JP2638962B2 - Image exposure equipment - Google Patents

Image exposure equipment

Info

Publication number
JP2638962B2
JP2638962B2 JP18653188A JP18653188A JP2638962B2 JP 2638962 B2 JP2638962 B2 JP 2638962B2 JP 18653188 A JP18653188 A JP 18653188A JP 18653188 A JP18653188 A JP 18653188A JP 2638962 B2 JP2638962 B2 JP 2638962B2
Authority
JP
Japan
Prior art keywords
imaging lens
magnification
pupil
optical axis
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP18653188A
Other languages
Japanese (ja)
Other versions
JPH0235480A (en
Inventor
小出  純
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP18653188A priority Critical patent/JP2638962B2/en
Publication of JPH0235480A publication Critical patent/JPH0235480A/en
Application granted granted Critical
Publication of JP2638962B2 publication Critical patent/JP2638962B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Optical Systems Of Projection Type Copiers (AREA)
  • Control Of Exposure In Printing And Copying (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Variable Magnification In Projection-Type Copying Machines (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は画像露光装置に関し、特に被照射面である原
稿台面上の画像を照明手段によりスリット照明するとき
の光学系の性質の一つであるCOS4乗則による原稿台面上
のスリット長手方向の照度分布のムラを補正し、結像倍
率の如何によらず常に均一照明が可能な画像露光装置の
提供を目的とする。
Description: BACKGROUND OF THE INVENTION The present invention relates to an image exposure apparatus, and more particularly to one of the properties of an optical system for slit-illuminating an image on an original table surface, which is a surface to be irradiated, with illumination means. It is an object of the present invention to provide an image exposure apparatus capable of correcting unevenness in illuminance distribution in a longitudinal direction of a slit on a document table surface according to a certain COS4 law, and capable of always performing uniform illumination regardless of an imaging magnification.

(従来の技術) 従来より原稿台面上をスリット方式で照明するように
した変倍可能な電子写真複写装置が種々と提案されてい
る。
2. Description of the Related Art Various types of variable-magnification electrophotographic copying apparatuses which illuminate a document table surface with a slit method have been proposed.

一般に原稿台面上のスリット領域を結像レンズにより
感光体ドラム面上に投影結像する際、感光体ドラム面上
のスリット長手方向は画角に応じて所謂COS4乗則により
照度ムラが生じる。このときの照度ムラを除去する一方
法として、例えば一様な輝度分布を有する光源を使用す
る場合にはCOS4乗則を補正するような形状の絞り板(遮
光板)を光路中に設ける方法がある。
In general, when a slit area on a document table is projected and imaged on a photosensitive drum surface by an imaging lens, illuminance non-uniformity occurs in a longitudinal direction of the slit on the photosensitive drum surface according to a so-called COS4 law according to an angle of view. As a method of removing the illuminance unevenness at this time, for example, when a light source having a uniform luminance distribution is used, a method of providing an aperture plate (light shield plate) in the optical path having a shape that corrects the COS fourth law is used. is there.

このとき結像レンズが変倍系であるときは(イ)結像
レンズの変倍率に応じて多数のスリットの中から適当な
スリットを選択して光路中に挿脱する。
At this time, if the imaging lens is a variable magnification system, (a) an appropriate slit is selected from a number of slits according to the magnification of the imaging lens and inserted into and removed from the optical path.

(ロ)変倍時、結像レンズの移動に対して感光体ドラム
近傍のスリット板をスリット長手方向と直角な方向(走
査方向)に移動させる。
(B) At the time of zooming, the slit plate near the photosensitive drum is moved in a direction (scanning direction) perpendicular to the slit longitudinal direction with respect to the movement of the imaging lens.

等の方法がとられている。And so on.

しかしながら(イ)の方向は機械的に部品点数が増加
すると共に各変倍率での切換動作や変倍毎のスリット板
の形状調整等、装置全体が複雑化する傾向があった。
又、(ロ)の方法は空間的に移動機構が装着しにくくな
り、かつ装置全体が大型化してくる等の問題点があっ
た。
However, in the direction (a), the number of components is mechanically increased, and the entire apparatus tends to be complicated, such as a switching operation at each magnification and a shape adjustment of a slit plate for each magnification.
In addition, the method (b) has a problem that the moving mechanism is difficult to be mounted spatially, and the whole apparatus becomes large.

