JP2657778B2 - Gate valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve, and more particularly to a gate valve used in a processing apparatus for processing semiconductor wafers and the like.

[0002]

2. Description of the Related Art In processing apparatuses for processing semiconductor wafers and liquid crystal substrates, wafers and substrates are taken in and out of various processing chambers through passages, and the passages are provided with gate valves. I have. It is necessary to prevent impurities from entering the processing chamber as much as possible.

The above-mentioned gate valve is disclosed, for example, in Japanese Patent Application Laid-Open No. 58-156781. In such an example, the valve desk is moved up and down in a state where it is separated from the valve seat, and the valve desk is pressed against the valve seat from a side thereof at a position facing the valve seat so as to contact the valve seat.

[0004]

However, in the above-mentioned conventional gate valve, since the valve disc is pressed against the valve seat, many mechanically movable parts such as valve restraints, pillars, springs, stoppers, rollers and the like are provided in the passage. There is a drawback that impurities generated by mechanical abrasion or the like from these are likely to be mixed into the processing chamber.

The present invention has been made to eliminate the above disadvantages.

[0006]

A gate valve according to the present invention comprises a valve box, a valve desk arranged in the valve box so as to be in contact with a valve seat provided in the valve box, and linked, a valve rod protruding hermetically vertically movably and tilt through the bellows to the outside of the valve casing from the valve box in a position facing the valve desk through the valve rod to the valve seat counter After moving to a position not to be moved, the valve desk is separated from the valve seat and becomes a position facing the valve seat, and then the valve rod is tilted so that the valve desk is pressed against the valve seat. It consists of moving means provided outside the valve box,
The moving means includes a piston cylinder device, rollers provided on one and the other of the piston cylinder device and the valve rod for connecting the piston rod and the valve rod to each other, and an oblong slot engaging with the roller. and inhibiting the spring so as to be separated from one another the rod and the valve rod in the axial direction, proposal the valve rod vertically movable and tiltably
And a guide formed on a cylinder of the piston cylinder device for receiving the piston rod. When the piston cylinder device presses the piston rod so as to approach the valve rod, the valve extends through the roller and the oblong hole. The rod tilts so that the valve desk is pressed against the valve seat.

Further, the gate valve of the present invention comprises a valve box,
A valve desk disposed in the valve box so as to be in contact with a valve seat provided in the valve box; and a vertical movement and a tilt through a bellows connected to the valve desk from the inside of the valve box to the outside of the valve box. a valve rod protruding hermetically freely, tighten if movably the valve desk through the valve rod in a position not located facing opposite to the valve seat, the valve desk and spaced apart therefrom in the valve seat After being in the opposing position, the valve rod is tilted so that the valve desk is pressed against the valve seat, and the moving means is provided outside the valve box. An inclined link rotatably supporting the ends of the piston rod and the valve rod so as to connect the piston rod and the valve rod to each other, and the piston rod and the valve rod are axially separated from each other. To A spring win, become more and guides formed in the cylinder of the piston cylinder device for guiding the valve rod vertically movable and tiltable, so to approach the piston rod relative to the valve rod by the piston cylinder device When pressed, the valve rod is tilted via the tilt link, and the valve desk is pressed against the valve seat.

The valve rod has a pivot guided by the guide , and the pivot and the guide are located on or near a line corresponding to a surface of the valve seat facing the valve desk. .

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

1 to 5, reference numeral 1 denotes a valve box, 2 denotes a rectangular valve seat provided in the valve box 1, and 3 denotes a valve seat disposed in the valve box 1 so as to be in contact with the valve seat 2. 4 is a piston-cylinder device provided above the valve box 1, 5 is a piston thereof, 6 is a piston rod protruding from the lower surface of the center of the piston 5, 7 is a cylinder,
Reference numeral 8 denotes a valve rod projecting from the valve desk 3 to the outside of the valve box 1.

In the present invention, one end of a tubular bellows 9 which can be extended and contracted in the axial direction is airtightly connected to a portion of the valve rod 8 protruding outside the valve box 1, and the other end is airtightly connected to the valve box 1. , So that the valve rod 8 projects from the inside of the valve box 1 to the outside of the valve box 1 in an airtight manner.

