JP2627041B2 - Clean room maintenance device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for maintaining cleanliness of a clean room requiring high cleanliness.

[0002]

2. Description of the Related Art In the manufacture of semiconductors, there is a process that requires an atmosphere of high cleanliness. In such a site, a facility, for example, a clean room, which is isolated from other work areas, is installed.

FIG. 3 is a side sectional view showing a schematic structure of a conventional clean room. As shown in FIG. 3, the clean room 1 has an HEPA (High Efficiency Partic
e Airfilter (hereinafter referred to as a hepafilter) 2 is installed, and a perforated plate floor 3 for discharging air introduced into the room is provided on the floor surface. In the clean room 1 having such a structure, the room 4 has a pair of duct openings (5a, 5b, 6a, 6b) provided above and below the group of hepafilters 2 (in this example, 2A and 2B) and below the floor. A circulation path is formed between the upper and lower sides of these duct openings, and internal controllers 5, 6 as secondary air-conditioning equipment having a blower fan are provided in the middle of the circulation path. In addition, duct opening 5
Ducts 7a and 7b are connected to b and 6b to form one passage, and an external air conditioner 7 as a primary air conditioner having a blower fan is provided in the middle of the passage. Although not shown here, the entire amount of air in the room 4 is not returned to the inner conditioners 5 and 6, and a part of the air is discharged to the outside of the clean room 1.

In the above arrangement, the outside air is taken in by the outside conditioner 7 to perform primary air conditioning at the temperature and humidity required by the inside conditioners 5 and 6. The air after the first air conditioning is in duct 7
The air is sent to the internal conditioners 5 and 6 via the a and 7b, and the secondary air conditioning of the temperature and the humidity required by the clean room 1 is performed in the internal conditioners 5 and 6. Further, the hepa filter groups 2A and 2B are connected to ducts 5 from the inner conditioners 5 and 6, respectively.
a, filter the air supplied through 6a to the cleanliness required by the clean room 1; Further, an isolation wall 8 is provided so that the air supplied from the inner conditioners 5 and 6 does not mix between the hepafilter groups 2A and 2B.

FIG. 2A is a block diagram for explaining power supply to an air conditioner (including a blower fan) provided corresponding to the arrangement of the conventional hepafilter groups 2A and 2B. FIG. 2B is a layout diagram showing the arrangement of the hepafilter on the ceiling in the clean room.

[0006] Two hepafilter groups 2A (A-1, A-
, A-6), 2B (B-1, B-2, ..., B-
6) are arranged in order as shown in FIG. As shown in FIG. 2A, each of the helper filter groups 2A and 2B is provided with an individual air conditioner (inner adjuster), and a power supply to the inner adjusters 5 and 6 of each of the helper filter groups 2A and 2B is provided. Is supplied from each of the breakers 10 and 11 connected to the blower fans provided in each of the internal conditioners 5 and 6 via a common power supply switching panel 13 to one power supply I or when an abnormality occurs in the power supply I, It is made by connecting to the generator 12 for use.

[0007]

As described above, the arrangement of the hepa filter in the conventional clean room and the blower fan (inner adjuster) provided with the hepa filter group according to this arrangement.
The following problems occur when the power supply circuit for the power supply is configured. There is only one power supply system to the group of hepafilters, and when a power failure occurs in the system, the operation of all hepafilters is stopped all at once, and the cleanliness of the clean room is significantly deteriorated. Power is to be supplied from the emergency generator to one supply power system to the hepafilter group to all the hepafilter groups, and the load on the emergency generator has become too large. For this reason, when other equipment required the emergency power supply, the emergency power supply to the hepa filter group had to be stopped at the same time, and the stepwise minimum cleanliness could not be maintained. . The hepa filter group is divided into a plurality of breaker units at the end of the power supply system, but the plurality of hepa filters are not distributed evenly in the clean room but are arranged in a certain partition unit in the clean room. At the time of the downtime, the cleanliness of only a certain section in the clean room deteriorates remarkably.

SUMMARY OF THE INVENTION The present invention has been made to solve such a conventional problem. Even if one power supply system fails, the functions of all the hepafilters do not stop, and the partial operation of only a part of the hepafilters is performed. It is an object of the present invention to provide a clean room cleanliness maintenance device that can prevent the clean room cleanliness from significantly deteriorating even if it is temporarily forced.

[0009]

[Means for Solving the Problems] Achieve the above objectives
In the clean room maintenance device of the present invention,
Take in outside air and air-condition to desired temperature, humidity and cleanliness.
Air is blown by multiple blowers,
Clean room that supplies to the clean room through the cluster
Corresponding to the group of hepafilters
The power supply system to the blower fan
Each of the hepafilters that make up the hepafilter group
It is mixed and dispersed in a clean room on average. Hope
More preferably, each of the mixed and dispersed
The hepa filters are arranged in a staggered or checkered pattern.

[0010]

By having the configuration of the present invention, the power supply II, via each breaker 10, 11 from the III
Is supplied to each hepa filter group,
The filter is driven .

For example, at the time of power supply II power failure,
Although power supply to the hepafilter is stopped, in the present invention, the A series
Is stopped, but the B-series hepafilter is
Operation can be continued, and when one of the breakers goes down,
When the breaker 10 is down, the left half of the clean room
All the filters stop, but in the present invention,
The B-series hepafilters arranged in a distributed manner are operated.
The clean room has a certain level of cleanliness
Can be maintained.

