JP2670633B2 - Monolayer accumulation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial applications]

The present invention relates to a monomolecular film accumulating device that transfers a monomolecular film formed on a liquid surface in a trough to a substrate and accumulates the monomolecular film.

[Prior art]

As a device for accumulating a monomolecular film, for example, JP-A-63-2291
The one shown in Japanese Patent Publication No. 72 is known. In the accumulator, a movable barrier is arranged between the inner walls of the trough facing each other on the liquid surface in the trough, and a device for allowing the movable barrier to be driven by a constant force is connected to the movable barrier, and is at the same level as the liquid surface. The auxiliary movable barrier that is in contact with the movable barrier is integrally formed with the movable barrier so that the auxiliary movable barrier can be driven parallel to the inner wall with a constant relative relationship. A substrate or the like having the same width as the width of the auxiliary movable barrier is configured to be slidable in the vertical direction with respect to the liquid surface. Then, when the movable barrier and the auxiliary movable barrier are moved so that the relative relationship becomes constant, the monomolecular film formed on the liquid surface surrounded by these is almost uniformly compressed and the film arrangement (molecular density) is made uniform. In addition, the monomolecular film compressed by the auxiliary movable barrier is prevented from coming into contact with the inner wall surface of the trough, and the monomolecular film is transferred and accumulated on the substrate.

[Problems to be solved by the invention]

However, in the above-mentioned conventional accumulating device, when the substrate is pulled up from the liquid surface or is submerged below the liquid surface when exchanging the substrate, it is surrounded by the movable barrier and the auxiliary movable barrier. There is a problem that a part of the molecular film flows out to the liquid surface on the back side of the substrate and the film arrangement state of the monomolecular film becomes non-uniform. This drawback can be avoided by providing a stopper on the back side of the substrate so as to intersect with the liquid surface and to be in sliding contact with the auxiliary movable barrier, but since the stopper is in contact with the auxiliary movable barrier, it can move to the substrate and auxiliary movable barrier. There was a gap with the barrier. As a result, the monomolecular film on the liquid surface surrounded by the movable barrier and the auxiliary movable barrier wraps around the back surface of the substrate from the gap between the auxiliary movable barrier and the substrate and enters the gap between the stopper and When the substrate is moved upward or downward while intersecting the liquid surface in this state, a part of the monomolecular film is transferred on the back surface of the substrate, and the film arrangement of the monomolecular film is transferred on the front surface of the substrate. The condition was uneven. The present invention was invented in order to solve the above-mentioned conventional drawbacks, and an object thereof is to obtain a monomolecular film on the back surface side of a substrate even when the substrate is taken out of the liquid surface or submerged. It is an object of the present invention to provide a monomolecular film accumulating device capable of preventing the film from flowing out to the liquid surface and keeping the film arrangement of the monomolecular film transferred to the substrate substantially uniform.

[Means for solving the problems]

Therefore, the first aspect of the present invention is to provide a membrane compression member that extends between the inner walls of the trough that stores the liquid in a direction orthogonal to the inner wall and that is movable along the inner wall, and to each end side of the membrane compression member. And a pair of moving walls that extend substantially parallel to each other in a direction orthogonal to the longitudinal direction of the membrane compression member at a predetermined interval and can move together with the membrane compression member in a state of intersecting with the liquid surface. A substrate movable between a lower position located in the trough liquid level and an upper position separated from the trough is provided between the trough and the trough. In a monomolecular film accumulating device for transferring a formed monomolecular film to a vertically moving substrate, a stopper provided so as to intersect the liquid surface on the back surface of the substrate and a liquid surface provided on the stopper. The outside is crossed Inside with sliding contact with the people of the moving wall is characterized in that a seal member provided so as to sliding contact with the substrate. According to a second aspect of the present invention, a membrane compression member that extends between the inner walls of the trough that stores the liquid in a direction orthogonal to the inner wall and is movable along the inner wall, and at each end side of the membrane compression member. A pair of moving walls extending substantially parallel to each other at a predetermined interval in a direction orthogonal to the longitudinal direction of the membrane compression member and movable together with the membrane compression member in a state intersecting the liquid surface;
A substrate that is movable between a pair of moving walls and a lower position located inside the liquid surface of the trough and an upper position that is separated from the liquid surface is provided, and with the movement of the membrane compression member and the moving wall. In a monolayer film accumulator that transfers a monolayer formed on the liquid surface to a vertically moving substrate, it can intersect the liquid surface on the back side of the substrate and can slide on the inner surface of each moving wall. And a pressing member that presses each moving wall to bring it into contact with the substrate. Further, the third aspect of the present invention is to provide a membrane compression member that extends between the inner walls of the trough storing the liquid in a direction orthogonal to the inner wall, and is movable along the inner wall, and at each end side of the membrane compression member. Between the pair of moving walls, a pair of moving walls that extend substantially parallel to each other in a direction orthogonal to the longitudinal direction of the membrane compressing member and are movable together with the membrane compressing member in a state intersecting with the liquid surface. And a substrate movable between an upper position separated from the liquid surface of the trough and an upper position separated from the liquid surface, and formed on the liquid surface as the membrane compression member and the moving wall move. In a device for accumulating the formed monolayer film on a vertically moving substrate, in the accumulation device for the monolayer film, an abutting position and a moving wall that abut the inner surface of each moving wall while intersecting the liquid surface on the back side of the substrate. Inward It is characterized by comprising a movable stopper between a spaced apart position from the liquid surface.

