JP2554885Y2 - Optical mirror inspection equipment - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical mirror inspection apparatus, and more particularly to an optical mirror inspection apparatus suitable for inspecting the spectral characteristics of an optical mirror.

[0002]

2. Description of the Related Art In a reflector for a halogen lamp, for example, it is desired that light in the visible region is reflected as much as possible, and heat rays in the infrared region are absorbed and transmitted / emitted to the back side.
In other words, while effectively absorbing heat rays that may thermally damage the illuminated object and transmitting and radiating them to the back side, visible light is reflected as far forward as possible to provide effective irradiation (illumination) It is desired to do. Therefore, the development of the reflector,
In manufacturing and putting into practical use, the multilayer film that constitutes the reflecting mirror,
For example, importance is placed on the inspection or evaluation of the spectral characteristics of a multilayer reflective film formed by laminating a high-refractive-index deposited film and a low-refractive-index deposited film.

The inspection or evaluation of the spectral characteristics of this type of optical mirror is generally performed by the following means. That is, using a spectrophotometer, each of the optical mirrors to be inspected is mounted on a predetermined jig one by one, scanned in an arbitrary wavelength range, and the spectral characteristics are measured and evaluated by the transmittance or reflectance in that wavelength range. doing.

[0004]

However, the measurement and evaluation of the spectral characteristics by the spectrophotometer has the following disadvantages. In other words, (1) a relatively long time is required for measurement to scan the set wavelength range, and
(2) When the set wavelength range is changed, it takes a relatively long time to initialize the measurement system. Moreover, since (3) the measurement result is obtained as a spectrum, post-processing such as digitization is complicated, and (4) the optical mirrors to be inspected are attached to the jig one by one in the measurement and evaluation. There are many practical problems, such as being unsuitable for large-scale measurement and evaluation.

The present invention has been made in view of the above circumstances, and has as its object to provide an optical mirror inspection apparatus capable of measuring and evaluating the spectral characteristics of an optical mirror instantaneously and continuously.

[0006]

An inspection apparatus for an optical mirror according to the present invention comprises: a light source for projecting parallel light in a predetermined direction;
A first light guide path integrally connected to the projection direction of the light source and configured to guide the projection light; and a projection light arranged and substantially perpendicular to the projection light guided into the first light guide path. A condenser lens that corrects the light into parallel rays, a detachable sample holder section of an optical mirror to be inspected on which the parallel rays integrally arranged in connection with the first light guide path are projected,
A second light guide path that guides a light beam transmitted through the optical mirror to be inspected, which is integrally arranged in connection with the sample holder,
Mounted in the first light guide or the second light guide
Spectral transmission that transmits only light in the reflection wavelength range of the optical mirror to be inspected
An optical filter that have the property to convert the second is attached to the light guide path guiding the light beam and focusing lens for focusing the light amount of light is condensed by the condenser lens into an analog electric signal It is characterized by comprising a light receiving means, and comparing / evaluating means for comparing / evaluating an analog electric signal obtained by the light receiving means with a standard value.

[0007]

In the inspection apparatus for an optical mirror according to the present invention, light in a necessary wavelength range is selected, and the transmittance (the amount of transmitted light) of the entire selected wavelength range is converted into an analog electric signal to be standardized. In order to compare / evaluate with the value, the measurement / evaluation result is grasped numerically instantaneously. Moreover, since it is possible to continuously supply and remove the optical mirror to be inspected to and from the removable sample holder, so-called mass-produced measurement and evaluation can be achieved.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a block diagram showing an outline of an inspection apparatus for an optical mirror according to the present invention. Reference numeral 1 denotes a light source unit for projecting light parallel to a predetermined direction, and reference numeral 2 denotes a light source unit connected in the projection direction of the light source 1. The first light guide 3 is a sample holder connected to the first light guide 2, and the second light guide 4 is connected to the sample holder 3, forming a so-called optical system.
FIG. 2 specifically illustrates the optical system. The light projected from the light source 1 a of the light source unit 1 that projects light parallel to a predetermined direction is guided in the first light guide path 2. And this first
In the light guide path 2, a condenser lens 5 for correcting the projected light into a parallel light beam so as to intersect substantially perpendicularly with the projected light to be guided, and a parallel light beam corrected by the condenser lens 5 are selected. Optical filters 6 that transmit light are arranged. Further, the first light guide path 2 is connected to a sample holder unit 3 of, for example, a revolver type, to which an optical mirror to be inspected on which a parallel light beam selected and transmitted through the optical filter 6 is projected can be continuously attached and detached. They are arranged integrally. In addition, a second light guide path 4 is arranged integrally with the sample holder section 3. On the other hand, a condensing lens 7 for condensing a light beam to be guided is provided in the second light guide path 4.
The amount of light collected by the condenser lens 7 is received by, for example, a photodiode (light receiving element) 8 and converted into an analog current signal. The converted analog current signal is processed by data processing means (not shown) such as a personal computer. That is, it is compared and evaluated with a standard value (reference data) previously input to the personal computer, and the result of the measurement and evaluation of the spectral characteristics of the optical mirror to be inspected is output instantaneously. In other words, non-defective / defective products are determined based on the threshold values in which the output measured / evaluated values are set in advance.

In the above configuration, the light source 1a includes, for example, a halogen lamp and a xenon lamp, and the optical filter 6 includes, for example, a photo mirror, a color glass filter, and the like.

In the above configuration, the first and second
The light guide paths 3 and 4 serve to prevent the incidence of disturbance light, and those whose inner wall surfaces are mirror-finished or have no reflection are used.

Next, an example of use (operation example) of the apparatus having the above configuration will be described.

First, the light projected (emitted) from the light source 1a is corrected into a parallel light by the condenser lens 5,
The light enters the optical filter 6. The optical filter 6 is arbitrarily selected and set according to the spectral characteristics of the optical mirror to be inspected. For example, when the optical mirror to be inspected has a spectral characteristic as shown in FIG. 3, a standard as shown in FIG.
The optical filter 6 having specific spectral characteristics is mounted. Thus, the light transmitted through the optical filter 6 is incident on the optical mirror to be inspected, and the amount of transmitted light varies depending on the quality and spectral characteristics of the optical mirror to be inspected. The light transmitted through the optical mirror to be inspected is condensed by a condenser lens 7 and is incident on a photodiode (light receiving element) 8. Here, the amount of light received by the photodiode (light receiving element) 8 is converted into an analog current signal, and the inspection (evaluation) and determination of the optical mirror to be inspected are performed based on the analog current signal.

In this series of operation steps, the optical mirror to be inspected is mounted on the revolver type sample holder 3, and the optical mirror to be inspected is attached and detached in accordance with the rotation of the revolver type sample holder 3. (Replacement of the optical mirror to be inspected) is performed.

In the present invention, the light receiving element is not limited to a photodiode, but may be, for example, a photoelectric conversion element such as a solar cell, an integrating sphere, or the like. The inspection (evaluation) and judgment of the mirror may be performed. Further, the sample holder may be of a belt conveyor type other than the revolver type. Further, the position of the optical filter 6 may be on the rear side instead of the front side of the sample holder 3. That is, the configuration may be such that light in the selected wavelength range is made incident on the optical mirror to be inspected, or only the light in the selected wavelength range is extracted from the light transmitted through the optical mirror to be inspected.

[0016]

As described above, in the optical mirror inspection apparatus according to the present invention, only light selected in a wavelength range corresponding to the spectral characteristics of the optical mirror to be inspected is incident on the light receiving element. The light amount is converted into an analog electric signal, and the inspection (evaluation) / judgment of the optical mirror to be inspected can be performed easily and instantly by comparison with a reference value. Therefore, the wavelength range corresponding to the spectral characteristics of the optical mirror to be inspected in this inspection / measurement can be selected by conversion of the optical filter, and the result of the measurement / evaluation can be easily grasped by the light amount value. (E.g., no processing is required), and there is no need to scan the entire set wavelength range, so that the measurement and evaluation time can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a main configuration of an optical mirror inspection apparatus according to the present invention.

FIG. 2 is a sectional view showing a configuration example of an optical system of the optical mirror inspection device according to the present invention;

FIG. 3 is a curve diagram illustrating an example of spectral characteristics of an optical mirror to be inspected.

FIG. 4 is a curve diagram showing an example of spectral characteristics of an optical filter selected corresponding to an optical mirror to be inspected.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Light source part 1a ... Light source 2 ... 1st light-guide path 3 ...
Sample (optical mirror to be inspected) holder 4 ... First light guide path 5 ... Condenser lens 6 ... Optical filter
7: Condensing lens 8: Light receiving element

Claims (1)

(57) [Scope of request for utility model registration] A light source for projecting light parallel to a predetermined direction;
A first light guide path integrally connected to the projection direction of the light source and configured to guide the projection light; and a projection light arranged and substantially perpendicular to the projection light guided into the first light guide path. A condenser lens that corrects the light into parallel rays, a detachable sample holder section of an optical mirror to be inspected on which the parallel rays integrally arranged in connection with the first light guide path are projected,
A second light guide path that guides a light beam transmitted through the optical mirror to be inspected, which is integrally arranged in connection with the sample holder,
Mounted in the first light guide or the second light guide
Spectral transmission that transmits only light in the reflection wavelength range of the optical mirror to be inspected
An optical filter that have the property to convert the second is attached to the light guide path guiding the light beam and focusing lens for focusing the light amount of light is condensed by the condenser lens into an analog electric signal An inspection apparatus for an optical mirror, comprising: a light receiving means; and a comparing / evaluating means for comparing / evaluating an analog electric signal obtained by the light receiving means with a standard value.