JP2551607Y2 - Displacement measurement probe device - Google Patents

Displacement measurement probe device

Info

Publication number
JP2551607Y2
JP2551607Y2 JP4490391U JP4490391U JP2551607Y2 JP 2551607 Y2 JP2551607 Y2 JP 2551607Y2 JP 4490391 U JP4490391 U JP 4490391U JP 4490391 U JP4490391 U JP 4490391U JP 2551607 Y2 JP2551607 Y2 JP 2551607Y2
Authority
JP
Japan
Prior art keywords
holding member
cam
clamp
click
cam member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4490391U
Other languages
Japanese (ja)
Other versions
JPH04138212U (en
Inventor
伸宏 品田
清 大家
治 荒井
康夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP4490391U priority Critical patent/JP2551607Y2/en
Publication of JPH04138212U publication Critical patent/JPH04138212U/en
Application granted granted Critical
Publication of JP2551607Y2 publication Critical patent/JP2551607Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】本考案は、例えば3次元座標測定
機等に用いられ、装置本体に対して少なくとも2軸方向
に変位可能な保持部材に測定子を装着し、この測定子を
被検物に接触させ、前記保持部材の変位量を読み取るも
のであって、前記保持部材を拘束するクランプ装置を備
えた変位測定プローブ装置に関する。
The present invention is used, for example, in a three-dimensional coordinate measuring machine and the like, in which a stylus is mounted on a holding member which can be displaced in at least two axial directions with respect to an apparatus body, and this stylus is inspected. The present invention relates to a displacement measuring probe device provided with a clamp device for contacting an object and reading a displacement amount of the holding member, the clamp device restraining the holding member.

【0002】[0002]

【従来の技術】3次元座標測定機等では、複数軸方向に
変位可能な保持部材に測定子を備え、この測定子が被検
物に当接したときの保持部材の微小な変位量を読み取る
ものが例えば特公昭54−6218号公報に開示されて
いるように公知である。保持部材を可動にする構造は精
密なものであるので、測定子を交換するときや移動,運
搬するときなどは衝撃を受けないよう保持部材を固定し
て拘束する必要がある。
2. Description of the Related Art In a three-dimensional coordinate measuring machine or the like, a stylus is provided on a holding member which can be displaced in a plurality of axial directions, and a minute displacement amount of the holding member when the stylus comes into contact with an object is read. These are known, for example, as disclosed in Japanese Patent Publication No. 54-6218. Since the structure for making the holding member movable is precise, it is necessary to fix and restrain the holding member so as not to receive an impact when exchanging the probe, moving or transporting the probe.

【0003】従来、保持部材を固定するには、保持部材
を変位可能にしている各軸の案内部位の可動部分にV溝
を設けた固定用の部材を固設し、このV溝に装置本体か
らボールを押し付けて保持部材を固定するクランプ装置
を設けるものが知られており、ボールを押し付ける動力
としては小型モータ、ボイスコイル、電磁石等が用いら
れている。
Conventionally, in order to fix a holding member, a fixing member having a V-groove provided in a movable portion of a guide portion of each shaft which enables the holding member to be displaced is fixed to the V-groove. There is known a device provided with a clamp device for pressing a ball to fix a holding member, and a small motor, a voice coil, an electromagnet, or the like is used as power for pressing the ball.

【0004】[0004]

【考案が解決しようとする課題】しかしながら、このよ
うな従来の技術では、クランプ装置のボールを押し付け
るための駆動動力を要するので、機構が大がかりとな
り、電源供給のための配線も複雑になるという問題点が
あった。
However, such a conventional technique requires a driving power for pressing the ball of the clamp device, so that the mechanism becomes large and wiring for power supply becomes complicated. There was a point.

【0005】また、手動で行なうようにすることは、ク
ランプ装置を各軸の案内部に設けているので、各種構成
部材が邪魔になって容易ではない。
[0005] Further, it is not easy to perform the operation manually because the clamping devices are provided on the guide portions of the respective shafts, so that various constituent members hinder the operation.

【0006】本考案は、このような従来の技術が有する
問題点に着目してなされたもので、小型化でき、構成も
単純なクランプ装置を備えた変位測定プローブ装置を提
供することを目的としている。
SUMMARY OF THE INVENTION The present invention has been made in view of such problems of the prior art, and has as its object to provide a displacement measuring probe device having a clamp device which can be reduced in size and has a simple structure. I have.

【0007】[0007]

【課題を解決するための手段】かかる目的を達成するた
めの本考案の要旨とするところは、 1 装置本体に対して少なくとも2軸方向に変位可能な
保持部材に測定子を装着し、該測定子を被検物に接触さ
せ、前記保持部材の変位量を読み取るものであって、前
記保持部材を拘束するクランプ装置を備えた変位測定プ
ローブ装置において、前記クランプ装置は、前記保持部
材の中心を回転中心として装置本体に回転自在に設けら
れ、前記保持部材の周りに螺旋状のカム溝を等間隔に有
するカム部材と、前記カム溝に係合するとともに、前記
保持部材の中心方向へ移動自在に装置本体に保持され、
前記カム部材の回転により前記保持部材を拘束するクラ
ンプ爪と、を備えたことを特徴とする変位測定プローブ
装置。
SUMMARY OF THE INVENTION In order to achieve the above object, the gist of the present invention is as follows: 1. A measuring element is mounted on a holding member which can be displaced in at least two axial directions with respect to an apparatus main body, and the measurement is performed. The probe is brought into contact with a test object to read the amount of displacement of the holding member, and in a displacement measurement probe device including a clamp device that restrains the holding member, the clamp device is configured to center the holding member. A cam member rotatably provided in the apparatus main body as a center of rotation and having spiral cam grooves at equal intervals around the holding member; and engaging with the cam groove and freely moving in the center direction of the holding member. Is held in the device body,
A displacement measuring probe device, comprising: a clamp claw that restrains the holding member by rotation of the cam member.

【0008】2 前記カム部材と前記装置本体との間
に、前記クランプ爪が前記保持部材のクランプを解除し
たとき、前記カム部材を拘束するクリック装置を設けた
ことを特徴とする項1記載の変位測定プローブ装置。
2. A click device is provided between the cam member and the apparatus main body, the click device being configured to restrain the cam member when the clamp claw releases the clamp of the holding member. Displacement measurement probe device.

【0009】3 前記クランプ爪が前記保持部材の拘束
を解除して、前記クリック装置が前記カム部材を拘束す
ると動作する検出スイッチを設けたことを特徴とする請
求項2記載の変位測定プローブ装置に存する。
3. The displacement measuring probe device according to claim 2, further comprising a detection switch that operates when the clamp claw releases the restraint of the holding member and the click device restrains the cam member. Exist.

【0010】項1の発明では、カム部材は、動力,手動
いずれで駆動してもよく、また、駆動のための別の機構
を設けてもよい。項2の発明は、手動の場合に有効であ
るが、動力の場合でも適用できる。項3の発明は、クリ
ック装置の変位動作を利用するのが有効であるが、単に
カム部材の動作を検出するものでもよい。
In the first aspect of the present invention, the cam member may be driven by power or manually, and another mechanism for driving may be provided. The invention of item 2 is effective in the case of manual operation, but can also be applied in the case of power. In the invention of item 3, it is effective to use the displacement operation of the click device. However, the invention of item 3 may simply detect the operation of the cam member.

【0011】[0011]

【作用】測定は保持部材をクランプ装置から開放した状
態で、測定子を被検物に当接させて行なう。被検物に測
定子が接触すると、保持部材は装置本体に対して変位
し、この変位量がエンコーダ、作動トランス等により読
み取られる。
The measurement is performed by bringing the probe into contact with the test object with the holding member released from the clamp device. When the probe comes into contact with the test object, the holding member is displaced with respect to the apparatus main body, and the amount of the displacement is read by an encoder, an operation transformer, or the like.

【0012】測定子を交換するときや移動,運搬すると
きなど、保持部材が衝撃を受けるおそれがあるときは保
持部材を固定する。カム部材は保持部材の中心を回転中
心として装置本体に回転自在に設けられ、カム部材を動
力または手動で回転させると、カム部材の各カム溝に係
合した各クランプ爪がカム溝の回転変位にしたがって保
持部材の中心軸へ向かう方向へ前進し、等間隔で対象的
に配設されたクランプ爪は保持部材を偏りなく挾持し、
保持部材は固定される。
The holding member is fixed when there is a risk that the holding member will be subjected to an impact, such as when the probe is replaced, moved, or transported. The cam member is rotatably provided in the apparatus main body around the center of the holding member, and when the cam member is rotated by power or manually, each clamp claw engaged with each cam groove of the cam member causes the rotational displacement of the cam groove. In the direction toward the center axis of the holding member, and the clamp claws symmetrically disposed at equal intervals nip the holding member without bias,
The holding member is fixed.

【0013】保持部材を固定してあるので、測定子を交
換したり、装置を動かしたりするとき、不用意に保持部
材が振動して衝撃を受けることがなく、精密な機構が保
護される。
Since the holding member is fixed, when the probe is replaced or the apparatus is moved, the holding member is not inadvertently vibrated and does not receive an impact, and the precise mechanism is protected.

【0014】固定した保持部材を開放するには、前記と
は逆にカム部材を回転させる。各クランプ爪はカム部材
のカム溝の回転変位にしたがって、保持部材の中心軸か
らはなれる方向へ後退し、保持部材の拘束が解除され
る。クリック装置を設けたものでは、保持部材の拘束の
解除時にカム部材の位置が定まって拘束される。保持部
材を固定したいときは、クリック装置の保持力より大き
な力でカム部材を回転させ、各クランプ爪を中心方向に
突出させて保持部材を挾持する。
To release the fixed holding member, the cam member is rotated in the opposite manner to the above. Each clamp claw retreats in a direction away from the central axis of the holding member in accordance with the rotational displacement of the cam groove of the cam member, and the restraining of the holding member is released. With the click device, the position of the cam member is determined and restrained when the restraint of the holding member is released. When it is desired to fix the holding member, the cam member is rotated with a force larger than the holding force of the click device, and each clamping claw is projected toward the center to clamp the holding member.

【0015】検出スイッチを設けたものは、保持部材を
開放してクリック装置が働いたときに検出スイッチが動
作して拘束解除を知らせるので、確実に保持部材の開放
操作を行なえるとともに、検出信号を各種制御に利用す
ることができる。
In the apparatus provided with the detection switch, when the holding member is opened and the click device is operated, the detection switch is operated to notify the release of the restraint, so that the holding member can be reliably opened and the detection signal is output. Can be used for various controls.

【0016】[0016]

【実施例】以下、図面に基づき本考案の一実施例を説明
する。図1および図2は本考案の一実施例を示してい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1 and 2 show an embodiment of the present invention.

【0017】保持部材1は、図示省略した装置本体に対
して変位可能に保持されている。保持部材1は、図1に
おいて紙面左右方向と紙面垂直方向との少なくとも2軸
方向に加え、紙面上下方向にも変位可能である。保持部
材1の先端には3軸方向に突出する測定子9,9…が装
着されている。変位測定プローブ装置Aは、必要に応じ
て測定子9,9…をそれぞれの方向から被検物に接触さ
せ、保持部材1の微小な変位を読み取って検出するもの
である。
The holding member 1 is held so as to be displaceable with respect to an apparatus main body (not shown). The holding member 1 can be displaced in at least two axial directions, that is, a horizontal direction and a vertical direction in FIG. 1 and a vertical direction in FIG. At the front end of the holding member 1, measuring elements 9, 9,... Protruding in three axial directions are mounted. The displacement measuring probe device A is for bringing the tracing styluses 9, 9,... Into contact with the test object from the respective directions as necessary, and reading and detecting the minute displacement of the holding member 1.

【0018】変位測定プローブ装置Aには、保持部材1
を必要により変位不能に拘束するクランプ装置Bが設け
られている。クランプ装置Bは、円盤形のカム部材6
と、カム部材6により動作するクランプ爪7,7…とを
備えている。
The displacement measuring probe device A has a holding member 1
Is provided if necessary. The clamping device B includes a disc-shaped cam member 6.
, Which are operated by the cam member 6.

【0019】装置本体の一部である本体カバー2が保持
部材1を挿通させて被さるように形成され、本体カバー
2にガイド板3が固着されている。ガイド板3に回転リ
ング4が回転可能に外嵌し、回転リング4の下面に固着
されるカバー板5とガイド板3との間にカム部材6が回
転リング4と一体的に回転可能に挾持されている。
A main body cover 2 which is a part of the apparatus main body is formed so as to cover the holding member 1 by being inserted therethrough, and a guide plate 3 is fixed to the main body cover 2. A rotating ring 4 is rotatably fitted on the guide plate 3 and a cam member 6 is rotatably held integrally with the rotating ring 4 between a cover plate 5 fixed to the lower surface of the rotating ring 4 and the guide plate 3. Have been.

【0020】本体カバー2,ガイド板3,カバー板5,
カム部材6の中心を通して開口があり、そこに保持部材
1が挿通している。回転リング4の周縁は指をかけて回
転させるためのつまみ部をなしており、カム部材6に
は、保持部材1の周りを囲むように螺旋状のカム溝6
a,6a…が対象的に等間隔に形成されている。
Body cover 2, guide plate 3, cover plate 5,
There is an opening through the center of the cam member 6, through which the holding member 1 is inserted. The periphery of the rotary ring 4 forms a knob for rotating with a finger. The cam member 6 has a spiral cam groove 6 surrounding the holding member 1.
are formed symmetrically at equal intervals.

【0021】ガイド板3には放射方向のガイド溝3a,
3a…がカム溝6a,6a…に対応して等間隔で形成さ
れ、ガイド溝3a,3a…にクランプ爪7,7…が保持
部材1を挾持可能なよう中心方向に進退可能に保持され
ている。クランプ爪7,7…にはカムピン8がそれぞれ
突設され、カムピン8,8…がカム溝6a,6a…に係
合することによりクランプ爪7,7…がカム部材6の回
転に応じ中心方向に突出して保持部材1を拘束するよう
配設されている。
The guide plate 3 has radial guide grooves 3a,
Are formed at equal intervals corresponding to the cam grooves 6a, and the clamp claws 7, 7 are held in the guide grooves 3a, 3a so as to be able to advance and retreat in the center direction so that the holding member 1 can be clamped. I have. Each of the clamp claws 7, 7 is provided with a cam pin 8 projecting therefrom. The cam pins 8, 8 are engaged with the cam grooves 6a, 6a so that the clamp claws 7, 7. The holding member 1 is disposed so as to project therefrom.

【0022】カム部材6と装置本体の本体カバー2との
間にはクリック装置が設けられるとともに、クリック装
置が働いたとき動作する検出スイッチが設けられてい
る。
A click device is provided between the cam member 6 and the main body cover 2 of the apparatus main body, and a detection switch that operates when the click device operates is provided.

【0023】本体カバー2の先端面部に取付部材10が
固設され、本体カバー2の先端面部に保持孔2aが穿設
されるとともに、保持孔2aに同心につながる円筒孔1
0aが取付部材10に穿設されている。
A mounting member 10 is fixedly mounted on the front end surface of the main body cover 2, a holding hole 2a is formed in the front end surface of the main body cover 2, and a cylindrical hole 1 concentrically connected to the holding hole 2a.
0 a is bored in the mounting member 10.

【0024】円筒孔10aから保持孔2aにクリック用
のボール15および押しロッド14が内挿され、押しロ
ッド14を弾撥的に押える板ばね13が設けられてい
る。回転リング4にはカム部材6が開放位置に来たとき
クリック用のボール15が落ち込む円錐穴4aが凹設さ
れている。前記構成により、クリック用のボール15が
円錐穴4aに弾撥的に係脱するクリック装置が構成され
ている。
A click ball 15 and a push rod 14 are inserted from the cylindrical hole 10a into the holding hole 2a, and a leaf spring 13 that resiliently presses the push rod 14 is provided. The rotary ring 4 is provided with a conical hole 4a into which a click ball 15 falls when the cam member 6 comes to the open position. With the above configuration, a click device in which the click ball 15 resiliently engages and disengages with the conical hole 4a is configured.

【0025】接点板11が絶縁材12を介して板ばね1
3とともに取付部材10に固定されている。接点板11
は、クリック用のボール15が円錐穴4aに落ち込んだ
とき板ばね13が接触して導通するよう板ばね13に対
向して配設されており、板ばね13と接点板11とによ
り検出スイッチが構成されている。
The contact plate 11 is connected to the leaf spring 1 via an insulating material 12.
3 together with the mounting member 10. Contact plate 11
Is arranged opposite to the leaf spring 13 so that the leaf spring 13 contacts and conducts when the click ball 15 falls into the conical hole 4a, and the detection switch is formed by the leaf spring 13 and the contact plate 11. It is configured.

【0026】次に作用を説明する。Next, the operation will be described.

【0027】クリック装置のクリック用のボール15が
回転リング4の円錐穴4aに落ち込んでいるとき、カム
部材6は開放位置にあって、カムピン8はカム溝6aの
最外端に位置し、クランプ爪7が後退しており保持部材
1は拘束されることなく本体カバー2,ガイド板3,カ
バー板5,カム部材6の中心の開口に挿通している。
When the click ball 15 of the click device falls into the conical hole 4a of the rotating ring 4, the cam member 6 is in the open position, the cam pin 8 is located at the outermost end of the cam groove 6a, The pawl 7 is retracted, and the holding member 1 is inserted through the central opening of the main body cover 2, the guide plate 3, the cover plate 5, and the cam member 6 without being restrained.

【0028】また、クリック用のボール15は回転リン
グ4の円錐穴4aに落ち込んでいるので、検出スイッチ
を構成する板ばね13と接点板11とは当接して導通し
ており、保持部材1が開放されていて測定可能状態にあ
ることを知らせている。被検物の測定はこのように保持
部材1をクランプ装置Bから開放した状態で、測定子
9,9…を被検物に当接させて行なう。
Further, since the click ball 15 has fallen into the conical hole 4a of the rotating ring 4, the leaf spring 13 and the contact plate 11, which constitute the detection switch, are in contact with each other to conduct, and the holding member 1 Notifies that it is open and in a measurable state. The measurement of the test object is performed by bringing the probes 9 into contact with the test object in a state where the holding member 1 is released from the clamp device B as described above.

【0029】測定子9,9…を当てる方向は保持部材1
の変位可能な方向であり、被検物に測定子9,9…が接
触すると、反作用により保持部材1が装置本体に対して
変位し、この変位により接触を感知してそのときの座標
値等が記録される。
The direction in which the measuring elements 9, 9...
When the probe 9 comes into contact with the test object, the holding member 1 is displaced with respect to the apparatus main body by a reaction, and the displacement is used to detect the contact, and the coordinate value at that time is detected. Is recorded.

【0030】測定子9,9…を交換するときや移動,運
搬するときなど、保持部材1が衝撃を受けるおそれがあ
るときは保持部材1を固定する。回転リング4の周縁の
つまみ部に手を掛け、クリック装置の保持力より大きな
力でカム部材6を図2において反時計方向に回転させる
と、カム部材6が各カム溝6a,6a…とともに一体に
回転する。
The holding member 1 is fixed when there is a possibility that the holding member 1 will be subjected to an impact, for example, when exchanging the measuring elements 9, 9,... When the user grips the knob on the peripheral edge of the rotating ring 4 and rotates the cam member 6 counterclockwise in FIG. 2 with a force greater than the holding force of the click device, the cam member 6 is integrated with the respective cam grooves 6a, 6a. To rotate.

【0031】クリック装置のボール15は回転リング4
の円錐穴4aから離脱して回転リング4の表面に乗り上
げ、クランプ爪7,7…はガイド溝3a,3a…に嵌合
していて回転せず、カムピン8の位置における各カム溝
6a,6a…と中心との距離が小さくなり、カムピン8
が中心方向に移動され、各クランプ爪7,7…はカム溝
6a,6a…の回転変位にしたがって中心方向に突出す
る。
The ball 15 of the click device is a rotating ring 4
, And rides on the surface of the rotary ring 4 so that the clamp claws 7, 7 are fitted in the guide grooves 3a, 3a and do not rotate, and the respective cam grooves 6a, 6a at the positions of the cam pins 8 are not rotated. ... and the distance between the center and the cam pin 8
Are moved toward the center, and the clamp claws 7, 7... Protrude toward the center according to the rotational displacement of the cam grooves 6a, 6a.

【0032】保持部材1は、本体カバー2,ガイド板
3,カバー板5,カム部材6の中心の開口に挿通してい
るので、突出したクランプ爪7,7…の先端は保持部材
1に当接する。等間隔で対象的に配設されたクランプ爪
7,7…の各先端は保持部材1を偏りなく挾持し、保持
部材1は変位不能に固定される。クリック装置のクリッ
ク用のボール15は回転リング4の円錐穴4aから離脱
したとき、押しロッド14が板ばね13を押し上げて接
点板11から離間させるので、板ばね13を押し上げて
接点板11とは導通しなくなり、検出スイッチが不作動
となって保持部材1が拘束されることを知らせる。
Since the holding member 1 is inserted through the center opening of the main body cover 2, the guide plate 3, the cover plate 5, and the cam member 6, the tips of the protruding clamp claws 7, 7. Touch The tips of the clamp claws 7, symmetrically arranged at equal intervals hold the holding member 1 without bias, and the holding member 1 is fixed so as not to be displaced. When the click ball 15 of the click device is disengaged from the conical hole 4a of the rotary ring 4, the push rod 14 pushes up the leaf spring 13 and separates it from the contact plate 11, so that the leaf spring 13 is pushed up and is separated from the contact plate 11. The conduction is stopped, and the detection switch is deactivated to notify that the holding member 1 is restrained.

