JP2578120Y2 - Non-bursting primary pressure safety device for gas supply - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a non-bursting primary pressure safety device for a gas supply. Such a gas supply device is used, for example, by attaching it to a carbon dioxide gas cylinder for cleaning fine dust and the like on a semiconductor substrate.

[0002]

2. Description of the Related Art In a device using a high-pressure gas cartridge, a rupturable plate is usually incorporated as a safety device when a pressure higher than the pressure permitted by the device is generated on the high-pressure side of the primary gas pressure. A return type safety valve is provided.

[0003]

When the safety device operates, thrust is generated by the gas flow released. It is very dangerous if the equipment moves due to this thrust. In order not to cause this movement, as shown in FIG.
The gas outlet 83 of the safety device is connected outside the gas appliance.
And it is necessary to open in opposite directions on the same straight line to cancel the thrust. Inevitably the safety device gas outlet 83
Had to be protruded out of the device. In the case of a general rupturable plate 84, the number of components is several, and the accuracy of those components and the mounting force of the rupturable plate 84 have a considerable effect on the operating pressure tolerance. Therefore, these must be strictly controlled. become not, a pair of course thrust at the time of rupture
Consideration was also indispensable .

[0004]

According to the present invention, there is provided a non-bursting type primary pressure safety device for a gas supply device, which has a stepped enlarged portion connected to an outer end of a primary pressure gas release passage formed in a main body of a takeout mechanism. Is provided. It constituted by incorporating a non-bursting type safety plate device airtightly to the enlarged diameter portion. The non-breaching type safety plate apparatus comprises a <br/> safety plate determined the recess frustoconical Yu vital operating pressure itself alone, and the sealing material, a screw stopper with a shaft hole,
A safety plate is inserted into the enlarged diameter portion via a sealing material, and a screw plug is screwed into the enlarged diameter portion to keep the safety plate in a predetermined position.

[0005] Safety plate comprises a cylindrical portion on the inner surface, the sealing member is an O-ring, the O-ring, the outer peripheral surface of the cylindrical portion and the enlarged diameter portion
The gas is sealed by pressing against the inner wall surface.

[0006]

[Action] Insert the safety plate into the enlarged diameter part via the sealing material,
If the stopper is screwed into this enlarged diameter part, the safety plate will be
Tightly integrated, this constitutes a non-bursting safety plate device
You. When the outside air temperature rises due to a fire or the like and the primary pressure (high pressure) rises to the pressure set by the primary pressure safety device, the safety plate is deformed to the outer surface side, the bottom of the truncated conical recess is broken, and A pore communicating with the outer surface is opened. High-pressure gas is gradually released to the outside through the pores. This release
It doesn't happen instantaneously like a rupture disc,
The thrust from the release is not large enough to move the instrument.

[0007] weaker with all plates cylindrical portion on the inner surface, the sealing member is an O-ring, the O-ring and pressed against the cylindrical outer peripheral surface and the enlarged diameter portion inner wall has a seal gas, the gas Sealing is performed by crimping the O-ring and the inner wall surface of the enlarged diameter portion, and the O-ring and the outer peripheral surface of the cylindrical portion, respectively, and the screw stopper merely presses the safety plate.

When the sealing material is a flat packing and the safety plate is pressed with a screw plug, the flat packing presses against the inner surface of the outer peripheral portion of the safety plate and the step surface of the enlarged diameter portion to seal gas. By screwing the screw stopper into the enlarged diameter portion and pressing down the safety plate, the gas is sealed. At the point where the axial length matches the thickness of the safety plate, the enlarged diameter part becomes a screw hole further enlarged by the second step surface, the seal material is flat packing, and this flat packing is screwed by screwing a screw plug. When the gas is sealed by pressing against the outer surface of the outer peripheral portion of the safety plate, the second step surface, and the inner end surface of the screw plug, the length of the enlarged portion following the primary pressure gas release path becomes shorter.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference numeral 1 denotes a gas supply device, which has a case 2, a take-out mechanism 3, a flow control mechanism 4, a pressure regulating and discharging mechanism 5 housed therein, and a supply port 6 protruding from the case 2.
The case 2 is formed by bonding the respective halves 21. A mounting port 22 for a small high-pressure gas cylinder B is opened on the lower surface of the case 2, and an operating port 2 for a lever 51 of the pressure regulating and discharging mechanism 5 is provided on an upper portion.
3 is open, and the supply port 6 penetrates the side surface. Each of the mechanisms 3, 4 and 5 is assembled, and is housed in the case 2 supported by a flange 24 on the inner surface thereof. There is a space between each mechanism and the opposing surface of the case 2, and there is no airtightness between the flange 24 and the mechanism supported by the flange 24, so that the high-pressure gas freely flows in the case 2, and the mounting port 22 and the operation port 23 and lever 5
1 can flow out through the gap between the two. Since the basic configuration of each mechanism is the same as that of the conventional type, only a brief description will be given.

In the main body 31 of the take-out mechanism 3, a primary pressure gas release path 32 communicating with a primary pressure gas chamber 43 provided in a guide 42 of a valve pin 41 of the flow rate control mechanism 4 through a passage 44 as usual is provided. Pierced. In the drawing, the communication state between the passage 44 and the primary pressure gas release passage 32 is not clear, but the guide 42
The high-pressure gas can flow freely even in a slight gap between the body and the main body 31. The outer end of the primary gas release passage 32 has a cross section 3
An enlarged diameter portion 34 having a circular cross section that expands at 3 is provided.

Reference numeral 7 denotes a non-bursting type safety plate device which comprises a safety plate 71, a sealing material 72 and a screw plug 73. The safety plate 71 has a circular shape, and the operating portion 711 in the central portion is preferably thinner than the outer peripheral portion 712. A truncated conical recess 713 is formed at the center of the operating portion 711. 1 and 2, reference numeral 714 denotes a cylindrical portion provided on the inner surface of the outer peripheral portion 712, and preferably has an outer diameter smaller than the outer diameter of the outer peripheral portion 712. By determining the operating pressure of the safety plate 71, the operating pressure of the non-rupture type safety plate device 7 is determined.

The seal member 72 may be an O-ring 721 (FIGS. 1 and 2) or a flat packing 722 (FIGS. 3 and 4). In the case of the O-ring 721, a safety plate 71 having a cylindrical portion 714 is used. This O-ring 72
1 is press-fitted to the outer periphery of the cylindrical portion 714, and the outer peripheral surface of the O-ring is pressed against the inner peripheral wall surface of the enlarged diameter portion 33. Further, in the case of the flat packing 722, there are a case where it is arranged in contact with the inner surface of the safety plate 71 (FIG. 3) and a case where it is the outer surface (FIG. 4). In the case of the inner surface arrangement, one surface of the flat packing 722 contacts the step surface 33 of the enlarged diameter portion 34, and the other surface contacts the inner surface of the outer peripheral portion 712 of the safety plate 71. In the case of the outer surface arrangement, the enlarged diameter portion 34 becomes a screw hole 332 further enlarged by the second step surface 331 at a point where its axial length matches the thickness of the safety plate 71. The inner surface of the flat packing 722 is connected to the outer surface of the outer peripheral portion 712 of the safety plate 71 and the second step surface 3.
Touches 31.

The screw plug 73 has a shaft hole 731. The inner end of this shaft hole has a larger inner diameter, and a space 732 is provided in which the operating portion 711 of the safety plate 71 can be bent outward. The screw stopper 73 is provided with an O-ring 721 or a flat packing 7.
Each of the cases 22 is for pressing the safety plate 71. That is, in the case of the O-ring 721, since the O-ring 721 itself resists the gas leakage pressure, the screw stopper 73 simply prevents the safety plate 71 from being pushed out from the large-diameter portion 33 by the gas pressure. , To do.

In the case of FIG. 3, the tightening force of the screw plug 73 is opposed to the gas pressure. Due to this tightening force, the inner surface of the flat packing 722 is pressed against the step surface 33 and the outer surface is pressed against the inner surface of the outer peripheral portion 712 of the safety plate 71, thereby completing the gas seal. Further, in the case of FIG. 4, by tightening the screw plug 73, the flat packing 722
1 is pressed against the outer surface of the outer peripheral portion and the second step surface 331, and the outer surface is pressed against the inner end surface of the screw plug 73 to seal the gas passage.

In these embodiments, when the appliance is heated and the gas pressure reaches the operating set pressure of the non-rupture type safety plate device 7, this operates to gradually release gas to the outside. The gas passes through the gaps between the mechanisms 3, 4 and 5 and the case 2, and is discharged to the outside from the mounting port 22 and the operation port 23. Safety board 7
If the first operating portion 711 has a truncated conical recess 713, the operating portion 711 bends outward first, and then a crack is formed on the bottom surface of the recess 713, and gas flows out through the crack. The concave portion 713 may be arranged on the inner surface of the operating portion 711 or on both the inner and outer surfaces.

[0016]

According to the present invention, the present invention has a truncated conical recess.
That since the non-breaching type a and operating pressures employing a safety device having a safety plate that is determined on its own alone, Shun as rupture disc
The thrust can be controlled and gas can be released without releasing a large amount of gas sometimes , so that this device can be easily incorporated into the take-out mechanism, which can contribute to the miniaturization of the instrument, and the operating characteristics are other. the unaffected parts, thus performing performance evaluation of the single item, quality control easy and Do Ri can completely be proof device leakage always gas passing.

According to the second aspect , since the gas can be sealed by the O-ring, the sealing can be simplified and completed .

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view in which an example of a non-bursting type primary pressure gas safety device according to the present invention is applied to a gas supply device.

FIG. 2 is an enlarged view of a part of FIG.

FIG. 3 is a cross-sectional view showing a state in which another aspect of the safety plate is set in a take-out mechanism.

FIG. 4 is a cross-sectional view of a specific example when the sealing material is located on the outer surface of the safety plate in FIG.

FIG. 5 is a side view showing an example of a conventional safety device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Gas supply device 2 Case 3 Removal mechanism 4 Flow control mechanism 5 Pressure regulation and discharge mechanism 6 Supply port 7 Non-rupture type safety plate device 31 Main body 32 Primary pressure gas escape path 33 Step surface 34 Large diameter portion 71 Safety plate 72 Seal material 73 screw stopper 331 second step surface 332 screw hole 712 outer peripheral part 713 concave part 714 cylindrical part 721 O-ring 722 flat packing 731 shaft hole

Claims (2)

(57) [Scope of request for utility model registration] An enlarged diameter portion connected to an outer end of a primary pressure gas release passage (32) formed in a main body (31) of an extraction mechanism (3) by a step surface (33).
(34) is provided, become incorporated the enlarged diameter portion non-breaching type safety plate device (34) (7) hermetically, the non-breaching type safety plate device (7) is a frustoconical recess (713) and that determined chromatic only One working pressure by itself alone safety plate (71), the sealing member (72) is constituted by a shaft hole (731) with a threaded plug (73), said sealant (72) the weaker <br/> all plate (71) is inserted into the enlarged diameter portion (34), said safety plate the Nejisen (73) screwed into the enlarged diameter portion (34) (71) is a predetermined position via non-breaching type primary pressure safety device for a gas supply to the kept not benzalkonium wherein the. In wherein the safety plate (71) is provided with a cylindrical portion (714) on an inner surface, said sealing member (72) is O-ring (721), said O-ring (7
21), the outer peripheral surface and the non-breaching type primary pressure of the gas supply according pressed to the claim 1 which has a seal gas into the inner wall surface of the enlarged diameter portion (34) of said cylindrical portion (714) Safety device.