これに対して例えば第6図に示すように光路中の結像
レンズの瞳領域108に相当する一部の領域を弧状の遮光
板110で遮光することによりスリット領域の各物点から
の結像光束の断面積が変倍の如何に拘らず略等しくなる
ようにして照度ムラを補正する方法がある。
On the other hand, as shown in FIG. 6, for example, a part of the area corresponding to the pupil area 108 of the imaging lens in the optical path is shielded by an arc-shaped light shielding plate 110 to form an image from each object point in the slit area. There is a method of correcting the illuminance unevenness by making the cross-sectional area of the light flux substantially equal regardless of the magnification.

即ち結像レンズの近傍位置にCOS4乗則を補正し、かつ
明るさ絞りとして作用する絞り板110を配設し、結像レ
ンズの変倍時の相対関係を維持しつつ、結像レンズと一
体的に絞り板110を移動させることにより、各変倍にお
ける感光体ドラム面上の照度ムラを補正している。
That is, an aperture plate 110 that corrects the COS4 power law and acts as a brightness aperture is disposed at a position near the imaging lens, and is integrated with the imaging lens while maintaining the relative relationship during zooming of the imaging lens. By moving the aperture plate 110, uneven illuminance on the photosensitive drum surface at each magnification change is corrected.

第6図に示す方法は絞り板110が変倍に拘らず一枚で
良く、変倍毎の絞り板110の結像レンズの瞳108に対する
相対的位置関係を変化させる必要がない為機構が簡素化
される特長がある。しかしながら最大画角でのCOS4乗則
による光量低下分だけ結像レンズの軸上の光束を遮光す
る必要があり、実質的に結像レンズのFNOを暗くして使
用しなければならなく光量的に大変非効率的であった。
The method shown in FIG. 6 requires only one diaphragm plate 110 irrespective of the magnification, and the mechanism is simple because it is not necessary to change the relative positional relationship of the diaphragm plate 110 with respect to the pupil 108 of the imaging lens for each magnification. There is a feature that is made. However, it is necessary to block the luminous flux on the axis of the imaging lens by the amount of light reduction by the COS4 law at the maximum angle of view, and the FNO of the imaging lens must be used in a darkened state. It was very inefficient.

(発明が解決しようとする問題点) 本発明は結像レンズの絞りの開口形状と遮光部材とを
適切に設定し、像面側から観察したときの瞳面積を光軸
上で瞳と遮光部材との相対的移動により不変とすること
により変倍率に拘らず常に感光体ドラム面上のスリット
長手方向の照度分布が均一となるようにした電子写真複
写装置等に好適な簡易な構成の画像露光装置の提供を目
的とする。
(Problems to be Solved by the Invention) According to the present invention, the aperture shape of the stop of the imaging lens and the light shielding member are appropriately set, and the pupil area when observed from the image plane side is determined by the pupil and the light shielding member on the optical axis. Image exposure of a simple configuration suitable for an electrophotographic copying apparatus or the like in which the illuminance distribution in the longitudinal direction of the slit on the surface of the photosensitive drum is always uniform regardless of the magnification by making it invariable by relative movement with respect to The purpose is to provide the device.

(問題点を解決するための手段) 照明手段により照明された原稿台面上の画像を結像レ
ンズにより所定面上に種々の倍率で投影結像させる画像
露光装置において、該倍率が所定倍率のとき該所定面上
の照度分布が均一となるように該照明手段からの光束を
制御し、所定倍速以外の倍率のときに該結像レンズの瞳
の光軸と直交する方向の位置を調整すると共に該結像レ
ンズ近傍に配置した遮光部材により該瞳を通過する光束
を規制し、像面から観察したときの光軸上の有効瞳面積
が同一となるようにしたことである。
(Means for Solving the Problems) In an image exposure apparatus for projecting an image on a document table surface illuminated by an illuminating means onto a predetermined surface at various magnifications by an imaging lens, when the magnification is a predetermined magnification, The luminous flux from the illuminating means is controlled so that the illuminance distribution on the predetermined surface is uniform, and the position of the pupil of the imaging lens in the direction orthogonal to the optical axis is adjusted at a magnification other than the predetermined speed. The luminous flux passing through the pupil is regulated by a light blocking member arranged near the imaging lens so that the effective pupil area on the optical axis when observed from the image plane is the same.

