JP2610239B2 - Moving state detection device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving state detecting device that detects an angular displacement with respect to an absolute space using an inertial force.

(Background of the Invention) Conventionally, this kind of angular displacement detecting device is disclosed in Japanese Patent Application No. 63-126375.
No., Japanese Patent Application No. 63-126374, Japanese Patent Application No. 63-235158, Japanese Patent Application No.
As proposed in Japanese Patent Application No. 63-126373 and Japanese Patent Application No. 63-255661, it basically has the configuration described in detail below, and will be described with reference to FIGS. 10 to 1.

In these figures, 101 is a base for mounting each component constituting the apparatus, 102 is an outer cylinder as a liquid enclosure having a chamber in which a floating body 103 and a liquid 104 are enclosed, and is shown in detail in FIG. A groove 102a for fitting and fixing the U-shaped floating body holding body 114 formed therein is formed on the inside thereof. Reference numeral 103 denotes a floating body having magnetic properties, which is held by the floating body holding body 114 so as to be rotatable around an axis 103a.
9 and a mask 110 having a slit 110a are attached so as to cover the arm 9 and arms are respectively extended from the other pair of side surfaces of the central block. Further, the floating body 103 is configured such that the rotation balance around the shaft 103a and the buoyancy balance in the liquid are obtained.

104 is a liquid sealed in the outer cylinder 102. Reference numeral 105 denotes a light-emitting element (iRED) that generates light when energized, and is attached to the base 101 by a light-emitting element holder 107. Reference numeral 106 denotes a light receiving element (PSD) including a photoelectric conversion element whose output changes depending on the position of the received light, and a photoelectric conversion element holder 108.
To the base 101. The light emitting element 105 and the light receiving element 106 constitute optical angular displacement detection means of transmitting light through a mirror 109 mounted on the surface of the center block of the floating body 103. The light-emitting element holder 107 is provided with a light-guiding section 107a for guiding light from the light-emitting element 105.
At the end of 7a, a mask 110 covering the mirror 109 of the floating body 103 is provided.
A mask 110 having the same slit 110a is attached. Since this light transmission is performed through the outer cylinder 102, the entire outer cylinder 102 or a portion to which light is applied is provided as a transparent body.

119 and 120 are a pair of yokes, which are provided in a pair so as to exert a magnetic field effect for fixing the floating body 103 having the above-mentioned magnetic characteristics at a fixed position (position shown in the figure). As described above, the outer cylinder 102 is provided so as to be spaced apart and opposed in the diameter direction. These are the yokes 119,12
A yoke 121 is provided between the other ends of the coils 0, and an electromagnetic coil 122 is externally fitted to the yoke 121 and assembled. With these configurations, a magnetic circuit composed of the yokes 119, 120, 121 and the floating body 103 is configured, and a magnetic force is applied to the floating body 103 by the magnetic force generated by the electromagnetic coil 122.

The above-mentioned rotatable holding of the floating body 103 is performed as follows. That is, the floating body 103 is the first in the central block.
A through-rotation shaft 111 is provided at the top and bottom as shown in the cross-sectional view of FIG. 1, and a pivot 112 having a sharp tip is press-fitted at the upper and lower ends thereof. On the other hand, the floating body holder 1 described above
Pivot bearings 113 are provided at the tips of the U-shaped upper and lower arms inwardly facing each other, and the sharp ends of the pivots 112 are fitted into the pivot bearings 113 to hold the floating body.

Reference numeral 115 denotes an upper cover of the outer cylinder, which is sealed to the outer cylinder 102 by a known technique using a silicone adhesive or the like. 116
Is a rubber packing, which is sandwiched between the holding plate 117 and the upper lid 115 and fixed with screws or the like.

In the above configuration, the floating body 103 does not generate a rotational moment under the influence of gravity in any posture, and does not substantially apply a load to the pivot shaft.
As described above, the rotation balance around the shaft 103a and the buoyancy balance in the liquid are obtained.

In such a configuration, even if the outer cylinder 102 rotates around the rotation axis 103a, the liquid inside does not move due to inertia, so the floating body 103 in a floating state does not rotate, and therefore, the outer cylinder 102 and the floating body 103
Rotates relatively around the rotation axis 103a. This is the principle of the present apparatus for detecting the relative angular displacement, and these relative angular displacements can be detected by the optical detecting means using the light emitting element 105 and the light receiving element 106.

Actually, a flow occurs inside the sealed liquid due to the effect of the wall surface of the outer cylinder 102, which exerts a force on the floating body 103 and acts as a viscous force. Can be made as small as possible by selecting in consideration of the viscosity and the like.

The detection of the angular displacement in the apparatus having the above configuration is performed as follows.

First, light emitted from the light emitting element 105 is applied to the floating body 103 through the light guide 107a, where it is reflected by the mirror 109 and reaches the light receiving element. And as mentioned above,
A mask is provided on the tip of the light guide 107a and the mirror 109 of the floating body 103.
Since the light 110 is provided, the light becomes substantially parallel light due to the slit 110a of the mask 110 during the light transmission, and an image without blur is formed on the light receiving element 106.

Since the outer cylinder 102, the light emitting element 105, and the light receiving element 106 are all fixed on the base 101 and move integrally, the relative angular displacement movement between the outer cylinder 102 and the floating body 103 is performed. Occurs, the slit image on the light receiving element 106 moves by an amount corresponding to the displacement. Accordingly, the output of the light receiving element 106, which is a photoelectric conversion element whose output changes depending on the position of the received light, is an output proportional to the positional displacement of the slit image, and the angular displacement of the outer cylinder 102 is detected using the output as information. Can be.

Considering the angular displacement detection device formed with the above configuration,
Since the floating body 103 is not receiving a force from the outside, the posture of the floating body 103 cannot be regulated.Therefore, there is no guarantee that the slit image is located within the measurement range of the light receiving element 106 as it is. However, for example, a weak magnetic field is applied to the floating body 103 by using the above-described electromagnetic coil 122, and a force is applied to the floating body 103 at the steady state position shown in FIG. Can be done.

The spring force exerted on the floating body 103 by this magnetic field action is:
In principle, it is a force that keeps the floating body 103 in a fixed posture with respect to the outer cylinder 102 (that is, moves it integrally), so if the spring force is strong, the outer cylinder 102 and the floating pair 103 are integrated. Movement causes a problem that a relative angular displacement does not occur for a target angular displacement. However, if the magnetic field action is sufficiently small with respect to the inertia of the liquid 104, it can respond to a relatively low frequency angular displacement. It can be configured as follows.

However, in the configuration of the above conventional example, the float 10
Numeral 3 receives a force to move in a direction to reduce the magnetic resistance of the magnetic field generated by the coil 122. That is, the floating body 103
In the closed magnetic circuit composed of the yoke 119, the yoke 121, the yoke 120, and the floating body 103, the floating body 103 tends to move to reduce its magnetic resistance. Specifically, the state in which the tip 119a of the yoke 119, the longitudinal direction of the floating body 103, and the tip 120a of the yoke 120 are aligned on a straight line as shown in FIG. When it occurs, a force that tries to restore it acts.

Although some modifications are proposed in the above-mentioned published patent publication, there is basically no difference from the above configuration, and the magnetic acting force is fixed by the arrangement of the yoke forming the closed magnetic circuit. It only acted as a spring force in the direction.

By the way, the liquid 104 sealed in the outer cylinder 102 has light transmittance,
Low viscosity and high specific gravity are required. Light transmittance is indispensable for performing position detection using a light emitting / receiving element. In addition, the viscosity of the liquid 104 acts on the outer cylinder
When the liquid 104 has a low viscosity, the force is small, which leads to an improvement in accuracy. Also, maintaining the same accuracy,
It is also possible to reduce the gap between the wall surface and the floating body 103 so as to reduce the size. Similarly, for a high specific gravity, since the detection device uses inertia, it goes without saying that the accuracy is improved as the inertia increases, and a high specific gravity contributes to compactness.

Thus, the restrictions imposed on the liquid 104 are severe, and the performance and size of the device are greatly affected by the liquid 104. As a relatively good liquid that is within the above restrictions, for example, a fluorine-based inert liquid can be mentioned, and its specific gravity is about “1.8”. If the material of the floating body 103 is made of, for example, a plastic material PBT (polybutylene terephthalate) containing iron powder so as to match this specific gravity, the iron content is about 30% by weight and about 7% by volume. belongs to. Therefore, the floating body 103 is 7
% Of iron powder, the permeability is extremely low. That is, the floating body 103-yoke 119-yoke 121-
The magnetic resistance of the closed magnetic path formed by the yoke 120 and the floating body 103 is extremely high, and the magnetic field generated by the electromagnetic coil 122 exerts a very weak force on the floating body 103, resulting in a low efficiency, resulting in a large power consumption. there were.

In addition, the floating body and the yoke in the stationary state do not actually align with each other due to the influence of the vertical force due to the mechanical unbalance of the floating body 103, and when the unbalance increases, the light from the light emitting element 105 receives light from the light emitting element 105. It deviates from 106. Therefore, in this case, the position of the yokes 109 and 120 must be mechanically moved, or the position of the light receiving element 106 must be mechanically moved.
There is also a problem that the adjustment mechanism for that purpose becomes complicated.

(Object of the Invention) An object of the present invention is to solve the above-mentioned problems, to freely change the characteristics of the device with small power consumption, and to electrically adjust the moving state of the movable part. It is an object of the present invention to provide a moving state detecting device capable of performing the following.

(Features of the Invention) In order to achieve the above object, the present invention provides a movable part, a holder for holding the movable part movably in a closed state, and a relative movement state between the movable part and the holder. Detecting means for detecting a magnetic field, a closed magnetic path forming means for forming a closed magnetic path including the movable portion, and a magnetic field disposed outside the holding body in the closed magnetic path so as to receive an electromagnetic force from the closed magnetic path when energized. And a conductor for moving the movable portion relative to the holder by the action of the electromagnetic force.

(Embodiment of the Invention) Figs. 1 to 6 show a first embodiment of the present invention, which will be described below with reference to these drawings.

In FIGS. 1 to 3, reference numeral 1 denotes an additional plate for mounting each component constituting the apparatus, and 2 denotes an outer cylinder having a chamber in which a floating body 3 and a liquid 4 described later are sealed. Reference numeral 3 denotes a floating body rotatably held around a shaft 3b by a floating body holding body 5 which will be described later. The projection 3a has a slit-like reflecting surface formed of a material made of a permanent magnet. It is magnetized in the direction.
Further, the floating body 3 is configured such that the balance of rotation about the axis 3b and the balance of buoyancy are obtained.

Reference numeral 5 denotes a floating body holder that is fixed to the outer cylinder 2 while holding the floating body 3 via a pivot bearing 13 described later. Reference numeral 6 denotes a U-shaped yoke attached to the other plate 1, which forms a closed magnetic path together with the floating body 3. Reference numeral 7 denotes a winding coil, and a floating body 3
And the yoke 6, and is provided in a fixed relationship with the outer cylinder 2. 8 is a light emitting element (iRE
D), which is attached to the other plate 1. Reference numeral 9 denotes a light receiving element (PSD) whose output changes depending on the position of the received light, and is attached to the other plate 1. The light emitting element 8 and the light receiving element 9 constitute optical angular displacement detecting means of transmitting light through the projection (reflection surface) 3a of the floating body 3.

Reference numeral 10 denotes a mask disposed on the front surface of the light emitting element 8 and has a slit 10a for transmitting light. Reference numeral 11 denotes a stopper member attached to the outer cylinder 2, which regulates rotation so that the floating body 3 does not rotate beyond a predetermined range.

Incidentally, the above-mentioned rotatable holding of the floating body 3 is performed as follows. That is, a pivot 12 having a sharp tip at the top and bottom is press-fitted into the center of the floating body 3 as shown by the AA section in FIG. On the other hand, pivot bearings 13 are provided at the ends of the U-shaped upper and lower arms of the floating body holder 5 so as to face inward each other, and the sharp ends of the pivots 12 are fitted into the pivot bearings 13. The floating body is held.

Reference numeral 14 denotes an upper cover of the outer cylinder 2, which is sealed and sealed so as to enclose the liquid 4 in the outer cylinder 2 by a known technique using a silicone adhesive or the like.

In the above configuration, the floating body 3 has a symmetrical shape around the rotation axis 3b so that no rotation moment is generated by the influence of gravity in any posture, and substantially no load acts on the pivot axis. In addition, it is made of a material having the same specific gravity as the liquid 4. To achieve this, it is impossible to achieve zero unbalance component, but the shape error does not act as an unbalance that is only the specific gravity difference, so it is practically sufficiently small, and the SN ratio of friction against inertia is extremely good. Is easy to understand.

In such a configuration, even if the outer cylinder 2 rotates around the rotation axis 3b, the internal liquid 4 remains stationary with respect to the absolute space due to inertia, so that the floating body 3 in a floating state does not rotate, and accordingly, the outer cylinder 2 and the floating body 3 3 rotates relatively around the rotation axis 3b. These relative angular displacements can be detected by optical detecting means using the light emitting element 8 and the light receiving element 9.

The detection of the angular displacement in the apparatus having the above configuration is performed as follows.

First, the light emitted from the light receiving element 8 passes through the slit hole 10a of the mask 10 and irradiates the floating body 3, where it is reflected by the slit-shaped reflecting surface of the projection 3a and reaches the light receiving element 9.
When transmitting the light, the light becomes substantially parallel light by the slit hole 10a and the slit-shaped reflection surface, and an image without blur is formed on the light receiving element 9.

The outer cylinder 2, the light emitting element 8, and the light receiving element 9 are all other plate 1
, And moves integrally, so that when a relative angular displacement movement occurs between the outer cylinder 2 and the floating body 3, the slit image on the light receiving element 9 moves by an amount corresponding to the displacement. Will do. Therefore, the output of the light receiving element 9, which is a photoelectric conversion element whose output changes according to the position of the received light,
The output is proportional to the positional displacement of the slit image, and the angular displacement of the outer cylinder 2 can be detected using the output as information.

By the way, as described above, the floating body 3 is made of a permanent magnet material having the same specific gravity as the liquid 4, which is formed, for example, as follows.

When the above-mentioned fluorine-based inert liquid is used as the liquid, if the content is adjusted by adding a fine powder of a permanent magnet material (for example, ferrite) as a filler based on a plastic material, the volume content is about 8%. It is easy to set the specific gravity of the liquid to about the same as the specific gravity of “1.8”. If the floating body 3 is magnetized in the direction of the shaft 3b after or at the same time as the floating body 3 is formed from such a material, the floating body 3 has properties as a permanent magnet.

FIG. 4 is a sectional view taken along the line BB of FIG. 3, showing the relationship among the floating body 3, the yoke 6, and the coil 7.

As shown in the figure, the floating body 3 is magnetized in the direction of the axis 3b. In this figure, the upper side is magnetized to the N pole and the lower side is magnetized to the S pole. The magnetic field lines coming out of the N pole pass through a U-shaped yoke 6 and enter the S pole to form a closed magnetic circuit, and a winding coil 7 arranged in this magnetic path is formed from the back of the paper as shown in the figure. If a current is passed to the front side, the coil 7
Receives a force in the direction of arrow f. However, the winding coil 7
Cannot move because it is fixed to the outer cylinder 2 as described above, so that a force acts in the direction of arrow F, which is the reaction, and the float 3 is driven by the force. This force is proportional to the current flowing through the winding coil 7, and it goes without saying that the direction of the force also acts in the opposite direction if the current flows in the opposite direction. That is, in the configuration of the present embodiment,
The floating body 3 can be driven freely.

Also, considering the closed magnetic circuit formed by the floating body 3 and the yoke,
Conventionally, the floating body itself having a very low magnetic permeability forms a permanent magnet, and the magnetic resistance of the closed magnetic path is very large. Therefore, conventionally, an excessive current had to be applied to the electromagnetic coil in order to form a magnetic field by overcoming the reluctance, but in the present embodiment, the winding coil disposed in the magnetic field created by the permanent magnet was used. 7 generates an electromagnetic driving force to drive the floating body 3, so that the electric-magnetic conversion efficiency is remarkably improved and energy is saved.

Next, FIG. 5 shows an overall circuit configuration for controlling the embodiment.

FIG. 5A shows a position detecting circuit for detecting the position of the floating body 3 with respect to the outer cylinder 2, and detects the reflected light of the infrared light emitted from the light emitting element 8 on the floating body 3 for position detection. Light receiving element 9
This is the basic configuration to detect.

As is known, the photocurrents Ia and Ib generated by the light receiving element 9 are divided according to the position of the center of gravity of the infrared light incident on the light receiving element 9, and the current-voltage is composed of an operational amplifier 30, a resistor 31, and a capacitor 32, respectively. The conversion circuit and the current-voltage conversion circuit composed of the operational amplifier 33, the resistor 34 and the capacitor 35
Converted to b. These voltages Va and Vb are inputted to a differential amplifier comprising an operational amplifier 36 and resistors 37, 38, 39 and 40 arranged at the next stage, where a difference signal (Va−Vb) is obtained. The sum signal (Va + Vb) is obtained also from the summing amplifier constituted by 41 and the resistors 42, 43 and 44. Since the sum signal (Va + Vb) is connected to the inverting input terminal of the operational amplifier 45 via the resistor 46, the constant current type of the operational amplifier 45, the feedback resistor 47, the current detecting resistor 49, and the transistor 50 The iRED driver circuit outputs the sum signal (Va
+ Vb), the current supplied to the light emitting element 8 is varied, and as a result, the negative feedback is performed so that the sum signal (Va + Vb) becomes equal to the reference voltage KVC connected to the non-inverting input terminal of the operational amplifier 45. Is controlled.

The capacitor 48 is a phase compensating capacitor for preventing the feedback system from oscillating, and determines the entire band by a combination with the resistor 47.

As described above, if the photocurrent generated in the light receiving element 9 is always kept constant, the difference signal (Va−Vb) between the two outputs of the light receiving element 9 can be used to control the change in temperature and the like and the variation in the element. It is possible to always correctly detect the relative position between the outer cylinder 2 and the floating body 3 without being affected.

Next, the part of FIG. 5B is an arithmetic circuit for determining parameters as a sensor in the present embodiment.

The difference signal (Va−Vb) which is the output of the operational amplifier 36 is connected to the inverting input terminal of the operational amplifier 55 via the gain setting resistor 57, and the operational amplifier 55 is connected to the feedback resistor 56. The values of 57 and 56 set the parameters of the entire apparatus. The reference potential set by the variable resistor 59 is connected to the non-inverting input terminal of the operational amplifier 58, and the output of the buffer amplifier composed of the operational amplifier 58 is connected to the non-inverting input terminal of the operational amplifier 55 via the resistor 60. Connected. Therefore, the DC level of the operational amplifier 55 is varied by the value set by the variable resistor 59.

The part of FIG. 5C is a driver circuit part for actually driving the winding coil 7, and includes an operational amplifier 51, a transistor 52,
A push-pull type constant current circuit is formed by the resistor 53 and the current detecting resistor 54, and a current can flow in any of the X and Y directions indicated by arrows in FIG. The operational amplifier 55 applied to the input terminal
Is supplied to the coil 7.

According to the circuit configuration as described above, the current proportional to the difference signal between the outer cylinder 2 and the floating body 3, that is, the relative position signal Va-Vb) is supplied to the winding coil 7 to thereby make the floating body as described above. A force based on Fleming's left-hand rule is generated in a closed magnetic circuit composed of the coil 3 and the yoke 6, and this force is naturally
Therefore, a force proportional to the relative value between the outer cylinder 2 and the floating body 3 is generated.

Next, the characteristics of the angular displacement detecting device according to the present embodiment will be described using the transfer characteristics on frequency shown in FIG.

I (S) as an input indicates the displacement of the outer cylinder 2 with respect to the absolute space, and the output angular displacement O (S) detected by the apparatus of the present embodiment is the displacement R of the floating body 3 with respect to the absolute space. Since it is detected from the relative relationship between (S) and the input angular displacement I (S), it is expressed by the following equation.

O (S) = I (S) -R (S) (1) Further, the output angular displacement O (S) is a relative angular displacement between the outer cylinder 2 and the floating body 3 as described in the conventional example. The viscous force ηSO (S) proportional to the relative speed between the outer cylinder 2 and the floating body 3 is generated by the viscosity of the liquid 4 sealed in the outer cylinder 2. On the other hand, if the width of the yoke 6 is increased to infinity with respect to the moving direction of the floating body 3, the spring force due to the magnetic force should not be generated unless the winding coil 7 is energized. Since the width of the yoke 6 is finite, as described in the conventional example,
Although the force is weak, the spring force KO (S) also works. Further, in this embodiment, a new spring force can be applied by applying a current proportional to the relative displacement between the outer cylinder 2 and the floating body 3 to the winding coil 7 to generate a force by the method described above. Here, in the present embodiment, the spring force KCL due to coil energization
O (S) acts to increase the original spring force KO (S),
An arbitrary spring force can be generated by the value of the gain setting resistor 57.

Assuming that the above force acts on the floating body 3, the angular displacement R (S) of the floating body 3 with respect to the absolute space is expressed by using the moment of inertia J of the liquid 4 in the outer cylinder 2. It is represented by the following equation.

Using the above equations (1) and (2), the transfer characteristics in the present embodiment are expressed as follows. It becomes the formula of.

The above equation (3) shows the characteristics of the secondary high-pass filter, and it is clear that the frequency characteristics are determined by the spring force of the winding coil 7.

In addition, since the DC level of the operational amplifier 55 varies according to the value of the variable resistor 56, the DC-like current supplied to the winding coil 7 similarly changes, so that the reference position of the floating body 3 is electrically controlled by the coil current value. Can be controlled freely.

In this embodiment, a spring force is applied in which a force proportional to the relative displacement between the outer cylinder 2 and the floating body 3 is applied. However, various controls such as a viscous force proportional to the relative speed and an inertia force proportional to the relative acceleration are provided. Is possible.

FIG. 7 is a sectional view showing a second embodiment of the present invention.
Members having the same functions as in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

101 is a floating body made of a material having magnetic properties,
For example, it is made of a material containing iron powder having a high magnetic permeability based on a plastic material, and is held by the floating holder 5 so as to be rotatable around the shaft 3a in the same manner as in the first embodiment.
The projection 101a (corresponding to 3a) (not shown) has a slit-shaped reflection surface. 102 is a permanent magnet, 103 and 104 are yokes, and the permanent magnet 102-yoke 103-floating body 101-yoke 104-
The path of the permanent magnet 103 forms a closed magnetic path.

Even in such a closed magnetic circuit, a closed magnetic circuit similar to that shown in FIG. 4 showing the first embodiment can be constructed. Therefore, if a current is supplied to the winding coil 7 arranged in the magnetic path, framing is performed. The winding coil 7 receives a force according to the left-hand rule. Thus, the floating body 101 is driven by receiving a reaction force as in the first embodiment.

As is clear from the above description, the same effect as in the first embodiment can be obtained in the configuration of the second embodiment.

Further, the electrification circuit for controlling the operation is the same as that shown in the first embodiment, and the description is omitted here.

FIG. 8 is a sectional view showing a third embodiment of the present invention,
Members having the same functions as in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

201 is a floating body made of a material having magnetic properties,
For example, it is made of a material containing iron powder having a high magnetic permeability based on a plastic material, and is held by the floating body holder 5 so as to be rotatable around the shaft 3a as in the first embodiment.
An unillustrated projection 201a (corresponding to 3a) is formed with a slit-shaped anti-slope. Reference numeral 202 denotes a coil bobbin in which a bobbin is wound, and an iron core 203 penetrates the center of the bobbin, thereby forming a known electromagnet device 206. Reference numerals 204 and 205 denote yokes, each of which includes an electromagnet device 206, a yoke 204, a floating body 201, and a yoke 2.
05—The path of the electromagnet device 206 constitutes a closed magnetic circuit.

In such a configuration, if a current is applied to the coil bobbin 202, the iron core 203 is magnetized.
A closed magnetic path similar to that shown in the figure is formed. Therefore, when an electric current is applied to the winding coil 7 arranged in the magnetic path, a force is applied in accordance with Fleming's left hand rule.
Is driven by receiving a reaction force as in the first embodiment.

FIG. 9 is a diagram showing a circuit configuration in the third embodiment.
This is equivalent to the circuit shown in FIG.
2) A constant current driver circuit composed of an operational amplifier 61, a transistor 62, and a resistor 63 for energizing the operational amplifier 61 is added. The reference voltage KVC connected to the non-inverting input terminal of the operational amplifier 61 is The current divided by the resistance value is supplied to the electromagnet device 206 (coil bobbin 202), and the above-described force is generated.

According to the present embodiment, since the floating body 3 can be driven to an arbitrary position, it is possible to freely create a spring term, a viscosity term, an inertia term, and the like. In addition to being able to freely change the characteristics,
It has also become possible to expand the selection range of liquids.

Also, the deviation from the reference position caused by the unbalance of the floating body 3 can be easily adjusted without using a complicated adjustment mechanism by changing the value of the DC current supplied to the winding coil 7. It becomes possible.

In addition, the present invention has the effect that the electromagnetic efficiency is greatly improved and the power consumption is very small.

(Correspondence between the invention and the embodiment) In the above embodiments, the floating pairs 3, 101, 201 are the movable parts of the present invention, the outer cylinder 2 and the floating body holder 5 are the holders, the projections 3a,
The light emitting element 8, the light receiving element 9 and the mask 10 correspond to the detecting means, the yoke 6, or the permanent magnets 102 and the yokes 103 and 104, or the iron core 203 and the yokes 204 and 205 correspond to the closed magnetic path forming means, and the winding coil 7 corresponds to the conductor. I do.

(Effects of the Invention) As described above, according to the present invention, it is possible to freely change the characteristics of the device with small power consumption and obtain a configuration in which the moving state of the movable unit can be electrically adjusted. In addition, since there is no need to perform wiring in a sealed structure, the above configuration can be obtained without causing complication.

[Brief description of the drawings]

FIG. 1 is a plan view showing a mechanical structure according to a first embodiment of the present invention, FIG. 2 is a sectional view taken along the line AA of FIG. 1, and FIG. 3 is a mechanical structure according to the first embodiment of the present invention. FIG. 4 is a sectional view taken along the line BB of FIG. 1, FIG. 5 is an electric circuit and mechanical configuration diagram showing a first embodiment of the present invention, and FIG. FIG. 7, FIG. 7 is a cross-sectional view of a main part of a second embodiment of the present invention, FIG. 8 is a cross-sectional view of a main part of a third embodiment of the present invention, and FIG. FIG. 10 is a plan view showing a mechanical configuration of a conventional device, FIG. 11 is a cross-sectional view taken along the line AA of FIG. 10, and FIG. 12 is a main configuration of FIG. FIG. 2 ... outer cylinder, 3 ... floating body, 4 ... liquid, 6 ... yoke,
7 ... winding coil, 8 ... light emitting element, 9 ... light receiving element,
A: position detection circuit, B: arithmetic circuit, 101: floating body, 1
02 ... permanent magnet, 103, 104 ... yoke, 201 ... floating body, 20
2 ... bobbin coil, 203 ... iron core, 204, 205 ... yoke, 206 ... electromagnet device.

Claims (1)

(57) [Claims] A movable portion; a holder for movably holding the movable portion in a closed state; detecting means for detecting a relative movement state between the movable portion and the holder; Closed-magnetic-path forming means for forming a closed magnetic path including: a movable magnetic section disposed outside the holding body in the closed magnetic path so as to receive an electromagnetic force from the closed magnetic path when energized; And a conductor for relatively moving the holding member with respect to the holding member.