【0033】このように保持部材1を固定してあれば、
測定子9,9…を交換したり、装置を動かしたりすると
き、不用意に保持部材1が振動して衝撃を受けることが
なく、精密な機構が保護される。
If the holding member 1 is fixed as described above,
When the tracing styluses 9 are exchanged or the apparatus is moved, the holding member 1 is not inadvertently vibrated and does not receive an impact, and the precise mechanism is protected.

【0034】固定した保持部材1を開放するには、逆に
カム部材6を図2において時計方向に回転させる。各ク
ランプ爪7,7…はカム部材6のカム溝6a,6a…の
回転変位にしたがって放射方向に後退し、保持部材1が
開放される。完全開放時にクリック装置のクリック用の
ボール15が回転リング4の円錐穴4aに落ち込み、カ
ム部材6の位置が定まって拘束される。
To release the fixed holding member 1, the cam member 6 is rotated clockwise in FIG. Each of the clamp claws 7, 7,... Retreats radially in accordance with the rotational displacement of the cam grooves 6a, 6a,. When the click device is completely opened, the click ball 15 of the click device falls into the conical hole 4a of the rotating ring 4, and the position of the cam member 6 is determined and restrained.

【0035】クリック装置のクリック用のボール15が
回転リング4の円錐穴4aに落ち込んだとき、押しロッ
ド14が図1において下方に変位し、離間していた接点
板11と板ばね13とが当接して導通する。すなわち、
保持部材1を開放してクリック装置が働いたとき、接点
板11と板ばね13とにより構成される検出スイッチが
動作して開放を知らせる。これにより、保持部材1の開
放操作を確認するとともに、検出信号を各種制御に利用
する。
When the click ball 15 of the click device falls into the conical hole 4a of the rotary ring 4, the push rod 14 is displaced downward in FIG. 1, and the contact plate 11 and the plate spring 13 which have been separated come into contact with each other. Contact and conduct. That is,
When the click device operates with the holding member 1 opened, a detection switch constituted by the contact plate 11 and the leaf spring 13 operates to notify the opening. Thus, the opening operation of the holding member 1 is confirmed, and the detection signal is used for various controls.

【0036】なお、カム部材1は、動力で駆動してもよ
く、また、駆動のための別の機構を設けてもよい。ま
た、検出スイッチはクリック装置の変位動作を利用する
のが有効であるが、単にカム部材の動作を検出するもの
でもよい。
Incidentally, the cam member 1 may be driven by power or another mechanism for driving may be provided. Although it is effective to use the displacement operation of the click device, the detection switch may simply detect the operation of the cam member.

【0037】[0037]

【考案の効果】本考案にかかる変位測定プローブ装置に
よれば、カム部材の回転に応じて複数のクランプ爪を進
退させ、測定子を装備した保持部材を拘束あるいは開放
するようにしたから、簡単な構成で容易に必要に応じて
保持部材を拘束することができ、小型軽量化し、かつ使
い勝手のよい変位測定プローブ装置となる。
According to the displacement measuring probe device of the present invention, a plurality of clamp claws are advanced and retracted in accordance with the rotation of the cam member, and the holding member equipped with the tracing stylus is restrained or released. With such a configuration, the holding member can be easily restrained as needed, and the displacement measuring probe device can be reduced in size and weight and can be used easily.

【0038】クリック装置を設けたものでは、完全開放
時にカム部材の位置が定まって拘束され、確実な動作を
させることができ、検出スイッチを設けたものは、保持
部材の開放,拘束を検出スイッチの動作で知ることがで
き、確実に保持部材の開放操作を行なえるとともに、検
出信号を各種制御に利用して合理的な変位測定プローブ
装置とすることができる。
With the click device, when the cam member is completely opened, the position of the cam member is fixed and restrained, and the operation can be reliably performed. With the detection switch, the opening and restraint of the holding member are detected by the switch. The operation described in (1) above allows the opening operation of the holding member to be reliably performed, and the detection signal can be used for various controls to provide a reasonable displacement measurement probe device.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本考案の一実施例に係る変位測定プローブ装置
の縦断面図である。
FIG. 1 is a longitudinal sectional view of a displacement measuring probe device according to an embodiment of the present invention.

