JP2541613Z

JP2541613Z -

Info

Publication number: JP2541613Z
Authority: JP
Original assignee: 清原まさ子
Publication date: 1999-07-12

Description

【考案の詳細な説明】【０００１】【産業上の利用分野】本考案は、半導体製造装置等で使用する微流量調整用の制御器の改良に係り、弁棒駆動部に差動ねじ機構を採用することにより、構造が簡単で且つ正確な微流
量調整が出来るようにした制御器に関する。【０００２】【従来の技術】半導体製造装置等に於いて使用される高純度ガス用の制御器は、所謂パーティ
クルフリーやデッドスペースフリーと云う特性が厳しく要求される。そのため、
半導体製造の分野では、前記パーティクルフリーやデッドスペースフリーの要求
を構造的に充足し易いダイヤフラム型制御弁（特にダイレクトダイヤフラム弁）
が多く使用されている。しかし、ダイヤフラム型制御弁は一般にダイヤフラムの作動ストロークが極め
て小さいため、本質的に流量等の調整には適さないと云う難点がある。【０００３】ところで、ダイヤフラム型制御弁の流量調整の問題を解決するものとして、ギ
ヤー型の減速機構を用いてバルブハンドルの回転数を低減させることにより、弁
体のストロークを微調整するようにした制御弁が開発されている。しかし、この
ギヤー機構の弁駆動部を備えたダイヤフラム型制御弁は、弁駆動部の構造が複雑
で著しく大形化し、制御弁の小形化が図れないと云う問題がある。【０００４】また、出願人は先に、ダイヤフラム型制御弁の正確な微流量調整を可能にする
ものとして、図３に示すような構造の制御器を開発し、実開平１−１７６２７５
号としてこれを公開している。即ち、圧電素子Ａへ印加する入力電圧を変えてそ
の延び量を制御することにより、ダイヤフラムＢを介して弁体Ｃを上・下動させ
、弁体Ｃと弁座Ｄ間の間隙を調整すると共に、圧電素子Ａの上方にマイクロメー
タＥを設け、圧電素子Ａを介して弁体Ｃに加わる押圧力を常時一定圧に調整する
ものである。当該制御器は、１００〜５００ｃｃ／ｍｉｎ程度の微流量ガスを比較的高精度
で自動的に流量制御することができ、優れた実用的効用を奏するものである。【０００５】【考案が解決しようとする課題】しかし、前記図３の制御器にも下記の如く解決すべき多くの問題が残されてい
る。イ．自動流量制御が基本となっており、手動による流量調整が簡単に行えない
こと。ロ．圧電素子やマククロメータを含む弁駆動部の竪方向寸法が著しく大形化し
、制御弁の小形化が図れないこと。ハ．制御すべきガス流量が大きくなると、ストロークを大きくする必要から大
形の圧電素子が必要となり、実用化が困難であること。ニ．圧電素子の制御装置等が必要なため、製造コストが上昇すること。本件考案は、従前の制御器に於ける上述の如き問題を解決せんとするものであ
り、構造が簡単で大幅な小形化が図れるとともに、自動操作のみならず手動操作
でも高精度な微流量制御が行え、しかも製造コストの大幅な引下げを可能とした
制御器を提供するものである。【０００６】【課題を解決するための手段】流体入口２と流体出口３と弁座４と弁室５を備えた弁箱２内へダイヤフラム６
を配設すると共に、弁箱１に備えたボンネット１１を挿通して昇降動自在に配設
したステムの下降により、前記ダイヤフラム６を下降させて流体通路を閉鎖する
構成としたダイヤフラム型制御弁に於いて、連結ねじ部１１ｃを設けたボンネッ
ト１１内へ連結ねじ部１４ｃを有するスライドステム１４を廻り止めした状態で
昇降動自在に挿着すると共に、内側にねじピッチＰ１の第１連結ねじ部２２を、
また外側に前記ねじピッチＰ１より大きいねじピッチＰ２の第２連結ねじ部２３
を夫々同心状に備えた回動ステム１５を前記スライドステム１４の上方に同軸心
状に配設し、第１連結ねじ部２２を前記スライドステム１４の連結ねじ部１４ａ
へ、また第２連結ねじ部２３を前記ボンネット１１の連結ねじ部１１ｃへ夫々螺
合し、前記回動ステム１５の回転によりスライドステム１４を昇降動させること
を基本構成とするものであり、回動ステム１５の一回転毎に第２連結部のねじピ
ッチＰ２と第１連結部のねじピッチＰ１との差に相当する微小距離だけスライド
ステム１４を昇降動させることを特徴とするものである。【０００７】【作用】ハンドル１７の操作等によって回動ステム１５を回転させることにより、回動
ステム１５はボンネット１１の連結ねじ部１１ｃへ螺合した外側の第２連結ねじ
部２３により、回動しつつ昇降動する。回動ステム１５が回動しつつ昇降動すると、スライドステム１４の連結ねじ部
１４ａと螺合する内側の第１連結ねじ部２２の回動により、廻り止めされたスラ
