JP2635036B2 - Exhaust device - Google Patents
Exhaust deviceInfo
- Publication number
- JP2635036B2 JP2635036B2 JP62009846A JP984687A JP2635036B2 JP 2635036 B2 JP2635036 B2 JP 2635036B2 JP 62009846 A JP62009846 A JP 62009846A JP 984687 A JP984687 A JP 984687A JP 2635036 B2 JP2635036 B2 JP 2635036B2
- Authority
- JP
- Japan
- Prior art keywords
- purge fluid
- molecular pump
- exhaust
- valve
- side valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、排気装置に係り、特にターボ分子ポンプを
使用した排気装置に関するものである。The present invention relates to an exhaust device, and more particularly to an exhaust device using a turbo molecular pump.
従来の排気装置は、例えば、特公昭59−5185号公報に
記載のような、定量リーク専用弁を使用する方式であ
り、ターボ分子ポンプの吸気側および排気側バルブによ
って仕切られた内部空間部の容積に応じた追加槽が設置
される。A conventional exhaust device is, for example, a method using a valve dedicated to quantitative leakage, as described in Japanese Patent Publication No. 59-5185, and includes an internal space defined by intake and exhaust valves of a turbo-molecular pump. An additional tank according to the volume will be installed.
上記従来のターボ分子ポンプを使用した排気装置で
は、停止中の油分子の逆拡散と壁面付着防止を図るため
に、専用の定量リーク弁を使用し、停止時の圧力制御が
なされているが、ターボ分子ポンプの吸気側および排気
側バルブによって仕切られた内部空間部の容積に応じた
追加槽の選定が必要であり、高価なシステム構成となる
問題があった。In the exhaust system using the above-mentioned conventional turbo-molecular pump, in order to prevent the reverse diffusion of oil molecules during stoppage and to prevent wall adhesion, a dedicated quantitative leak valve is used, and pressure control during stoppage is performed. It is necessary to select an additional tank according to the volume of the internal space parted by the intake side and exhaust side valves of the turbo molecular pump, and there is a problem that an expensive system configuration is required.
本発明の目的は、安価なシステム構成で、ターボ分子
ポンプ停止中の油分子の逆拡散と壁面付着を防止できる
排気装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide an exhaust device that can prevent back diffusion of oil molecules and adhesion to a wall surface while a turbo molecular pump is stopped with an inexpensive system configuration.
上記目的は、ターボ分子ポンプの吸気側バルブと排気
側バルブとによって仕切った内部空間部に、一定量のパ
ージ流体を供給元から直に供給するパージ流体導入口を
設けるとともに、該パージ流体導入口の前段にパージ流
体の流路開閉用バルブを設け、ターボ分子ポンプを停止
する時に、空気制御タイマーを利用してパージ流体の流
路開閉用バルブの開閉時間を制御し、内部空間部に一定
量のパージ流体を供給元から直に導入することにより達
成される。The above object is achieved by providing a purge fluid introduction port for directly supplying a fixed amount of purge fluid from a supply source in an internal space defined by an intake side valve and an exhaust side valve of a turbo molecular pump. A valve for opening and closing the flow path of the purge fluid is provided in the preceding stage, and when the turbo molecular pump is stopped, the opening and closing time of the valve for opening and closing the flow path of the purge fluid is controlled using an air control timer, and a fixed amount is provided in the internal space. By directly introducing the purge fluid from the source.
なお前記パージ流体導入口に、ターボ分子ポンプの駆
動部への排気ガス侵入防止用として設けた専用の不活性
ガス導入口を利用した場合、目的の効果はさらに増大す
る。If a dedicated inert gas inlet provided for preventing exhaust gas from entering the drive unit of the turbo molecular pump is used as the purge fluid inlet, the intended effect is further increased.
ターボ分子ポンプの吸気側バルブと排気側バルブによ
って仕切った内部空間部へのパージ流体導入量を、空気
制御タイマーによるパージ流体導入用バルブの開閉時間
制御により実施するため、前記内部空間部の容積が増減
してもタイマー値を調節するだけで、前記内部空間部へ
のパージ流体導入量を変えることができ、パージ流体供
給元から直に導入しても所定の圧力に制御することがで
きる。The amount of the purge fluid introduced into the internal space defined by the intake side valve and the exhaust side valve of the turbo molecular pump is controlled by controlling the opening / closing time of the purge fluid introduction valve by an air control timer. Even if it is increased or decreased, the amount of purge fluid introduced into the internal space can be changed only by adjusting the timer value, and the pressure can be controlled to a predetermined pressure even when introduced directly from the purge fluid supply source.
また空気制御タイマーを使用するため、停電時におい
ても上記制御は確実に実行できる。In addition, since the air control timer is used, the above control can be reliably performed even during a power failure.
以下本発明の一実施例を第１図，第２図により説明す
る。An embodiment of the present invention will be described below with reference to FIGS.