特に本発明は前記結像レンズの瞳を光軸と直交する方
向に変位させると共に前記遮光部材を光軸と直交する方
向に変位させることにより該瞳を通過する光束を規制し
たことを特徴としている。
In particular, the present invention is characterized in that the pupil of the imaging lens is displaced in a direction perpendicular to the optical axis and the light shielding member is displaced in a direction perpendicular to the optical axis to restrict the light flux passing through the pupil. .

(実施例) 第1図は本発明の画像露光装置を変倍系を有する電子
写真複写装置に適用したときの一実施例の概略図であ
る。
(Embodiment) FIG. 1 is a schematic view of an embodiment in which the image exposure apparatus of the present invention is applied to an electrophotographic copying machine having a variable power system.

同図において1は原稿台であり例えば透明なプラテン
ガラス等から成っている。2は原稿等の画像情報であり
原稿台1上に載置されている。3は照明手段であり画像
情報2をスリット照明している。4はスリット規制部材
であり、その開口幅は後述する結像レンズ8の変倍に拘
らず常に一定となっている。5、6、7、11は各々ミラ
ー、8は結像レンズであり内部には通過光量を規制する
偏平円孔の開口部9aと開口部9bとを有する絞り板9が配
置されている。10は遮光部材であり結像レンズ8近傍に
配置されている。12は感光体ドラムである。
In FIG. 1, reference numeral 1 denotes a document table, which is made of, for example, a transparent platen glass. Reference numeral 2 denotes image information of a document or the like, which is placed on the document table 1. Reference numeral 3 denotes an illumination unit which slit-illuminates the image information 2. Reference numeral 4 denotes a slit restricting member, and its opening width is always constant irrespective of the magnification of an image forming lens 8 described later. Reference numerals 5, 6, 7, and 11 denote mirrors, and reference numeral 8 denotes an imaging lens. Inside the diaphragm plate 9, an aperture 9a and an aperture 9b of a flat circular hole for regulating the amount of light passing therethrough are arranged. Reference numeral 10 denotes a light blocking member, which is arranged near the imaging lens 8. Reference numeral 12 denotes a photosensitive drum.

本実施例では照明手段3でスリット照明された原稿台
1上の画像情報2をミラー5、6、7を介し、結像レン
ズ8により集光しミラー11を介し感光体ドラム12面上に
スリット状に所定倍率で結像させている。
In this embodiment, the image information 2 on the document table 1 illuminated by the slit 3 by the illumination means 3 is condensed by the imaging lens 8 via the mirrors 5, 6, 7, and slit on the surface of the photosensitive drum 12 via the mirror 11. An image is formed at a predetermined magnification.

そして倍率を変えて画像情報2を感光体ドラム12面上
に結像させるときは結像レンズ8の焦点距離を変化させ
つつ、光軸方向に例えば破線で示す位置まで移動して変
倍を行うようにし、これにより変倍の際の物像間距離を
一定に維持している。
When the image information 2 is formed on the surface of the photosensitive drum 12 by changing the magnification, the focal length of the imaging lens 8 is changed while moving in the optical axis direction to a position indicated by a broken line, for example, to change the magnification. As a result, the distance between object images during zooming is kept constant.

一般に照明手段で照明された画像情報を結像レンズに
より種々の倍率で感光体ドラム面上に結像させる画像露
光装置においては所定倍率(基準倍率)時に感光体ドラ
ム面上の照度分布が均一となるように照明手段による画
像情報面上の照度分布を適切に設定している。
Generally, in an image exposure apparatus that forms image information illuminated by illumination means on a photosensitive drum surface at various magnifications by an imaging lens, the illuminance distribution on the photosensitive drum surface is uniform at a predetermined magnification (reference magnification). The illuminance distribution on the image information surface by the illumination means is appropriately set so as to be as follows.

そして所定倍率以外の倍率時には、例えば第7図に示
すように結像レンズ内の瞳を光軸と直交する方向に変位
させて結像レンズ近傍に配置した遮光部材210で光束を
規制することにより感光体ドラム面上の照度分布が均一
になるように各要素を設定している。
At a magnification other than the predetermined magnification, for example, as shown in FIG. 7, the pupil in the imaging lens is displaced in a direction perpendicular to the optical axis, and the light beam is regulated by a light shielding member 210 arranged near the imaging lens. Each element is set so that the illuminance distribution on the photosensitive drum surface is uniform.

