JP2615685B2 - Method of forming electrode spacer for flat display device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a position setting between a plurality of secondary electron multiplying electrode plates of a flat display device by a secondary electron multiplying method, and an electric and mechanical method. More particularly, the present invention relates to a method for forming an electrode spacer of a flat display device, which is suitable for forming an electrode spacer which needs to maintain a high withstand voltage.

[Summary of the Invention]

According to the present invention, in order to dispose a spacer on at least one of the electrode plates to be arranged opposite to each other, an adhesive glass material is applied in a predetermined pattern on a surface facing the electrode plate and another electrode plate, while the vacuum suction is performed. The insulating microspheres are arranged in a pattern corresponding to the pattern described above, and the electrode plate is matched with the adhesive glass material so that the adhesive glass material is pressed against the corresponding insulating microspheres. Insulating microspheres are adhered to the electrode plate to form spacers with the insulating microspheres for the electrodes, and the other electrode plates are opposed to this electrode plate to ensure electrical and mechanical It is possible to oppose while maintaining high withstand voltage.

[Conventional technology]

As a secondary electron multiplication type display device, for example, Philips Journal of Research (Philli)
ps Journal of Research) Vol, 41 No 3, 1986, p. 325-
On page 342, there is a proposal as a channel multiplying cathode ray tube.

FIG. 3 is a schematic enlarged cross-sectional view of a main part of a flat display device, that is, a flat display device by a secondary electron multiplication method, and FIG. 4 is an enlarged exploded cross-sectional view of the main part. It is conceivable to adopt a structure showing This device comprises, for example, a transparent substrate (2) made of, for example, a glass substrate facing an insulating substrate (1) made of, for example, a glass substrate.
Is arranged, an airtight vacuum container is formed by the two substrates (1) and (2), and a flat high vacuum space is formed between the substrates (1) and (2).

On the inner surface of the transparent panel (2), a required pattern, for example, a phosphor (3) that emits a single color or red, green, and blue light of each color in an island shape at predetermined intervals in the horizontal and vertical directions, for example, optically. A conductive coating film (4) made of light-absorbing carbon or the like is previously formed by an optical printing method in addition to the portions to which the phosphors (3) are applied, in addition to the portions to which the phosphors (3) are applied. Thus, a fluorescent surface (5) is formed.

An electron emission means (6) comprising a heater (7) coated with, for example, a thermionic emission cathode material is arranged on the insulating substrate (1) side facing the fluorescent surface (5). A secondary electron multiplying means (8) is arranged in a vacuum flat space between (6) and the phosphor screen (5).

Also, for example, a first grid surrounding the electron emitting means (6)
G ₁ is disposed, a fluorescent screen secondary electron multiplying means (8) (5)
, A second grid G ₂ , a third grid G ₃ , and a fourth grid G ₄ are arranged.

The secondary electron multiplying means (8) includes a plurality of first, second, third,... Electrode plates (81), (82), (83),. The through-holes (81a) and (8) are located on the fluorescent surface (5) at positions facing the positions of the respective phosphors (3).
2a), (83a) ... are drilled. Each electrode (81) (8
2) Different voltages V ₁ V ₂ V ₃ ... Are applied to (83)... Toward the fluorescent screen (5).

With such a configuration, accelerated electrons coming from the electron emitting means (6) impact on the inner wall surface of the through hole (81a) of the first electrode plate (81) to generate secondary electrons. This is further accelerated, and the secondary electrons and the electrons from the electron emission means (6) are converted into the second electrode (82).
Impacts on the inner wall surface of the through-hole (82a) to generate secondary electrons, and sequentially impacts on the inner wall surface of the through-hole (83a) of the third electrode (83) to produce a secondary electron multiplication effect. The electrons multiplied in this way are selected by, for example, an applied voltage between the second grid G ₂ and the third grid G ₃ and impact the predetermined phosphor (3) on the phosphor screen (5). To perform image projection.

In the flat display device of the secondary electron multiplication system having such a configuration, the secondary electron multiplying means (8) has a plurality of electrode plates (8) to which different voltages are applied.
1) (82) (83) are arranged at minute intervals. In this case, each electrode plate (81) (82) (83) ...
In order to prevent uniform brightness, that is, non-uniform color in each portion of the fluorescent screen (5), the spaces are precisely arranged at uniform intervals and electrically and mechanically maintain high breakdown voltage. Is required.