Effect of the Invention

According to claim 1 configured as described above, a monomolecular film having a desired film arrangement state is formed along with the movement of the film compression member and the moving wall, and then the substrate is moved up along with the movement of the film compression member and the moving wall. The monomolecular film is transferred to the substrate by moving in the downward direction or in the downward direction and accumulated. When the monomolecular film is accumulated on the substrate as described above, the sealing member restricts the monomolecular film from flowing out to the back surface side of the substrate, so that the monomolecular film is accumulated on the substrate in a substantially uniform film arrangement state. be able to. In addition, when the substrate is taken out of the liquid surface or when the substrate is submerged below the liquid surface, the stopper prevents the monomolecular film from flowing out to the liquid surface on the back side of the substrate. The membrane arrangement state of the membrane can be kept almost constant. According to claim 2, in addition to the function of the stopper described above, when the monomolecular film is accumulated on the substrate, the moving member and the substrate are surely brought into contact with each other by the pressing member so that the monomolecular film flows out to the back side of the substrate. Can be prevented. Further, according to claim 3, when the monomolecular film is accumulated on the substrate, it is possible to prevent the stopper from moving to the separated position to interfere with the moving wall, and to pull the substrate from the liquid surface or to move it below the liquid surface. In the case of sinking, the stopper can be moved to the contact position on the back side of the substrate to regulate the outflow of the monomolecular film to the back side of the substrate.

