JP2547717B2 - Two-stage pressure reducing valve device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a two-stage pressure reducing valve device for reducing high-pressure gas in two stages by a high-pressure reducing valve and a low-pressure reducing valve, and in particular to gas-supplied equipment. The present invention relates to a two-stage pressure reducing valve device suitable for filling the gas chamber with a reduced pressure gas of a predetermined pressure.

(Prior Art) In a conventional two-stage pressure reducing valve device of this type, as shown in FIG. 5, a high pressure side pressure reducing valve 100 in which pressure cannot be adjusted and a low pressure side pressure reducing valve 110 in which pressure can be adjusted are connected in series. The gas inlet conduit 120 is connected to the high pressure side pressure reducing valve 100, the gas outlet conduit 130 is connected to the low pressure side pressure reducing valve 110, and the gas outlet conduit 130 is connected.
There was a structure in which an on-off valve 140 was connected in the middle of.
The high pressure side pressure reducing valve 100 is configured to include a high pressure side valve body 102 in which a flow passage 101 is formed, and a high pressure side spring 104 that biases the high pressure side valve body 102 in a direction of separating the high pressure side valve body 102 from a valve seat 103, and a gas The pressure of the gas flowing in from the inflow conduit 120 is reduced. The upper limit of gas decompression is determined by the biasing force of the high-pressure side spring 104.
The low pressure side pressure reducing valve 110 includes a low pressure side valve body 112 housed in a low pressure side valve body storage chamber 111, an auxiliary spring 114 for urging the valve body 112 toward a valve seat 113, and a low pressure side gas adjusting chamber 115. A valve pusher 116 disposed inside, and a diaphragm 117 fixed to the valve pusher 116 and constituting one wall portion of the low pressure side gas adjustment chamber 115.
And a low pressure side spring 119 arranged between the valve pusher 116 and the adjusting knob member 118. In the low-pressure side pressure reducing valve 110, the pressure reduction can be adjusted by adjusting the knob member 118 and adjusting the biasing force of the low-pressure side spring 119.

When the gas chamber of the gas supply device is filled with the gas of the predetermined pressure P ₀ by using this type of pressure reducing valve device, by adjusting the knob member 118 with the on-off valve 140 closed, the low-pressure side gas The pressure inside the adjusting chamber 115 is set to the predetermined pressure P ₀ . After adjusting the pressure in the low-pressure side gas adjustment chamber 115, open / close valve 140
When the valve is opened, the low-pressure side valve body 112 separates from the valve seat 113 and gas flows out, and the pressure P1 in the low-pressure side gas adjustment chamber 115 and the gas outflow conduit 130 is reduced by several tens of percent from the set pressure P _0. To do. When the pressure in the gas chamber of the gas-supplied equipment approaches the pressure P ₀ due to the gas supply, the pressure P in the low-pressure side gas adjustment chamber 115 is accordingly increased.
When 1 also approaches the set pressure P ₀ and the pressure P ₁ in the low pressure side gas adjustment chamber 115 reaches the set pressure P ₀ , the low pressure side valve body 112 comes into contact with the valve seat 113 and the gas supply is stopped. .

(Problems to be Solved by the Invention) When a conventional two-stage pressure reducing valve device is used to fill a gas chamber of a gas supply device with a gas having a reduced pressure,
As described above, the pressure of the gas supplied to the gas supply device when the on-off valve 140 is opened (the pressure in the gas outflow conduit 130).
Will fall. Therefore, in the conventional device, the set pressure
Gas filling will be started at a gas pressure lower than P ₀ , which means that the pressure set in the gas chamber of the gas-supplied equipment is
It was a cause of delaying filling with P ₀ gas.