イドステム１４が昇降動する。即ち、回動ステム１５が１回転すると、スライド
ステム１４は第２連結ねじ部２３のねじピッチＰ２と第１連結ねじ部のねじピッ
チＰ１と差だけ昇降動する。スライドステム１４が上昇すると、ダイヤフラム６はスプリング１０若しくは
ダイヤフラム６自体の弾性力によって上昇し、またスライドステム１４が下降す
ると、ダイヤフラム６は押圧されて下降する。これにより、流体通路はダイヤフ
ラム６によって直接又は間接的にその有効流通面積が調整され、流体の流量制御
が行われる。【０００８】【実施例】以下、図面に基づいて本考案の実施例を説明する。図１は本考案に係る制御器
の縦断面図であり、左側半分は制御器の全閉時を、また右側半分は制御器の全開
時を示すものである。また、図２は図１のＡ−Ａ視断面図である。【０００９】図に於いて、１は弁箱、２は流体入口、３は流体出口、４は弁座、５は弁室、
６はダイヤフラム、７は押えアダプター、８はダイヤフラム押え、９はディスク
、１０はスプリング、１１はボンネット、１２はボンネットナット、１３はパネ
ル止め用ナット、１４は円筒状のスライドステム、１５はボンネット１１とスラ
イドステム１４へ夫々螺合した回動ステムであり、第１部材１５Ａと第２部材１
５Ｂとから形成されている。また、１６は固定用ナット、１７はハンドル、１８はインディゲータ、１９は
廻り止めねじ、２０はハンドル固定ねじ、２１はインディゲータ固定ねじである。【００１０】前記ダイヤフラム６は特殊ステンレス鋼等の薄板により皿形に形成されており
、本実施例では所謂ダイレクトダイヤフラム型弁であるため、弁室５の最下部に
弁座４へ直接対向する姿勢で配設されている。また、当該ダイヤフラム６は弁箱
１に螺着したボンネットナット１２を締込むことにより、弁室５内へ挿着したボ
ンネット１１の下端面よりステンレス鋼製の押えアダプター７を介して弁箱１側
へ押圧され、気密に保持固定されている。【００１１】前記ダイヤフラム押え８はポリイミド等の合成樹脂材によって形成されており
、ディスク９の下面側に固着されている。当該ダイヤフラム押え８はディスク９
がスライドステム１４によって下方へ押圧されることにより、ダイヤフラム６の
上面側を押圧し、これを弁座４へ押圧すると共に、スライドステム１４が上方へ
引上げられることにより、スプリング１０の反力によって上方へ移動する。尚、
本実施例ではスプリング1０の弾力によりスライドステム１４を上方へ押し上げ
る構成としているが、流体圧やダイヤフラム６の反力によって押し上げるように
してもよい。又、本実施例ではダイヤフラム６を直接弁座４へ押し当てる構成と
しているが、ダイヤフラム６の下方に弁体を設け、これを弁座へ押し付けるよう
にしても良い。【００１２】前記ボンネット１１は所謂筒状に形成されており、弁箱１内へ挿入する下方部
の孔部は太径に形成され、ディスク９の収容部１１ａを形成している。また、ボ
ンネット１１の中央部の孔部はやや細径に形成され、前記スライドステム１４の
ガイド部１１ｂを形成している。更に、ボンネット１１の上方部の孔部はやや太
径に形成され、その内周面には後述する回動ステム１５の第２部材１５Ｂが螺合
する連結ねじ部１１ｃが形成されている。当該ボンネット１１は弁箱１の上方から弁室５内へ挿着され、前述の如くボン
ネットナット１２を締込むことにより弁箱１へ気密に固定されている。また、ボ
ンネット１１の外周面には筒状のインディゲータ１８が挿着され、固定用ねじ２１により固着されている。【００１３】前記スライドステム１４は中空状に形成されており、前記ボンネット１１のス
テムガイド部１１ｂ内へ上方より摺動自在に挿着されている。当該スライドステ
ム１４の中空部の内周面には、ねじピッチＰ１の内ねじが設けられており、連結
ねじ部１４ａを形成している。即ち、この連結ねじ部１４ａに、後述する回動ス
テム１５の第１部材１５Ａが螺挿される。尚、本実施例では、前記連結ねじ部１
４ａをねじ径５ｍｍφ、ピッチＰ１＝０．５ｍｍの内ねじとしている。また、当該スライドステム１４の外周面には竪向きに一条のガイド溝１４ｂが
形成されており、廻り止めねじ１９の先端をガイド溝１４ｂ内へ係合させること
により、スライドステム１４が廻り止めされている。【００１４】前記回動ステム１５は、内側の第１部材１５Ａと外側の第２部材１５Ｂを固定
用ナット１６の締め込みにより一体化して形成したものであり、内側の第１部材
１５Ａの下方部外周には外ねじから成るねじピッチＰ１の第１連結ねじ部２２が
、また、外側の第２部材１５Ｂの下方部外周には外ねじから成るねじピッチＰ２
の第２連結ねじ部２３が夫々同心状に形成されている。また、回動ステム１５は前記スライドステム１４の上方にこれと同軸心状に配
設され、内側の第１連結ねじ部２２をスライドステム１４の連結ねじ部１４ａへ
、また外側の第２連結ねじ部２３をボンネット１１の連結ねじ部１１ｃへ夫々螺
合させることにより、ボンネット１１へ取付けられている。【００１５】即ち、回動ステム１５を形成する前記第１部材１５Ａはその下方部の外周面に
スライドステム１４の連結ねじ部（内ねじ）１４ａに螺合する第１連結ねじ部（
外ねじ）２２が形成されており、上方より連結ねじ部１４ａ内へ螺挿されている
。また、第１部材１５Ａの上部は後述する第２部材１５Ｂの内部を挿通してその
上方へ突出されており、中間部に段部２４を設けて固定用ナット２２を締込むこ
とにより、第２部材１５Ｂへ固着されている。尚、本実施例では第１連結ねじ部
２２をねじ径５ｍｍ、ねじピッチＰ１＝０．５ｍｍに形成している。【００１６】また、回動ステム１５を形成する第２部材１５Ｂは中空筒状に形成されており
、その下方部の外周面には前記ボンネット１１の連結ねじ部（内ねじ）１１ｃに
螺合する第２連結ねじ部（外ねじ）２３が形成されていて、ボンネット１１の上
方よりその内方へ螺挿されている。尚、本実施例では、第２連結ねじ部２３をね
じ径が１１ｍｍでねじピッチＰ２が０．５５ｍｍの内ねじとしている。また、当
該第２部材１５Ｂは前述の如く固定用ナット１６により第１部材１５Ａと連結さ
れており、その上方部にはハンドル１７が固定用ねじ２０により挿着固定されて
いる。更に、ハンドル１７の下端部は前記インディゲータ１８の外表面に沿って
回動並びに昇降動し、これにより弁開度や流量調整度が直読される。【００１７】前記本実施例に於いては、第１部材１５Ａと第２部材１５Ｂとを別体とし、両
者を固定用ナット１６により連結固定する構成としているが、両者を一体的に形
成するようにしてもよい。また、本実施例では前記スライドステム１４と回動ステム１５とのねじ連結部
を、スライドステム１４のうちねじ１４ａ内へ第１部材１５Ａの外ねじ２２を螺
挿する構造のねじ連結部としているが、これとは逆に、スライドステム１４側を
外ねじとし、第１部材１５Ａ側を内ねじとしたねじ連結部であってもよい。更に、本実施例では前記回動ステム１４とボンネット１１とのねじ連結部を、
回動ステム１４の第２部材１５Ｂの外ねじ２３をボンネット１１の内ねじ１１ｃ
内へ螺挿する構造のねじ連結部としているが、これとは逆に、第２部材１５Ｂ側
を内ねじとし、ボンネット１１側を外ねじとしたねじ連結部であってもよい。【００１８】換言すれば、本考案に於けるダイヤフラム駆動用の回動ステム１５は、回動さ
れることによってボンネット１１と螺合する第２連結ねじ部２３により回動しつ
つ昇降動すると共に、スライドステム１４と螺合する第１連結ねじ部２２により
スライドステム１４を昇降動させるものであり、ハンドル１７を１回転すること
により、第２連結ねじ部２３のねじピッチＰ２と第１連結ねじ部２２のねじピッ
チＰ１との差だけスライドステム１４が昇降動する。また、前記回動ステム１５の回転駆動はモータやソレノイドで行っても良いことは勿論である。【００１９】次に、本考案の作動について説明する。ハンドル１７を回動すると、回動ステ
ム１５が回動されることになり、ボンネット１１と螺合する第１連結ねじ部２２
を介して回動ステム１５が回動しつつ昇降動する。回動ステム１５が回動すると
、第１部材１５Ａも当然に回動することになり、スライドステム１４と螺合する
第１連結ねじ部２２により、スライドステム１４が止めねじ１９及びガイド溝１
４ｂによって廻り止めされた状態で昇降動される。尚、スライドステム１４の昇降距離は、ハンドル１７の１回転につき第２連結
ねじ部２３のねじピッチＰ２と第１連結ねじ部のねじピッチＰ１との差距離とな
る。スライドステム１４が昇降動すると、スプリング１０の反力と前記スライド
ステム１４の下端部とによってディスク９及びダイヤフラム押さえ８が昇降動さ
れ、これによって弁座５に対してダイヤフラム６が当・離座する。また、スライドステム１４の昇降量等はインディケータ１８上のハンドル１７
の下端部の位置から直読される。【００２０】【考案の効果】本考案は上述の通り、ダイヤフラム型の制御器に於いて、連結ねじ部１１ｃを
設けたボンネット１１内へ連結ねじ部１４ａを有するスライドステム１４を廻り
止めした状態で昇降自在に挿着されると共に、ねじピッチＰ１の第１連結部２２
とねじピッチＰ２の第２連結ねじ部２３を同心状に有する回動ステム１５をスラ
イドステム１４の上方に同軸心状に配設し、回動ステム１５の第１連結ねじ部２
２をスライドステム１４の連結ねじ部１４ａへ、また回動ステム１５の第２連結
ねじ部２３をボンネット１１の連結ねじ部１１ｃへ夫々螺合し、前記第２連結ね
じ部２３と第１連結ねじ部２２とのねじピッチ差（Ｐ２−Ｐ１）でもってスライ
ドステム１４を昇降動させる構成としている。その結果、前記ねじピッチ差（Ｐ２−Ｐ１）を適宜に設定することにより、回
動ステム１５の回転に対するスライドステム１４の昇降量即ち弁体若しくはダイ
ヤフラムのストロークを極めて微細に調整することが出来、より高精度な微流量調整が行える。また、本考案では回動ステム１５をボンネット１１及びボンネット１１内へ挿
着したスライドステム１４へ夫々螺合する構成としているため、制御弁そのもの
の構造が簡素化されると共に組立も簡単になり、しかも制御弁の背丈を短くして
大幅な小形化が可能となる。本考案は上述の通り優れた実用的効用を奏するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a controller for fine flow rate adjustment used in a semiconductor manufacturing apparatus and the like, and a differential screw mechanism is provided in a valve stem driving section. The present invention relates to a controller having a simple structure and capable of performing accurate fine flow rate adjustment by adopting the controller. 2. Description of the Related Art A controller for a high-purity gas used in a semiconductor manufacturing apparatus or the like is required to have strictly so-called particle-free and dead-space-free characteristics. for that reason,
In the field of semiconductor manufacturing, a diaphragm-type control valve (particularly, a direct diaphragm valve) that is structurally easy to satisfy the particle-free and dead-space-free requirements.
Is often used. However, the diaphragm-type control valve generally has a drawback that the working stroke of the diaphragm is extremely small, so that the diaphragm-type control valve is essentially not suitable for adjusting the flow rate or the like. In order to solve the problem of adjusting the flow rate of the diaphragm type control valve, the stroke of the valve body is finely adjusted by reducing the rotation speed of the valve handle using a gear type reduction mechanism. Control valves have been developed. However, the diaphragm type control valve provided with the valve drive unit of the gear mechanism has a problem that the structure of the valve drive unit is complicated and extremely large, so that the control valve cannot be downsized. The applicant has previously developed a controller having a structure as shown in FIG. 3 as a device capable of accurately adjusting a minute flow rate of a diaphragm type control valve.