第１図で、ロータリーポンプ2,ターボ分子ポンプ3,バ
ルブ4,5,6より構成された排気装置で、ターボ分子ポン
プ３の停止時に、吸気側バルブ５と排気側バルブ４で仕
切った内部空間に、一定量のN2ガスを、ターボ分子ポン
プ３の不活性ガス導入口3aより導入し、内部空間の圧力
を数100Pa（数Torr）に保つことにより、ターボ分子ポ
ンプ３の停止中の油分子の逆拡散と壁面付着を押え、次
回排気の際に短時間で清浄な高真空が得られる。この場
合、一定量のN2ガス導入は、空気制御タイマー10によ
る、バルブ７の開閉動作時間の制御により行なう。In FIG. 1, an exhaust device comprising a rotary pump 2, a turbo molecular pump 3, valves 4, 5, and 6, an internal space partitioned by an intake side valve 5 and an exhaust side valve 4 when the turbo molecular pump 3 is stopped. Then, a constant amount of N 2 gas is introduced from the inert gas inlet 3a of the turbo-molecular pump 3 and the pressure in the internal space is maintained at several hundred Pa (several Torr), whereby the oil while the turbo-molecular pump 3 is stopped is stopped. By suppressing the reverse diffusion of molecules and adhesion to the wall, a clean high vacuum can be obtained in a short time at the next evacuation. In this case, the introduction of a certain amount of N 2 gas is performed by controlling the opening and closing operation time of the valve 7 by the air control timer 10.
停止時の圧力保持作用と、運転時のターボ分子ポンプ
駆動部への排気ガス侵入防止用N2パージを共通のガス導
入口3aより実行するため、各動作時の状態を以下説明す
る。A pressure maintaining operation at stop, in order to perform the exhaust gas antiintrusion N 2 purge to the turbo molecular pump drive unit during operation of a common gas inlet 3a, illustrating the state during the operation below.
空気制御電磁弁8,9と空気制御タイマー10と空気信号
入力10a,駆動空気10b,空気出力10cの関係は、下表に示
す構成としており、各動作時の状態は第２図タイムチャ
ートに示すとおりとなる。The relationship between the air control solenoid valves 8, 9 and the air control timer 10, the air signal input 10a, the driving air 10b, and the air output 10c is as shown in the table below, and the state of each operation is shown in the time chart of FIG. It is as follows.
動作状態の記号Ａ〜Ｇは下記による。 The symbols A to G of the operating state are as follows.
A:装置停止状態 B:ターボ分子ポンプ内荒引き排気 C:ターボ分子ポンプ運転状態 D:ターボ分子ポンプ運転状態でのバイパスライン排気 E:ターボ分子ポンプ排気ラインからの主排気 F:通常のターボ分子ポンプ停止 G:停電時の状態 通常の起動→排気→停止動作はＡ〜Ｆに示すとおりで
あるが、停電等緊急停止の場合のターボ分子ポンプへの
パージ流体導入は、C,D,Eの状態からＧに示す状態とな
り、一定量のN2ガス導入操作は予定通り行なわれる。A: System stopped state B: Rough exhaust in turbo molecular pump C: Turbo molecular pump operating state D: Bypass line exhaust in turbo molecular pump operating state E: Main exhaust from turbo molecular pump exhaust line F: Normal turbo molecule Pump stop G: State at power failure Normal start → exhaust → stop operation is as shown in A to F. In the case of emergency stop such as power failure, introduction of purge fluid to turbo molecular pump is performed by C, D, E The state changes from G to the state shown in G, and the operation of introducing a certain amount of N 2 gas is performed as scheduled.
本実施例によれば、ターボ分子ポンプの吸気側バルブ
と排気側バルブによって仕切った内部空間部へのパージ
流体導入を空気制御タイマーにより、パージガス導入用
バルブの開閉時間制御を行なうため、前記内部空間部の
容積が増減してもタイマー値を調節するだけで、前記内
部空間部へのパージ流体導入量を考えることができ、所
定の圧力に制御することができるため、内部空間部の容
積が変動しても容易に対応できる安価なシステムを提供
できる効果がある。According to the present embodiment, the opening and closing time of the purge gas introduction valve is controlled by the air control timer for the introduction of the purge fluid into the internal space defined by the intake side valve and the exhaust side valve of the turbo molecular pump. Even if the volume of the internal space increases or decreases, the amount of purge fluid introduced into the internal space can be considered simply by adjusting the timer value, and the pressure can be controlled to a predetermined value. However, there is an effect that an inexpensive system that can be easily handled can be provided.
また、前記パージ流体導入口に、ターボ分子ポンプの
駆動部への排気ガス侵入防止用として設けた専用の不活
性ガス導入口を利用した場合、空気制御タイマーを付加
するだけでこれらの二つの作用を一箇所から行なうこと
ができ、さらに安価なシステムを提供できる効果があ
る。Further, when a dedicated inert gas inlet provided for preventing exhaust gas from entering the drive unit of the turbo molecular pump is used as the purge fluid inlet, these two functions can be achieved simply by adding an air control timer. Can be performed from one place, and there is an effect that an inexpensive system can be provided.