In the conventional device, the pressure reduction amount by the high pressure side pressure reducing valve 100 is
Since it is determined by the urging force of the high pressure side spring 104, the adjustment range of the low pressure side pressure reducing valve 110 is limited by the gas pressure reduced by the high pressure side pressure reducing valve 100. When the gas pressure adjusted by the low pressure side pressure reducing valve 110 is increased, the pressure difference between the high pressure side and the low pressure side of the low pressure side pressure reducing valve 110 becomes small, and the valve operation becomes unstable. Therefore, in order to widen the adjustment range of the low pressure side pressure reducing valve 110, it is necessary to increase the spring force of the high pressure side pressure reducing valve 100 to increase the gas pressure reduced by the high pressure side pressure reducing valve 100. . However, in the conventional device, in order to increase the gas pressure on the low pressure side of the high pressure side pressure reducing valve 100 (the high pressure side of the pressure reducing side pressure reducing valve), it is necessary to use a large high pressure side spring, and it is difficult to downsize the device. There was a problem.

(Object of the Invention) An object of the present invention is to provide a two-stage pressure reducing valve device in which the pressure in the gas outflow conduit does not drop when the on-off valve is opened.

Another object of the present invention is that the pressure in the gas outflow conduit does not drop when the on-off valve is opened, and the low pressure side pressure reducing valve is used even if a small spring is used as the high pressure side spring of the high pressure side pressure reducing valve. It is an object of the present invention to provide a two-stage pressure reducing valve device capable of increasing the adjustment range of.

(Means for Solving Problems) To facilitate understanding, the description will be made with reference to the reference numerals attached to the embodiments shown in the drawings, and the first invention and the second invention of the present application are objects of improvement. The two-stage pressure reducing valve device is used to fill the gas chamber of the gas supply device with a depressurized gas of a predetermined pressure, and the high pressure side valve body 6 becomes high pressure in the direction of separating from the high pressure side valve seat 4. High pressure side spring for urging the side valve body 6
The high pressure side pressure reducing valve 16 having 12 and the low pressure side valve body can be freely adjusted in the direction of separating the low pressure side valve body 20 from the low pressure side valve seat 19.
A low pressure side pressure reducing valve 53 having a low pressure side spring 41 for urging 20 and reducing the pressure of the outflow gas is connected in series by a gas conduit 18. The high pressure side pressure reducing valve 16 is connected to the gas inflow conduit 2, the low pressure side pressure reducing valve 53 is connected to the gas outflow conduit 72, and the gas outflow conduit 72 is connected to the open / close valve 58.

In the first aspect of the invention, the low pressure side pressure applying means for applying a force corresponding to the flow rate of the outflow gas flowing through the gas outflow guide passage 72 to the low pressure side valve body 20 in the direction of separating the low pressure side valve body 20 from the valve seat 19. 52
(27,28,32,36,49,50) are provided.

Further, in the second invention, in addition to the low pressure side pressure applying means 52 of the first invention, the pressure of the gas in the gas outflow conduit 72 is applied to the high pressure side valve body 6 of the high pressure side pressure reducing valve 16 by the high pressure side valve body 6. 6 is the high pressure side valve seat 4
High pressure side pressure applying means 48 (47,46,
14) is provided.

(Operation of the Invention) In the two-stage pressure reducing valve device according to the first invention of the present application,
When the gas chamber of the gas-supplied equipment is filled with gas at a predetermined pressure P ₀ , first the on-off valve is closed and the urging force of the low-pressure side spring of the low-pressure side pressure reducing valve is adjusted so that the gas outflow conduit Is set to a predetermined pressure P ₀ . When the on-off valve is opened to supply gas to the gas-supplied equipment, the pressure in the gas outflow conduit decreases and the low-pressure side spring pushes the low-pressure side valve element away from the low-pressure side valve seat, causing the gas to flow. leak. When the gas flows through the gas outflow road, the low pressure side pressure applying means applies a force corresponding to the flow rate of the outflow gas in the direction in which the low pressure side valve body is separated from the low pressure side valve seat. As a result, the low pressure side valve element is further separated from the low pressure side valve seat, and the outflow amount of outflow gas increases. In other words, the pressure of the outflow gas becomes high. Therefore, the gas chamber of the gas supply device can be filled earlier than in the conventional case.
When the gas filling progresses and the pressure in the gas chamber of the gas-supplied device rises, the flow rate of the outflow gas begins to decrease. As a result, the force applied by the low-pressure side pressure applying means to the low-pressure side valve element also gradually decreases, and finally the force applied by the low-pressure side pressure applying means to the low-pressure side valve element becomes zero. At this time, the pressure in the gas chamber of the gas supply device, that is, the pressure in the gas outflow conduit,
When it is in equilibrium with the urging force of the low-pressure side spring, the gas chamber of the gas supply device is filled with the gas at the set pressure P ₀ .

According to the present invention, when the on-off valve is opened, the outflow amount of the outflow gas is increased and the pressure of the outflow gas is increased, so that the gas chamber of the gas supply target device can be quickly filled.

In order to expand the adjustment range of the low pressure side pressure reducing valve, it is necessary to increase the biasing force of the high pressure side spring of the high pressure side pressure reducing valve to increase the gas pressure of the high pressure side of the low pressure side pressure reducing valve (low pressure side of the high pressure side reducing valve). There is. In the second invention of the present application, since the high pressure side pressure applying means applies the pressure of the gas in the gas outflow conduit to the high pressure side valve body in the direction of separating the high pressure side valve body from the high pressure side valve seat, apparently high pressure The biasing force of the side spring increases by the amount of gas pressure in the gas outflow conduit. Therefore, according to the present invention, the adjustment range of the low pressure side pressure reducing valve can be increased without increasing the size of the high pressure side spring.

(Examples) The present invention will be described in detail below with reference to the examples shown in FIGS. 1 to 4.

The two-stage pressure reducing valve device of the present invention has a base 1, and a gas inflow passage 2 is formed in the base 1. A gas supply source (not shown) is connected to one end of the gas inflow passage 2, and the high pressure side valve body storage chamber 3 formed in the base body 1 is connected to the other end. A high pressure side valve seat 4 is formed on the periphery of the opening of the gas inflow passage 2 in the high pressure side valve body storage chamber 3, and the high pressure side valve body 6 is formed by making the head 5 face the high pressure side valve seat 4. It is arranged. The high-pressure side valve body 6 has a first piston portion 7 and a second piston portion 8 in addition to the head portion 5, and the first piston portion 7 keeps the high-pressure side valve body storage chamber 3 airtight. And is slidably fitted. The high-pressure valve body 6 has a recess 9 formed in a portion opposite to the head portion 5, and the recess 9 has a first gas communication conduit whose one end opens into the high-pressure valve storage chamber 3. Road 10
The other end of is open. Around the high pressure side valve body accommodating chamber 3 of the base body 1, annular recesses 11 are formed concentrically at a distance.
A high pressure side spring 12 is interposed between the bottom portion 11a of the annular recess 11 and the second piston portion 8 of the high pressure side valve body 6. The high-pressure side spring 12 biases the high-pressure side valve body 6 in a direction away from the high-pressure side valve seat 4. A high pressure side valve cover for covering the high pressure side valve body 6 and the high pressure side spring 12 on the outer periphery of the annular recess 11 of the base body 1
Thirteen openings are screwed on. The second piston portion 8 of the high pressure side valve body 6 is slidably in contact with the inner wall of the high pressure side valve cover 13, and the inside of the high pressure side valve cover 13 is pressurized by the second piston portion 8 with the spring chamber 14. It is airtightly divided into two parts. The high pressure side valve body storage chamber 3, the high pressure side valve seat 4, the high pressure side valve body 6, the high pressure side spring 12, and the high pressure side valve cover 13 constitute a high pressure side pressure reducing valve 16.