[Problems to be solved by the invention]

Each electrode plate (81), (82), (8) of the secondary electron multiplying means (8) in the flat display device as described above.
3) ... spacing between, further setting the distance between the grid G ₂ is, in each other opposite electrode plates (81) (82) (83) ... one surface e.g., through holes for the secondary electron generation (81a) (82a) (83
a) Insulating microspheres (10), specifically, glass beads, are bonded to the insulating microspheres (9), that is, the bonding glass frit, except for the portions where the electron beam transmission holes are formed. It is conceivable to maintain the interval between the electrode plates with an interval corresponding to the diameter of 10). In this case, the frit is applied by applying an adhesive frit, that is, an adhesive glass material to a predetermined position on the surface of the electrode plate, for example, by screen printing, and insulating microspheres, ie, glass beads, at a predetermined position in a state where the solvent is not dried. A method of placing the material on a material (9) and compressing the material is considered. However, according to such a method, the solvent of the adhesive glass material (9) is scattered and dried during the work of arranging the insulating microspheres (10) with the increase in the area of the display device, and the insulating property is reduced. Kitashi variations substantially adhesion height of microspheres (10), a plurality of electrode plates of such insulating microspheres (10) as a spacer for example (81) (82) (83) ... facing crimped G ₂ In this case, there is a problem that a uniform interval cannot be secured in each part. The practical spacing between the individual electrode plates (81) (82) (83 ) ... G 2 , it is necessary to hold a small spacing, insulating microspheres (10) or glass beads used are, for example, 200μm approximately Due to the diameter, handling of such microspheres (10) individually is extremely low in workability, and as described above, the crimping by the glass frit becomes non-uniform and the height differs substantially. There are problems.

The present invention solves such a problem and sets a plurality of electrode plates with a uniform fine interval in each part even if the electrode plates have a large area, and reliably ensures an electrical and mechanical withstand voltage between the electrodes. Provided is a method for forming an electrode spacer of a flat display device which can be held.

[Means for solving the problem]

In the present invention, for example 1 of the electrode plate requires the attachment of the spacer, as shown in FIG. 1 A ₁ (80), for example through holes or electron beam transmitting hole for causing the secondary electron multiplication effect (80a) adhering and bonding an adhesive glass material (9), that is, an adhesive frit material, to a predetermined portion other than the perforated portion while maintaining a plurality of required intervals in, for example, X and Y directions orthogonal to each other; on the other hand, as shown in FIG. 1 a _2, placing the insulating microspheres by vacuum suction (10), on a plane plate with a pattern corresponding to the arrangement pattern of the bonding glass member (9) (33), first As shown in FIG. 1B, a corresponding adhesive glass material (9) is brought into contact and pressure-bonded so as to abut on a portion where the insulating microsphere (10) is placed, and an insulating material is attached to a predetermined portion of the electrode plate (80). Bonding and forming spacers with microspheres (10)

[Action]

According to the method of the present invention described above, the insulating microspheres (10) are arranged in a predetermined pattern by vacuum suction, so that it is not necessary to handle the spheres (10) individually, and the arrangement is made up of a large number of microspheres. Since the sphere (10) can be placed on the vacuum suction part only by spraying it on the suction surface, the electrode plate (8
In 0), an adhesive glass material, for example, made into a paste by using a solvent, is applied in a predetermined pattern by screen printing or the like, and is immediately pressed into conformity with the surface of the insulating microspheres (10). Then, the microspheres (10) are adhered on the entire surface thereof with a uniform predetermined adhesion state. Therefore, the electrode plate (80) to which the microspheres (10) are fixed as described above is placed on another electrode plate (80), which is to be opposed to the electrode plate (80) while maintaining a predetermined distance from the electrode plate (80). ), And these are mechanically held by appropriate means so as to abut against the sphere (10) between the two electrode plates (80).
Is set to an interval d corresponding to the diameter of

〔Example〕

The structure of the secondary electron multiplication type flat display device to which the method of the present invention is applied will be described in further detail with reference to FIGS.

In this example, a plurality of electron emitting means (6) are formed on the insulating substrate (1) by linear heaters (7) extending in one direction, that is, in a direction perpendicular to the plane of FIG. 3 and FIG. Is done.

Then, each of the first grid G ₁ is disposed over each electron emitting means (6). Each first grid G ₁ may take a structure in which a slit extending in a direction perpendicular to the axial semi-cylindrical electrode plate with an axis direction in the extension direction of the heater (7) are arranged.

Further, on the substrate (1), there is a glass wall (21) projecting between the electron emitting means (6), and on the surface of the glass wall, a conductive film (22) such as a carbon coating film is formed. This voltage of the first grid G ₁ and the same potential is applied to.