本発明によれば、ターボ分子ポンプの吸気側バルブと
排気側バルブによって仕切った内部空間部の容積が増減
しても空気制御タイマーのタイマー値を調節するだけで
容易に対応できるので、安価なシステム構成で、ターボ
分子ポンプ停止中の油分子の逆拡散と壁面付着を防止で
きるという効果がある。ADVANTAGE OF THE INVENTION According to this invention, even if the volume of the internal space part partitioned by the intake side valve and the exhaust side valve of the turbo molecular pump increases / decreases, it can respond easily only by adjusting the timer value of an air control timer, and is an inexpensive system. With the configuration, there is an effect that the back diffusion of the oil molecules and the adhesion to the wall surface can be prevented while the turbo molecular pump is stopped.
【図面の簡単な説明】 第１図は本発明の一実施例の排気装置のシステム構成
図、第２図は第１図の排気装置の動作タイミングチャー
ト図である。 ２……ロータリーポンプ、３……ターボ分子ポンプ、４
……排気側バルブ、５……吸気側バルブ、７……バル
ブ、8,9……空気制御電磁弁、10……空気制御タイマ
ー、3a……ガス導入口、11……フローメータBRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a system configuration diagram of an exhaust device according to an embodiment of the present invention, and FIG. 2 is an operation timing chart of the exhaust device of FIG. 2 ... Rotary pump, 3 ... Turbo molecular pump, 4
…… Exhaust side valve, 5 …… Intake side valve, 7 …… Valve, 8,9 …… Air control solenoid valve, 10 …… Air control timer, 3a …… Gas inlet, 11 …… Flow meter
───────────────────────────────────────────────────── フロントページの続き (72)発明者 空岡 稔 下松市大字東豊井794番地 株式会社日 立製作所笠戸工場内 (72)発明者 坪根 恒彦 下松市大字東豊井794番地 株式会社日 立製作所笠戸工場内 (72)発明者 川原 博宣 土浦市神立町502番地 株式会社日立製 作所機械研究所内 (56)参考文献 実開 昭57−61189（ＪＰ，Ｕ) 特公 昭59−5185（ＪＰ，Ｂ２) ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Minoru Soraoka 794, Higashi-Toyoi, Katsumatsu-shi, Katsumatsu, Ltd. Inside the Kasado Plant (72) Inventor Tsunehiko Tsune 794, Higashi-Toyoi, Kagawa-matsu, Japan Inside Kasado Factory (72) Inventor Hironobu Kawahara 502 Kandachi-cho, Tsuchiura-shi Inside Machinery Research Laboratory, Hitachi, Ltd. (56) References Shokai Sho 57-61189 (JP, U) Japanese Patent Publication Sho 59-5185 (JP) , B2)
Claims (2)
気側バルブおよび後段ポンプより成る排気装置におい
て、 前記吸気側バルブと前記排気側バルブとによって仕切っ
た内部空間部に、一定量のパージ流体を供給元から直に
導入するパージ流体導入口を設けるとともに、該パージ
流体導入口の前段にパージ流体の流路開閉用バルブを設
け、 前記ターボ分子ポンプを停止する時に、空気制御タイマ
ーを利用して前記パージ流体の流路開閉用バルブの開閉
時間を制御し、前記内部空間部に一定量のパージ流体を
供給元から直に導入するように構成したことを特徴とす
る排気装置。1. An exhaust system comprising a turbo molecular pump and its intake side valve, exhaust side valve and post-stage pump, wherein a predetermined amount of purge fluid is supplied to an internal space defined by said intake side valve and said exhaust side valve. A purge fluid introduction port to be introduced directly from the supply source is provided, and a purge fluid flow path opening / closing valve is provided at a stage preceding the purge fluid introduction port.When the turbo molecular pump is stopped, an air control timer is used. An exhaust system, wherein an opening / closing time of a valve for opening / closing a flow path of the purge fluid is controlled so that a fixed amount of purge fluid is directly introduced into the internal space from a supply source.
口が、前記ターボ分子ポンプの駆動装置部への排気ガス
侵入防止用として設けた専用の不活性ガス導入口である
ことを特徴とする排気装置。2. A purge fluid introduction port according to claim 1, wherein the purge fluid introduction port is a dedicated inert gas introduction port provided for preventing exhaust gas from entering into a drive unit of the turbo-molecular pump. And exhaust system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62009846A JP2635036B2 (en) | 1987-01-21 | 1987-01-21 | Exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62009846A JP2635036B2 (en) | 1987-01-21 | 1987-01-21 | Exhaust device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63179180A JPS63179180A (en) | 1988-07-23 |
| JP2635036B2 true JP2635036B2 (en) | 1997-07-30 |
Family
ID=11731495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62009846A Expired - Fee Related JP2635036B2 (en) | 1987-01-21 | 1987-01-21 | Exhaust device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2635036B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5761189U (en) * | 1980-09-30 | 1982-04-10 |
-
1987
- 1987-01-21 JP JP62009846A patent/JP2635036B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63179180A (en) | 1988-07-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |