KR100445848B1
(ko )
2005-02-03
스테이지및스테이지구동방법
US6750625B2
(en )
2004-06-15
Wafer stage with magnetic bearings
US5864389A
(en )
1999-01-26
Stage apparatus and exposure apparatus and device producing method using the same
US6989889B2
(en )
2006-01-24
Method, system, and apparatus for management of reaction loads in a lithography system
TWI498187B
(zh )
2015-09-01
整體平台定位系統和方法
JP2004340372A
(ja )
2004-12-02
駆動装置、それを用いた露光装置、デバイスの製造方法
US6408767B1
(en )
2002-06-25
Low stiffness suspension for a stage
JPH0586845B2
(ko )
1993-12-14
US6888620B2
(en )
2005-05-03
System and method for holding a device with minimal deformation
KR20120105355A
(ko )
2012-09-25
중력을 보상하는 수직 액츄에이터 구동장치
CN107306099B
(zh )
2019-04-09
磁悬浮导向装置及其控制方法
US20030173833A1
(en )
2003-09-18
Wafer stage with magnetic bearings
JPS6320014B2
(ko )
1988-04-26
WO2017142481A1
(en )
2017-08-24
High precision localizing platforms
CN107306098B
(zh )
2019-10-22
磁悬浮导向装置及其控制系统和控制方法
JP2004132435A
(ja )
2004-04-30
軸受装置
US20060061751A1
(en )
2006-03-23
Stage assembly including a stage having increased vertical stroke
JP2573502B2
(ja )
1997-01-22
二軸移動装置
US20030098965A1
(en )
2003-05-29
System and method for supporting a device holder with separate components
US6882126B2
(en )
2005-04-19
Holder mover for a stage assembly
US20040004703A1
(en )
2004-01-08
Method and apparatus for reducing rotary stiffness in a support mechanism
US20040057817A1
(en )
2004-03-25
Switchable damping mechanism for use in a stage apparatus
JP2573502C
(ko )
1999-01-13
Williams et al.
1997
Six degrees of freedom Mag-Lev stage development
RU2404380C1
(ru )
2010-11-20
Управляемая опора