JP2594812Y2 - Air dehumidification system - Google Patents

Description

[Detailed description of the invention]

[0001]

INVENTION The present invention relates to a relative space required low humidity environment, an air dehumidifying system for supplying dry air.

[0002]

Conventionally, for example, as in a semiconductor manufacturing plant, placed in the space which is required a low humidity environment in the manufacturing process
In addition , an air dehumidification system is provided . This air dehumidification system is required to always exhibit a predetermined capability in order to ensure product quality. For this reason , in this type of air dehumidification system, as shown in FIG.
Two with dehumidification capacity required respectively (first, second) dehumidifiers 10, 12 are arranged in parallel.

Normally, air supplied from a compressor 14 is cooled and dehumidified to a predetermined dew point temperature by a first dehumidifier 10 and introduced into a low-humidity environment space 16. In this case, the first dehumidifier 1
When 0 fails, the switching valves 18a to 18b are switched, and the second dehumidifier (standby unit) 12 is configured to operate.

[0004] In this case, switching of the dehumidifier is performed by :
It must be done as quickly and reliably as possible,
This type of system, provided with a controller 20 which includes a conventional failure detection device, the switching example operated by the controller 20
And it is configured to automatically line Migihitsuji.

[0005]

An invention is, however, in the conventional air dehumidification system having the configuration described above, had the disadvantage as described below.

Namely, in the conventional air dehumidification system, when switching example of dehumidifiers, pre <br/>備機a second dehumidifier, after the failure of the first dehumidifier has occurred, control Vessel 2
Through 0 is intended to start, and since in this case, the dehumidified air has to wet relatively cool dividing until extremely low dew point temperature, the changeover example during dehumidification function not only to stop at least once, a predetermined to dehumidifying <br/> fully reached until capacity has been to require usually several hours.

[0007] Therefore, in the semiconductor manufacturing plant or the like as described above, can not be sufficiently stably ensure product quality. Further, the automatic switching device including the controller 20 ;
As a result, the structure becomes relatively complicated , and the entire system is manufactured.
It had the disadvantage of increasing costs .

Accordingly, an object of the present invention is to provide an air dehumidification system that can be simply configured without temporarily stopping or lowering the air dehumidification capacity.

[0009]

Means for Solving the Problems] To achieve the above object, an air dehumidification system according to the present invention includes a compressor and two dehumidifier having alone respectively required dehumidification capacity
It is connected in series on the main pipeline connecting the low humidity environment space, and each dehumidifier in this main pipeline is
Providing a bypass pipe line, and each dehumidifier in the main pipe line;
Before and after, there are always open shut-off valves,
A switching valve which is always closed in each of the bypass piping paths
If one of the dehumidifiers fails, one dehumidifier
Closing shutoff valves before and after the machine and corresponding bypass piping
The switching valve of the road is configured to be opened .

[0010]

[Action]According to the air dehumidification system according to the present invention,series
2 connected toTableThe dehumidifier is,AlwaysmotionStatusToRetained
handYes, eitherOne dehumidifier failedSmell if
This failureDehumidificationBurden by machineshouldCapacity is,another
WorkingEasy to follow up with dehumidifierCan
To.Therefore,By these dehumidifiersAir dehumidification functionIsStop
To doNot againIt does not drop.

[0011]

Next, the implementation of the air dehumidification system according to the present invention.
Examples will be described in detail below with reference to the accompanying drawings. For convenience of explanation, the same reference numerals are used for the same components as the conventional configuration shown in FIG. 2, a detailed description thereof will be omitted.

Referring to FIG. 1, the present inventionPertain toAir dehumidification system
The system has the required dehumidifying capacity by itself.Table
(First, Second) Dehumidifiers 10 and 12
LaThe dehumidifiers 10, 12Compressor 14 and low humidity environment
Connect to space 16ConclusionOn the main pipeline 22,Connect in series
Continued. AndSaidIn the main pipeway 22In the above 2
Dehumidifiers 10 and 12Against,EachBypass piping
Road 24, 24Is provided,SaidOf the main pipeline 22The two above
Before and after the dehumidifiers 10 and 12Shut-off valve 2
6a, 26b and 26c,26d is providedTogether with,Previous
RecordBypass piping 24, 24ToRespectivelySwitching valve 28
a and 28b are provided. In addition, each of the aboveShut-off valve 26a-
26d is always open, and each switching valve 28a, 28b is always open.
Time is set to close, eachAutomated operation
Can beTheseOpening and closing operations,See below
like,MalfunctiondidOperated only when the dehumidifier is restored
Manual operationAsEven if it is composed,what
Equal troubleIsAbsent.