【Example】

Next, an embodiment of a monomolecular film accumulating device according to each claim will be described with reference to the drawings. Claim 1 FIG. 1 is a plan view of an essential part showing an embodiment of a monomolecular film accumulating apparatus according to claim 1. FIG. 2 is a longitudinal sectional view of an essential part of FIG. FIG. 3 is a perspective view of the seal member. A monolayer accumulator 1 has a trough 2 for storing a liquid,
A single-molecule supply means (not shown) for supplying a single molecule to the liquid surface of the trough 2, and a single molecule supplied to the liquid surface of the trough 2 are compressed together with a moving wall 5 described later to obtain a desired film arrangement state The film compression member (not shown) formed on the monolayer of the trough 2 and the monolayer formed on the liquid surface of the trough 2 are attached to the substrate 3
And a moving wall 5 for guiding the monomolecular film formed on the liquid surface of the trough 2 to the substrate 3, which are control means (not shown). ). The trough 2 is a container formed in a substantially rectangular parallelepiped having an appropriate depth, and a liquid such as pure water is stored inside. The liquid in the trough 2 is always kept at a constant temperature by a temperature adjusting means (not shown). The single-molecule supply means is a unit for supplying a single-molecule solution (a substance that is insoluble in water and has a strong hydrophilic group in the molecule) dissolved in a solvent by dropping it on the liquid surface of the trough 2. The dropping timing and the dropping amount of the monomolecular solution are controlled by the control circuit. The membrane compression member extends between the inner wall surfaces of the trough 2 facing each other in a direction orthogonal to the inner wall surface, intersects with the liquid surface, and is movable along the inner wall surface. Then, the membrane compression member compresses the monomolecules spread on the liquid surface of the trough 2 together with the moving wall 5 into a desired film arrangement state to form a monomolecular film, and keeps the pressure of the monomolecular film at a desired set value. ing. The membrane compression member is substantially the same as the movable barrier in JP-A-63-229172, and a detailed description thereof will be omitted. Further, the moving amount of the membrane compression member is controlled by the control means so as to form the monomolecular film in a desired film arrangement state. The film accumulating means moves the substrate 3 up and down in a state of intersecting the liquid surface, and transfers the monomolecular film formed in a desired film arrangement state surrounded by the film compressing member and the moving wall 5 to the substrate 3.
It is something that is transferred to the top and accumulated. The moving direction and speed of the substrate 3 with respect to the vertical direction of the film accumulating means are variably controlled in accordance with the moving speed of the film compressing member. The two tapes 6 and 7 constituting the moving wall 5 are endless and are respectively wound around two rollers 6a and 7a and intersect the liquid surface of the trough 2, and at least the inner side of each tape 6 and 7 is the trough 2 Is stretched so as to extend at a desired distance from the inner wall surface of the membrane and extend in a direction orthogonal to the moving direction of the membrane compression member. The distance between the tapes 6 and 7 is set slightly smaller than the width of the substrate 3, and the respective rollers 6a and 7a are
The vehicle travels in the extending direction with the driving of driving means (not shown) such as an electric motor connected to the. Each end of the above-mentioned membrane compression member is attached to a part of each of the tapes 6 and 7 so as to be orthogonal to the running direction, and the membrane compression member is integrally moved with the running of each of the tapes 6 and 7. Let it. The moving speed of the tapes 6, 7 and thus the moving wall 5 is variably controlled by the control means so that the moving speed thereof corresponds to the moving speed of the substrate 3 in the vertical direction. Incidentally, the moving wall 5 is substantially the same as the auxiliary movable barrier in JP-A-63-229172, and a detailed description thereof will be omitted. A stopper 8 attached to a holding means (not shown) is provided on the rear surface side of the substrate 3 so that the space between the rear surface 3a and the stopper surface 8 is small, and at least the regulating surface 8a along the rear surface 3a intersects with the liquid surface of the trough 2. Is provided. Sealing members 9 shown in FIG. 3 are provided on both sides of the stopper 8.
The trough 2 is attached so as to intersect with the liquid surface, and the outer side is slidably contacted with the inner surfaces of the tapes 6 and 7, and the inner side is slidably contacted with both edges 3b, 3c of the substrate 3, respectively. Next, the operation of the present embodiment will be described. When the monomolecular film accumulating device 1 is activated, a predetermined amount is supplied to the liquid level of the trough 2 surrounded by the film compressing member and the moving wall 5 and the substrate 3 from the monomolecular supply means controlled by the control means. A monomolecular solution is provided. When the film compressing member and the moving wall 5 are controlled to move toward the substrate 3, the monomolecular film on the liquid surface is compressed by the film compressing member and kept at a desired pressure, and the monomolecular film in a desired film arrangement state. Formed. When a desired monomolecular film is formed by the above-mentioned action, the substrate 3 is moved upward or downward by the film accumulating means while moving the film compression member and the moving wall 5 toward the substrate 3 side. Then, a monomolecular film is attached to the front surface 3d of the substrate 3. Then, the operation of moving the substrate 3 in the vertical direction is repeated with the movement of the film compression member and the moving wall 5 to accumulate the monomolecular film on the front surface 3d of the substrate 3. Both sides of the substrate 3 in which the inside of the seal member 9 moves in the vertical direction when the monomolecular film is attached to and accumulated on the substrate 3.
Since the outer surfaces are in sliding contact with the tapes 3 and 3b and the insides of the tapes 6 and 7, respectively, the monomolecular film surrounded by the film compression member and the moving wall 5 flows out to the back surface side of the substrate 3 to the back surface 3a. Adhesion can be regulated and the monomolecular film can be transferred to the front surface 3d of the substrate 3 while maintaining the desired film arrangement state. On the other hand, when the monomolecular film adhered and accumulated on the substrate 3 is lifted from the liquid surface for drying, for example, or when the entire substrate 3 is submerged below the liquid surface as in a hetero device, the film compression is performed. The monomolecular film surrounded by the member and the moving wall 5 tries to flow out to the liquid surface on the back surface side of the substrate 3, but the stopper 8 controls the outflow of the monomolecular film.