しかしながらこの方法は第8図に示すように所定倍率
に比べ拡大倍率では結像レンズの軸上の光束を遮らなけ
ればならず拡大倍率のときの感光体ドラム面上での絶対
照度が所定倍率のときより低下してくる傾向があった。
However, in this method, as shown in FIG. 8, the light beam on the axis of the imaging lens must be blocked at the magnification compared to the predetermined magnification, and the absolute illuminance on the photosensitive drum surface at the magnification is the predetermined magnification. There was a tendency to decrease from time to time.

これに対して本実施例では絞り板9及び遮光部材10の
形状を適切に設定することにより全変倍範囲にわたり感
光体面上の照度分布の均一化を図ると共に絶対照度を一
定に維持していることを特長としている。
On the other hand, in the present embodiment, by appropriately setting the shapes of the aperture plate 9 and the light shielding member 10, the illuminance distribution on the photosensitive member surface is made uniform over the entire zoom range, and the absolute contrast is maintained constant. The feature is that.

即ち照明手段3は第2図に示すように所定倍率(例え
ば基準倍率の等倍)時に結像レンズ8のCOS4乗則を補正
して感光体ドラム12面上における照度分布が均一となる
ように、例えば中央部よりも周辺部の方が明るい配光特
性となるように光源の輝度分布を変える等して構成して
いる。
That is, as shown in FIG. 2, the illuminating means 3 corrects the COS4 law of the imaging lens 8 at a predetermined magnification (for example, equal to the reference magnification) so that the illuminance distribution on the surface of the photosensitive drum 12 becomes uniform. For example, the luminance distribution of the light source is changed such that the peripheral portion has a light distribution characteristic that is brighter than the central portion.

この場合変倍を行うと感光体ドラム12面上の照度分布
が不均一となる。即ち照明手段3の配光特性を等倍で補
正した場合、第8図に示すように縮小時には周辺部で照
度が高くなり、拡大時には逆に周辺部で照度が低くな
る。
In this case, when the magnification is changed, the illuminance distribution on the surface of the photosensitive drum 12 becomes non-uniform. That is, when the light distribution characteristic of the illumination means 3 is corrected at the same magnification, the illuminance increases in the peripheral portion at the time of reduction and decreases in the peripheral portion at the time of enlargement as shown in FIG.

そこで本実施例では結像レンズ8内に配置した絞り板
9を変倍に伴い光軸と直交する方向に移動させて結像レ
ンズ8の瞳位置を変倍させ、遮光部材10との相対的位置
関係を変化させ、かつ像面側から観察したときの光軸上
の瞳面積が一定となるようにしている。これにより第9
図に示すように拡大倍率のときの照度分布が一定となる
ようようにし全変倍範囲にわたり照度分布の均一化を図
り、かつ絶対照度が略一定となるようにしている。
Therefore, in the present embodiment, the iris plate 9 disposed in the imaging lens 8 is moved in the direction orthogonal to the optical axis with the magnification, to change the pupil position of the imaging lens 8, The positional relationship is changed, and the pupil area on the optical axis when observed from the image plane side is made constant. This makes the ninth
As shown in the figure, the illuminance distribution at the magnification is made constant to make the illuminance distribution uniform over the entire zoom range, and the absolute illuminance is made substantially constant.

第3図はこのときの結像レンズ8内に配置した絞り板
9の開口形状の一実施例である。
FIG. 3 shows an embodiment of the aperture shape of the diaphragm plate 9 arranged in the imaging lens 8 at this time.

同図において9aは第2図に示す原稿台面上の照度分布
によって結像レンズ8に起因するCOS4乗則による照度ム
ラを補正する基準倍率時(例えば最大縮小倍率時)に像
面側から観察したときの瞳面積に対応する開口部であ
る。9bは基準倍率より拡大倍率時に光軸上の開口部9aに
対応する瞳面積が遮られる面積分を補正する開口部であ
る。
In the figure, 9a is observed from the image plane side at the reference magnification (for example, at the time of the maximum reduction magnification) for correcting the illuminance unevenness due to the COS power law caused by the imaging lens 8 by the illuminance distribution on the original table shown in FIG. The aperture corresponds to the pupil area at the time. Reference numeral 9b denotes an opening for correcting an area where a pupil area corresponding to the opening 9a on the optical axis is blocked when the magnification is larger than the reference magnification.

