JP2680386B2 - Air filter device for clean room - Google Patents

Description

The present invention relates to an air filter device installed on the ceiling of a clean room.

[Prior Art] In the manufacturing industry of semiconductors, the electronics industry, the precision machinery industry, the pharmaceutical industry, the food industry, the biotechnology industry, and other factories and research laboratories, or operating rooms of hospitals, etc. Uses a clean room to eliminate.

As a typical structure of a clean room, an air filter device is installed over the entire ceiling of the clean room, and the air sent through the air conditioner and the blower is filtered by the filter device and blown out into the clean room. There is a vertical laminar flow type air filter device which is configured to recirculate air from an intake port that opens at the.

In this type of air filter device, a channel member having a U-shaped groove shape that opens upward is joined in a lattice shape by a joint having a U-shaped groove shape, and is hung on a ceiling of a clean room. A non-volatile sealant is filled in the groove of the frame, and an air filter module having a skirt that fits into a channel member having a U-shaped cross section is fitted into the lattice-shaped opening of the channel frame to achieve high performance. A technique for constructing an air filter device is known, and the present applicant has proposed an improved filter bank device as Japanese Patent Publication No. 62-29576, and a patent has been granted.

The air filter device having the above-mentioned configuration is suspended and installed on the ceiling, and it is necessary to reduce the weight in order to easily attach and replace the air filter module. For this purpose, a channel member with a U-shaped cross section,
It is desirable that the joint for joining the channel members, the frame of the air filter module, and the like be made of a material having a small specific gravity such as an aluminum material or a synthetic resin, and the aluminum material is particularly excellent in workability and rigidity. In the case of an aluminum material, a technique of forming an anodized film on the surface of the aluminum material by performing anodization treatment in order to improve corrosion resistance and wear resistance is known.

[Problems to be Solved by the Invention] An anodic oxide film improves corrosion resistance and wear resistance, but its electrical resistance is extremely large and lacks conductivity, so static electricity is generated when applied to air filter modules and channel frames. Then, the surface is charged, and airborne pollutant particles are likely to adhere, and these particles are re-scattered by the air flow and diffused into the clean room, reducing the cleanliness of indoor air and reducing the quality of products such as semiconductors. There is a problem such as a decrease in yield. Also, due to the presence of this anodic oxide film, the air filter module and the channel frame are not electrically insulated from each other, so that the disturbance electromagnetic waves passing through the filter device cannot be shielded and the electrons in the clean room cannot be shielded. It is easy to cause adverse effects on equipment. Similar problems occur with synthetic resin materials.

Therefore, the present invention solves the conventional problems by imparting corrosion resistance, wear resistance, and electrical conductivity to a member made of an aluminum material that constitutes an air filter device.

[Means for Solving the Problems] The present invention provides an air filter device for a clean room, which comprises a channel frame hung on the ceiling of a clean room and an air filter module. A channel frame including a frame having a skirt portion in contact with each other, a filter medium which is airtightly arranged inside the frame, and a breathable flat plate-like protective member which covers upper and lower surfaces of the filter medium and engages with the frame at a peripheral edge portion thereof are provided. The channel member, the joint, the frame of the air filter module, and the protective member, which are constituted, are made of an aluminum material and the surface thereof is subjected to a conductive treatment.

The conductive treatment includes, for example, metal plating, and the material of the metal plating is nickel, zinc, tin, chromium,
Copper and silver can be used.

A conductive paint may be coated instead of the metal plating.

[Operation] With the above configuration, the entire air filter device installed on the ceiling of the clean room is electrically connected and grounded so that static electricity is not charged and the adhesion of airborne contaminant particles in the air is prevented. To be done. In addition, disturbance electromagnetic waves that enter from the ceiling of the clean room are shielded, and electronic devices in the clean room are not adversely affected.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing the whole of a clean room air filter device embodying the present invention. A channel frame generally designated by reference numeral 1 is a channel member 2a, 2b having a U-shaped groove shape whose cross section opens upward. , Fittings 3a, 3b, 3c
It is assembled in a grid by. The dimensions in the longitudinal direction of the channel members 2a, 2b are selected according to the dimensions of the long side and the short side of the air filter module to be used to form the compartment 35.
Both ends of the channel members 2a, 2b are connected to the joints 3a, 3b, 3c, and the connecting portions are liquid-tightly sealed. The joint 3a has a cruciform shape in plan view and supports four ends of the channel members 2a and 2b. The joint 3b has a T-shaped plan,
It supports the three ends of the channel members 2a, 2b. Fitting 3c
Is an L-shaped planar shape, and the channel members 2a, 2
Support the two ends of b. As mentioned above, several kinds of joints are prepared according to the purpose of use.

Each of the joints 3a and 3b has a boss portion 4 projecting at the center thereof, and a low bolt hole is formed in this boss portion. Boss 4
A suspension bolt 6 is screwed on the suspension bolt, and the suspension bolt is used to suspend it through the turn bag 8 to the ceiling of the clean room.
Connect to 10.

After each of the above steps, a special sealant is injected into the U-shaped groove of the channel frame. Special sealant 20
Is a non-fluidic or gel-like non-volatile sealant having a high viscosity like a grease, and includes a modified urethane type sealant, an epoxy type sealant, and a silicone type sealant.