【図2】図1のII−II線矢視図である。FIG. 2 is a view taken along line II-II in FIG.

【符号の説明】[Explanation of symbols]

A…変位測定プローブ装置 B…クランプ装置 1…保持部材 2…本体カバー 3…ガイド板 4…回転リング 4a…円錐穴 6…カム部材 6a…カム溝 7…クランプ爪 8…カムピン 9…測定子 11…接点板 13…板ばね 14…押しロッド 15…クリック用のボール A: Displacement measuring probe device B: Clamping device 1: Holding member 2: Body cover 3: Guide plate 4: Rotating ring 4a: Conical hole 6: Cam member 6a: Cam groove 7: Clamping claw 8: Cam pin 9: Measuring element 11 ... Contact plate 13 ... Leaf spring 14 ... Push rod 15 ... Ball for click

Claims (3)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】装置本体に対して少なくとも2軸方向に変
位可能な保持部材に測定子を装着し、該測定子を被検物
に接触させ、前記保持部材の変位量を読み取るものであ
って、前記保持部材を拘束するクランプ装置を備えた変
位測定プローブ装置において、 前記クランプ装置は、 前記保持部材の中心を回転中心として装置本体に回転自
在に設けられ、前記保持部材の周りに螺旋状のカム溝を
等間隔に有するカム部材と、 前記カム溝に係合するとともに、前記保持部材の中心方
向へ移動自在に装置本体に保持され、前記カム部材の回
転により前記保持部材を拘束するクランプ爪と、 を備えたことを特徴とする変位測定プローブ装置。
1. A stylus is mounted on a holding member displaceable in at least two axial directions with respect to an apparatus body, and the stylus is brought into contact with a test object to read a displacement amount of the holding member. A displacement measuring probe device provided with a clamp device for restraining the holding member, wherein the clamp device is rotatably provided on a device body around a center of the holding member as a rotation center, and has a spiral shape around the holding member. A cam member having cam grooves at regular intervals; a clamp claw engaged with the cam groove and movably held in a center direction of the holding member by the apparatus main body, and restraining the holding member by rotation of the cam member. And a displacement measuring probe device comprising:
【請求項2】前記カム部材と前記装置本体との間に、前
記クランプ爪が前記保持部材のクランプを解除したと
き、前記カム部材を拘束するクリック装置を設けたこと
を特徴とする請求項1記載の変位測定プローブ装置。
2. A click device is provided between said cam member and said apparatus main body, said click device restraining said cam member when said clamp claw releases clamping of said holding member. The displacement measuring probe device according to the above.
【請求項3】前記クランプ爪が前記保持部材の拘束を解
除して、前記クリック装置が前記カム部材を拘束すると
動作する検出スイッチを設けたことを特徴とする請求項
2記載の変位測定プローブ装置。
3. A displacement measuring probe device according to claim 2, further comprising a detection switch which operates when said clamp pawl releases said restraint of said holding member and said click device restrains said cam member. .
JP4490391U 1991-06-14 1991-06-14 Displacement measurement probe device Expired - Fee Related JP2551607Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4490391U JP2551607Y2 (en) 1991-06-14 1991-06-14 Displacement measurement probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4490391U JP2551607Y2 (en) 1991-06-14 1991-06-14 Displacement measurement probe device

Publications (2)

Publication Number Publication Date
JPH04138212U JPH04138212U (en) 1992-12-24
JP2551607Y2 true JP2551607Y2 (en) 1997-10-27

Family

ID=31924915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4490391U Expired - Fee Related JP2551607Y2 (en) 1991-06-14 1991-06-14 Displacement measurement probe device

Country Status (1)

Country Link
JP (1) JP2551607Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3129750B1 (en) * 2014-04-08 2023-05-31 Nikon Metrology NV Measurement probe unit for metrology applications
CN106500568B (en) * 2016-12-16 2023-01-17 苏州美瑞时科技有限公司 Adjustable height gauge measuring head

Also Published As

Publication number Publication date
JPH04138212U (en) 1992-12-24

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