JP2616602B2 - Image furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image furnace used for crystal growth and the like, and more particularly, to a structure of an image furnace for exchanging a heat source.

[0002]

2. Description of the Related Art In an image furnace conventionally used for crystal growth, a heat source is placed at a first focal point of a reflector having a spheroidal surface, and an object to be heated is placed at a second focal point. It concentrates the heat rays emitted from the heat source and heats the object to be heated. This device has a single elliptical type in which a reflecting mirror is composed of only one spheroidal surface, and a bi-elliptic type in which a reflecting mirror is composed of a combination of two spheroidal surfaces and shares a second focal point. In addition, there is a multi-elliptical type having a structure in which a reflecting mirror is constituted by a combination of three or more spheroidal surfaces and shares a second focal point.

Next, a specific structure of a conventional image furnace will be described with reference to the drawings, taking a bi-elliptical image furnace as an example.

FIG. 2 is a sectional view of a main part of a conventional double elliptical image furnace. In FIG. 2, the spheroidal reflecting mirror 200 includes a fixed spheroidal reflecting mirror 201 and an open / closed spheroidal reflecting mirror 202. A heat light source 203 is provided at the first focal point of each of the spheroidal reflecting mirrors 201 and 202.
Are attached by heat source fixing screws 204.

The open / close spheroidal reflecting mirror 202 is in an open state for exchanging the heat light source, and the second focal point portion 210 is where the infrared light emitted from the heat light source is concentrated and heated ( (Not shown) is also removed for replacing the heat light source. Electric power to the heat light source is supplied from the outside of the respective spheroidal reflecting mirrors by inserting electrodes 205 attached to the heat light source into sockets 206 provided on the respective spheroidal reflecting mirrors 201 and 202.

To remove the heat light source, the heat light source 203 can be pulled out by opening the open / close spheroidal reflection mirror 202 and loosening the heat source fixing screw 204 from the inside of the spheroidal reflection mirror.
The mounting of the heat light source can be performed in the reverse order.

FIG. 3 is a cross-sectional view of a main part of another conventional elliptical image furnace having a structure. In the figure, a spheroidal reflecting mirror 300 includes a fixed spheroidal reflecting mirror 301 and an open / closed spheroidal reflecting mirror 302. A heat source 3 is provided at the first focal point of each of the spheroidal reflecting mirrors 301 and 302.
Numeral 03 is attached by a heat light source fixing screw 304. The open / close spheroidal reflecting mirror 302 has a second focal point 3
A sample (not shown) in which infrared rays emitted from a heat light source are concentrated and heated is placed on 10 and can be opened and closed when the sample is attached and detached. Electric power to the heat light source 303 is supplied by connecting wires 305 attached to the heat light source to terminals 306 provided on the respective spheroidal reflection mirrors with connection screws 307, and the respective spheroidal reflection mirrors 301,
302 is supplied from outside.

To remove the heat light sources 303, 303, remove the lids 308 at both ends of each spheroidal reflecting mirror and loosen the connecting screw 307 and the fixing screw 304 from the outside of the spheroidal reflecting mirror. 303 can be pulled out, and mounting of the heat light source can be performed in the reverse order.

[0009]

However, in the case where the power supply to the heat light source is performed by inserting an electrode of the heat light source, a poor connection may occur at a connection portion with the terminal of the spheroidal reflecting mirror. In some cases, sufficient power could not be supplied to the light source. In addition, in the case where the power supply to the heat light source is performed by wiring, the wiring work requires the worker to work around the spheroidal reflector, so that a sufficient working space is required or the working space is not sufficient. If it could not be secured, the entire spheroidal mirror had to be removed from the image furnace and the heat source had to be replaced.

It is an object of the present invention to provide an image furnace in which a heat source can be exchanged from the inside of a spheroidal reflector and a connection with a power terminal to be supplied to the heat source can be strengthened. It is in.

[0011]

According to the present invention, a heat source is provided at a first focal point of a spheroidal reflector, and a sample is provided at a second focal point of the spheroidal reflector. A power terminal for supplying power to the heat light source; and an image furnace for heating the sample by concentrating infrared rays emitted from the heat light source. An image furnace including an electrode made of a plate body, wherein the electrode is fixed to a power supply terminal provided on the spheroidal reflecting mirror is obtained.

According to the present invention, the electrode has an L-shape, and the fixing to the power terminal is performed by a connecting screw.

[0013]

According to the present invention, in an image furnace for heating the sample by concentrating infrared rays emitted from a heat light source, the electrode of the heat light source is a flexible conductive L-shaped plate, Is fixed to a power supply terminal provided on the spheroidal reflecting mirror by a connecting screw.

Accordingly, no excessive force is applied to the power supply terminal even when tightening with the screw, and there is no possibility that the electrode itself may be damaged.

[0015]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a sectional view of a main part of a double elliptical image furnace showing one embodiment of the present invention. In FIG. 1, a spheroidal reflecting mirror 100 is a fixed spheroidal reflecting mirror 1.
01 and the hinge 109, the opening / closing spheroidal reflecting mirror 10 can be opened and closed with respect to the fixed spheroidal reflecting mirror 101.
2 is comprised. Each spheroidal reflecting mirror 10
The heat source 103 is attached to the first focus portion of the mounting portions 1 and 102
The heat source fixing screws 104 are attached via the heat source fixing screws 104 respectively. Open / close spheroidal reflecting mirrors 101 and 102
Are open for replacement of the heat light source 103, and the heat light source 1 placed at the second focal point portion 110.
The sample (not shown) to which the infrared rays emitted from 03 are concentrated and heated is also removed for the replacement of the heat light source. Electric power to the heat light sources 103 is supplied from outside the respective spheroidal reflecting mirrors 101 and 102, and the heat light sources 101 and 1
The electrode 105 provided at one end of the reference numeral 02 and the terminals 106 provided at the respective spheroidal reflecting mirrors are tightened and connected by connecting screws 107.

In the embodiment of the present invention, the electrode 105 provided in the heat light source has an L-shaped plate shape and is made of a material such as a conductive copper plate so as to have flexibility. Therefore, the electrodes 105, 105 are deformed when being tightened by the connecting screws 107, respectively, and the electrodes themselves are damaged,
The terminal is configured not to apply excessive force.

To remove the heat source 103, the open / close spheroidal reflector 102 is opened, a tool is inserted through the insertion hole 108 from the inside of the spheroidal reflector, the connection screw 107 is loosened, and the heat source If the fixing screw 104 is loosened, the heat source 10
3 can be pulled out, and mounting of the heat light source 103 can be realized by performing the reverse procedure. Although the description has been given of the double ellipse type image furnace here, it can be easily conceived that the present invention can be similarly applied to a single ellipse type or a multi-ellipse type image furnace.

[0018]

As described above, in the image furnace according to the present invention, the connection between the electrode of the heat source and the terminal of the spheroidal reflector can be performed from the inside of the spheroidal reflector. There is no need to work behind a spheroidal reflector. Further, since the electrode of the heat light source and the terminal of the spheroidal reflecting mirror can be firmly connected with the screw, no contact failure occurs.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part of an image furnace according to an embodiment of the present invention.

FIG. 2 is a sectional view of a main part of an example of a conventional image furnace.

FIG. 3 is a sectional view of a main part of another example of a conventional image furnace.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 spheroidal reflector 103 thermal light source 104 thermal light source fixing screw 105 electrode 107 connecting screw 110 second focal point portion 200 spheroidal reflective mirror 203 thermal light source 204 thermal light source fixing screw 205 electrode 210 second focal point portion 300 Spheroidal reflecting mirror 303 Heat source 304 Heat source fixing screw 307 Connection screw 310 Second focal point

Claims (2)

(57) [Claims] 1. A heat source is provided at a first focal point of a spheroidal reflector, a sample is provided at a second focal point of the spheroidal reflector, and power is supplied to the heat source at the spheroidal reflector. An image furnace for heating the sample by concentrating infrared rays emitted from the heat light source, comprising: an electrode made of a flexible conductive plate extending from the heat light source; Is fixed to a power supply terminal provided on the spheroidal reflecting mirror. 2. The image furnace according to claim 1, wherein said electrode has an L-shape, and said electrode is fixed to said power terminal by a connecting screw.