JP2572729B2 - Heat treatment equipment for powder - Google Patents

Heat treatment equipment for powder

Info

Publication number
JP2572729B2
JP2572729B2 JP62089252A JP8925287A JP2572729B2 JP 2572729 B2 JP2572729 B2 JP 2572729B2 JP 62089252 A JP62089252 A JP 62089252A JP 8925287 A JP8925287 A JP 8925287A JP 2572729 B2 JP2572729 B2 JP 2572729B2
Authority
JP
Japan
Prior art keywords
heat
powder
resistant container
furnace body
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62089252A
Other languages
Japanese (ja)
Other versions
JPS63254390A (en
Inventor
栄一 水谷
茂男 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHUO KAKOKI
Original Assignee
CHUO KAKOKI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHUO KAKOKI filed Critical CHUO KAKOKI
Priority to JP62089252A priority Critical patent/JP2572729B2/en
Publication of JPS63254390A publication Critical patent/JPS63254390A/en
Application granted granted Critical
Publication of JP2572729B2 publication Critical patent/JP2572729B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 <産業上の利用分野> 本発明は粉体用熱処理装置に関する。シリカ、タング
ステン、希金属等の種々の粉体に高温雰囲気下で反応や
焼成等を行なって、例えば窒化ケイ素や炭化ケイ素等の
ファインセラミックスで代表される高純度の新素材や新
触媒等を製造している。本発明は、上記のような粉体、
特にそれが粒径30μm以下の極微粉体であっても、その
反応や焼成等を経済的且つ効率的に行なうことができる
粉体用熱処理装置に関するものである。
Description: TECHNICAL FIELD The present invention relates to a powder heat treatment apparatus. Manufacture of various powders such as silica, tungsten, rare metals, etc. in a high temperature atmosphere by reaction and firing to produce new materials and catalysts of high purity represented by fine ceramics such as silicon nitride and silicon carbide. doing. The present invention provides a powder as described above,
In particular, the present invention relates to a powder heat treatment apparatus capable of economically and efficiently performing a reaction, calcination, and the like, even if it is an ultrafine powder having a particle size of 30 μm or less.

<従来の技術、その問題点> 従来、窒化ケイ素や炭化ケイ素等を製造するための熱
処理装置として、ヒータを加熱源とする容器内に原料粉
体を静置し、窒素ガスや炭酸ガスの高温雰囲気下で加熱
処理するようにして成るものが使用されている。ところ
が、かかる従来装置には、原料粉体の窒化反応や炭化反
応が原料粉体と反応ガスとの接触により起きるため、原
料粉体層を厚くすると、未反応物が増加し、このような
未反応物の増加を避けようとすると、著しい長時間の反
応が必要になるという問題点がある。逆に原料粉体層を
薄くすると、原料粉体や製品の出し入れ等、その全体と
しての作業が煩雑になり過ぎるとういう問題点がある。
レーザーを加熱源とする熱処理装置も使用されている
が、この場合には温度の制御が困難という問題点があ
る。
<Prior art and its problems> Conventionally, as a heat treatment apparatus for producing silicon nitride, silicon carbide, or the like, a raw material powder is allowed to stand in a vessel using a heater as a heating source, and a high temperature of nitrogen gas or carbon dioxide gas is used. A material which is subjected to a heat treatment in an atmosphere is used. However, in such a conventional apparatus, since the nitriding reaction and the carbonization reaction of the raw material powder occur due to the contact between the raw material powder and the reaction gas, when the raw material powder layer is thickened, unreacted substances increase, and such unreacted substances increase. To avoid an increase in the number of reactants, there is a problem that a remarkably long reaction time is required. Conversely, if the raw material powder layer is made thin, there is a problem that the whole work such as taking in and out of the raw material powder and products becomes too complicated.
A heat treatment apparatus using a laser as a heating source is also used, but in this case, there is a problem that it is difficult to control the temperature.

<発明が解決しようとする問題点、その解決手段> 本発明は、叙上の如き従来装置の問題点を解決する粉
体用熱処理装置を提供するものである。
<Problems to be Solved by the Invention, Means for Solving the Problems> The present invention provides a powder heat treatment apparatus that solves the above-described problems of the conventional apparatus.

すなわち本発明は、底部が開設された断熱性の炉本体
と、炉本体の底部に近接して装備された断熱性の受台
と、炉本体と受台とで囲まれる加熱室内に装備されたヒ
ータ及び耐熱容器とを備え、炉本体は基台に支持され、
また受台はスプリングを介し基台に支持されていて、受
台には振動モータが取付けられ、更に耐熱容器は受台に
支持されていて、耐熱容器の下部には多孔板が取付けら
れ、振動モータの作動及び多孔板を介しての耐熱容器内
への気体の送入により、耐熱容器内の粉体にある種の自
由運動を与えるようにして成ることを特徴とする粉体用
熱処理装置に係る。
That is, the present invention is provided in a heating chamber surrounded by a heat-insulating furnace body having a bottom opened, a heat-insulating pedestal provided near the bottom of the furnace main body, and the furnace body and the pedestal. With a heater and a heat-resistant container, the furnace body is supported on a base,
The pedestal is supported by a base via a spring, a vibration motor is mounted on the pedestal, and the heat-resistant container is supported by the pedestal. The powder heat treatment apparatus is characterized in that a certain free movement is given to the powder in the heat-resistant container by operating the motor and sending gas into the heat-resistant container through the perforated plate. Related.

本発明に係る粉体用熱処理装置は、粉体に高温雰囲気
下で反応や焼成等の熱処理を行なう装置であって、底部
が開設された断熱性の炉本体と、炉本体の底部に近接し
て装備された断熱性の受台と、炉本体と受台とで囲まれ
る加熱室内に装備されたヒータ及び耐熱容器とを備えて
いる。炉体は炉本体と受台とに分割されており、炉本体
と受台とで囲まれて加熱室が形成されていて、加熱室内
にヒータ及び耐熱容器が装備されているのである。
The heat treatment apparatus for powder according to the present invention is an apparatus for performing heat treatment such as reaction and baking on the powder under a high temperature atmosphere, a heat insulating furnace body having a bottom opened, and a furnace close to the bottom of the furnace body. And a heat-insulating pedestal provided in the heating chamber surrounded by the furnace body and the pedestal. The furnace body is divided into a furnace body and a pedestal, a heating chamber is formed by being surrounded by the furnace body and the pedestal, and a heater and a heat-resistant container are provided in the heating chamber.

炉本体は基台に支持され、また受台はスプリングを介
し基台に支持されていて、受台には振動モータが取付け
られ、更に耐熱容器は受台に支持されていて、耐熱容器
の下部には多孔板が取付けられている。振動モータを作
動させると、炉本体は振動せず、スプリングで支持され
た受台だけが振動し、したがって受台に支持された耐熱
容器が振動して、耐熱容器内の粉体に振動作用が加えら
れる。また多孔板を介して耐熱容器内へ気体を送入する
と、耐熱容器内の粉体に分散作用が加えられる。耐熱容
器内の粉体に機械的な振動作用及び気体の送入による分
散作用を加えると、粉体はある種の自由運動が与えられ
た流動層を形成する。
The furnace body is supported by the base, the pedestal is supported by the base via a spring, a vibration motor is mounted on the pedestal, and the heat-resistant container is supported by the pedestal. Is provided with a perforated plate. When the vibration motor is operated, the furnace body does not vibrate, but only the pedestal supported by the spring vibrates.Therefore, the heat-resistant container supported by the pedestal vibrates, and the powder inside the heat-resistant container vibrates. Added. When gas is fed into the heat-resistant container through the perforated plate, a dispersing action is added to the powder in the heat-resistant container. When a mechanical vibration action and a dispersing action by gas introduction are applied to the powder in the heat-resistant container, the powder forms a fluidized bed given a certain free motion.

<作用> 炉体全体に振動を加えるのではなく、受台だけに振動
を加えるため、機械的な振動系統を小型化でき、振動に
要するエネルギを低減できる。また粉体にある種の自由
運動が与えられた流動層を形成させ、この状態でその表
面に例えば窒素ガス或は炭酸ガスを接触させて反応させ
るため、反応が全体にわたり速やかに行なわれる。本発
明によると、粉体の反応や焼成等を経済的且つ効率的に
行なうことができるのである。
<Operation> Since vibration is applied only to the pedestal instead of applying vibration to the entire furnace body, a mechanical vibration system can be reduced in size and energy required for vibration can be reduced. Further, a fluidized bed given a certain kind of free motion is formed on the powder, and in this state, the surface is brought into contact with, for example, nitrogen gas or carbon dioxide gas to cause a reaction. According to the present invention, the reaction and firing of the powder can be performed economically and efficiently.

以下、図面に基いて本発明の構成を更に詳細に説明す
る。
Hereinafter, the configuration of the present invention will be described in more detail with reference to the drawings.

<実施例> 第1図は本発明の一実施例を略示する縦断面図であ
る。縦断面略逆U字形の炉殻21と炉殻21の内周面に取付
けられた断熱材31とで炉本体20が構築されており、炉殻
21は下方へ延設されていて、基台11に支持されている。
炉本体20の開設された底部に近接して受台51が装備され
ており、受台51は縦断面略U字形の炉殻22と、炉殻22の
内周面に取付けられた筒状の断熱材32と、断熱材32の筒
状空間部に埋設された耐火材34とで構築されている。炉
殻22はスプリング61,62を介し基台11に支持されてお
り、炉殻22からは取付け枠23が下方に延設されていて、
取付け枠23に振動モータ71が取付けられている。
<Embodiment> FIG. 1 is a longitudinal sectional view schematically showing an embodiment of the present invention. The furnace body 20 is constructed of a furnace shell 21 having a substantially inverted U-shaped vertical section and a heat insulating material 31 attached to the inner peripheral surface of the furnace shell 21.
Reference numeral 21 extends downward and is supported by the base 11.
A pedestal 51 is provided near the opened bottom of the furnace body 20, and the pedestal 51 is a furnace shell 22 having a substantially U-shaped vertical section and a cylindrical shape attached to the inner peripheral surface of the furnace shell 22. The heat insulating material 32 and the refractory material 34 embedded in the cylindrical space of the heat insulating material 32 are constructed. The furnace shell 22 is supported on the base 11 via springs 61 and 62, and a mounting frame 23 extends downward from the furnace shell 22,
The vibration motor 71 is mounted on the mounting frame 23.

炉本体20と受台51とで囲まれて加熱室41が形成されて
おり、加熱室41内にヒータ42及び耐熱容器81が装備され
ていて、耐熱容器81は受台51の耐火材34に支持されてい
る。耐熱容器81の下部に多孔板82が取付けられており、
多孔板82の下方には耐熱容器81との間でチャンバ83が形
成されていて、チャンバ83は断熱材33でほぼ覆われてい
る。そしてチャンバ83に、断熱材33、耐熱容器81及び耐
火材34を貫通して気体送入用の配管91が接続されてい
る。
A heating chamber 41 is formed surrounded by the furnace body 20 and the pedestal 51, and a heater 42 and a heat-resistant container 81 are provided in the heating chamber 41. Supported. A perforated plate 82 is attached to the lower part of the heat-resistant container 81,
A chamber 83 is formed below the perforated plate 82 between the heat-resistant container 81 and the chamber 83, and the chamber 83 is almost covered with the heat insulating material 33. A gas supply pipe 91 is connected to the chamber 83 through the heat insulating material 33, the heat-resistant container 81, and the refractory material.

断熱材31,32,33としては例えばセラミックスファイバ
を、また耐火材34として例えば耐火レンガを、更に耐熱
容器81としては例えばカーボン製容器をそれぞれ使用で
きるが、本発明はかかる材質を特に限定するものではな
い。また図示を省略するが、炉殻21,22の内周面に水冷
ジャケットを取付けることができ、耐熱容器81に原料粉
体の供給配管や製品の排出配管を炉外から接続すること
もできる。
For example, ceramic fibers can be used as the heat insulating materials 31, 32, and 33, and refractory bricks can be used as the refractory material 34, and further, for example, a carbon container can be used as the heat-resistant container 81. However, the present invention specifically limits such materials. is not. Although not shown, a water-cooling jacket can be attached to the inner peripheral surfaces of the furnace shells 21 and 22, and a supply pipe for raw material powder and a discharge pipe for products can be connected to the heat-resistant container 81 from outside the furnace.

次に、図示した実施例の装置を用いて窒化ケイ素を製
造する場合を説明する。
Next, a case where silicon nitride is manufactured using the apparatus of the illustrated embodiment will be described.

断熱材31と共に炉殻21を吊り上げて加熱室41を開放
し、耐熱容器81内へ原料粉体Aを入れる。そして断熱材
31と共に炉殻21を吊り下げ、炉殻21を基台11へと固定す
る。
The furnace shell 21 is lifted together with the heat insulating material 31 to open the heating chamber 41, and the raw material powder A is put into the heat-resistant container 81. And insulation
The furnace shell 21 is suspended together with the furnace shell 31, and the furnace shell 21 is fixed to the base 11.

引き続き、図示しない真空ポンプで加熱室41内の大気
を吸引排気しつつ窒素ガスを送入して、加熱室41内をガ
ス置換する。そしてヒータ42で加熱室41内を所定温度に
高温加熱する一方、振動モータ71を作動させて受台51と
共に耐熱容器81を振動させ、併せて配管91及び多孔板82
を介して原料粉体Aの下方から窒素ガスを送入する。こ
れらにより原料粉体Aはある種の自由運動が与えられた
流動層を形成する。従来の流動化手段では良好な流動化
が殆ど不可能な極微粉体でも、振動と気体(この場合に
は窒素ガス)の送入との相乗作用によってあたかも液体
の如き流動層を形成させることができるのである。かく
して、原料粉体Aの表面と窒素ガスとの接触によって引
き起こされる原料粉体Aの窒化反応が著しく促進され
る。
Subsequently, nitrogen gas is supplied while the atmosphere in the heating chamber 41 is sucked and exhausted by a vacuum pump (not shown), and the inside of the heating chamber 41 is gas-replaced. Then, while heating the inside of the heating chamber 41 to a predetermined temperature by the heater 42, the vibration motor 71 is operated to vibrate the heat-resistant container 81 together with the receiving table 51, and the piping 91 and the porous plate 82
Through which nitrogen gas is fed from below the raw material powder A. As a result, the raw material powder A forms a fluidized bed given a certain kind of free motion. Even in the case of extremely fine powder which cannot be satisfactorily fluidized by conventional fluidizing means, it is possible to form a fluidized bed as if it were a liquid by synergistic action of vibration and introduction of gas (in this case, nitrogen gas). You can. Thus, the nitriding reaction of the raw material powder A caused by the contact between the surface of the raw material powder A and the nitrogen gas is remarkably promoted.