A block 10 is connected to the upper part of the valve rod 8 so as to cover the upper part of the cylindrical bellows 9.
And a guide groove 12 of a predetermined length for guiding the pivot 11 is provided on the inner surface of the cylinder 7 of the piston cylinder device 4 facing the pivot 11. If the piston rod device 6 is urged to lower the piston rod 6, the pivot 11 is guided by the guide groove 12 via the connecting means 13, which will be described later, and moves downward, as shown in FIGS. 6 and 7. When the block 10 is pushed in the direction of the arrow A in a state where the pivot 11 is supported by the lower end of the guide groove 12 as shown in FIG. The valve desk 3 connected to the lower end moves in the direction of arrow B and is pressed by the valve seat 2.

The connecting means 13 has a bifurcated portion 14 formed at the upper end of the valve rod 8 so that the piston rod 6 suspended from the lower surface at the center of the piston 5 can be inserted.
And a roller 16 rotatably supported by a fork 14 via a pivot shaft 15, and an oblong slot 1 provided through the piston rod 8 so that the roller 16 is engaged.
7 and an extension spring 18 interposed between the piston rod 6 and the valve rod 8 to suppress the piston rod 6 and the valve rod 8 from being separated from each other in the axial direction.

Since the gate valve of the present invention is constructed as described above, when closing the valve, the piston cylinder device 4 is energized to lower the piston rod 6 from the position shown in FIGS. At the same time, the valve rod 8 is lowered integrally via the extension spring 18, and as a result, as shown in FIGS. 6 and 7, the valve desk 3 is lowered to a position opposed to the valve seat 2, and in this position, the pivot 11 is moved by the guide Positioning comes into contact with the lower end of the groove 12.

In this state, the valve rod 8 does not descend any further, but the piston rod 6 continues to descend while compressing the extension spring 18, and the roller 16 moves gradually to the left along the inclined oblong hole 17. This movement causes the valve rod 8 to tilt about the pivot 11 in the direction of the arrow A. As a result, the valve desk 3 connected to the lower end of the valve rod 8 moves in the direction of the arrow B to move to the valve seat 2. Becomes strongly pressed.

In this state, the piston cylinder device 4
When the downward movement of the piston rod 6 is stopped, the valve desk 3 is kept pressed by the valve seat 2.

When the valve is opened, the piston cylinder device 4 is energized to raise the piston rod 6. In this case, the valve rod 8 does not immediately rise due to a large frictional force between the valve seat 2 and the valve desk 3, while the piston rod 6 is suppressed in a direction away from the valve rod 8 by the action of the extension spring 18. As a result, the roller 16 immediately moves upward along the oblique long hole 17, and as a result, the inclination of the valve rod 8 is released, and the valve desk 3 moves in the direction opposite to the arrow B direction. Away from the valve seat 2.

Thereafter, when the piston rod 6 is further raised, the valve rod 8 is raised together with the valve disc 3 via the pivot shaft 15 of the roller 16, and the valve is opened as shown in FIGS.

In the present invention, the guide groove 12 is used.
Preferably, the pivot 11 is located on or near a line corresponding to the surface of the valve seat 2 facing the valve desk 3.

In this way, the trajectory of the movement of the valve desk 3 at the position where the valve desk 3 contacts the valve seat 2 is
Is substantially perpendicular to the surface, and there is no side contact.

FIG. 8 shows another embodiment of the present invention. In this embodiment, instead of using the roller 16 and the oblong hole 17, the forked portion 14 of the valve rod 8 and the end of the piston rod 6 are respectively provided. Link 1 with its part pivotably supported
9 is used. That is, in this embodiment, the inside of the fork 14
And the piston rod 6 inserted into the fork 14
The inclined links 19 are respectively arranged between the opposing surfaces of
One end of the inclined link 19 is located in front of the inner surface of the fork 14.
The other end (lower part in FIG. 8) is rotatably supported at the other end.
Is the rear end of the inner surface of the fork 14 (the upper end in FIG. 8).
Part) is pivotally supported by the
The rod 6 is pushed down relative to the valve rod 8
The inclined link 19 is inclined, and the piston rod 6
The upper part is relatively rearward with respect to the forked part 14 (in FIG. 8,
Upward), and the lower part of the piston rod 6 is pivotally supported.
It is moved forward (downward in FIG. 8) about the axis 15.
Will be able to

The operation and effect of this embodiment are the same as those of the above embodiment.