[0013] Air dehumidifying system of the present embodiment having such a configuration, during driving operation, the dehumidifier 10,1
2 correspond to the respective shut-off valves 26a , 26b and 2
6c and 26d are opened, and each of the switching valves 28a and 28b is closed, so that both the dehumidifiers 10 and 12 maintain the operating state.
You . Therefore, the air supplied from the compressor 14 is
Through the main pipe line 22, I'm <br/> the cooperating functions of both the dehumidifier 10 and 12 to a predetermined dew point temperature is cooled and dehumidified and introduced into the low-humidity environment space 16.

In such a state, one dehumidifier,
For example, if the first dehumidifier 10 fails, the dehumidification capacity of the system tends to decrease by the reduced capacity of the dehumidifier 10. At this time, the shut-off valve 26 for the first dehumidifier 10 is used.
a, 26b are closed and the switching valve 28a is opened to
By bypassing the flow path of the humidifier 10, the second dehumidifier 12
Hold the operating state . As described above, since the second dehumidifier 12 is maintained in the operating state, the degraded capacity can be easily complemented by the dehumidifier 12.
In addition, in this case, the dehumidifier 12 alone is required as a whole.
The dehumidifier 10 which has failed.
Even completely stopped functioning, the system can reliably exhibit the predetermined dehumidification capacity.

It should be noted that the first dehumidifier 10 has a
That during repair, shut-off valve 26a, close the 26b, opening the switching valve 28a, by bypassing causing the flow path of the failed dehumidifier 10 can be easily performed. When the second dehumidifier 12 has failed, as in the
Then, the corresponding shutoff valves 26c and 26d are closed, and the switching valve
It can be restored by opening 28b .

[0016] In this way, air dehumidification cis definitive to the present invention
According to Temu, even if one of the dehumidifier fails, because other one dehumidifier continues to operate, it is possible to completely prevent the stopping or reduction of the dehumidification function. In addition, the system of the present invention does not require an automatic switching device in this type of conventional device, so that the configuration is simplified and the manufacturing is simplified.
There is an advantage that the cost can be reduced.

Although the preferred embodiment of the present invention has been described above , the present invention is not limited to the above-described embodiment , and the present invention is not limited thereto.
There are many possible design changes within a range not departing from the spirit of the invention.

[0018]

[Devised effect of As is clear from the above-described embodiments, according to the air dehumidification system according to the present invention, a solely two dehumidifier compressors and low humidity environment space having a dehumidification capacity required respectively connected in series to the main pipe path for connecting, the respectively provided a bypass pipe passage for each dehumidifier in the main distribution line, provided with a shut-off valve opened at all times, respectively before and after each dehumidifier before Symbol main distribution line Along with
A switching valve that is always closed is provided in each of the bypass piping paths, and when one of the dehumidifiers fails, the shut-off valves before and after the one dehumidifier are closed and the switching valve of the corresponding bypass piping path is opened. It can be set and, even if one dehumidifier fails, this can easily be complemented by another operating dehumidifier without stopping or reducing the dehumidification capacity. That is, a predetermined dehumidifying ability can always be ensured. Therefore, for example, it is possible to cope with demands of strict working conditions in a semiconductor manufacturing factory or the like, and it is possible to manufacture a product of excellent quality.

Further, the system of the present invention is a conventional
Omitted automatic switching device that is required Oite the type of device
Therefore , there is an advantage that the configuration can be simplified and the manufacturing cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a system diagram showing one embodiment of an air dehumidification system according to the present invention.

FIG. 2 is a system diagram showing a conventional air dehumidification system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 1st dehumidifier 12 2nd dehumidifier 14 Compressor 16 Low humidity environment space 22 Main pipeline 24 Bypass pipeline 26a-26d Shutoff valve 28a, 28b Switching valve

Claims (1)

(57) [Scope of request for utility model registration] 1. A and solely the two dehumidifier compressor and low humidity environment space having a dehumidification capacity required respectively
Connect in series on the main pipeline to be connected , and
A bypass piping path for each dehumidifier
Always open before and after each dehumidifier in the main pipeline
A cutoff valve is provided and the bypass piping is
Switch valves that are always closed are provided, and one of them is removed.
When the humidifier fails, close the shut-off valves before and after one of the dehumidifiers
An air dehumidification system, wherein a switching valve of a corresponding bypass piping path is opened .