JP2611566B2 - Hydraulic power recovery system - Google Patents

Hydraulic power recovery system

Info

Publication number
JP2611566B2
JP2611566B2 JP11716991A JP11716991A JP2611566B2 JP 2611566 B2 JP2611566 B2 JP 2611566B2 JP 11716991 A JP11716991 A JP 11716991A JP 11716991 A JP11716991 A JP 11716991A JP 2611566 B2 JP2611566 B2 JP 2611566B2
Authority
JP
Japan
Prior art keywords
motor
pump
motors
tandem
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11716991A
Other languages
Japanese (ja)
Other versions
JPH04347381A (en
Inventor
成一 北野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11716991A priority Critical patent/JP2611566B2/en
Publication of JPH04347381A publication Critical patent/JPH04347381A/en
Application granted granted Critical
Publication of JP2611566B2 publication Critical patent/JP2611566B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Forklifts And Lifting Vehicles (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、パワーユニット等の液
圧機構に利用される動力回収装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power recovery device used for a hydraulic mechanism such as a power unit.

【0002】[0002]

【従来の技術】例えば、パワーユニットの一つであるフ
ォークリフトは、ポンプ/モータから吐出される圧液で
シリンダを駆動し得るように構成されている。このう
ち、ポンプ/モータが直流電動機に接続され、この直流
電動機がバッテリで駆動されるように構成されたもので
は、バッテリの放電時期を引き伸ばすための工夫が必要
になる。そこで、従来は図3に示すように、パワーシリ
ンダ等を駆動して負荷を上昇、下降させる役割を担うポ
ンプ/モータCに直流機Mを接続し、ポンプ/モータC
が図中X方向に正回転してポンプ作用を営むときは直流
機Mを電動機として使用し、ポンプ/モータCが図中−
X方向に逆回転してモータ作用を営むときは直流機Mを
発電機として使用することにより、負荷のエネルギを取
り込んでバッテリを適時充電できるようにしている。
2. Description of the Related Art For example, a forklift, which is one of power units, is configured so that a cylinder can be driven by a hydraulic fluid discharged from a pump / motor. Among them, the pump / motor is connected to the DC motor, and the DC motor is configured to be driven by the battery, so that a device for extending the discharge time of the battery is required. Therefore, conventionally, as shown in FIG. 3, a DC machine M is connected to a pump / motor C which plays a role of driving a power cylinder or the like to raise or lower a load, and
Uses the DC machine M as an electric motor when the pump / motor C rotates
When the motor rotates by performing reverse rotation in the X direction, the DC machine M is used as a generator so that the energy of the load is taken in and the battery can be charged in a timely manner.

【0003】[0003]

【発明が解決しようとする課題】ところが、このような
従来の動力回収装置では、ポンプ/モータCが容積の一
定したものであるため、要求される流量に応じて1回転
あたりのポンプ吐出容積Qが決まると、動力回収時にも
それに等しい呑み込み容積Qでポンプ/モータCにモー
タ作用を営ませる以外にない。このため、電動機Mの回
転数を上げて動力回収時の回収効率を向上させることが
出来ないという問題がある。
However, in such a conventional power recovery apparatus, since the pump / motor C has a constant volume, the pump discharge volume Q per rotation depends on the required flow rate. Is determined, there is no other choice but to operate the pump / motor C with the same swallowing volume Q at the time of power recovery. For this reason, there is a problem that it is not possible to increase the rotation speed of the electric motor M to improve the recovery efficiency at the time of power recovery.

【0004】本発明は、簡単な構成により、このような
課題を解決することを目的としている。
An object of the present invention is to solve such a problem with a simple configuration.

【0005】[0005]

【課題を解決するための手段】本発明は、かかる目的を
達成するために、次のような構成を採用したものであ
る。
In order to achieve the above object, the present invention employs the following configuration.

【0006】すなわち、本発明に係る液圧機構の動力回
収装置は、2以上のポンプ/モータを同軸上において連
結したタンデム機構と、このタンデム機構に接続されタ
ンデム機構が正回転してポンプ作用を営むときは電動機
として機能しタンデム機構が逆回転してモータ作用を営
むときは発電機として機能する直流機と、前記タンデム
機構の正回転時に各ポンプ/モータから圧液を吐出させ
逆回転時に一部のポンプ/モータにのみ圧液を呑み込ま
せる切換回路とを具備してなり、この切換回路が、タン
デム機構の逆回転時に一部以外のポンプ/モータの吐出
側と吸込側を短絡する短絡回路を備えていることを特徴
とする。また、他の構成としては、2以上のポンプ/モ
ータを同軸上に配置するとともに一部のポンプ/モータ
の正回転時に該一部のポンプ/モータに他のポンプ/モ
ータを連結し逆回転時に他のポンプ/モータを切り離す
ワンウェイクラッチを備えたタンデム機構と、このタン
デム機構に接続されタンデム機構が正回転してポンプ作
用を営むときは電動機として機能しタンデム機構が逆回
転してモータ作用を営むときは発電機として機能する直
流機と、前記タンデム機構の正回転時に各ポンプ/モー
タから圧液を吐出させ逆回転時に一部のポンプ/モータ
にのみ圧液を呑み込ませる切換回路とを具備してなるも
のが挙げられる。
That is, the power recovery apparatus for a hydraulic mechanism according to the present invention includes a tandem mechanism in which two or more pumps / motors are coaxially connected, and a tandem mechanism connected to the tandem mechanism for positive rotation to perform a pump action. A DC motor that functions as an electric motor when operating and functions as a generator when the tandem mechanism rotates in reverse and performs a motor function. One pump / motor discharges hydraulic fluid when the tandem mechanism rotates forward and one when reverse rotates. only the part of the pump / motor will be and a switching circuit which swallowed the liquid, the switching circuit, Tan
Discharge of pump / motor other than a part when reverse rotation of dem mechanism
And a short circuit for short-circuiting the suction side and the suction side . In another configuration, two or more pumps / modes are provided.
Motors are arranged coaxially and some pumps / motors
During the normal rotation of the pump, some of the pumps / motors
And separate other pumps / motors during reverse rotation
A tandem mechanism with a one-way clutch and this tandem
Connected to the dem mechanism, the tandem mechanism rotates forward and the pump operates.
When working, it functions as an electric motor and the tandem mechanism is reversed.
When rotating to perform the motor function,
And each pump / mode when the tandem mechanism rotates forward.
Some pumps / motors discharge pressure fluid from the
And a switching circuit for swallowing the pressurized liquid only
Is included.

【0007】[0007]

【作用】このような構成により、要求される流量に応じ
てタンデム機構が正回転して全てのポンプ/モータが
ンプ作用を営むときの1回転あたりの吐出容積が決まる
と、タンデム機構が逆回転して一部のポンプ/モータの
みがモータ作用を営むときの1回転あたりの呑み込み容
積はその吐出容積よりも小さいものとなる。このため、
全ポンプ/モータが圧液を呑み込んでモータ作用を営む
場合に比べて、同量の飲み込み量を消化するためにタン
デム機構の軸はより高回転で回転駆動されることにな
る。この結果、発電時の直流機の回転数が上がり、これ
に比例して発電出力が増加することになる。なお、タン
デム機構が逆回転する際に、請求項1に係る構成では、
一部以外のポンプ/モータは一部のポンプ/モータと共
に逆回転するが、切換回路の一部に設けた短絡回路によ
ってこの一部以外のポンプ/モータの吐出側と吸込側が
短絡されるため、この一部以外のポンプ/モータは液を
短絡回路内で自己循環させながら無負荷に近い状態で回
転し、引きづり抵抗を増大させることもなければ、一部
のポンプ/モータが営むモータ作用に対してさほど大き
な負荷となることもない。一方、請求項2に係る構成で
は、一部のポンプ/モータに対して一部以外のポンプ/
モータはワンウェイクラッチによって切り離されるた
め、引きづり抵抗の問題は生じず、そしてやはり一部の
ポンプ/モータが営むモータ作用に対して一部以外のポ
ンプ/モータが負荷となることがない。したがって、何
れの構成によっても、一部以外のポンプ/モータが動力
回収時の作動や動力回収効率の妨げとなる不具合を有効
に回避することができる。
With such a configuration, when the tandem mechanism rotates forward according to the required flow rate and the discharge volume per rotation when all the pumps / motors perform the pumping action is determined, The tandem mechanism rotates in reverse and some pumps / motors
Only the swallowing capacity of 1 per rotation when engaged in motor effect becomes smaller than the ejection volume. For this reason,
The shaft of the tandem mechanism will be driven to rotate at a higher speed to digest the same amount of swallowing than when all pumps / motors swallow the hydraulic fluid to perform the motor function. As a result, the number of revolutions of the DC machine during power generation increases, and the power generation output increases in proportion thereto. In addition, Tan
When the dem mechanism rotates in the reverse direction, in the configuration according to claim 1,
Other pumps / motors share some pumps / motors.
Reverse rotation, but due to the short circuit provided in a part of the switching circuit.
Therefore, the discharge side and suction side of the pump / motor other than this part
Pumps / motors other than this part will not be able to
Turn in a state close to no load while recirculating in a short circuit.
Rolls and does not increase drag resistance,
Large for the motor action performed by other pumps / motors
There is no heavy load. On the other hand, in the configuration according to claim 2,
Indicates that some pumps / motors
Motor disconnected by one-way clutch
The problem of drag resistance does not arise, and again some
Except for a part of the motor action performed by the pump / motor
The pump / motor does not become a load. So what
With this configuration, pumps / motors other than some
Effective at the time of recovery and trouble that hinders power recovery efficiency
Can be avoided.

【0008】[0008]

【実施例】以下、本発明の一実施例を図面を参照して説
明する。
An embodiment of the present invention will be described below with reference to the drawings.

【0009】この実施例に係る液圧機構の動力回収装置
は、図1に示すように、一対のポンプ/モータA、Bを
同軸上において連結した構造のタンデム機構1と、この
タンデム機構1に接続されタンデム機構1が図中X方向
に正回転してポンプ作用を営むときは電動機として機能
しタンデム機構1が図中−X方向に逆回転してモータ作
用を営むときは発電機として機能する直流機Mとを備え
ている。そして、これらのポンプ/モータA、Bに切換
回路2を接続している。切換回路2は、前記タンデム機
構1の両ポンプ/モータA、Bを共通の吸込口INおよ
び吐出口OUTに並列に接続するとともに、ポンプ/モ
ータBから吐出口OUTに向かう流路2aの途中に正回
転時のみに流体の流れを許容する逆止弁2bを設けてい
る。また、この逆止弁2bを設けると、タンデム機構1
が逆回転した時にポンプ/モータBへの圧液の流れが阻
止されることになるが、この際にポンプモータBはポン
プ/モータAとともに同期回転するため、引きづり抵抗
が増大するとともに回路やポンプ/モータの破損等につ
ながる恐れがある。そこで、ポンプ/モータBの吐出側
と吸込側とを逆止弁2cを有した短絡回路2dによって
接続し、ここで流体が無負荷に近い状態で自己循環し得
るようにしている。
As shown in FIG. 1, a power recovery device for a hydraulic mechanism according to this embodiment has a tandem mechanism 1 having a structure in which a pair of pumps / motors A and B are connected coaxially. The tandem mechanism 1 functions as an electric motor when the tandem mechanism 1 rotates forward in the X direction in the drawing to perform a pump action, and functions as a generator when the tandem mechanism 1 rotates in the -X direction in the drawing to perform a motor action. And a DC machine M. The switching circuit 2 is connected to these pumps / motors A and B. The switching circuit 2 connects the two pumps / motors A and B of the tandem mechanism 1 in parallel to the common suction port IN and the discharge port OUT, and connects the pump / motor A and B in the flow path 2a from the pump / motor B to the discharge port OUT. A check valve 2b is provided to allow the flow of the fluid only during normal rotation. When the check valve 2b is provided, the tandem mechanism 1
When the pump rotates in the reverse direction, the flow of the hydraulic fluid to the pump / motor B is blocked. At this time, since the pump motor B rotates synchronously with the pump / motor A, the drag resistance increases and the circuit and the There is a risk of damaging the pump / motor. Therefore, the discharge side and the suction side of the pump / motor B are connected by a short circuit 2d having a check valve 2c so that the fluid can self-circulate in a state close to no load.

【0010】このような構成からなる本装置を、例えば
フォークリフトに適用し、先ず直流機Mを電動機として
作動させると、前記タンデム機構1が正回転して吸込口
INから図示矢印(実線)に沿って両ポンプ/モータ
A、Bに吸い込んだ流体を圧液として吐出口OUTから
吐出することになる。次に、負荷のエネルギを吸収して
動力回収する場合は、吐出口OUTの負荷圧力によって
タンデム機構1のポンプ/モータAが逆回転方向に駆動
され、吐出口OUTから流入した圧液を図示矢印(破
線)に沿ってこのポンプ/モータAに呑み込み、吸込口
INに排出することになる。また、排出された流体の一
部は短絡回路2dに流入し、逆止弁2cを介してポンプ
/モータBに流れた後、再び吐出口OUTへ向かう流れ
に合流して自己循環を繰り返す。
When this device having such a configuration is applied to, for example, a forklift, and the DC machine M is first operated as an electric motor, the tandem mechanism 1 rotates forward and moves from the suction port IN along the illustrated arrow (solid line). Thus, the fluid sucked into both pumps / motors A and B is discharged from the discharge port OUT as a pressure liquid. Next, when power is recovered by absorbing the energy of the load, the pump / motor A of the tandem mechanism 1 is driven in the reverse rotation direction by the load pressure of the discharge port OUT, and the pressure liquid flowing from the discharge port OUT is drawn by an arrow in the drawing. The pump / motor A is swallowed along (broken line) and discharged to the suction port IN. In addition, a part of the discharged fluid flows into the short circuit 2d, flows through the check valve 2c to the pump / motor B, then joins the flow toward the discharge port OUT again, and repeats the self-circulation.

【0011】しかして、この構成において正回転時の1
回転あたりの吐出口OUTからの吐出量Qを図3に示し
た従来の動力回収装置の吐出量Qに等しく設定すると、
各々のポンプ/モータA、Bが受け持つ吐出容積はそれ
ぞれQ/2になり、逆回転時はこの容積Q/2でポンプ
/モータAのみが全容量Qをまかなわなければならなく
なる(ポンプ/モータBはモータとして作用しない)。
しかし、このときポンプ/モータBを通過する流体は無
負荷に近い状態で自己循環するため、直流機Mにかかる
引きづり抵抗は軽減されている。このため、負荷が等し
ければタンデム機構1は2倍の回転数で回転できること
になる。この結果、この動力回収装置を利用すると、直
流機1において従来の約2倍の発電量を得ることがで
き、上述したフォークリフトがバッテリ駆動方式である
場合等にバッテリ放電時期を有効に引き伸ばすことが可
能になる。
Thus, in this configuration, the 1
If the discharge amount Q from the discharge port OUT per rotation is set equal to the discharge amount Q of the conventional power recovery device shown in FIG.
The pump / motors A and B have a discharge volume of Q / 2, respectively. During reverse rotation, only the pump / motor A must cover the full capacity Q with this volume Q / 2 (pump / motor B). Does not act as a motor).
However, at this time, the fluid passing through the pump / motor B self-circulates in a state near no load, so that the drag resistance applied to the DC machine M is reduced. Therefore, if the loads are equal, the tandem mechanism 1 can rotate at twice the number of rotations. As a result, when this power recovery device is used, it is possible to obtain approximately twice the amount of power generation in the DC machine 1 as compared with the conventional case, and it is possible to effectively extend the battery discharge timing when the above-described forklift is a battery-driven system or the like. Will be possible.

【0012】なお、本発明は上記実施例のみに限定され
るものではない。例えば、図2に示す動力回収装置を構
成する切換回路3は、一対のポンプ/モータA、Bを共
通の吸込口INおよび吐出口OUTに並列に接続し逆止
弁3aを設けた点で前記実施例と同様であるが、この装
置は短絡回路を設ける代わりにタンデム機構1のポンプ
/モータA、Bをワンウェイクラッチ4を介して連結し
ている。すなわち、このワンウェイクラッチ4は図中X
方向に正回転する時のみ動力伝達を行い、図中−X方向
に逆回転する時は空転するように構成されたもので、逆
回転時にはポンプ/モータBを回転させないようにして
いる。このような構成によっても、前記実施例と全く同
様の作用効果を得ることができる。また、図1および図
2の実施例はポンプ/モータA、Bの容積比を1:1に
設定したが、これらを互いに異ならせた場合には、動力
回収効率を直流機の特性に応じて従来比で2倍以上ある
いは2倍未満の適宜の値に設定することが可能になる。
さらに、タンデム機構を構成するポンプ/モータの数を
3個以上とすることもでき、その他、切換機構の構成な
ども本発明の趣旨を逸脱しない範囲で種々変形が可能で
ある。
The present invention is not limited only to the above embodiment. For example, the switching circuit 3 constituting the power recovery device shown in FIG. 2 is different from the switching circuit 3 in that a pair of pumps / motors A and B are connected in parallel to a common suction port IN and a common discharge port OUT and a check valve 3a is provided. This apparatus is the same as the embodiment, except that the pump / motors A and B of the tandem mechanism 1 are connected via a one-way clutch 4 instead of providing a short circuit. That is, this one-way clutch 4 is
Power is transmitted only when the motor rotates in the forward direction, and idles when the motor rotates in the -X direction in the figure. The pump / motor B is not rotated during the reverse rotation. With such a configuration, it is possible to obtain exactly the same operation and effect as in the above embodiment. Also, in the embodiment of FIGS. 1 and 2, the volume ratio of the pump / motors A and B is set to 1: 1. However, when these are made different from each other, the power recovery efficiency is changed according to the characteristics of the DC machine. It can be set to an appropriate value that is at least twice or less than twice the conventional value.
Further, the number of pumps / motors constituting the tandem mechanism may be three or more, and the configuration of the switching mechanism may be variously modified without departing from the spirit of the present invention.

【0013】[0013]

【発明の効果】本発明に係る液圧機構の動力回収装置
は、以上説明したように、シリンダ等を駆動するポンプ
/モータにタンデム機構を採用し、そのタンデム機構が
ポンプとして機能する場合とモータとして機能する場合
とで容積比を異ならせた構成により、動力回収時の直流
機の回転数を従来に比べて高回転化し、高い動力回収効
率を実現できる効果が得られる。
As described above, the power recovery apparatus for a hydraulic mechanism according to the present invention employs a tandem mechanism for a pump / motor for driving a cylinder or the like, and a case where the tandem mechanism functions as a pump and a case where the tandem mechanism functions as a pump. With the configuration in which the volume ratio is different from that in the case of functioning as, the effect that the rotation speed of the DC machine at the time of power recovery is increased as compared with the conventional case and high power recovery efficiency can be realized is obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す回路図。FIG. 1 is a circuit diagram showing one embodiment of the present invention.

【図2】本発明の他の実施例を示す図1に対応した回路
図。
FIG. 2 is a circuit diagram corresponding to FIG. 1, showing another embodiment of the present invention.

【図3】従来例を示す図1および図2に対応した回路
図。
FIG. 3 is a circuit diagram corresponding to FIGS. 1 and 2 showing a conventional example.

【符号の説明】[Explanation of symbols]

A、B…ポンプ/モータ M…直流機 1…タンデム機構 2、3…切換回路 A, B: pump / motor M: DC machine 1: tandem mechanism 2, 3, switching circuit

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】2以上のポンプ/モータを同軸上において
連結したタンデム機構と、このタンデム機構に接続され
タンデム機構が正回転してポンプ作用を営むときは電動
機として機能しタンデム機構が逆回転してモータ作用を
営むときは発電機として機能する直流機と、前記タンデ
ム機構の正回転時に各ポンプ/モータから圧液を吐出さ
せ逆回転時に一部のポンプ/モータにのみ圧液を呑み込
ませる切換回路とを具備してなり、この切換回路が、タ
ンデム機構の逆回転時に一部以外のポンプ/モータの吐
出側と吸込側を短絡する短絡回路を備えていることを特
徴とする液圧機構の動力回収装置。
1. A tandem mechanism in which two or more pumps / motors are coaxially connected, and a tandem mechanism connected to the tandem mechanism functions as an electric motor when the tandem mechanism rotates forward to perform a pump action, and the tandem mechanism rotates in reverse. When performing a motor operation, a direct current machine that functions as a generator and a switch that discharges hydraulic fluid from each pump / motor during normal rotation of the tandem mechanism and swallows hydraulic fluid only in some pumps / motors during reverse rotation And a switching circuit,
When the reverse rotation of the
A power recovery device for a hydraulic mechanism, comprising: a short circuit that short-circuits an outlet side and a suction side .
【請求項2】2以上のポンプ/モータを同軸上に配置す
るとともに一部のポンプ/モータの正回転時に該一部の
ポンプ/モータに他のポンプ/モータを連結し逆回転時
に他のポンプ/モータを切り離すワンウェイクラッチを
備えたタンデム機構と、このタンデム機構に接続されタ
ンデム機構が正回転してポンプ作用を営むときは電動機
として機能しタンデム機構が逆回転してモータ作用を営
むときは発電機として機能する直流機と、前記タンデム
機構の正回転時に各ポンプ/モータから圧液を吐出させ
逆回転時に一部のポンプ/モータにのみ圧液を呑み込ま
せる切換回路とを具備してなることを特徴とする液圧機
構の動力回収装置。
2. A coaxial arrangement of two or more pumps / motors.
At the time of forward rotation of some pumps / motors.
When another pump / motor is connected to the pump / motor and rotating in reverse
A one-way clutch to disconnect other pumps / motors
Tandem mechanism and a tandem mechanism connected to this tandem mechanism.
When the Ndem mechanism rotates forward to perform the pump action, the motor
Function and the tandem mechanism rotates in reverse to operate the motor.
The DC machine functioning as a generator, and the tandem
Discharges hydraulic fluid from each pump / motor during normal rotation of the mechanism
During reverse rotation, only some pumps / motors are swallowed by pressure fluid
A hydraulic circuit comprising a switching circuit for causing
Power recovery equipment for construction.
JP11716991A 1991-05-22 1991-05-22 Hydraulic power recovery system Expired - Fee Related JP2611566B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11716991A JP2611566B2 (en) 1991-05-22 1991-05-22 Hydraulic power recovery system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11716991A JP2611566B2 (en) 1991-05-22 1991-05-22 Hydraulic power recovery system

Publications (2)

Publication Number Publication Date
JPH04347381A JPH04347381A (en) 1992-12-02
JP2611566B2 true JP2611566B2 (en) 1997-05-21

Family

ID=14705154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11716991A Expired - Fee Related JP2611566B2 (en) 1991-05-22 1991-05-22 Hydraulic power recovery system

Country Status (1)

Country Link
JP (1) JP2611566B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1006143C2 (en) * 1997-05-28 1998-12-01 Innas Free Piston Bv Hydraulic system with constant pressure in pressure line.
EP1852388B1 (en) * 2005-02-25 2013-04-03 Mitsubishi Heavy Industries, Ltd. Load handling regeneration system for battery type industrial vehicle
US7770697B2 (en) 2005-02-25 2010-08-10 Mitsubishi Heavy Industries, Ltd. Energy recovering method and system in hydraulic lift device of battery operated industrial trucks
EP3151268B1 (en) 2009-01-23 2020-04-01 Nichia Corporation Method of producing a semiconductor device by directly bonding silver oxide on a surface of a semiconductor element with silver or silver oxide on a surface of a base
WO2010084746A1 (en) 2009-01-23 2010-07-29 日亜化学工業株式会社 Semiconductor device and method for manufacturing same
US8836130B2 (en) 2009-01-23 2014-09-16 Nichia Corporation Light emitting semiconductor element bonded to a base by a silver coating

Also Published As

Publication number Publication date
JPH04347381A (en) 1992-12-02

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