A low pressure side valve body storage chamber 17 is also formed in the base body 1, and the low pressure side valve body storage chamber 17 is connected to the high pressure side valve body storage chamber 3 by a second gas communication conduit 18 formed in the base body 1. ing.
A low pressure side valve seat 19 is provided in a portion of the low pressure side valve body storage chamber 17 opposite to the opening of the second gas communication channel 18.
A low pressure side valve body 20 is slidably arranged in the low pressure side valve body storage chamber 17 so as to face the low pressure side valve seat 19. This low pressure side valve body
A third wall is provided on the peripheral wall portion in contact with the inner wall of the low pressure side valve body storage chamber 17 of 20.
The gas communication channel 21 is formed. Low pressure side valve body storage chamber
An auxiliary spring 22 for urging the low pressure side valve body 20 toward the low pressure side valve seat 19 is also disposed inside the valve 17. The base 1 has a protruding portion 23 that protrudes outward, including the portion where the low pressure side valve body storage chamber 17 is located, and one end of this protruding portion 23 is opened into the low pressure side valve seat 19 and the other end is A first hole 24 opening to the outer surface of the projecting portion 23 and a plurality of second holes orthogonal to the axis of the first hole 24 and extending radially from the first hole 24 and opening to the outer surface of the projecting portion 23. And 25 are formed. The first hole 24 and the plurality of second holes 25 form a fourth gas communication channel 26, and the fourth gas communication channel 26 communicates with a gas pressure adjusting chamber described later. . A cylinder portion 27 forming an annular space is integrally formed on the outer peripheral side of the protruding portion 23 in the base body 1, and a piston 28 slidably contacting the inner wall of the cylinder portion 27 while keeping airtightness. It is loaded. The piston 28 has a valve body thrusting rod 29 that penetrates the first hole 24 of the fourth gas communication passageway 26 and abuts against the low pressure side valve body 20, and the piston on the side opposite to the valve body thrusting rod 29. A spherical projection 30 is provided on the outer surface of 28. A low pressure side gas pressure adjusting chamber 31 is defined by the piston 28, the cylinder 27 and the protrusion 23. The cylinder portion 27 of the base 1 is covered with a bellows 32, and one end of the bellows 32 is fixed to the base 1 via a bellows support 33. At the other end of the bellows 32, a spherical projection of the piston 28
Attached is a pusher 35 having a conical recess 34 into which 30 can engage. A pressure chamber 36 is formed between the bellows 32, the bellows supporting member 33 and the pressing member 35 and the cylinder portion 27 and the piston 28 of the base 1. A cylindrical portion 37 is provided on the outside of the bellows 32 so as to project from the base body 1, and a low-pressure side valve cover 38 that covers the bellows 32 is screwed into an opening portion of the cylindrical portion 37. The low pressure side valve cover 38 is composed of a large diameter bellows storage portion 39 and a small diameter spring storage portion 40. A low-pressure side spring 41 is arranged in the spring accommodating portion 40 of the low-pressure side valve cover 38 such that one end of the low-pressure side spring 41 abuts on the outer surface of the bellows 32.
The other end of 41 is held by a spring seat 42. One end of a screw rod 43 screwed to the low-pressure side valve cover 38 is brought into contact with the spring seat 42, and the other end of the screw rod 43 penetrates the low-pressure side valve cover 38 by a screw connection and protrudes to the outside. Has been done. A knob 44 is attached to the other end of the screw rod 43, and the amount of bending of the low pressure side spring 41 can be set to a desired amount by appropriately turning the knob 44. A hole 45 is formed at the boundary between the bellows storage portion 39 and the spring storage portion 40 of the low pressure side valve cover 38, and this hole 45 serves to remove air from the low pressure side valve cover 38 or introduce outside air into the cover 38. Is what you do. The substrate 1 is also formed with a first gas outflow hole 46 having one end opened to the low pressure side gas pressure adjusting chamber 31 in a substantially L shape. A fifth gas communication passage 47 is provided between the bent portion of the first gas outflow hole 46 and the spring chamber 14 of the high pressure side pressure reducing valve 16 so as to communicate them with each other. The gas communication conduit 47, the first gas outflow hole 46 and the spring chamber 14 constitute a high pressure side pressure adding means 48 for adding the gas pressure of the first gas outflow hole 46 to the urging force of the high pressure side spring 12. ing. A low-pressure gas chamber 49 formed of an annular space is formed outside the first gas outflow hole 46 near the end thereof. Between the low pressure side gas chamber 49 and the pressure chamber 36 in the bellows 32, there are formed pores 50 communicating with each other.
The fine pores 50 act as pressure guiding paths for transmitting pressure changes to the pressure chambers 36 due to changes in the flow rate of the gas flowing in the low pressure side gas chamber 49. A second gas outflow hole 51 formed in the base body 1 is connected to a portion of the low pressure side gas chamber 49 opposite to the first outflow hole 46. Due to the cylinder portion 27, the piston 28, the bellows 32, the low pressure side gas chamber 49 and the pores 50 formed as described above, a force corresponding to the flow rate of the gas flowing through the low pressure side gas chamber 49 or the gas outflow conduit is applied to the low pressure side. A low pressure side pressure applying means 52 for applying the low pressure side valve body in the direction of separating the valve body from the valve seat is configured. Further, the low pressure side pressure reducing valve 53 is constituted by the constituent members denoted by reference numerals 17 to 50 excluding the second gas communication conduit 18 and the fifth gas communication conduit 47.