As described above, according to the gate valve of the present invention, a mechanical part for pressing the valve desk 3 against the valve seat 2 in the valve box 1 airtightly partitioned from the outside by the bellows 9. Therefore, there is no possibility that impurities such as wear and the like are generated in the valve box 1 unlike the conventional case, and the driving means of the valve desk 3 can be made extremely simple. Further, since the number of the piston cylinder device 4 is one, there is a great advantage that the shape of the entire gate valve can be reduced.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional side view of a gate valve of the present invention in a state where a valve is opened.

FIG. 2 is a side view of the gate valve of the present invention in a state where the valve is opened.

FIG. 3 is a vertical front view of the gate valve of the present invention in a state immediately before the valve is closed.

FIG. 4 is a front view of the gate valve of the present invention in a state immediately before the valve is closed.

FIG. 5 is a perspective view of the gate valve of the present invention in a state immediately before the valve is closed.

FIG. 6 is a vertical sectional side view of the gate valve of the present invention in a state immediately before the valve is closed.

FIG. 7 is a side view of the gate valve of the present invention in a state immediately before the valve is closed.

FIG. 8 is a cross-sectional plan view of a piston rod portion in another embodiment of the gate valve of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Valve box 2 Valve seat 3 Valve desk 4 Piston cylinder device 5 Piston 6 Piston rod 7 Cylinder 8 Valve rod 9 Cylindrical bellows 10 Block 11 Axis 12 Guide groove 13 Connecting means 14 Bifurcation 15 Axis 16 Roller 17 Inclined length Hole 18 Extension spring 19 Inclined link

Claims (3)

(57) [Claims] 1. A valve box, a valve desk arranged in the valve box so as to be in contact with a valve seat provided in the valve box, and a valve box connected to the valve desk, from inside the valve box to outside the valve box. A valve rod protruding airtightly vertically and tiltably via bellows,
After tightening if freely move the valve desk through the valve rod in a position not located facing opposite to the valve seat, the valve desk is located at a position opposed to spaced apart therefrom in the valve seat, the valve The valve disc is pressed against the valve seat by tilting a rod, the moving means provided outside the valve box, the moving means is a piston cylinder device,
Rollers provided on one side and the other side for connecting the piston rod of the piston cylinder device and the valve rod to each other and inclined oblong holes engaged with the rollers, and the piston rod and the valve rod are separated from each other in the axial direction. And a guide formed on a cylinder of the piston cylinder device for guiding the valve rod vertically and tiltably, and the piston cylinder device is used to move the piston rod with respect to the valve rod. The gate valve, wherein when pressed to approach, the valve rod is inclined through the roller and the oblong hole, so that the valve desk is pressed against the valve seat. 2. A valve box, a valve desk disposed in the valve box so as to be in contact with a valve seat provided in the valve box, and a valve box connected to the valve desk and connected to the outside of the valve box. A valve rod protruding airtightly vertically and tiltably via bellows,
After tightening if freely move the valve desk through the valve rod in a position not located facing opposite to the valve seat, the valve desk is located at a position opposed to spaced apart therefrom in the valve seat, the valve The valve disc is pressed against the valve seat by tilting a rod, the moving means provided outside the valve box, the moving means is a piston cylinder device,
In order to connect the piston rod of the piston cylinder device and the valve rod to each other, an inclined link rotatably supporting the ends of the piston rod and the valve rod, respectively, and the piston rod and the valve rod are restrained from being axially separated from each other. And a guide formed on a cylinder of the piston cylinder device to guide the valve rod vertically and tiltably, and the piston cylinder device presses the piston rod so as to approach the valve rod. The gate valve is characterized in that when the valve rod is tilted via the tilt link, the valve desk is pressed against the valve seat. 3. The valve rod has a pivot guided by the guide , and the pivot and the guide are located on or near a line corresponding to a surface of the valve seat facing the valve desk. 3. The gate valve according to claim 1, wherein