JP2568883C - - Google Patents

Info

Publication number

JP2568883C

JP2568883C JP2568883C JP 2568883 C JP2568883 C JP 2568883C JP 2568883 C JP2568883 C JP 2568883C

Authority

JP

Japan

Prior art keywords

novolak resin

resin

alkali

resist

present

Prior art date

1998-10-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 229920005989 resin Polymers 0.000 claims description 61
• 239000011347 resin Substances 0.000 claims description 61
• 229920003986 novolac Polymers 0.000 claims description 47
• 239000000203 mixture Substances 0.000 claims description 30
• 229920002120 photoresistant polymer Polymers 0.000 claims description 22
• -1 quinonediazide compound Chemical class 0.000 claims description 19
• 239000000539 dimer Substances 0.000 claims description 17
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
• 150000001875 compounds Chemical class 0.000 claims description 9
• 239000002798 polar solvent Substances 0.000 claims description 7
• 125000003118 aryl group Chemical group 0.000 claims description 5
• 150000002148 esters Chemical class 0.000 claims description 5
• 239000002253 acid Substances 0.000 claims description 4
• 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
• 239000011342 resin composition Substances 0.000 claims description 3
• 230000001376 precipitating Effects 0.000 claims 1
• 238000005292 vacuum distillation Methods 0.000 claims 1
• MUBZPKHOEPUJKR-UHFFFAOYSA-N oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 24
• WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 14
• 230000000052 comparative effect Effects 0.000 description 13
• 239000000463 material Substances 0.000 description 13
• IWDCLRJOBJJRNH-UHFFFAOYSA-N P-Cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 10
• 230000035945 sensitivity Effects 0.000 description 10
• 239000007864 aqueous solution Substances 0.000 description 8
• 239000000178 monomer Substances 0.000 description 8
• 235000006408 oxalic acid Nutrition 0.000 description 8
• 230000000694 effects Effects 0.000 description 7
• 239000000758 substrate Substances 0.000 description 7
• SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 6
• 239000004793 Polystyrene Substances 0.000 description 6
• CSCPPACGZOOCGX-UHFFFAOYSA-N acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
• 238000004519 manufacturing process Methods 0.000 description 6
• OKKJLVBELUTLKV-UHFFFAOYSA-N methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
• 229920002223 polystyrene Polymers 0.000 description 6
• 230000002194 synthesizing Effects 0.000 description 6
• 230000004304 visual acuity Effects 0.000 description 6
• ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Natural products OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
• 229910052710 silicon Inorganic materials 0.000 description 5
• 239000010703 silicon Substances 0.000 description 5
• 239000002904 solvent Substances 0.000 description 5
• ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
• VEXZGXHMUGYJMC-UHFFFAOYSA-N HCl Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
• RLSSMJSEOOYNOY-UHFFFAOYSA-N M-Cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 4
• GHMLBKRAJCXXBS-UHFFFAOYSA-N Resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
• WGTYBPLFGIVFAS-UHFFFAOYSA-M Tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
• 230000015572 biosynthetic process Effects 0.000 description 4