A valve seat 54 for an on-off valve is formed on the base body 1 so as to correspond to the end of the second gas outflow hole 51. A valve body storage chamber 55 is formed in a portion of the base body 1 facing the valve seat 54.
A valve body 56 is arranged inside. The valve body 56 is supported on the base body 1 by screw connection and can be opened and closed by operating a knob 57 attached to the end opposite to the valve seat 54 side. The valve seat 54, the valve body storage chamber 55, the valve body 56 and the knob 57 constitute an on-off valve 58. A columnar protrusion 59 whose axis is orthogonal to the second gas outflow hole 51 is integrally formed near the mounting position of the on-off valve 58 of the base 1. A third gas outflow hole 60, one end of which is connected to the valve body storage chamber 55, is formed at the axial center of the columnar projection 59, and the columnar projection 59 is provided at the other end of the third gas outflow hole 60. The float accommodating portion 61 having a diameter larger than that of the hole is continuously formed. The columnar protrusion 59 is provided with two display windows 62 for peeping into the float storage 61, and each display window 62 has a transparent plate 63 for keeping the float storage 61 airtight.
Is fitted. Float storage part 61 of columnar protrusion 59
A spring accommodating recess 64 is formed in a portion opposite to the opening / closing valve 58 side, and the spring accommodating recess 64 is connected to a fourth gas outflow hole 65 formed in the columnar protrusion 59. Float storage
A float 66 is accommodated in the 61, and the float 66 is supported by the cylindrical base portion 67 having a bottom and a plurality of gas flow holes 68 formed in the bottom portion of the base 67 and the conical head portion. 3 and a fitting 69 formed so as to be fitted into the gas outflow hole 60. A spring 70 is arranged between the float 66 and the spring accommodating recess 64, and the spring 70 allows the float 70 to
66 is biased towards the third gas outlet 60. These third gas outflow hole 60, float storage 61, display window
A flow detecting mechanism 71 for detecting the flow of gas is constituted by 62, the float 66 and the spring 70. The first gas outflow hole 46, the low pressure side gas chamber 49, and the second gas outflow hole 46 formed in the base body 1 as described above.
Gas outflow hole 51, valve body storage chamber 55, third gas outflow hole 60,
The float housing portion 61, the spring housing recess 64, and the fourth gas outlet hole 65 constitute a gas outlet conduit 72.

Next, the operation and operation of the above embodiment will be described with reference to FIGS. First, the gas inflow passage 2 of the substrate 1
A gas supply source (not shown) such as a gas cylinder is connected to, and a gas chamber of a gas supply device (not shown) such as a communication cable is connected to the gas outflow conduit 72 of the base 1. In this state, as shown in FIG. 2, the on-off valve 58 of the two-stage pressure reducing valve device of the present invention is closed, and the low pressure side pressure reducing valve 52 is also closed. The high pressure side pressure reducing valve 16 is the high pressure side valve body 6 of the high pressure side spring 12 when gas is not supplied.
It is always open due to the urging force against. Next, when gas is supplied from the gas supply source to the gas inflow conduit 2 as shown by the arrow in FIG. 2, the gas supplied to the high pressure side valve body storage chamber 3 passes through the second gas communication conduit 18 and to the low pressure side. It is fed to the valve body storage chamber 17 and is fed to the pressure chamber 15 through the first gas communication passage 10 formed in the high pressure side valve body 6. Gas pressure chamber
When the pressure is continuously supplied to 15, the pressure in the pressure chamber 15 increases, and this pressure acts against the biasing force of the high pressure side spring 12 against the high pressure side valve body 6, and finally closes the high pressure side pressure reducing valve 16. . In this state, the on-off valve 58, the high pressure side pressure reducing valve 16 and the low pressure side pressure reducing valve
53 and are closed. Next, while operating the knob 44 of the low pressure side pressure reducing valve 53 while observing the pressure gauge (not shown) for measuring the gas pressure in the second gas outflow hole 51 of the gas outflow conduit 72, the low pressure side valve body 20 is moved to its valve seat. The gas pressure in the second gas outflow hole 51 is set to a desired pressure (the pressure of the gas filling the gas chamber of the gas supply device) while being separated from 19. At this time, the first gas outlet hole 46
The gas inside passes through the fifth gas communication conduit 47 and the high pressure side pressure reducing valve
It is fed to 16 spring chambers 14. Therefore, the gas pressure in the spring chamber 14 acts in the direction in which the high pressure side valve body 6 is separated from the high pressure side valve seat 4, and the biasing force of the high pressure side spring 12 apparently increases. In other words, this means that the gas pressure on the low pressure side of the high pressure side pressure reducing valve 16 (in the low pressure side valve body storage chamber 17) has increased, that is, the gas pressure adjustment range of the low pressure side pressure reducing valve 53 has expanded. .

At this time, the gas pressure in the second gas outlet hole 51 is
It is transmitted to the pressure chamber 36 in the bellows 32 through 50 (pore 50
Gas enters the bellows through), the bellows 32 extends, and the low-pressure side spring 41 is bent. At this time, the expansion of the bellows 32 acts so as to reduce the urging force of the low pressure side spring 41 on the piston 28, and the piston 28 is attached to the low pressure side valve body 20 side by the deflection amount of the low pressure side spring 41 and the expansion of the bellows 32. Biasing force is generated. When the urging force for urging the piston 28 toward the low pressure side valve body 20 side and the gas pressure in the second gas outflow hole 51 are balanced, the low pressure side valve body 20 contacts the low pressure side valve seat 19 and the low pressure side. The pressure reducing valve 53 is closed, and then the high pressure side pressure reducing valve 16 is also closed. This completes the pressure setting operation for the gas supplied to the gas supply device.

