JP2583598B2 - Hot isostatic press - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a hot isostatic pressing device.

(Prior art) In a hot isostatic pressing apparatus (hereinafter referred to as a HIP apparatus), processing is usually performed in an inert gas atmosphere such as argon or nitrogen. A gas obtained by mixing oxygen with argon may be used as a processing gas.

In this case, since oxidation resistance is required in a high-temperature atmosphere, a platinum alloy heating device or the like is used as a heating device mounted in the pressure vessel. The processing gas usually has a ratio of oxygen to an inert gas such as argon or nitrogen of 20% or less.

On the other hand, a safety valve or a rupture disk is used as a safety device in a normal inert gas atmosphere HIP device.

(Problems to be solved by the invention) In a HIP device, pressure management is very important,
If the pressure exceeds the design pressure, the pressure vessel and piping may be damaged.

That is, in the HIP device, a safety valve or a rupture disk is provided to release the pressure so that the pressure in the pressure vessel does not exceed the design pressure.

However, if the oxygen concentration in the processing gas is high and exceeds the design pressure, a large amount of gas is released at once when the rupture disk ruptures and releases the pressure, so there is a risk that the piping may ignite for some reason. is there. In particular, when the temperature of the piping increases during gas release, the risk is considered to increase.

In view of such a conventional problem, the present invention suppresses the release of a large amount of high-temperature gas at a time when a safety device such as a rupture disk ruptures, and suppresses supply of a processing gas to a pressure vessel. Stop and turn off the heating device,
The purpose is to prevent damage, ignition and fire spread of HIP equipment, especially piping.

(Means for Solving the Problems) According to the present invention, as a first means for achieving this, the compressor 20 and the compressor 20 of the processing gas system piping 14 for supplying the processing gas from the cylinder 15 to the pressure vessel 1 via the compressor 20 are used. Between container 1
A hot line or the like connecting a relief system pipe 21a for releasing pressure to the atmosphere and a safety system pipe 21b having a safety device 24 for bursting and releasing pressure when the pressure in the pressure vessel 1 exceeds a design pressure. In the direction pressurizing device, between the cylinder 15 and the compressor 20 of the processing gas system piping 14, the relief system piping 21a,
On the safety system piping 21b, a flow switch 23 for detecting the ejection of the processing gas when the safety device 24 ruptures is provided by opening / closing valves 19d, 19b, 19c in each of the safety system piping 21b. When the ejection of the processing gas is detected, the on-off valves 19d, 1 of the processing gas system piping 14 and the safety system piping 21b are detected.
9c is closed, the on-off valve 19b of the relief system pipe 21a is opened, the compressor 20 is stopped, and the power supply 13 of the heating device 4 in the pressure vessel 1 is turned off.
An interlock means 28 for cutting off the power is provided.

Further, the present invention provides, as a second means, a pressure between the compressor 20 and the pressure vessel 1 of the processing gas system piping 14 for supplying a processing gas from the cylinder 15 to the pressure vessel 1 via the compressor 20. System piping 21a for escaping to
In a hot isostatic pressurizing device connected to a safety system piping 21b having a safety device 24 that ruptures and releases pressure when the internal pressure exceeds the design pressure, the cylinder 15 of the processing gas system piping 14 Opening / closing valves 19d, 19b, and 19c are interposed between the relief system piping 21a and the safety system piping 21b between the compressors 20, respectively, and the processing gas system piping is provided near the lid having the gas inlet of the pressure vessel 1.
Thermocouple 30a for measuring pipe temperature of 14 and on-off valve 19b
A thermocouple 30b for measuring the piping temperature of the relief system piping 21a in the vicinity of the safety system 24 and a thermocouple 30c for measuring the piping temperature of the safety system piping 21b in the vicinity of the safety device 24 are provided. , 30b, 30c, when any of the temperature signals exceeds the set value, close the on-off valves 19d, 19c of the processing gas system pipe 14 and the safety system pipe 21b, open the on-off valve 19b of the relief system pipe 21a, Interlock means for stopping the compressor 20 and turning off the power supply 13 of the heating device 4 in the pressure vessel 1
38 are provided.

Further, the present invention provides, as a third means, a pressure between the compressor 20 and the pressure vessel 1 of the processing gas system piping 14 for supplying a processing gas from the cylinder 15 to the pressure vessel 1 via the compressor 20. System piping 21a for escaping to
In a hot isostatic pressurizing device connected to a safety system piping 21b having a safety device 24 that ruptures and releases pressure when the internal pressure exceeds the design pressure, the cylinder 15 of the processing gas system piping 14 Opening / closing valves 19d, 19b, and 19c are interposed between the relief system piping 21a and the safety system piping 21b between the compressors 20, and the flow switch 23 that detects the emission of the processing gas when the safety device 24 ruptures safely is provided. A thermocouple 30a provided in the system pipe 21b for measuring the pipe temperature of the processing gas system pipe 14 near the lid having the gas inlet of the pressure vessel 1, and a pipe temperature of the relief system pipe 21a near the on-off valve 19b. Thermocouple 30b for measuring
And a thermocouple 30c for measuring the piping temperature of the safety system piping 21b in the vicinity of the safety device 24, and the flow switch 23 detects gas ejection, and each of the thermocouples 30a, 30
When any one of the temperature signals b and 30c exceeds a set value, the open / close valve 19 of the processing gas system pipe 14 and the safety system pipe 21b is used.
Close d, 19c, open on-off valve 19b of relief system piping 21a,
An interlock means 38 for stopping the compressor 20 and turning off the power supply 13 of the heating device 4 in the pressure vessel 1 is provided.

(Operation) In FIG. 1, when the processing gas is filled into the pressure vessel 1, the processing gas is supplied from the cylinder 15 to the pressure vessel 1 by the compressor 20 via the pipe 14.

The pressure inside the pressure vessel 1 rises above the set value and the safety device
In the case of rupture, the flow switch 23 detects the flow of gas released from the pressure vessel 1 through the pipe 21b and the safety device 24, and the interlock means 28 outputs the interlock signal A. A opens and closes the on-off valves 19c and 19d, opens the on-off valve 19b, opens the on-off switch 11, stops the compressor 20, and turns off the power supply 13 of the heating device 4.
Runs out.

In FIG. 2, when the pressure in the pressure vessel 1 rises above a set value and the safety device 24 ruptures, the flow switch 23
Detects the flow of gas released from the pressure vessel 1 via the pipe 21b and the safety device 24, and outputs a detection signal. If any one of the temperatures measured by the thermocouples 30a, 30b, and 30c is higher than the set temperature of the setter 32, the calculator 33 compares the respective values and the OR circuit 34 opens to output a signal. I do. The AND circuit 36 is opened by this signal and the detection signal to output the interlock signal A, so that the on-off valves 19c and 19d are closed and the on-off valve 19b is closed.
Is opened, the open / close switch 11 is opened, the compressor 20 is stopped, and the power supply 13 of the heating device 4 is turned off.

Here, the piping temperature of the relief system piping 21a is set to the thermocouple 30b.
The processing chamber in the pressure vessel 1 is in a high-temperature and high-pressure atmosphere, for example, at 1500 ° C. and 2000 atm. Since the processing chamber and the pipes 14, 21a, and 21b are connected, the temperature of the pipe 21a is reduced. Since the temperature may rise and the pipe 21a or the pipe sealing material may be melted due to the temperature rise, it is dangerous if the pipe temperature is measured and the temperature exceeds the specified temperature. Is to prevent it.

That is, when the rupture disk 24 ruptures, the high-temperature and high-pressure gas in the processing chamber in the pressure vessel 1 is blown out, and when the gas is released to the atmosphere, the temperature of the pipe 21a is measured by the thermocouple 30b, and the temperature exceeds a predetermined temperature. In this case, an increase in the gas temperature is prevented by interlocking the heater power supply stop.

In addition, the detection of gas ejection, and any thermocouple 30a,
The interlock is activated when the temperature signals of 30b and 30c exceed the set value. The reason is that if the temperature of the processing chamber in the pressure vessel 1 is low to some extent, even if the rupture disk 24 ruptures and high-pressure gas is ejected, This is because the pipe temperature does not increase as much as the pipe is melted, and in such a state, it is not particularly necessary to interlock.

(Examples) Hereinafter, the present invention will be described in detail with reference to the illustrated examples. First
The figure shows a first embodiment of the present invention, wherein 1 is a pressure vessel, which has an upper lid 2 and a lower lid 3, and the pressurizing axial force of various members is received by a press frame (not shown). 4 is a heating device,
A heater 6, a heat insulating layer 7, and the like are provided on a support 5, and an object 8 to be processed is placed on the support 5. Heater 6
Is connected to a power supply 13 via a transformer 9, a thyristor circuit 10, an on / off switch 11, a breaker 12, and the like.

Reference numeral 14 denotes a processing gas system pipe for supplying and filling the processing gas in the cylinder 15 into the pressure vessel 1 via the on-off valves 16 and 19d, the check valves 17 and 18, the on-off valve 19a, and the like. Reference numeral 20 denotes a compressor for compressing the processing gas, which is interposed in the processing gas system piping 14.

21a is a relief system piping for releasing pressure to the atmosphere, 21b
Are safety system pipes for ejecting the processing gas to the atmosphere when the pressure in the pressure vessel 1 exceeds the design pressure. These pipes 21a and 21b are connected between the compressor 20 and the pressure vessel 1 by the processing gas system. These pipes 14 and 2 are connected to
Since 1a and 21b have the same pressure as the processing chamber in the pressure vessel 1 and the temperature of these pipes 14, 21a and 21b may rise, it is meaningful to measure these temperatures. 22 is a throttle valve, piping 21a
Is connected to the processing gas system piping 14, and an on-off valve 19b is connected to the other end thereof. The on-off valve 19b is opened and closed to maintain the pressure.

Reference numeral 23 denotes a flow switch interposed in the pipe 21b, and a rupture disk 24
However, on / off valves 19c are mounted on the upper side of the flow switch 23, respectively. The rupture disk 24 is a kind of safety device that bursts when the pressure in the pipe 21b exceeds a predetermined pressure and releases the pressure. Flow switch 23 is rupture disk 24
When the flow switch 23 detects the flow of the processing gas and outputs a detection signal, when the flow switch 23 detects the flow of the processing gas and the detection signal is output, the signal is amplified by the amplifier 25 and becomes the interlock signal A. Become. Then, the electromagnetic valve 29b is excited by the interlock signal A to open and close the on-off valve 19b.
, The solenoid valves 29c, 29d are excited to close the on-off valves 19c, 19d, the power supply 13 of the heating device 4 is turned off by the on-off switch 11, and the compressor 20 is stopped.
The flow switch 23 and the amplifier 25 constitute an interlock means 28.

In the above configuration, when the pressure in the pressure vessel 1 becomes equal to or higher than the design pressure and the rough disk 24 ruptures,
The process gas passes through 21b, and the flow is detected by the flow switch 23 to output a detection signal. The detection signal is amplified by the amplifier 25 to become an interlock signal A. The interlock signal A excites the solenoid valve 29b to open the on-off valve 19b, and excites the solenoid valves 29c and 29d to excite the on-off valve 19.
When c and 19d are closed, the open / close switch 11 is turned off and the compressor 2
0 stops. Therefore, the injection of high-temperature and large-volume gas from the pipe 21b stops, and the pressure exceeding the allowable pressure is supplied from the pipe 21a to the throttle valve 2.
Slowly escaped through 2. Further, since the supply of gas to the pressure vessel 1 is cut off and the power supply to the heater 6 is cut off, damage to the HIP device piping due to the outflow of the high-temperature large-volume oxygen-containing gas can be prevented.

FIG. 2 shows a second embodiment of the present invention. In addition to the first embodiment, a thermocouple 30a for temperature measurement is attached to a pipe 14 near a lid having a gas inlet, and a pipe near an on-off valve 19b. twenty one
A thermocouple 30b for temperature measurement is attached to a, and a thermocouple 30c for temperature measurement is attached to a pipe 21b near the rupture disk 24. The thermocouples 30a, 30b, 30c are connected to thermoelectric converters 31a, 31b, 31c, respectively. Reference numeral 32 denotes a setting device for setting the allowable limit of each pipe temperature. Reference numeral 33 denotes an arithmetic unit which compares each pipe temperature with a set temperature, and outputs a detection signal when each pipe temperature exceeds the set temperature. 34 is an OR circuit
AND when there is any one detection signal from arithmetic unit 33
The signal is output to the circuit 36. The AND circuit 36 receives the detection signal and the detection signal from the flow switch 23, that is, when the rupture disk 24 ruptures and the processing gas is ejected, and when any of the pipe temperatures becomes higher than the set temperature, the AND circuit 36 is activated. A lock signal A is output. In this case, the flow switch 23, the amplifier 25, the setting device 32,
The arithmetic unit 33, the OR circuit 34, and the AND circuit 36 constitute an interlock means 37.