A metal support plate (23) is buried and buried in each glass wall (21), and, for example, a first electrode plate (81) of the secondary electron multiplier (8) is electrically and electrically mounted on the upper end surface thereof. Mechanically bonded. On the fluorescent surface (5) side of the secondary electron multiplying means (8), a plurality of strips are arranged in parallel so as to extend in one direction, for example, in a direction perpendicular to the plane of FIG. 3 and FIG. the second grid G ₂ is arranged which is formed by patterning the composed words for example a metal plate by application of photolithography. Further thereon, the phosphor (3) of the phosphor screen (5) and the respective electrode plates (81), (82), (83) of the secondary electron multiplier (8)
... through hole in (81a), via (82a), (83a) ... and electrons (secondary electrons) in a portion facing the first insulating plate beam transmissive hole H ₁ is drilled (24) for example, a plurality of strip the paper in a parallel direction in FIGS. 3 and 4 diagram is parallel arranged to extend, a third grid G ₃ is disposed which is formed by patterning i.e. for example similarly to the electrode plate. Fourth grid G ₄ That shield electrode is disposed becomes a mesh-like electrode plate through a second insulating plate having a through hole H ₁ and opposed to each through hole H ₂ (25) in addition top of this . And further a third insulating plate having a through hole H ₃ opposed to each through hole H _1, H ₂ between the transparent panel (2) having a fluorescent face (5) which (2
6) are stacked and arranged.

Each of the first, second, and third insulating plates (24), (25), (26) is formed of a ceramic capable of forming a through-hole by an optical method, for example, a photocell (trade name, manufactured by Corning Incorporated). Each of the through holes H ₁ , H ₂ , and H ₃ is formed at a predetermined position by an optical method, that is, photolithography.

On the inner surface of the transparent panel (2), a linear barrier rib (27) having a required height is provided by being pierced by a glass frit or the like, and the top of the rib is in contact with the third insulating plate (26). The lever insulating plate (26) is prevented from coming into direct contact with the fluorescent screen (5).

The secondary electron multiplying means (8) includes, for example, the first to third
The electrode plates (81) to (83) are arranged in parallel. These first to third electrode plates (81) to (83) are made of, for example, 426 alloy, and as described above, the through holes (81) are formed in the fluorescent screen (5) at positions facing the phosphor (3). 81a) (8
2a) (83a) is drilled.

Conductive film on the surface of the first grid G ₁ and the glass wall (21) (2
For example, 45 V is applied to 2), and V ₁ = 100 V is applied to the metal support plate (23) and the first electrode plate (81) of the secondary electron multiplier (8).
But the second electrode (82) in the V ₂ = 350 V, but also V ₃ = 600V is applied to the third electrode plate (83), the second grid G ₂ and the third grid G ₃ movies 60 depending on the video signal to be output
When a voltage of 0 to 690 V is applied, secondary electrons are sequentially scanned, for example, substantially horizontally on the phosphor (5).

The 800V is applied to the fourth grid G _4, high anode voltage of 10KV is applied to the phosphor screen (5). The fourth
The grid G _4, thereby retaining the function as a shield electrode for preventing the high pressure of the phosphor screen side to penetrate the secondary electron multiplying means (8) side.

In the present invention, for example, the respective electrode plates (81) - (83) cross the secondary electron multiplying means of the flat display device due to secondary electron multiplication scheme described above (8), the further distance between the second grid G ₂ This is applied to a spacer mounting method for setting. In the present invention, as shown in FIG. 2, a vacuum chamber (31) having an exhaust port (30) connected to a vacuum pump or a pressure reducing device (not shown) is prepared. The vacuum chamber (31) has, for example, an upper wall with a large number of through holes (32a).
Is constituted by a support plate (32) with a hole. Then, a thin metal sheet (33) of, for example, about 80 μm is brought into contact with the support plate (32). This sheet (33) has the first
Diameter and spheres of a degree that can set this position narrowing down (10) the inner diameter for example insulating microspheres (10) with smaller diameter than the insulating microspheres (10) as shown in FIG. A ₂ is of about 200μ In this case, the through-hole (33a) having an inner diameter of about 100 μm is formed in a portion other than the electron-transmitting holes (eg, (80a), (81a), (82a), (83a). As arranged, for example, horizontal Y direction and vertical X
They are pierced and arranged with a required interval in the direction. In this case, the through hole (32a) of the support plate (32) is
The through hole (32a) and the through hole (33a) are sufficiently large as compared with 3a), for example, so that the through hole (32a) and the through hole (33a) do not coincide with each other, for example, between the adjacent through holes (33a). (32a) is set in such a positional relationship as to be arranged.