Next, as shown in FIG. 3, the on-off valve 58 is opened to supply the gas to the gas supply device. When the open / close valve 58 is opened, the gas in the first gas outflow hole 46 and the second gas outflow hole 51 flows through the open / close valve 58 to the gas supply device side. When the gas flows through the gas outflow conduit 72, the gas pressure in the low pressure side gas pressure adjusting chamber 31 decreases, and the biasing force of the low pressure side spring 41 against the piston 28 exceeds the gas pressure in the low pressure side gas pressure adjusting chamber 31. The piston 28 moves to the low pressure side valve body 20 side and the low pressure side pressure reducing valve 53 opens. Further, at this time, the low pressure side gas chamber 49 and the pores 50 have a negative pressure due to the gas flow flowing through the gas outflow conduit 72, and the gas in the pressure chamber 36 flows out, and this negative pressure acts on the pressure chamber 36 in the bellows 32. Then, the bellows 32 is deformed so as to contract toward the low pressure side valve body 20 side. When the bellows 32 contracts toward the low pressure side valve body 20, the contracting force of the bellows 32 acts to apparently increase the urging force of the low pressure side spring 41 to the piston 28. In other words, the contracting force of the bellows 32 is low. Apart from the urging force of the side spring 41, the low pressure side valve body 20 acts on the piston 28 in the direction away from the valve seat 19, and the bottom pressure side valve body 20 moves further away from the valve seat 19 (the low pressure side pressure reducing valve 53 Open further). That is, the bottom pressure side pressure applying means 52 operates to open the low pressure side pressure reducing valve 53 greatly. The larger the opening of the low pressure side pressure reducing valve 53 (the bottom pressure side valve body 20 is
The farther away from 19), the larger the flow rate of the outflow gas (the gas pressure in the low-pressure side gas adjustment chamber 31 increases). For example, in an example of a device actually manufactured, the gas pressure in the low pressure side gas adjustment chamber 31 before opening the on-off valve 58 was 1 kgf / cm ² , but the low pressure after the low pressure side pressure reducing valve 53 was opened. Side gas adjustment room 31
The gas pressure inside rose to 1.47 to 1.48 kgf / cm ² . By the way, in the device of the conventional structure which does not have the low pressure side pressure applying means 52, when the gas pressure in the low pressure side gas adjustment chamber is set to 1 kgf / cm ² , the low pressure side gas adjustment chamber is opened after the low pressure side pressure reducing valve is opened. The gas pressure dropped to 0.77 to 0.78 kgf / cm ² . Low pressure reducing valve 5
When 3 is opened and gas flows out, the gas in the high pressure side pressure chamber 15 also flows out, and the force that adds the biasing force of the high pressure side spring 12 to the high pressure side valve body 6 and the gas pressure in the gas chamber 14 is the high pressure side. Pressure chamber
The high pressure valve body 6 is separated from the valve seat 4 by overcoming the gas in 15, and the high pressure side pressure reducing valve 16 is opened. In this way, the gas pressure reduction valve 16 and the low pressure side pressure reduction valve 53 from the gas supply reduction reduce the pressure in two stages and supply them to the gas supply device, but the gas flows through the gas outflow conduit 72. It is detected by the galvanizing mechanism 71. That is, in this flow detecting mechanism 71, unlike the conventional flowmeter, the fitting 69 of the float 66 has the third gas outlet hole.
When the flow rate of the gas is such that the gas flows out from the gap between the fitter 69 and the third gas outflow hole 60 when fitted into the 60, and when the fitter 69 is the third gas outflow hole. It operates both when it is separated from 60 and when the flow rate of gas in which the float 66 floats in the storage section 61 is extremely large. This flow detection mechanism 71 is, for example, 1/1000 to 1/10 of the maximum gas flow rate.
It is possible to detect whether or not gas is flowing for a minimum gas flow rate of about 0. Further, whether or not the gas detected by the flow detecting mechanism 71 is flowing is displayed by the cylindrical base 67 located in the display window 62. When it is detected by the flow detecting mechanism 71 that the flow rate of the gas is equal to or less than the predetermined value, the knob 44 of the low pressure side pressure reducing valve 53 is turned to loosen the screw rod and the low pressure side pressure reducing valve 53 is closed.

In the above embodiment, the bellows is closed when the on-off valve 58 is closed and the gas is filled in the first gas outflow hole 46 and the second gas outflow hole 51 through the high pressure side pressure reducing valve 16 and the low pressure side pressure reducing valve 53.
The difference between the pressure exerted by the piston 28 due to the expanding force of 32 and the pressure exerted by the piston 28 due to the contracting force of the bellows 32 when the on-off valve 58 is opened and flowing in the gas outflow conduit 72 is calculated as follows. If the on-off valve of the two-stage pressure reducing valve device is opened and the bellows 32 and the pore 50 are set so as to be equal to the difference between the gas pressure when the gas flows through the gas outflow conduit and the gas set pressure. Automatically set gas pressure and gas outlet conduit 72
The supply pressure of the gas flowing through can be the same.

Further, the low-pressure side pressure applying means 52 may use a case having a diaphragm instead of the bellows 32, and may have a structure in which the displacement amount of the diaphragm is added to the low-pressure side spring 41.

Furthermore, the high-pressure side pressure applying means 48 is not limited to the one in which the fifth gas communication guide path 47 is connected to the first gas outflow hole 46 as in the above-mentioned embodiment, and the gas outflow guide path 72 and the high pressure side. Any element may be used as long as it communicates with the spring chamber 14 of the side pressure reducing valve 16.