In the above configuration, when the interlock signal A is output, the solenoid valve 29b is excited to open the on-off valve 19b, and the electromagnetic valve 29b is opened.
29c and 29d are excited to close the on-off valves 19c and 19d, the on-off switch 11 is turned off, and the compressor 20 is stopped. Therefore, piping
The ejection of the high-temperature large-volume gas stops from 21b, and the pressure exceeding the allowable level is gradually released from the pipe 21a through the throttle valve 22. Also, each pipe temperature does not exceed the set temperature,
Further, since the supply of gas to the pressure vessel 1 is cut off and the power supply to the heater 6 is cut off, damage to the HIP device piping due to the outflow of a large amount of high-temperature oxygen-containing gas can be prevented beforehand, and a highly reliable safety It is a device.

In FIG. 2, the setting unit 32, the arithmetic unit 33, and the OR circuit
The interlock means 38 may be constituted by 36.

The safety device may be other than the rupture disk 24.

(Effects of the Invention) According to the present invention, between the cylinder 15 of the processing gas system piping 14 and the compressor 20, the relief system piping 21a and the safety system piping 21b
A flow switch 23 that interposes on-off valves 19d, 19b, and 19c to detect the ejection of the processing gas when the safety device 24 ruptures.
Is provided in the safety system piping 21b, and when the flow switch 23 detects ejection of the processing gas, the processing gas system piping 14
And an interlock for closing the on / off valves 19d and 19c of the safety system piping 21, opening the on / off valve 19b of the relief system piping 21a, stopping the compressor 20, and turning off the power supply 13 of the heating device 4 in the pressure vessel 1. Since the means 28 is provided, the HIP associated with the outflow of high-temperature large-volume oxygen-containing gas when the safety device 24 ruptures
Damage to the equipment piping can be prevented.

In the present invention, between the cylinder 15 and the compressor 20 of the processing gas system piping 14, the relief system piping 21a, and the safety system piping 21b
And a thermocouple 30a for measuring the temperature of the processing gas system piping 14 near the lid having the gas inlet of the pressure vessel 1, and a vicinity of the opening / closing valve 19b. Thermocouple 30b for measuring the piping temperature of the relief system piping 21a
And a thermocouple 30c for measuring the pipe temperature of the safety system pipe 21b near the safety device 24, respectively.
When any one of the temperature signals 0a, 30b, and 30c exceeds a set value, the on-off valves 19d and 19c of the processing gas system pipe 14 and the safety system pipe 21b are closed, and the on-off valve 19b of the relief system pipe 21a is opened. Since the interlock means 38 for stopping the compressor 20 and turning off the power supply 13 of the heating device 4 in the pressure vessel 1 is provided, damage to the HIP device piping can be prevented as before.

Further, according to the present invention, the cylinder 15 of the processing gas system piping 14
The opening and closing valves 19d, 19b, and 19c are interposed between the relief system piping 21a and the safety system piping 21b between the
A flow switch 23 for detecting the ejection of the processing gas when the gas ruptures is provided in the safety system piping 21b, and a thermocouple 30a for measuring the piping temperature of the processing gas system piping 14 near the lid having the gas inlet of the pressure vessel 1 is provided. A thermocouple 30b for measuring the piping temperature of the relief system piping 21a near the on-off valve 19b and a thermocouple 30c for measuring the piping temperature of the safety system piping 21b near the safety device 24 are provided. , The flow switch 23
Detects the ejection of gas, and when any of the temperature signals of the thermocouples 30a, 30b, 30c exceeds a set value, the open / close valves 19d, 19c of the processing gas system pipe 14 and the safety system pipe 21b are opened. Since the opening and closing valve 19b of the relief system piping 21a is closed, the compressor 20 is stopped, and the interlock means 38 for turning off the power supply 13 of the heating device 4 in the pressure vessel 1 is provided. The HIP device and its piping can be prevented from being damaged due to the outflow of the high-temperature, large-volume oxygen-containing gas in the event of a rupture, and the safety device is extremely reliable.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a first embodiment of the present invention, and FIG. 2 is a block diagram showing a second embodiment of the present invention. 1 ... pressure vessel, 4 ... heating device, 11 ... open / close switch, 13 ... power supply, 14 ... processing gas system piping, 19a, 19b, 19
c, 19d ... On-off valve, 20 ... Compressor, 21a ... Relief system piping, 21b ... Safety system piping, 23 ... Flow switch, 24
... Rupture discs (safety devices), 28, 37, 38 ... Interlock means, 30a, 30b, 30c ... Thermocouples, 31a, 31b, 3
1c …… Thermoelectric converter.

