JP2629458B2 - Test system for laser application equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test system for a laser application apparatus, and more particularly to a laser power calibration method for testing a plurality of laser application apparatuses using a plurality of test machines.

[0002]

2. Description of the Related Art In a conventional testing machine of a laser application apparatus, a laser power is individually measured before starting a test in each testing machine, and a laser testing apparatus is tested while controlling laser power based on the measured laser power. Was implemented.

[0003]

In the above-described test apparatus of the laser application apparatus, since the test is performed based on the laser power measured before the start of the test, the laser power fluctuates during the test. If you do not get the correct power and the laser light source power is no longer available,
There was a disadvantage that all the test machines could not be used until they were restored.

[0004]

According to the present invention, there is provided a test system for a laser application apparatus, comprising: means for switching laser light from two laser light sources and inputting the laser light to an optical attenuator; and outputting the laser light attenuated by the optical attenuator. A beam splitter for branching into a plurality of beams, a power measuring unit connected to one of the outputs of the beam splitter to measure the power of the laser beam, and receiving the output of the beam splitter and performing laser power control to perform laser power control. A plurality of testing machines for testing the applied device and the respective output ratios of the beam splitter are stored, and the laser power input to each testing machine is calculated using the laser power incident on the power measuring unit as a reference input. Means, means for transmitting the calculated laser power value to each tester, and power of the laser beam input from the power measuring unit to obtain a power value. And means for switching the laser light to be inputted to the optical attenuator when drops below Luo beforehand determined value.

[0005]

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention.

A shutter 2 installed on the optical path of the first laser light source 1, a shutter 4 installed on the optical path of the second laser light source 3, and a laser light of the second laser light source 3
A mirror 5 for reflecting the laser beam at a right angle to the optical path of the first laser light source 1 and a laser beam of the first laser light source 1 and the reflected light from the mirror 5, and on the same straight line as the optical path of the first laser light source. Beam splitter 6 that outputs laser light to
A light attenuator 7 for attenuating the laser light from the beam splitter 6, a beam splitter 8 for splitting the laser light from the optical attenuator 7 into a plurality, and a pulsed laser light connected to one of the outputs of the beam splitter 8. And a plurality of test machines 20 and 3 for receiving the output from the beam splitter 8 and a power measuring unit 9 for measuring the power of the laser beam and transmitting the power value to the data transfer unit 10 and the laser light source switching unit 11.
, A laser light source switching unit 11 that receives a power value from the power measurement unit 9 and controls the shutter 2 and the shutter 4 to switch the pulse laser light source when an abnormality in the power value is detected; A data transfer unit 10 for receiving a power value from each of the test devices 9, calculating a power value input to each test device based on each output ratio of the beam splitter 8 stored in advance, and transmitting the calculated power value to each test device. Consists of

Further, each of the test machines 20, 30... Comprises an optical attenuator 21 for controlling the power value of the incident light, a laser application device 22 which operates by receiving a laser beam from the optical attenuator 21, an optical attenuator 21 and a laser application device. A test unit 23 that controls the device 22 to execute a test on the laser application device 22.

Next, the operation of this embodiment will be described in detail with reference to FIG.

For ease of explanation, it is assumed that the first laser light source 1 is in use, the shutter 2 is open, the second laser light source 2 is unused, and the shutter 4 is closed. Laser light emitted from the first laser light source 1 passes through the beam splitter 6, is attenuated by the attenuator 7, and is input to the beam splitter 8. Here, the optical attenuator 7 is set so as to have the maximum power value required by the tester groups 20, 30,. One output of the beam splitter 8 is input to the power measurement unit 9 and the remaining output is supplied to each of the test machines 20, 30,. The power measuring unit 9 measures the power value at a specified interval (for example, 5 seconds),
The power value is transferred to the data transfer unit 10 and the laser light source switching unit 1
Send to 1.

On the other hand, before starting the test, the testing machine 20
The data transfer unit 10 issues a transmission request for the power value incident on the optical attenuator 21 of the own tester. When the power value is received from the data transfer unit 10, the test is executed by controlling the optical attenuator 21 and the laser application device 22 based on the received power value.

The laser light source switching unit 11 includes a power measuring unit 1
When an abnormality is detected by receiving a power value from 0 and decreasing the power value, the shutter 2 is closed and the shutter 4 is opened, and the light source of the laser light input to the beam splitter 8 is changed from the first laser light source 1 to the second laser light source. Is switched to the laser light source 3. Further, the optical attenuator 7 is adjusted while controlling the power measuring unit 9 to measure the power value, and the testers 20, 30,.
The optical attenuator 7 is set so as to have the maximum incident power.

In this way, the laser light source is switched from the first laser light source 1 to the second laser light source 3. The switched pulse laser is supplied to each of the test machines 20, 30,... In the same manner as described above, and the test is continued.

[0014]

As described above, the present invention transmits a laser power measurement value to each tester in real time, and automatically switches to a spare pulse laser light source when the pulse laser light source becomes abnormal. Therefore, even if the laser power fluctuates during the test, accurate power setting can always be performed, and even if the laser light source fails, the recovery time is short and the test machine does not need to be stopped.

[Brief description of the drawings]

FIG. 1 is a configuration block diagram of an embodiment of the present invention.

[Explanation of symbols]

 1,3 laser light source 2,4 shutter 5 mirror 6 beam splitter 7 optical attenuator 8 beam splitter 9 power measuring unit 10 data transfer unit 11 laser light source switching unit 20 testing machine 21 optical attenuator 22 laser application device 23 testing unit

Claims (1)

(57) [Claims] 1. A means for switching laser light from two laser light sources and inputting the laser light to an optical attenuator, a beam splitter for branching the laser light attenuated by the optical attenuator into a plurality of light beams, and an output of the beam splitter. A power measuring unit connected to one for measuring the power of the laser beam, a plurality of test machines for receiving the output of the beam splitter, performing laser power control and testing a laser application device, and the beam Memorize each output ratio of splitter,
Means for calculating the laser power input to each testing machine with the laser power incident on the power measuring unit as a reference input, means for sending the calculated laser power value to each testing machine, and a laser from the power measuring unit. Means for switching the laser light to be input to the optical attenuator when the power of the light is input and the power value falls below a predetermined value.