(Effect of the invention) As described above, according to the first invention of the present application, when the on-off valve is opened and the gas is supplied to the gas supply device, the low pressure side pressure applying means responds to the flow rate of the outflow gas. Applied force in the direction of separating the low pressure side valve body from the low pressure side valve seat to further separate the low pressure side valve body from the bottom pressure side valve seat, the outflow gas outflow amount or the outflow gas pressure can be increased, It is possible to fill the gas chamber of the gas supply device earlier than before.

Further, according to the second invention of the present application, since the high-pressure side pressure applying means applies the pressure of the gas in the gas outflow conduit to the high-pressure side valve body in the direction of separating the high-pressure side valve body from the high-pressure side valve seat, The urging force of the high-pressure side spring can be apparently increased by the pressure of the gas in the gas outflow conduit, and the adjustment range of the low-pressure side pressure reducing valve can be increased without increasing the size of the high-pressure side spring.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal sectional view of a pressure reducing valve device of the present invention, FIGS. 2 and 3 are operation explanatory views showing the operation of each valve, and FIG. FIG. 5 is an external view of the mechanism, and FIG. 5 is a schematic vertical sectional view of a conventional pressure reducing valve device. 2 ... Gas inflow conduit, 6 ... High pressure side valve body, 12 ... High pressure side spring, 16 ... High pressure side pressure reducing valve, 18 ... Second gas communication conduit, 20 ... Low pressure side valve body, 41 ... Low pressure side spring, 48 ... High pressure side pressure applying means, 52 ... Low pressure side pressure applying means, 53 ... Low pressure side pressure reducing valve, 72 ... Gas outflow conduit.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenji Wakatsuki 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Public Corporation (72) Inventor Rokuro Sato 2391-1, Kamiyabe-cho, Totsuka-ku, Yokohama-shi Stock Association Kakudomaru Seiki Seisakusho (56) References: Actually open 55-78205 (JP, U) Actually open 56-88314 (JP, U) Actually open 57-10013 (JP, U)

Claims (2)

(57) [Claims] 1. A high-pressure side pressure reducing valve having a high-pressure side spring for urging the high-pressure side valve body in a direction of separating the high-pressure side valve body from the high-pressure side valve seat, and a direction of separating the low-pressure side valve body from the low-pressure side valve seat. A low-pressure side pressure reducing valve for reducing the pressure of the outflow gas having a low-pressure side spring for biasing the low-pressure side valve body so that the urging force of the high-pressure side pressure reducing valve can be adjusted. A gas inflow conduit is connected to the low pressure side pressure reducing valve, a gas discharge conduit is connected to the low pressure side pressure reducing valve, and an on-off valve is connected to the gas outflow conduit to reduce the pressure in the gas chamber of the gas supply device to a predetermined pressure. In a two-stage pressure reducing valve device used for filling with gas, the low pressure side valve applies a force corresponding to a flow rate of the outflow gas flowing through the gas outflow conduit in a direction of separating the low pressure side valve body from the valve seat. Two-stage type characterized in that low pressure side pressure applying means for applying to the body is provided Valve apparatus. 2. A high pressure decompression having a high pressure side spring for urging the high pressure side valve body in a direction of separating the high pressure side valve body from the high pressure side valve seat, and a direction of separating the low pressure side valve body from the low pressure side valve seat. It is connected in series with a low pressure side pressure reducing valve for reducing the pressure of the outflow gas by having a low pressure side spring for biasing the low pressure side valve element with an adjustable urging force, and a gas is connected to the high pressure side pressure reducing valve. An inflow conduit is connected, a gas outflow conduit is connected to the low-pressure side pressure reducing valve, and an opening / closing valve is connected to the gas outflow conduit, so that the gas in the gas chamber of the gas-supplied device is decompressed with a predetermined pressure of gas. In a two-stage pressure reducing valve device used for filling, a force corresponding to a flow rate of the outflow gas flowing through the gas outflow conduit is applied to the low pressure side valve body in a direction of separating the low pressure side valve body from the valve seat. Low pressure side pressure applying means for applying, and pressure of gas in the gas outflow conduit And a high pressure side pressure applying means for applying the high pressure side valve body to the high pressure side valve body of the high pressure side pressure reducing valve in a direction of separating the high pressure side valve body from the high pressure side valve body. .