第4図は基準倍率(最大縮小倍率)での結像レンズ8
より像面側の投影光束の断面図であり絞り開口部9aに対
応する瞳は遮光部材10により遮られることなく感光体ド
ラム面12上に結像する。この基準倍率(最大縮小倍率)
時、照明手段3は結像レンズ8の画角照度爪下特性を補
正するように配光設定されているため感光体ドラム面12
上ではスリット長手方向において均一な照度分布を得る
ことができる。また第5図は拡大倍率時の投影光束の断
面図で結像レンズ8内の絞り板9が第1図において光軸
と直交する下方へ変位することにより遮光部材10によっ
て光軸部の開口部9aに相当する瞳が遮られ、開口部9bに
相当する瞳からの光束が通過するようになり、かつ周辺
部にて開口の遮られ量が減少する。このとき開口部9aに
相当する瞳の内、遮光部材10により遮られる面積と開口
部9bに相当する瞳が遮光部材10から現われ瞳の有効面積
を基準倍率(最大縮小)時と同様となるようにし、これ
により感光体ドラム12上のスリット長手方向の照度分布
を均一にかつ変倍による絶対照度を同一になるようにし
ている。
FIG. 4 shows an imaging lens 8 at a reference magnification (maximum reduction magnification).
FIG. 4 is a cross-sectional view of the projection light flux on the image plane side, and a pupil corresponding to the aperture opening 9 a forms an image on the photosensitive drum surface 12 without being blocked by the light blocking member 10. This reference magnification (maximum reduction magnification)
At this time, the illuminating means 3 is set so that the light distribution is set so as to correct the angle-of-view illuminance under the nail of the imaging lens 8, so that the photosensitive drum surface 12
Above, a uniform illuminance distribution can be obtained in the longitudinal direction of the slit. FIG. 5 is a cross-sectional view of the projection light beam at the time of enlargement magnification, and the aperture plate 9 in the imaging lens 8 is displaced downward orthogonal to the optical axis in FIG. The pupil corresponding to 9a is blocked, the light beam from the pupil corresponding to the opening 9b passes through, and the amount of blocking of the opening at the periphery decreases. At this time, of the pupil corresponding to the opening 9a, the area blocked by the light shielding member 10 and the pupil corresponding to the opening 9b appear from the light shielding member 10 so that the effective area of the pupil is the same as that at the time of the reference magnification (maximum reduction). Thus, the illuminance distribution in the longitudinal direction of the slit on the photosensitive drum 12 is made uniform, and the absolute illuminance by zooming is made the same.

尚、以上の実施例において結像レンズ8内の絞り板9
を光軸と直交する方向に変位させ遮光部材10との相対的
位置関係を変える代わりに、遮光部材10のみを変位させ
て瞳からの通過光束を制御するようにしても良い。
In the above embodiment, the aperture plate 9 in the imaging lens 8 is used.
Instead of displacing in the direction perpendicular to the optical axis to change the relative positional relationship with the light shielding member 10, only the light shielding member 10 may be displaced to control the light beam passing from the pupil.

(発明の効果) 本発明によれば前述の如く結像レンズ内の絞り板の形
状と遮光部材とを適切に設定し、絞り板と遮光部材との
相対的移動により像面積から観察した瞳の面積が光軸上
で不変となるようにし、これにより感光体ドラム面上の
スリット長手方向の照度分布の均一化と絶対照度を全変
倍範囲にわたり一定に維持することのできる画像露光装
置を達成することができる。
(Effects of the Invention) According to the present invention, as described above, the shape of the aperture plate and the light shielding member in the imaging lens are appropriately set, and the pupil observed from the image area by the relative movement between the aperture plate and the light shielding member. An image exposure device that makes the area invariant on the optical axis, thereby achieving uniform illuminance distribution in the longitudinal direction of the slit on the surface of the photosensitive drum and maintaining the absolute illuminance constant over the entire zoom range can do.