As shown in FIG. 2, for example, positioning pins (34) are projected from four corners of the support plate (32), and positioning holes (33b) formed in the sheet (33) are formed thereon. The fitting is performed so that the positional relationship between the sheet (33) and the support plate (32) is set to a predetermined relationship.

Thus, the pressure in the vacuum chamber (31) is reduced. As shown with this way the arrow in FIG. 1 A _2, through holes (33
Through a), suction is performed from the gap of the overlapped portion between the sheet (33) and the support plate (32) through the through hole (32a). In this state, a large number of insulating microspheres ( By spraying 10), one microsphere (10) is suction-held on each of the through holes (33a). Therefore, in this state, the remaining spheres (10) in a state in which the spheres (10) other than the spheres (10) sucked into the through holes (33a) are freely adsorbed and free to move
Is eliminated, the sphere (10) is arranged only on the through hole (33a).

Each electrode of electrode plates eg secondary electron multiplying means and an object to be Naso the arrangement of the spacers as shown in this state in FIG. 1 _{A 1 (8) (81)} (82) (83) ..., or an adhesive glass material i.e. adhesive glass frit paste (9) with an arrangement pattern and the pattern of the island pattern or a sphere (10) interspersed applied by screen printing or the like to a predetermined portion of the electrode plate or the like of the second grid G ₂ In a state where the solvent does not evaporate, the electrode plate is pressed toward the sheet (33) with a required pressure so that the adhesive glass material (9) is pressed against the sphere (10) as shown in FIG. 1B.

Thereafter, the vacuum chamber (31) is set at the same pressure as the atmospheric pressure, for example, so that the sphere (10) is easily separated from the through hole (33a) of the sheet (33). In this way, each sphere (10) is bonded to the bonding glass material (9) scattered at the corresponding position as shown in FIG. 1C. In this state or in the state shown in FIG. 1B, the solvent is scattered or dried by heating at, for example, 150 ° C., and the electrode plate on which the sphere (10) is arranged is passed through a heating furnace, for example, at 450 ° C. After firing,
The sphere (10) is securely attached to a predetermined position on the electrode plate by the adhesive glass material (9).

Since the attachment of the spacer by a sphere (10) is made to each electrode (81) - (83) or (83) ~G ₂ of interest in the, as explained these in FIGS. 3 and 4 The target flat display device can be constructed by superposing in a predetermined order on an electrode plate or the like to be superimposed on each other and holding it in this state by other appropriate means for uniting and bonding.

In the above-described example, the present invention is applied to the formation of the electrode spacers of the flat display device using the secondary electron multiplication method. Obviously, the present invention can be applied to various other flat display devices to be provided.

〔The invention's effect〕

As described above, according to the present invention, by vacuum suction, insulating microspheres are arranged at predetermined positions and fritting is performed at the same time as a whole, so that even a large-area electrode plate in a large-area flat display device can be used. Spacers can be formed by attaching insulating microspheres (10) in a uniform state at each part, and in practice, the diameter of insulating microspheres (10) is provided with high accuracy. The height of the spacer corresponding to the diameter of the sphere (10), that is, the distance between the electrode plates can be regulated with high precision, and the display device can be mass-produced with uniform characteristics using this. Therefore, even in a large-area display device, a high-quality display device that is uniform in each part of the screen and has no unevenness in brightness and color can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view of each step for explaining the present invention;
FIG. 2 is a schematic perspective view, partially cut away, of an example of an apparatus for carrying out the method of the present invention, FIG. 3 is a sectional view of a main part of a flat display device to which the present invention is applied, and FIG. It is an exploded sectional view of a part. (80) is an electrode plate, (9) is an adhesive glass material, (10) is an insulating microsphere, (31) is a vacuum chamber, (32) is its supporting plate,
(33) is a sheet, and (33a) is a vacuum suction hole.

Claims (1)

(57) [Claims] 1. A step of applying an adhesive glass material in a predetermined pattern on an electrode plate; a step of arranging insulating microspheres in a pattern corresponding to the pattern by vacuum suction; and arranging the insulating microspheres. The electrode plate on the electrode plate, and the adhesive glass material on the electrode plate and the insulating microspheres are brought into contact with each other so as to be pressed against each other at positions corresponding to each other. Adhering and forming spherical spacers. A method for forming electrode spacers for a flat display device, the method comprising: