JP2544678Y2 - Non-contact type water saving valve - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a non-contact type water saving valve used for cleaning electronic parts such as wafers.

[0002]

2. Description of the Related Art When a precision electronic component such as a wafer is cleaned with pure water or the like, a fluid supply valve generally called a water saving valve is used. This water-saving valve has a so-called general switching valve mechanism for filling the inside of the washing tank with a fluid, and always keeps a small amount of fluid even when the valve mechanism is closed to prevent the generation of bacteria due to stagnation of the fluid. Supply mechanism.

As disclosed in Japanese Utility Model Laid-Open Publication No. Hei 3-29782, the applicant of the present application discloses a water-saving valve of this kind, which includes a minute amount of dust caused by contact between a valve body and a fluid inlet when the valve is opened and closed. In order to prevent debris (also referred to as particles) from adhering to the electronic components being cleaned and causing a product defect, the valve body and the fluid inlet are kept in non-contact even when the valve body is closed. We proposed a non-contact type water-saving valve that continuously supplies a small amount of fluid by forming a small gap.

[0004] However, with this disclosed technique, although the intended purpose has been achieved, it has now been required to adjust the opening amount of the gap when the valve is closed.

[0005]

SUMMARY OF THE INVENTION In response to such a demand, the present invention provides a mechanism for adjusting the clearance between the valve body and the fluid inlet when the valve body is closed in the non-contact type water saving valve. It is a suggestion.

[0006]

Means for Solving the Problems That is, the present invention provides:
A diaphragm valve body having a peripheral portion fixed in a valve chamber opens and closes with respect to an inflow port of a controlled fluid by reciprocation of a piston member connected via a valve rod, and a valve body when the valve body is closed. In the non-contact type water saving valve mechanism in which a slight gap is formed between the valve stem and the inflow port, the valve stem is configured to be freely rotatable, and the valve stem body has a first screw portion and a valve. A second screw portion having a different screw pitch from the first screw portion is formed at a rod tip, and the piston member has a penetrating inner screw portion screwed with the first screw portion, and The valve body is provided with an operating member connected to the valve stem integrally with the valve body so as to be able to move forward and backward by the rotation of the valve stem. The member has an inner threaded portion screwed with the second threaded portion, and the valve stem An operating member screwed to the second screw portion by the rotation of the valve stem is screwed to the valve stem so as to be able to move forward and backward by the rotation, and a piston member screwed to the first thread portion by the rotation of the valve stem. The non-contact type water-saving valve according to claim 1, wherein the valve body is further advanced or retracted by an amount corresponding to the screw pitch difference, so that a gap between the valve body and the fluid inflow port when the valve is closed can be adjusted. .

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is an overall vertical sectional view showing an example of a non-contact type water saving valve according to the present invention, FIG. 2 is a schematic view showing a relation of a screw portion in a fine adjustment mechanism, and FIG. 3 is a turning handle for adjustment and its stopper. FIG.

As shown in FIG. 1, the non-contact type water-saving valve 10 includes a diaphragm valve body 20 having a peripheral portion 22 fixed in a valve chamber 12 of a valve box 11 via a valve rod 30. The reciprocating motion of the piston member 40 causes the controlled fluid F to open and close with respect to the inlet 13. When the valve body 20 is closed (the position indicated by the solid line in FIG. 1), the valve body 21 A small gap C is formed with the inflow port 13. In the figure, reference numeral 14 denotes an inlet port of a controlled fluid F such as pure water, 15 denotes an outlet port thereof, and 25 denotes a diaphragm cushion.

The diaphragm valve body 20 is actuated by a piston member 40 inserted into a cylinder portion 51 of a cylinder block 50 as shown in the figure. That is, the cylinder member 51 of the cylinder block 50 includes the piston member 40
, The valve closing air inlet 52 for closing the valve and the valve opening air inlet 5 for retracting the piston member 40 to open the valve.
The piston member 40 is reciprocated by an air switching mechanism (not shown). Reference numeral 41 denotes a spring. The solid line position in the figure is when the valve is closed when air is supplied from the air inflow port 52, and the valve body 2 indicated by a chain line in the figure is closed.
0R and the position of the piston member 40R are located at the air inlet 53.
This represents the state when the valve is opened, to which more air has been sent.

The forward limit position of the piston member 40 is shown in FIG.
As shown by the solid line, the piston member front end 40f and the cylinder part front end 51f of the cylinder block 50 are in contact with each other. The retreat limit position is also ultimately determined by the contact between the rear end 40r of the piston member and the rear end 51r of the cylinder portion of the cylinder block 50. Usually, however, the opening adjustment rod (stopper) shown in the upper part of FIG. ) 71
It is made adjustable. That is, the chain line 40 in FIG.
As shown by R, when the valve is opened, the rear end 30r of the valve rod 30 to which the piston member 40 is attached abuts on the opening adjustment rod (stopper) 71, whereby the piston member 4
A zero retraction limit position is determined. Reference numeral 70 denotes a valve cap detachably attached to the cylinder block 50, 72
Is an adjustment knob for the opening adjustment rod (stopper) 71;
Is the lock nut. It goes without saying that the opening / closing stroke of the valve element 20 is determined by the forward limit position (solid line position) and the backward limit position (dashed line position) of the piston member 40. The opening and closing stroke of the valve body 20 in this embodiment is about 4 mm at the maximum.

As described above, when the piston member 40 advances, that is, when the valve is closed, the gap C formed between the valve body 21 of the valve body 20 and the fluid inlet 13 is increased.
The mechanism is as follows.

That is, first, the valve stem 20 is configured to be rotatable. As shown in FIG. 1, the valve stem 20 is rotatably tightly fitted in a mounting hole 54 of the cylinder block 50, and its rear portion projects from the cylinder block 50. The rotation can be adjusted as needed by removing the valve cap 70 described above.

A first screw portion 32 is formed on the main body 31 of the valve stem 30, and a second screw portion 33 is formed on the tip of the valve shaft 30. The first screw portion 32 and the second screw portion 33 include, for example, as described below with reference to FIG.
The thread pitch a of the first threaded portion 32 is 1 mm and the second threaded portion 3
3 are formed with different screw pitches, such as a screw pitch b of 1.5 mm.

The piston member 40 includes the first screw portion 32
And has a penetrating inner thread portion 42 screwed with the valve stem 3
It is held by the valve rod 30 so as to be able to move forward and backward by the rotation of 0. In other words, the piston member 40 does not rotate with the rotation of the valve stem 30 by the rotation preventing pin indicated by the reference numeral 45 in FIG. fall back.

On the other hand, an actuating member 60 connected to the valve rod 30 is provided integrally with the valve body 21 on the diaphragm valve body 20. Reference numeral 61 denotes a fixing portion. The operating member 60 has a second threaded portion 33 at the tip of the valve stem 30.
The operating member 60 is screwed to the valve rod 30 so as to be able to advance and retreat by the rotation of the valve rod 30. Since the diaphragm valve body 20 to which the operating member 60 is fixed is fixed in the valve chamber 12 at the peripheral edge portion 22, the diaphragm valve body 20 does not rotate with the rotation of the valve stem 30, By the rotation, it moves forward and backward by a predetermined screw pitch. As the operating member 60 advances and retreats, the valve body 21 of the valve body 20 advances and retreats in the valve chamber 12 by the amount of the movement.

Here, when the valve rod 30 is rotated by a predetermined angle, the piston member 40 screwed to the first screw portion 32 and the operating member 60 screwed to the second screw portion 33 become the respective members. Move forward and backward by the amount corresponding to the screw pitch. Since the amount of protrusion of the operating member 60 is based on the difference between the amount of movement of the piston member 40 and the amount of movement of the operating member 60, the amount of operation member 60 is different from the screw pitch of the piston member 40. Many steps forward or backward,
The gap C between the valve body 20 of the valve body 20 to which the operating member 60 is fixed and the fluid inlet 13 when the valve body 21 is closed is adjusted.

This will be described with reference to the example shown in FIG. In this example, the thread pitch a of the first thread portion 32 of the valve stem 30 to which the inner thread portion 42 of the piston member 40 is screwed is 1 mm, and the second pitch of the valve stem 30 to which the inner thread portion 62 of the operating member 60 is screwed. When the thread pitch b of the threaded portion 33 is 1.5 mm, and the valve stem 30 is rotated by one 360 ° in the reverse screw direction, the piston member 40 moves forward by 1 mm and the operating member 60 is moved 1.5 mm.
Advance. As a result, the difference between the two screw pitches (ba)
The tip of the operating member 60 protrudes from the piston member 40 by 0.5 mm. In addition, when the valve stem 30 makes one rotation in the opposite screw direction, the piston member 40 becomes 1 mm.
Retracting, the actuating member 60 retracts 1.5 mm, so that
The tip of the operating member 60 is retracted from the piston member 40 by 0.5 mm, which is the difference (ba) between the two screw pitches. The amount of protrusion and the amount of retraction due to the difference in the screw pitch is the amount of adjustment of the gap C with the fluid inlet 13 when the valve body 21 of the valve body 20 is closed.

Therefore, in this example, the valve stem 30 is
If the rotation is made by one-half, the operating member 60 (that is, the valve body 21) can make the gap C with the fluid inflow port 13 wider or narrower by 0.5 / 12 mm when the valve is closed. That is. It should be noted that which of the screw pitch of the first screw portion 32 and the screw pitch of the second screw portion 33 is to be increased, and how much the difference between the screw pitches is to be appropriately determined as necessary. Needless to say.

FIG. 3 further shows an adjusting handle 55 for rotating the valve stem 30. As shown in FIG. 3, if the handle 55 is divided into 12 parts, the difference in screw pitch can be reduced. Fine adjustment can be performed in (ba) / 12 units, and change adjustment of the gap C can be easily, easily, and reliably performed. In this example, the valve stem 30 is fixed by inserting a lock pin 57 into a notch 56 provided in the handle 55. Symbol 59
Denotes an open groove of the lock pin (refer to a corresponding portion in FIG. 1).

In the non-contact type water saving valve constructed as described above, first, when the washing tank is filled with fluid, the piston is inserted through the valve opening air inlet 53 formed in the cylinder portion 51 of the cylinder block 50. Air for operation is introduced to retract the piston member 40. At this time, the piston member 40 retreats to the maximum opening adjusted by the opening adjustment rod 71, and the controlled fluid F flows through the maximum gap formed between the valve body 21 of the valve body 20 and the inflow port 13. The fluid F flows out of the inlet port 14 to the outlet port 15, and the fluid F is injected into the cleaning tank in a short time with the maximum outflow amount.

When a predetermined amount of the fluid F is filled in the cleaning tank and the cleaning processing of the wafer or the like is started in the cleaning tank, the valve closing air inlet 5 formed in the cylinder portion 51 is formed.
The piston member 40 is advanced by switching and feeding air for piston advance from 2. The switching of air causes the piston member 40 to move forward and the valve body 20 to move to the closed state. At this time, in the water-saving valve 10 of the present invention, a predetermined gap C adjusted between the main body 21 of the valve body 20 and the inflow port 13 is formed, so that the fluid F to be pumped is passed through the gap C. The fluid is constantly discharged by a predetermined amount, and the fluid in the cleaning tank is replenished little by little without stagnation.

[0022]

[Effects of the Invention] As is clear from the above description, the present invention has a non-contact type valve structure in which there is no contact between the valve body and the fluid inflow port. It can be completely prevented.

At the same time, according to the present invention, the gap between the valve body and the inflow port can be adjusted as desired, so that the flow rate of the fluid can be appropriately adjusted as needed, and the accuracy and efficiency of the operation can be improved.

[Brief description of the drawings]

FIG. 1 is an overall longitudinal sectional view showing an example of a non-contact type water saving valve according to the present invention.

FIG. 2 is a schematic diagram showing a relationship between screw portions in the fine adjustment mechanism.

FIG. 3 is a plan view of a main part showing a turning handle for adjustment and a stopper thereof. DESCRIPTION OF SYMBOLS 10 Non-contact type water saving valve 12 Valve chamber 13 Inflow port of controlled fluid C Gap of inflow port 20 Diaphragm valve 21 Valve main body 22 Peripheral edge 30 Valve stem 31 Valve stem main body 32 First screw part 33 Second screw part 40 Piston Member 42 Internal thread 50 Cylinder block 51 Cylinder 55 Rotating handle 57 Lock pin 60 Actuating member 62 Internal thread 71 Opening adjustment rod

Claims (3)

(57) [Scope of request for utility model registration] A diaphragm valve having a peripheral portion fixed in a valve chamber is opened and closed with respect to an inflow port of a controlled fluid by reciprocating motion of a piston member connected via a valve rod. In a non-contact type water-saving valve mechanism configured to form a small gap between the valve body and the inflow port when closed, the valve stem is configured to be rotatable, and the valve stem is A first thread portion and a second thread portion having a different thread pitch from the first thread portion are formed at the tip of the valve stem, and the piston member has a penetrating inner thread portion screwed with the first thread portion. An operating member connected to the valve stem is provided integrally with the valve body, and the operating member is connected to the valve body so that the valve stem can be moved forward and backward by the rotation of the valve stem. And the actuating member has an inner threaded portion that is screwed with the second threaded portion. An operating member screwed to the second screw portion by the rotation of the valve stem is screwed to the first screw portion. Forward or backward more by the difference in thread pitch than the piston member
A non-contact type water-saving valve characterized in that a gap between the valve body and the fluid inlet can be adjusted when the valve body is closed. 2. The non-contact type water-saving valve according to claim 1, wherein a screw pitch of the second screw portion is larger than a screw pitch of the first screw portion of the valve stem. 3. The non-contact type water-saving valve according to claim 1, wherein a rotary handle and a stopper thereof are formed at a rear portion of the valve stem.