上記のような状態で原料粉体Aを所定時間熱処理した
後、ヒータ42による加熱及び振動モータ71の作動並びに
窒素ガスの送入を停止し、法冷してから、断熱材31と共
に炉殻21を吊り上げて、加熱室41内を開放し、耐熱容器
81から窒化ケイ素を回収する。
After the raw material powder A is heat-treated for a predetermined time in the above-described state, the heating by the heater 42, the operation of the vibration motor 71, and the supply of nitrogen gas are stopped, and the mixture is legally cooled. To open the heating chamber 41,
Recover silicon nitride from 81.

<発明の効果> 以上説明した通りであるから、本発明には、それが粒
径30μm以下の極微粉体であっても、粉体の高温雰囲気
下における反応や焼成等を極めて経済的且つ効率的に行
なうことができるという効果がある。
<Effect of the Invention> As described above, according to the present invention, even if it is an ultrafine powder having a particle size of 30 μm or less, the reaction and firing of the powder in a high-temperature atmosphere are extremely economical and efficient. There is an effect that it can be performed in an efficient manner.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例を略示する縦断面図である。 11……基台、20……炉本体、21,22……炉殻 31,32,33……断熱材、34……耐火材 41……加熱室、42……ヒータ、51……受台 61,62……スプリング、71……振動モータ 81……耐熱容器、82……多孔板、83……チャンバ 91……配管、A……原料粉体 FIG. 1 is a longitudinal sectional view schematically showing an embodiment of the present invention. 11 Base, 20 Furnace body, 21, 22 Furnace shell 31, 32, 33 Insulation material, 34 Refractory material 41 Heating chamber, 42 Heater, 51 Cradle 61, 62: Spring, 71: Vibration motor 81: Heat-resistant container, 82: Perforated plate, 83: Chamber 91: Piping, A: Raw material powder

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】底部が開設された断熱性の炉本体と、炉本
体の底部に近接して装備された断熱性の受台と、炉本体
と受台とで囲まれる加熱室内に装備されたヒータ及び耐
熱容器とを備え、炉本体は基台に支持され、また受台は
スプリングを介し基台に支持されていて、受台には振動
モータが取付けられ、更に耐熱容器は受台に支持されて
いて、耐熱容器の下部には多孔板が取付けられ、振動モ
ータの作動及び多孔板を介しての耐熱容器内への気体の
送入により、耐熱容器内の粉体にある種の自由運動を与
えるようにして成ることを特徴とする粉体用熱処理装
置。
An insulated furnace body having a bottom opened, a heat-insulating pedestal provided near the bottom of the furnace body, and a heating chamber surrounded by the furnace body and the pedestal. It has a heater and a heat-resistant container, the furnace body is supported by the base, the receiving table is supported by the base via a spring, the vibration motor is attached to the receiving table, and the heat-resistant container is supported by the receiving table. The perforated plate is attached to the lower part of the heat-resistant container, and a certain free movement of the powder in the heat-resistant container is caused by the operation of the vibration motor and the introduction of gas into the heat-resistant container through the perforated plate. And a heat treatment apparatus for powder.
JP62089252A 1987-04-11 1987-04-11 Heat treatment equipment for powder Expired - Lifetime JP2572729B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62089252A JP2572729B2 (en) 1987-04-11 1987-04-11 Heat treatment equipment for powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62089252A JP2572729B2 (en) 1987-04-11 1987-04-11 Heat treatment equipment for powder

Publications (2)

Publication Number Publication Date
JPS63254390A JPS63254390A (en) 1988-10-21
JP2572729B2 true JP2572729B2 (en) 1997-01-16

Family

ID=13965567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62089252A Expired - Lifetime JP2572729B2 (en) 1987-04-11 1987-04-11 Heat treatment equipment for powder

Country Status (1)

Country Link
JP (1) JP2572729B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0736889B2 (en) * 1991-06-05 1995-04-26 工業技術院長 Fluidized bed equipment for high temperature heating

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5218460U (en) * 1975-07-28 1977-02-09
JPS54152148U (en) * 1978-04-12 1979-10-23

Also Published As

Publication number Publication date
JPS63254390A (en) 1988-10-21

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