Claims (3)

(57) [Claims] A processing gas system piping (1) for supplying a processing gas from a cylinder (15) to a pressure vessel (1) via a compressor (20).
4) Between the compressor (20) and the pressure vessel (1), a relief system pipe (21a) for releasing pressure to the atmosphere, and the pressure in the pressure vessel (1) is higher than the design pressure. In a hot isostatic pressurizing device connected to a safety system piping (21b) having a safety device (24) that sometimes explodes and releases pressure,
Cylinder (15) and compressor (20) for processing gas system piping (14)
Between the relief system piping (21a) and the safety system piping (21a).
On / off valves (19d), (19b), and (19c) are interposed in each of b), and a flow switch (23) that detects the emission of processing gas when the safety device (24) ruptures is connected to the safety system piping (21b). Provided,
When the flow switch (23) detects the ejection of the processing gas, the on-off valves (19d) and (19c) of the processing gas system pipe (14) and the safety system pipe (21b) are closed, and the release system pipe (21a) is closed. Open the on-off valve (19b), stop the compressor (20), and turn on the power supply (1) for the heating device (4) in the pressure vessel (1).
3) A hot isostatic pressurizing device characterized by having interlock means (28) for cutting off. 2. A processing gas system pipe (1) for supplying a processing gas from a cylinder (15) to a pressure vessel (1) via a compressor (20).
4) Between the compressor (20) and the pressure vessel (1), a relief system pipe (21a) for releasing pressure to the atmosphere, and the pressure in the pressure vessel (1) is higher than the design pressure. In a hot isostatic pressurizing device connected to a safety system piping (21b) having a safety device (24) that sometimes explodes and releases pressure,
Cylinder (15) and compressor (20) for processing gas system piping (14)
Between the relief system piping (21a) and the safety system piping (21a).
On / off valves (19d), (19b) and (19c) are interposed in each of b) to measure the piping temperature of the processing gas piping (14) near the lid with the gas inlet of the pressure vessel (1). Thermocouple (30a)
A thermocouple (30b) for measuring the piping temperature of the relief system piping (21a) near the on-off valve (19b), and a safety device (2
In the vicinity of 4), thermocouples (30c) for measuring the piping temperature of the safety system piping (21b) are provided, and these thermocouples (30c) are provided.
a) When any of the temperature signals of (30b) and (30c) exceeds a set value, the on-off valves (19d) and (19c) of the processing gas system pipe (14) and the safety system pipe (21b) are closed, An interlock means for opening the on-off valve (19b) of the relief system pipe (21a), stopping the compressor (20), and turning off the power supply (13) of the heating device (4) in the pressure vessel (1). 38) A hot isostatic pressing device characterized by the provision of (38). 3. A processing gas system pipe (1) for supplying a processing gas from a cylinder (15) to a pressure vessel (1) via a compressor (20).
4) Between the compressor (20) and the pressure vessel (1), a relief system pipe (21a) for releasing pressure to the atmosphere, and the pressure in the pressure vessel (1) is higher than the design pressure. In a hot isostatic pressurizing device connected to a safety system piping (21b) having a safety device (24) that sometimes explodes and releases pressure,
Cylinder (15) and compressor (20) for processing gas system piping (14)
Between the relief system piping (21a) and the safety system piping (21a).
On / off valves (19d), (19b), and (19c) are interposed in each of b), and a flow switch (23) that detects the emission of processing gas when the safety device (24) ruptures is connected to the safety system piping (21b). Provided,
A thermocouple (30) for measuring the pipe temperature of the processing gas system pipe (14) near the lid with the gas inlet of the pressure vessel (1).
a) and relief system piping (21a) near the on-off valve (19b)
A thermocouple (30b) for measuring the pipe temperature of the safety system (24), and a thermocouple (30c) for measuring the pipe temperature of the safety system pipe (21b) near the safety device (24). (23) detects the gas ejection, and when any of the temperature signals of the thermocouples (30a) (30b) (30c) exceeds a set value, the processing gas system piping (14) and the safety Close the on-off valves (19d) and (19c) of the system piping (21b), open the on-off valve (19b) of the relief system piping (21a), and open the compressor (20).
A hot isostatic pressurizing device, characterized in that an interlock means (38) for stopping the heating and for turning off the power supply (13) of the heating device (4) in the pressure vessel (1) is provided.