• 238000006243 chemical reaction Methods 0.000 description 4
• 239000000975 dye Substances 0.000 description 4
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
• 150000002989 phenols Chemical class 0.000 description 4
• 239000004065 semiconductor Substances 0.000 description 4
• 238000003756 stirring Methods 0.000 description 4
• 238000003786 synthesis reaction Methods 0.000 description 4
• WYURNTSHIVDZCO-UHFFFAOYSA-N tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
• ZMANZCXQSJIPKH-UHFFFAOYSA-N triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 4
• ZRDYULMDEGRWRC-UHFFFAOYSA-N (4-hydroxyphenyl)-(2,3,4-trihydroxyphenyl)methanone Chemical compound C1=CC(O)=CC=C1C(=O)C1=CC=C(O)C(O)=C1O ZRDYULMDEGRWRC-UHFFFAOYSA-N 0.000 description 3
• QTBSBXVTEAMEQO-UHFFFAOYSA-N acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
• 239000003513 alkali Substances 0.000 description 3
• 239000003795 chemical substances by application Substances 0.000 description 3
• 238000005530 etching Methods 0.000 description 3
• BDAGIHXWWSANSR-UHFFFAOYSA-N formic acid Chemical compound OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 3
• 238000005227 gel permeation chromatography Methods 0.000 description 3
• KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
• HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
• 239000004094 surface-active agent Substances 0.000 description 3
• RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
• ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-Ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
• DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
• ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 2
• 239000004115 Sodium Silicate Substances 0.000 description 2
• NTHWMYGWWRZVTN-UHFFFAOYSA-N Sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
• QIQXTHQIDYTFRH-UHFFFAOYSA-N Stearic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
• QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
• IKHGUXGNUITLKF-UHFFFAOYSA-N acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 2
• 230000002378 acidificating Effects 0.000 description 2
• 150000001299 aldehydes Chemical class 0.000 description 2
• 150000001335 aliphatic alkanes Chemical class 0.000 description 2
• 150000001491 aromatic compounds Chemical class 0.000 description 2
• 239000003054 catalyst Substances 0.000 description 2
• 230000002950 deficient Effects 0.000 description 2
• 238000004090 dissolution Methods 0.000 description 2
• 238000004821 distillation Methods 0.000 description 2
• 238000001312 dry etching Methods 0.000 description 2
• 230000002708 enhancing Effects 0.000 description 2
• 150000002576 ketones Chemical class 0.000 description 2
• VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
• 238000001393 microlithography Methods 0.000 description 2
• 229920002866 paraformaldehyde Polymers 0.000 description 2
• 239000004014 plasticizer Substances 0.000 description 2
• CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
• 229910052911 sodium silicate Inorganic materials 0.000 description 2
• UYBDKTYLTZZVEB-UHFFFAOYSA-N (2,3,4,5,6-pentahydroxyphenyl)-phenylmethanone Chemical class OC1=C(O)C(O)=C(O)C(O)=C1C(=O)C1=CC=CC=C1 UYBDKTYLTZZVEB-UHFFFAOYSA-N 0.000 description 1
• XEDWWPGWIXPVRQ-UHFFFAOYSA-N (2,3,4-trihydroxyphenyl)-(3,4,5-trihydroxyphenyl)methanone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC(O)=C(O)C(O)=C1 XEDWWPGWIXPVRQ-UHFFFAOYSA-N 0.000 description 1
• QWRVAXMLZCMVSL-UHFFFAOYSA-N (2,4,6-trihydroxyphenyl)-(3,4,5-trihydroxyphenyl)methanone Chemical compound OC1=CC(O)=CC(O)=C1C(=O)C1=CC(O)=C(O)C(O)=C1 QWRVAXMLZCMVSL-UHFFFAOYSA-N 0.000 description 1
• NFNNWCSMHFTEQD-UHFFFAOYSA-N (2-hydroxyphenyl)-(2,3,4,5,6-pentahydroxyphenyl)methanone Chemical class OC1=CC=CC=C1C(=O)C1=C(O)C(O)=C(O)C(O)=C1O NFNNWCSMHFTEQD-UHFFFAOYSA-N 0.000 description 1
• XPJSWQIGULIVBS-UHFFFAOYSA-N 1,3-bis(2,3,4-trihydroxyphenyl)propane-1,3-dione Chemical compound OC1=C(O)C(O)=CC=C1C(=O)CC(=O)C1=CC=C(O)C(O)=C1O XPJSWQIGULIVBS-UHFFFAOYSA-N 0.000 description 1
• KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-Naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 1
• QWBBPBRQALCEIZ-UHFFFAOYSA-N 2,3-Dimethylphenol Chemical compound CC1=CC=CC(O)=C1C QWBBPBRQALCEIZ-UHFFFAOYSA-N 0.000 description 1
• NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-dimethylphenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 1
• KUXGUCNZFCVULO-UHFFFAOYSA-N 2-(4-nonylphenoxy)ethanol Chemical compound CCCCCCCCCC1=CC=C(OCCO)C=C1 KUXGUCNZFCVULO-UHFFFAOYSA-N 0.000 description 1
• ISPYQTSUDJAMAB-UHFFFAOYSA-N 2-Chlorophenol Chemical compound OC1=CC=CC=C1Cl ISPYQTSUDJAMAB-UHFFFAOYSA-N 0.000 description 1
• LBCZOTMMGHGTPH-UHFFFAOYSA-N 2-[2-[4-(2,4,4-trimethylpentan-2-yl)phenoxy]ethoxy]ethanol Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(OCCOCCO)C=C1 LBCZOTMMGHGTPH-UHFFFAOYSA-N 0.000 description 1
• XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 1
• LFSAPCRASZRSKS-UHFFFAOYSA-N 2-methylcyclohexan-1-one Chemical compound CC1CCCCC1=O LFSAPCRASZRSKS-UHFFFAOYSA-N 0.000 description 1
• LFMCTLLZHYCABW-UHFFFAOYSA-N 3,3,3',3'-tetramethyl-1,1'-spirobi[2H-indene]-4,4',5,5',6,6'-hexol Chemical compound C12=CC(O)=C(O)C(O)=C2C(C)(C)CC11C(C=C(O)C(O)=C2O)=C2C(C)(C)C1 LFMCTLLZHYCABW-UHFFFAOYSA-N 0.000 description 1
• HORNXRXVQWOLPJ-UHFFFAOYSA-N 3-Chlorophenol Chemical compound OC1=CC=CC(Cl)=C1 HORNXRXVQWOLPJ-UHFFFAOYSA-N 0.000 description 1
• ZRYCRPNCXLQHPN-UHFFFAOYSA-N 3-hydroxy-2-methylbenzaldehyde Chemical compound CC1=C(O)C=CC=C1C=O ZRYCRPNCXLQHPN-UHFFFAOYSA-N 0.000 description 1
• HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-Ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 1
• NBLFJUWXERDUEN-UHFFFAOYSA-N 4-[(2,3,4-trihydroxyphenyl)methyl]benzene-1,2,3-triol Chemical class OC1=C(O)C(O)=CC=C1CC1=CC=C(O)C(O)=C1O NBLFJUWXERDUEN-UHFFFAOYSA-N 0.000 description 1
• WXNZTHHGJRFXKQ-UHFFFAOYSA-N 4-chlorophenol Chemical compound OC1=CC=C(Cl)C=C1 WXNZTHHGJRFXKQ-UHFFFAOYSA-N 0.000 description 1
• FCQATSRLMJRCKX-UHFFFAOYSA-N 6-phenylbenzene-1,2,3,4,5-pentol Chemical class OC1=C(O)C(O)=C(O)C(O)=C1C1=CC=CC=C1 FCQATSRLMJRCKX-UHFFFAOYSA-N 0.000 description 1
• 229920000180 Alkyd Polymers 0.000 description 1
• FFUAGWLWBBFQJT-UHFFFAOYSA-N Bis(trimethylsilyl)amine Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
• FXHOOIRPVKKKFG-UHFFFAOYSA-N DMA Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
• 229960002887 Deanol Drugs 0.000 description 1
• JQVDAXLFBXTEQA-UHFFFAOYSA-N Dibutylamine Chemical compound CCCCNCCCC JQVDAXLFBXTEQA-UHFFFAOYSA-N 0.000 description 1
• HPNMFZURTQLUMO-UHFFFAOYSA-N Diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
• PHDPNHJFOMABOA-UHFFFAOYSA-N Difucol Chemical compound OC1=CC(O)=CC(O)=C1C1=C(O)C=C(O)C=C1O PHDPNHJFOMABOA-UHFFFAOYSA-N 0.000 description 1
• LZCLXQDLBQLTDK-UHFFFAOYSA-N Ethyl lactate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 1
• HYBBIBNJHNGZAN-UHFFFAOYSA-N Furfural Chemical compound O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 1
• 229940107698 Malachite green Drugs 0.000 description 1
• JFTBTTPUYRGXDG-UHFFFAOYSA-N Methyl violet Chemical compound Cl.C1=CC(=NC)C=CC1=C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 JFTBTTPUYRGXDG-UHFFFAOYSA-N 0.000 description 1
• UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
• GNVRJGIVDSQCOP-UHFFFAOYSA-N N-ethyl-N-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
• QWVGKYWNOKOFNN-UHFFFAOYSA-N O-Cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 1
• MBCILLZHWZPDGW-UHFFFAOYSA-N OC1=C(C(=C(C(=C1C(C1=CC=CC=C1)C1=CC=CC=C1)O)O)O)O Chemical class OC1=C(C(=C(C(=C1C(C1=CC=CC=C1)C1=CC=CC=C1)O)O)O)O MBCILLZHWZPDGW-UHFFFAOYSA-N 0.000 description 1
• NFQBXNQMQQQPHD-UHFFFAOYSA-N OC1C(C(C(C=C1)(C(C1=CC=CC=C1)C1=CC=CC=C1)O)(O)O)(O)O Chemical class OC1C(C(C(C=C1)(C(C1=CC=CC=C1)C1=CC=CC=C1)O)(O)O)(O)O NFQBXNQMQQQPHD-UHFFFAOYSA-N 0.000 description 1
• QCDYQQDYXPDABM-UHFFFAOYSA-N Phloroglucinol Chemical compound OC1=CC(O)=CC(O)=C1 QCDYQQDYXPDABM-UHFFFAOYSA-N 0.000 description 1
• 229960001553 Phloroglucinol Drugs 0.000 description 1
• WGYKZJWCGVVSQN-UHFFFAOYSA-N Propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 1
• REFJWTPEDVJJIY-UHFFFAOYSA-N Quercetin Chemical compound C=1C(O)=CC(O)=C(C(C=2O)=O)C=1OC=2C1=CC=C(O)C(O)=C1 REFJWTPEDVJJIY-UHFFFAOYSA-N 0.000 description 1
• 229960001285 Quercetin Drugs 0.000 description 1
• IKGXIBQEEMLURG-BKUODXTLSA-N Rutin Chemical compound O[C@H]1[C@H](O)[C@@H](O)[C@H](C)O[C@@H]1OC[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](OC=2C(C3=C(O)C=C(O)C=C3OC=2C=2C=C(O)C(O)=CC=2)=O)O1 IKGXIBQEEMLURG-BKUODXTLSA-N 0.000 description 1
• 229940081967 Rutin Drugs 0.000 description 1
• 235000021355 Stearic acid Nutrition 0.000 description 1
• LSNNMFCWUKXFEE-UHFFFAOYSA-L Sulphite Chemical compound [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
• GSEJCLTVZPLZKY-UHFFFAOYSA-N Tris Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
• QZKPXGFHHIFFTQ-UHFFFAOYSA-N [2-(2,3,4-trihydroxybenzoyl)phenyl]-(2,3,4-trihydroxyphenyl)methanone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1C(=O)C1=CC=C(O)C(O)=C1O QZKPXGFHHIFFTQ-UHFFFAOYSA-N 0.000 description 1
• RISQRMSSRWWBNR-UHFFFAOYSA-N [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1(C(C=CC2=CC=CC=C12)=O)=O.OC1=C(C(=C(C(=O)C2=CC=CC=C2)C=C1)O)O Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1(C(C=CC2=CC=CC=C12)=O)=O.OC1=C(C(=C(C(=O)C2=CC=CC=C2)C=C1)O)O RISQRMSSRWWBNR-UHFFFAOYSA-N 0.000 description 1
• 239000011354 acetal resin Substances 0.000 description 1
• 235000011054 acetic acid Nutrition 0.000 description 1
• 238000007792 addition Methods 0.000 description 1
• 239000002318 adhesion promoter Substances 0.000 description 1
• VHUUQVKOLVNVRT-UHFFFAOYSA-N ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
• 150000001555 benzenes Chemical class 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 229940043232 butyl acetate Drugs 0.000 description 1
• 239000000919 ceramic Substances 0.000 description 1
• AZFVLHQDIIJLJG-UHFFFAOYSA-N chloromethylsilane Chemical compound [SiH3]CCl AZFVLHQDIIJLJG-UHFFFAOYSA-N 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000009833 condensation Methods 0.000 description 1
• 230000005494 condensation Effects 0.000 description 1
• 238000010908 decantation Methods 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• 235000014113 dietary fatty acids Nutrition 0.000 description 1
• XTHFKEDIFFGKHM-UHFFFAOYSA-N dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
• IAZDPXIOMUYVGZ-UHFFFAOYSA-N dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 1
• 238000010894 electron beam technology Methods 0.000 description 1
• 150000002170 ethers Chemical class 0.000 description 1
• QUSNBJAOOMFDIB-UHFFFAOYSA-N ethyl amine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 1
• 229940116333 ethyl lactate Drugs 0.000 description 1
• XNWFRZJHXBZDAG-UHFFFAOYSA-N ethylene glycol monomethyl ether Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
• 238000011156 evaluation Methods 0.000 description 1
• 239000000194 fatty acid Substances 0.000 description 1
• 238000001914 filtration Methods 0.000 description 1
• 235000019253 formic acid Nutrition 0.000 description 1
• 230000005251 gamma ray Effects 0.000 description 1
• 229940052308 general anesthetics Halogenated hydrocarbons Drugs 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 150000008282 halocarbons Chemical class 0.000 description 1
• 150000004000 hexols Chemical class 0.000 description 1
• 125000004464 hydroxyphenyl group Chemical group 0.000 description 1
• 239000003112 inhibitor Substances 0.000 description 1
• 230000002401 inhibitory effect Effects 0.000 description 1
• 239000010410 layer Substances 0.000 description 1
• 239000004973 liquid crystal related substance Substances 0.000 description 1
• VFCNQNZNPKRXIT-UHFFFAOYSA-N malachite green cation Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 VFCNQNZNPKRXIT-UHFFFAOYSA-N 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• LPEKGGXMPWTOCB-UHFFFAOYSA-N methyl 2-hydroxypropionate Chemical compound COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
• 229940057867 methyl lactate Drugs 0.000 description 1
• SECXISVLQFMRJM-UHFFFAOYSA-N n-methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
• QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical compound [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 1
• 239000012299 nitrogen atmosphere Substances 0.000 description 1
• 229920001568 phenolic resin Polymers 0.000 description 1
• 239000005011 phenolic resin Substances 0.000 description 1
• 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
• HTQNYBBTZSBWKL-UHFFFAOYSA-N phenyl-(2,3,4-trihydroxyphenyl)methanone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1 HTQNYBBTZSBWKL-UHFFFAOYSA-N 0.000 description 1
• 239000003504 photosensitizing agent Substances 0.000 description 1
• NQRYJNQNLNOLGT-UHFFFAOYSA-N piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 1
• 238000001020 plasma etching Methods 0.000 description 1
• 239000002244 precipitate Substances 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 150000003141 primary amines Chemical class 0.000 description 1
• KAESVJOAVNADME-UHFFFAOYSA-N pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 1
• 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
• 235000005875 quercetin Nutrition 0.000 description 1
• 229930002344 quercetin Natural products 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 238000007761 roller coating Methods 0.000 description 1
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