The channel members 2a, 2b and the joints 3a, 3b, 3c are made of aluminum material to reduce weight, but the surface is treated with metal plating, coating of conductive paint, etc. to improve corrosion resistance and wear resistance as well as conductive. Imparts sex. Examples of metal plating materials include nickel, zinc, tin, chromium, copper, and silver. By this surface treatment, the joint portions of the channel members 2a, 2b and the joints 3a, 3b, 3c also have conductivity, and the hanging bolts 6, 10
Since the turn bag 8 is made of iron, it naturally has conductivity. Since the suspension bolt 10 on the ceiling side is hung on a steel beam or the like of a building that constitutes a clean room, the channel frame 1 as a whole is electrically grounded.

Next, an air filter module is attached to the entire upper surface of the channel frame 1.

As shown in FIG. 2, one air filter module 40 is provided for each lattice-shaped section 35 defined by the channel members 2a, 2b.
The air filter module 40 is made of aluminum and is extremely lightweight, so
Using an appropriate workbench placed on the floor 24 of the clean room, the operator manually lifts the air filter module 40 and passes it between the compartments 35, and horizontally rotates it to move the air filter module 40 to the channel member 2a. , 2b and the joints 3a, 2b, 3c are fitted into the grooves of the compartment 35.

The cross-sectional structure of the air filter module 40 is shown in Fig. 3. The air filter module 40 is provided with a frame 42 made of aluminum, and the upper and lower ends on the inner peripheral side of the frame 42 project upward inward. An edge 44 and a lower edge 46 are formed. A filter medium 50 is provided between the upper edge portion 44 and the lower edge portion 46, and the filter members 50 are protected by covering the upper and lower sides thereof with protective members 52 and 54.

The protection members 52, 54 are made of aluminum and have a breathable flat plate shape, and are made of a net, a perforated plate, or the like, allow air to freely pass therethrough, and engage with the frame at their peripheral portions. The frame 42 is extended to form a skirt 48. The tip 49 of the skirt portion 48 abuts the bottom surface of the U-shaped groove of the channel portion 2b, and the wall surface of the skirt portion 48 has the channel member 2b.
Immerse inside the special sealing agent 20 filled in. Skirt part 48 of another air filter module 40 arranged adjacently
Also inserted in the same channel member 2b, the filter modules are kept airtight.

In the present invention, the frame 42 including the skirt 48 constituting the air filter module 40 and the protective members 52, 54 are coated with metal plating or conductive paint to improve wear resistance and corrosion resistance, and It imparts conductivity.

Since the entire channel frame on which the air filter module 40 is mounted is electrically grounded as described above, the channel member is attached at the tip 49 of the skirt portion 48.
The entire air filter module 40 in contact with 2b is also electrically grounded. Therefore, the air filter tamo module 40 and the channel frame 1 are not charged,
It does not cause the attachment of airborne contaminant particles in the air due to static electricity. Further, since the air filter module 40 and the entire channel frame 1 are grounded, electromagnetic waves can be shielded, and disturbance electromagnetic waves can be blocked to protect the equipment in the clean room.

[Advantages of the Invention] As described above, the present invention performs a conductive treatment on all of the components such as a channel frame and an air filter module made of an aluminum material that constitute an air filter device arranged on the ceiling of a clean room, It has conductivity and corrosion resistance and wear resistance.

The conductive treatment includes metal plating or coating of conductive paint.

A typical example of the metal plating is electroless nickel plating, but other conductive materials such as zinc, tin, chromium, copper, and silver can be used as the plating material.

When the conductive coating is applied as the conductive treatment, for example, the one subjected to the conventional anodic oxidation treatment shows a resistance value of 2 to 3 × 10 ¹⁵ ohms per unit cross section, but the conductive coating is not It has been confirmed by experiments that the resistance value is 3 to 5 × 10 ⁷ ohms and that it has sufficient conductivity.

By this process, the entire air filter device becomes electrically conductive and grounded, the generation of static electricity is prevented, and the floating pollutant particles in the air adhere to the air filter device. It reduces air cleanliness and eliminates problems such as deterioration of product quality such as semiconductors and yield.

Further, it is effective in preventing disturbance electromagnetic waves passing through the air filter device from entering the clean room, and not adversely affecting electronic devices in the clean room.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the overall structure of an air filter device for a clean room according to the present invention, FIG. 2 is a perspective view showing a part of the air filter device, and FIG. 3 is a sectional view of the air filter module. 1 …… Channel frame, 2a, 2b …… Channel member, 3a, 3b, 3c …… Fitting, 4 …… Boss part, 6,10 …… Suspension bolt, 8 …… Turn backpack, 20 …… Special sealant, 40 …… Air filter module, 42 …… frame, 48 …… skirt, 50 …… filter material, 52,54 …… protective material.

Claims (3)

(57) [Claims] 1. A channel member having a U-shaped groove shape whose cross-section opens upward, and a joint having a U-shaped groove shape in which the channel members are connected in a grid pattern and are hung from the ceiling of a clean room through a suspender. In the air filter device for a clean room, which includes a channel frame made of, a sealant filled in the groove of the channel frame, and an air filter module fitted into the lattice-shaped openings of the channel frame, the air filter module is the channel of the channel frame. A frame having a skirt portion in contact with the bottom of the U-shaped groove, a filter medium that is airtightly arranged inside the frame, and a breathable flat plate-shaped protective member that covers the upper and lower surfaces of the filter medium and engages with the frame at its peripheral edge. And a channel member, a joint, an air filter module frame, and a protection member. Cleanroom Eafuiruta apparatus characterized by comprising subjecting a conductive treatment to the surface as well as manufactured in aluminum material. 2. The method according to claim 1, characterized in that the conductive treatment is a metal plating, and the material of the metal plating is selected from nickel, zinc, tin, chromium, copper or silver materials. Air filter device for clean room. 3. The air filter device for a clean room according to claim 1, wherein the conductive treatment is coating with a conductive paint.