Therefore, the film arrangement state of the monomolecular film on the liquid surface can be kept substantially constant. As described above, in the present embodiment, when the monomolecular film is transferred onto the front surface 3d of the substrate 3 and attached and accumulated, the monomolecular film is prevented from entering the gap between the substrate 3 and the stopper 8 by the seal member 9. The film arrangement state of the monomolecular film transferred onto the substrate 3 while preventing it can be made almost constant. Further, when the substrate 3 is taken out of the liquid surface of the trough 2 or when the substrate 3 is submerged in the liquid surface, the stopper 8 prevents the monomolecular film from entering the back surface side of the substrate 3 to prevent the monomolecular film from entering. It is possible to keep the film arrangement state of (1) almost constant. Claim 2 FIG. 4 is a plan view of an essential part showing a first embodiment of the monomolecular film accumulating apparatus according to claim 2. FIG. 5 is a vertical sectional view taken along line VV of FIG. In the first embodiment of claim 2, a tension applying member 12 as a pressing member is attached to the monomolecular film accumulating device 11, and the tapes 6 and 7 are attached to both edges 3b and 3c of the substrate 3 by the tension applying member 12. It is configured to be pressed against and pressed against. The tension applying member 12 is disposed on both edges 3b, 3c of the substrate 3, and has guide portions 12a, 12b having an E-shaped vertical section and located on the front and back sides of the substrate 3, and the guide portions 12a, 12b.
The connecting portion 12c is formed in a concave shape with respect to the guide portions 12a, 12b, and both edges 3b,
A gap is formed with respect to 3c. Also, each guide part 12a, 2
In b, the upper edges and underlines of the tapes 6 and 7 are hooked at the upper and lower portions, and the tapes 6 and 7 are attached to both edges 3 of the substrate 3 at the middle portion.
It bulges out to b, 3c side. When the tension applying member 12 moves the substrate 3 upward or downward to deposit and accumulate the monomolecular film, the tapes 6, 7 running on both edges 3b, 3c of the substrate 3 are surely slid. The contact with the monomolecular film is regulated from flowing out to the back surface side of the substrate 3. Also, the connecting portion 12c of the tension applying member 12
Has a gap with respect to both edges 3b and 3c of the substrate 3, and the guide portions 12a and 12b allow the tapes 6 and 7 to connect the respective edges 3b and 3b of the substrate 3 to each other.
Since it is supported so as to bulge toward the 3c side, the substrate 3 can be reliably and easily arranged between the tapes 6 and 7 facing each other. FIG. 6 is a plan view of an essential part showing a second embodiment of the monomolecular film accumulating device according to claim 2. The tension applying member 21 of the second embodiment is provided on both sides 3 of the substrate 3.
B-side and 3c-side supporting portions 21a and 21b, which are respectively arranged on the front side and the rear side of the substrate 3 and bulge toward the substrate 3 side, and the middle portion of which has a concave cross-section are U-shaped. Is formed.
The tension applying member 21 is provided between a tension applying position which is close to both edges 3b and 3c of the substrate 3 by a driving member (not shown) connected to the tension applying member 21 and a spaced position which is separated from both edges 3b and 3c of the substrate 3. Movement is controlled. Then, each tension applying member 21 is driven by driving the driving member.
Is moved to the tension applying position, the support portions 21a, 2
By pressing the tapes 6 and 7 supported between 1b against both edges 3b and 3c of the substrate 3 and making contact with them, the monomolecular film on the liquid surface surrounded by the film compression member and the tapes 6 and 7 is It prevents it from flowing out to the back side. Claim 3 FIG. 7 is a plan view showing an embodiment of a stopper attached to the monomolecular film accumulating device according to claim 3. FIG. 8 is a front view of FIG. FIG. 9 is a left side view of FIG. 7. The stopper 32 attached to the monomolecular film accumulating device 31 according to claim 3 is a support that is rotatably supported between a fixed portion 33 and a horizontal position and an upper position on the substrate 3 side of the fixed portion 33. Moving part
And 34. The fixing portion 33 is formed to have a width slightly smaller than the interval between the tapes 6 and 7, and a regulating step portion 36 having a pivotal support portion 35 at the center of the upper surface at the lower part of the substrate 3 side.
Are formed. On the other hand, a head 37 that is slightly wider than the mutual interval between the tapes 6 and 7 and that matches the width of the substrate 3 is formed on the substrate 3 side of the rotating portion 34. Further, a regulation step portion 36 is provided on the fixed portion 33 side of the rotating portion 34.
And a pivot arm 38 located on both sides of the pivot portion 35 is formed, and the rotating portion 34 includes the pivot portion 35 and the pivot arm.
It is supported by a shaft 39 passing through 38 so as to rotate with respect to the fixed portion 33 between a horizontal position and an upper position. The lower side of the head portion 37 is curved. Then, as shown in FIGS. 10 and 11, when the substrate 3 is arranged so as to intersect with the liquid surface, the rotating portion 34 is rotated upward with respect to the fixed portion 33 to move the head 37. Separated from liquid level. As a result, the head portion 37 of the stopper 32 is not brought into contact with the two tapes 6 and 7. In this state, since the two tapes 6 and 7 are in contact with both edges 3b and 3c of the substrate 3, when the monomolecular film is transferred onto the substrate 3,
The monomolecular film surrounded by the film compression member and the moving wall 5 is prevented from flowing out to the back side of the substrate 3. On the other hand, as shown in FIGS. 12 and 13, when the substrate 3 is pulled up from the liquid surface or when the substrate 3 is sunk below the liquid surface, the rotating portion 34 is rotated to the horizontal position with respect to the fixed portion 33. The head 37 is moved to position it between the tapes 6 and 7, and intersects with the liquid surface. As a result, since the regulating surface 37a of the head 37 is located on the back side of the substrate 3, even if the substrate 3 is pulled up from the liquid surface or sunk below the liquid surface, the monomolecular film remains on the back side of the substrate 3. It is possible to regulate the outflow to the liquid surface and keep the membrane arrangement state of the monomolecular film constant.

[Brief description of the drawings]

FIG. 1 is a plan view of an essential part showing an embodiment of a monomolecular film accumulating device according to claim 1. FIG. 2 is a longitudinal sectional view of an essential part of FIG. FIG. 3 is a perspective view of the seal member. FIG. 4 is a plan view of an essential part showing a first embodiment of the monomolecular film accumulating device according to claim 2. FIG. 5 is a vertical sectional view taken along line VV of FIG. FIG. 6 is a plan view of an essential part showing a second embodiment of the monomolecular film accumulating device according to claim 2. FIG. 7 is a plan view showing an embodiment of a stopper attached to the monomolecular film accumulating device according to claim 3. FIG. 8 is a front view of FIG. FIG. 9 is a left side view of FIG. 7. 10 to 13 are explanatory views showing the operation. In the figure, 1.11.31 is a monomolecular film accumulator, 3 is a substrate, 5 is a moving wall, 6 and 7 are tapes, 8.31 is a stopper, 9 is a sealing member, and 12 and 21 are tensions as pressing members. It is a granting means.

Claims (3)

(57) [Claims] 1. A membrane compression member extending between the inner walls of a trough storing a liquid in a direction orthogonal to the inner wall, and movable along the inner wall, and at each end side of the membrane compression member. Between the pair of moving walls, which extend substantially parallel to each other in a direction orthogonal to the longitudinal direction of the membrane compression member at a predetermined interval and are movable together with the membrane compression member in a state intersecting with the liquid surface, and between the pair of moving walls. And a substrate movable between an upper position separated from the liquid surface of the trough and an upper position separated from the liquid surface, and formed on the liquid surface as the membrane compression member and the moving wall move. In a device for accumulating a monomolecular film that transfers a monomolecular film to a vertically moving substrate, a stopper provided on the back surface of the substrate so as to intersect with the liquid surface, and a stopper provided on the stopper so as to intersect with the liquid surface. The outside of each is in the state Cumulative device and a sealing member provided such that the inner slides over the substrate together with the sliding contact with the chromatography Bing wall. 2. A membrane compression member extending between the inner walls of a trough storing a liquid in a direction orthogonal to the inner wall, and movable along the inner wall, and at each end side of the membrane compression member. Between the pair of moving walls, which extend substantially parallel to each other in a direction orthogonal to the longitudinal direction of the membrane compression member at a predetermined interval and are movable together with the membrane compression member in a state intersecting with the liquid surface, and between the pair of moving walls. And a substrate movable between an upper position separated from the liquid surface of the trough and an upper position separated from the liquid surface, and formed on the liquid surface as the membrane compression member and the moving wall move. In the device for accumulating a monolayer film that moves a monolayer film to a vertically moving substrate, a stopper that intersects with the liquid surface on the back surface of the substrate and that can slide on the inner surface of each moving wall, Moving wall Cumulative device including a pressing member is brought into contact to the substrate pressed, the. 3. A membrane compression member extending between the inner walls of a trough storing a liquid in a direction orthogonal to the inner wall, and movable along the inner wall, and at each end side of the membrane compression member. Between the pair of moving walls, which extend substantially parallel to each other in a direction orthogonal to the longitudinal direction of the membrane compression member at a predetermined interval and are movable together with the membrane compression member in a state intersecting with the liquid surface, and between the pair of moving walls. And a substrate movable between an upper position separated from the liquid surface of the trough and an upper position separated from the liquid surface, and formed on the liquid surface as the membrane compression member and the moving wall move. In the accumulator of monolayer film that transfers the monolayer film to the vertically moving substrate, the contact position and the inner surface of the moving wall that contact the inner surface of each moving wall while intersecting the liquid surface on the back side of the substrate. And liquid An accumulating device including a stopper that can move between a separated position separated from the surface.