸性が向上し、従来の酸化銅層と同等以上の接
着力を100%の確率で得ることができた。
(Effects of the Invention) As described above, according to the present invention, when an oxide film or an oxidation / reduction film is formed on a metal surface, an electric field having a sufficient standard potential until the initiation of the formation reaction is formed. Therefore, it is possible to stably oxidize the metal surface and to stably reduce the oxide layer to a metal without changing the surface roughness, which was not industrially available in the prior art. In the through-hole part of the multilayer substrate, the acid resistance is dramatically improved, and the adhesive force equal to or higher than that of the conventional copper oxide layer can be obtained with a probability of 100%.

また、従来技術では容易に除去できなかった銀及び銅
等の酸化物を、容易にしかも完全に目的にかなうよう還
元除去することを可能にした。
Further, it is possible to easily and completely reduce and remove oxides of silver, copper and the like, which cannot be easily removed by the conventional technique, so as to completely meet the purpose.

【図面の簡単な説明】[Brief description of the drawings]

第1図は、本発明における、電解質溶液への電場付与装
置の一例を示す縦断面図である。 符号の説明 1……電解質浴、2……陽極、3……陰極、4……銅回
路パターン、5……プリント配線板、6……電源、7…
…可変抵抗器、8……電圧計、9……電源スイッチ。
FIG. 1 is a vertical cross-sectional view showing an example of an electric field applying device for an electrolyte solution according to the present invention. Explanation of symbols 1 ... Electrolyte bath, 2 ... Anode, 3 ... Cathode, 4 ... Copper circuit pattern, 5 ... Printed wiring board, 6 ... Power supply, 7 ...
… Variable resistor, 8 …… Voltmeter, 9 …… Power switch.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−139437(JP,A) 特開 昭61−37977(JP,A) 特開 昭60−138099(JP,A) 特開 昭62−136092(JP,A) 特公 昭49−28815(JP,B1) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP 61-139437 (JP, A) JP 61-37977 (JP, A) JP 60-138099 (JP, A) JP 62- 136092 (JP, A) Japanese Patent Publication Sho 49-28815 (JP, B1)

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】金属を、熱力学的には当該金属を酸化する
に十分な標準電位を持った酸化剤溶液中に付与された電
場の中に、かつ電極とは無接触で浸漬し、当該金属の表
面に酸化被膜を形成した後、 熱力学的には当該酸化被膜を還元するに十分な標準電位
を持った還元剤溶液中に付与された電場の中に、かつ電
極とは無接触で浸漬させることにより、前記金属表面に
酸化・還元された被膜を形成する金属表面改質法であっ
て、 上記電場は、上記金属表面における酸化膜あるいは酸化
・還元膜の形成反応開始までの間のみ付与することを特
徴とする金属表面改質法。
1. A metal is immersed thermodynamically in an electric field applied to an oxidant solution having a standard potential sufficient to oxidize the metal and without contact with an electrode. After forming an oxide film on the surface of a metal, thermodynamically, in an electric field applied to a reducing agent solution having a standard potential sufficient to reduce the oxide film, and without contact with the electrode. A metal surface modification method of forming an oxidized / reduced film on the metal surface by immersion, wherein the electric field is applied only until the start of the reaction for forming an oxide film or an oxidation / reduction film on the metal surface. A method for modifying a metal surface, which is characterized by applying.
【請求項2】前記金属は、プリント配線板表面に形成さ
れた回路パターンであることを特徴とする請求項1記載
の金属表面改質法。
2. The metal surface modification method according to claim 1, wherein the metal is a circuit pattern formed on the surface of the printed wiring board.
JP63083529A 1988-04-04 1988-04-04 Metal surface modification method Expired - Lifetime JP2681188B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63083529A JP2681188B2 (en) 1988-04-04 1988-04-04 Metal surface modification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63083529A JP2681188B2 (en) 1988-04-04 1988-04-04 Metal surface modification method

Publications (2)

Publication Number Publication Date
JPH01255687A JPH01255687A (en) 1989-10-12
JP2681188B2 true JP2681188B2 (en) 1997-11-26

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Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP2681188B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112226790B (en) * 2020-10-19 2022-04-22 九江德福科技股份有限公司 Production method of ultrathin high-strength electronic copper foil

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928815A (en) * 1972-07-13 1974-03-14
JPS60138099A (en) * 1983-12-27 1985-07-22 Mitsubishi Heavy Ind Ltd Electrolytic treating device for steel strip
JPS6137977A (en) * 1984-07-28 1986-02-22 Marcon Electronics Co Ltd Chemical conversion method of aluminum foil for electrolytic capacitor
JPS62136092A (en) * 1985-10-23 1987-06-19 日立電線株式会社 Metal foil for printed wiring circuit

Also Published As

Publication number Publication date
JPH01255687A (en) 1989-10-12

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