[0012]

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

FIG. 1 is an explanatory diagram showing a schematic configuration of a main part according to a first embodiment of the present invention. FIG. 1A shows an air conditioner (including a blower fan) provided corresponding to the arrangement of the hepafilter groups 2A and 2B according to the first embodiment of the present invention.
FIG. 2B is a block diagram for explaining power supply to the air conditioner, and FIG. 2B is an arrangement diagram showing an arrangement of a hepa filter on a ceiling in a clean room. In FIG. 1, components having the same or equivalent functions as those in FIGS. 2 and 3 are denoted by the same reference numerals, and description thereof will be omitted.

In FIG. 1, one hepafilter group 2A
Is connected from the breaker 10 in the internal adjuster 5 to the power supply II via the power supply switchboard 14, and the other hepafilter group 2 B is connected to the power supply switchboard 15 from the breaker 11 in the internal adjuster 6.
To the power supply III.

Therefore, the power supply system (power supply II and power supply I
By using a plurality of II), there is no need to worry about a power outage in all the power supply systems at once. Power supply II and power supply II
I can be selectively supplied with power from the emergency generator 13.

Next, as shown in FIG. 1B, the hepafilter groups 2A and 2B are arranged in a staggered or checkered pattern. Thus, the hepafilter group 2 divided into a plurality of power supply systems (power supply II, power supply III)
Since each of the hepafilters 2A and 2B is distributed on average in the clean room, even if power is supplied to at least one system of hepafilters at the time of abnormality, for example, the distributed hepafilters can be used. The entire clean room can maintain a certain level of cleanliness.

FIG. 2 is a circuit block diagram showing a second embodiment of the present invention. In FIG. 2, reference numerals 2A 'and 2B' denote hepafilter units, and each hepafilter A-1, A-2,...
, B-1, B-2,..., B-6 and the blower fans FA-1, FA-2,..., FA-6 and FB-1, FB-2,. 6 is provided. Also, each of the hepafilters A-1, A-2,..., A-6 and B-1, B-2,.
, B-6 are the same as those in the first embodiment shown in FIG. 1B. Note that, in FIG. 2, the same reference numerals as those in FIG. 1 have the same or corresponding functions, and a description thereof will be omitted.

In FIG. 2, one hepa filter unit 2
Each of the hepafilters A-1, A-2, ..., A in A '
-6, each fan FA-1, FA-2, ..., FA-
6 are connected to the power supply II from the breaker 10 together with the internal adjuster 5 via the power supply switching board 14, and the respective hepafilters B-1 and B in the other hepafilter section 2B '.
-2,..., B-6 each fan FB-1, FB-
, FB-6 are connected to the power supply III from the breaker 11 and the power supply switching board 15 together with the internal adjuster 6 .

Therefore, also in the second embodiment, since there are a plurality of power supply systems (power supply II and power supply III), there is no fear that all the power supply systems will be cut off at the same time. Emergency generator 12 for II and III
, Power can be selectively supplied.

Further, also in the second embodiment, the arrangement of the hepa filter is the same as that of the first embodiment. Therefore, even when the power system is abnormal, it is necessary to maintain a certain level of cleanliness in the entire clean room. Can be.

[0022]

As described above, according to the present invention, the following effects can be obtained. By providing a plurality of power supply systems, the probability of an accident that the operation of the hepafilter is stopped all at once is reliably reduced, and remarkable deterioration in cleanliness of the clean room can be prevented. Since the power supply load to the hepa filter can be adjusted according to the load condition of the emergency generator, the probability of completely stopping the power supply to the hepa filter due to an overload can be reduced, and the cleanliness of the clean room can be prevented from significantly deteriorating. Since the groups of hepafilters are respectively dispersed and arranged in the clean room on average, it is possible to prevent the cleanliness of a certain section in the clean room from being significantly deteriorated even when a certain group of hepafilters is stopped.

[Brief description of the drawings]

FIG. 1 shows a hepafilter group 2A according to an embodiment of the present invention;
It is a block diagram for explaining power supply to an air conditioner (including a blower fan) provided corresponding to the arrangement of 2B, and an arrangement diagram showing an arrangement of a hepa filter on a ceiling in a clean room.

FIG. 2 is a hepafilter unit 2 according to a second embodiment of the present invention.
FIG. 4 is a circuit block diagram for supplying power to A ′, 2B ′ and internal tone controllers 5 and 6 .

FIG. 3 is a block diagram for explaining power supply to an air conditioner (including a blower fan) provided corresponding to the arrangement of the conventional hepafilter groups 2A and 2B, and shows the arrangement of the hepafilter on a ceiling in a clean room. FIG.

FIG. 4 is a side sectional view showing a schematic configuration of a conventional clean room.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Clean room 2 Hepa filter 2A, 2B Hepa filter group 5, 6 Internal adjuster 10, 11 Breaker 12 Emergency generator 13, 14, 15 Power supply switching board

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Atsushi Kawasaki 5-10-1 Fuchinobe, Sagamihara-shi, Kanagawa Prefecture Nippon Steel Corporation Electronics Research Laboratory (56) References REAL WORKS 55-117463 (JP, U) Edited by the Society of Air Conditioning and Sanitary Engineers, published by the Japan Society for Air Conditioning and Sanitary Engineering, Volume 2, Revised 9th Edition, September 5, 1978, Third Edition, pages 674-675

Claims (2)

(57) [Claims] 1. A method of taking in outside air to obtain a desired temperature, humidity and
The air conditioned to cleanliness is duplicated by multiple ventilation fans.
Supply to the clean room via several hepafilters
In the clean room maintenance device,
Multiple power supply systems for the blower fan corresponding to the filter group
Each of which constitutes the hepafilter group.
Hepa filter is evenly mixed and dispersed in the clean room.
Clean room cleanliness
Maintenance device. 2. The method according to claim 1, wherein
Are placed in a zigzag or city
Clean room cleaning characterized by being arranged in a pine pattern
Purity maintenance device.