【図面の簡単な説明】[Brief description of the drawings]

第一図は本発明の画像露光装置を変倍系を有する電子写
真複写装置に適用したときの一実施例の概略図、第2図
は第1図の原稿台面上の照度分布の説明図、第3図は第
1図の絞り板の説明図、第4図、第5図は本発明におけ
る投影光束と遮光部材との関係を示す説明図、第6図、
第7図、第8図は従来の画像露光装置における照度ムラ
の説明図、第9図は本発明における感光体ドラム面上の
照度分布の説明図である。 図中1は原稿台、2は画像情報、3は照明手段、4はス
リット規制部材、5、6、7、11はミラー、8は結像レ
ンズ、9は絞り板、10は遮光部材、12は感光体ドラム、
である。
FIG. 1 is a schematic view of an embodiment in which the image exposure apparatus of the present invention is applied to an electrophotographic copying apparatus having a variable magnification system, FIG. 2 is an explanatory view of the illuminance distribution on the document table of FIG. 1, FIG. 3 is an explanatory view of the aperture plate of FIG. 1, FIG. 4, FIG. 5 is an explanatory view showing the relationship between the projection light beam and the light shielding member in the present invention, FIG.
7 and 8 are explanatory diagrams of illuminance unevenness in a conventional image exposure apparatus, and FIG. 9 is an explanatory diagram of illuminance distribution on a photosensitive drum surface in the present invention. In the figure, 1 is a document table, 2 is image information, 3 is an illuminating means, 4 is a slit regulating member, 5, 6, 7, and 11 are mirrors, 8 is an imaging lens, 9 is an aperture plate, 10 is a light shielding member, 12 Is the photosensitive drum,
It is.

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】照明手段により照明された原稿台面上の画
像を結像レンズにより所定面上に種々の倍率で投影結像
させる画像露光装置において、該倍率が所定倍率のとき
該所定面上の照度分布が均一となるように該照明手段か
らの光束を制御し、所定倍率以外の倍率のときに該結像
レンズの瞳の光軸と直交する方向の位置を調整すると共
に該結像レンズ近傍に配置した遮光部材により該瞳を通
過する光束を規制し、像面から観察したときの光軸上の
有効瞳面積が同一となるようにしたことを特徴とする画
像露光装置。
An image exposure apparatus for projecting an image on a document table surface illuminated by an illuminating means onto a predetermined surface by an image forming lens at various magnifications. The luminous flux from the illuminating means is controlled so that the illuminance distribution becomes uniform, and at a magnification other than a predetermined magnification, the position of the pupil of the imaging lens in the direction orthogonal to the optical axis is adjusted and the vicinity of the imaging lens is adjusted. A light beam passing through the pupil is regulated by a light-blocking member disposed in the image exposure apparatus, so that the effective pupil area on the optical axis when observed from an image plane is the same.
【請求項2】前記結像レンズの瞳を光軸と直交する方向
に変位させると共に前記遮光部材を光軸と直交する方向
に変位させることにより該瞳を通過する光束を規制した
ことを特徴とする請求項1記載の画像露光装置。
2. A luminous flux passing through the pupil of the imaging lens is regulated by displacing a pupil of the imaging lens in a direction perpendicular to an optical axis and displacing the light blocking member in a direction perpendicular to the optical axis. The image exposure apparatus according to claim 1.
【請求項3】前記遮光部材を光軸と直交する方向に変位
させたことを特徴とする請求項1記載の画像露光装置。
3. An image exposure apparatus according to claim 1, wherein said light shielding member is displaced in a direction orthogonal to an optical axis.
JP18653188A 1988-07-26 1988-07-26 Image exposure equipment Expired - Fee Related JP2638962B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18653188A JP2638962B2 (en) 1988-07-26 1988-07-26 Image exposure equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18653188A JP2638962B2 (en) 1988-07-26 1988-07-26 Image exposure equipment

Publications (2)

Publication Number Publication Date
JPH0235480A JPH0235480A (en) 1990-02-06
JP2638962B2 true JP2638962B2 (en) 1997-08-06

Family

ID=16190123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18653188A Expired - Fee Related JP2638962B2 (en) 1988-07-26 1988-07-26 Image exposure equipment

Country Status (1)

Country Link
JP (1) JP2638962B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2606971B2 (en) * 1991-02-20 1997-05-07 新日本製鐵株式会社 Electromagnetic shielding materials

Also Published As

Publication number Publication date
JPH0235480A (en) 1990-02-06

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