This is published as an issue. That is, by changing the input voltage applied to the piezoelectric element A and controlling the amount of extension, the valve element C is moved up and down via the diaphragm B, and the gap between the valve element C and the valve seat D is adjusted. In addition, a micrometer E is provided above the piezoelectric element A, and the pressing force applied to the valve element C via the piezoelectric element A is constantly adjusted to a constant pressure. The controller can automatically control the flow rate of a small flow rate gas of about 100 to 500 cc / min with relatively high accuracy, and has excellent practical utility. However, the controller shown in FIG. 3 still has many problems to be solved as described below. I. Automatic flow control is fundamental, and manual flow adjustment cannot be performed easily. B. The vertical dimension of the valve drive section including the piezoelectric element and the Mcchromator must be significantly large, and the control valve cannot be downsized. C. When the flow rate of the gas to be controlled is increased, a large piezoelectric element is required because the stroke needs to be increased, which makes practical use difficult. D. Since a control device for the piezoelectric element is required, the manufacturing cost increases. The present invention is intended to solve the above-mentioned problems in the conventional controller, and has a simple structure and a large downsizing. It is intended to provide a controller which can perform the above-mentioned operations and can greatly reduce the manufacturing cost. A diaphragm 6 is inserted into a valve box 2 having a fluid inlet 2, a fluid outlet 3, a valve seat 4, and a valve chamber 5.
And a diaphragm-type control valve configured to insert the bonnet 11 provided in the valve box 1 so as to be movable up and down, thereby lowering the diaphragm 6 to close the fluid passage. In this case, the slide stem 14 having the connecting screw portion 14c is inserted into the bonnet 11 provided with the connecting screw portion 11c so as to be able to move up and down while being prevented from rotating, and the first connecting screw portion 22 having a screw pitch P1 inside. To
Further, the second connecting screw portion 23 having a screw pitch P2 larger than the screw pitch P1 on the outside.
Was disposed pivot stem 15 having respectively concentrically coaxially heart shape above the slide stem 14, the first coupling screw part 22 connecting screw portion 14a of the slide stem 14
To also are those connecting screw portion 11c respectively screwed into the second coupling screw part 23 of the bonnet 11, a basic structure that is moved up and down the slide stem 14 by the rotation of the rotating stem 15, times The slide stem 14 is moved up and down by a minute distance corresponding to the difference between the screw pitch P2 of the second connecting portion and the screw pitch P1 of the first connecting portion every rotation of the moving stem 15. When the rotating stem 15 is rotated by operating the handle 17 or the like, the rotating stem 15 is rotated by the outer second connecting screw 23 screwed to the connecting screw 11 c of the bonnet 11. While moving up and down. When the rotating stem 15 moves up and down while rotating, the rotation of the inner first connecting screw portion 22 screwed with the connecting screw portion 14a of the slide stem 14 causes the stopped slide stem 14 to move up and down. That is, when the rotation stem 15 makes one rotation, the slide stem 14 moves up and down by the difference between the screw pitch P2 of the second connection screw portion 23 and the screw pitch P1 of the first connection screw portion. When the slide stem 14 is raised, the diaphragm 6 is raised by the elastic force of the spring 10 or the diaphragm 6 itself, and when the slide stem 14 is lowered, the diaphragm 6 is pressed and lowered. Thus, the effective flow area of the fluid passage is adjusted directly or indirectly by the diaphragm 6, and the flow rate of the fluid is controlled. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of the controller according to the present invention, in which the left half shows the fully closed state of the controller and the right half shows the fully opened state of the controller. FIG. 2 is a sectional view taken along line AA of FIG. In the figures, 1 is a valve box, 2 is a fluid inlet, 3 is a fluid outlet, 4 is a valve seat, 5 is a valve chamber,
6 is a diaphragm, 7 is a presser adapter, 8 is a diaphragm presser, 9 is a disc, 10 is a spring, 11 is a bonnet, 12 is a bonnet nut, 13 is a panel fixing nut, 14 is a cylindrical slide stem, and 15 is a bonnet 11 And a rotation stem screwed to the slide stem 14, respectively. The first member 15A and the second member 1
5B. Reference numeral 16 denotes a fixing nut, 17 denotes a handle, 18 denotes an indicator, 19 denotes a turning screw, 20 denotes a handle fixing screw, and 21 denotes an indicator fixing screw. The diaphragm 6 is formed in a dish shape by a thin plate made of a special stainless steel or the like. In this embodiment, the diaphragm 6 is a so-called direct diaphragm type valve. It is arranged in. Further, the diaphragm 6 is tightened with a bonnet nut 12 screwed to the valve box 1, so that the lower end surface of the bonnet 11 inserted into the valve chamber 5 is connected to the valve box 1 via a stainless steel holding adapter 7. And is held and fixed in an airtight manner. The diaphragm retainer 8 is made of a synthetic resin material such as polyimide, and is fixed to the lower surface of the disk 9. The diaphragm holder 8 is a disk 9
Is pressed downward by the slide stem 14, thereby pressing the upper surface of the diaphragm 6 and pressing the upper surface of the diaphragm 6 against the valve seat 4, and the slide stem 14 is pulled upward, whereby the upward force is generated by the reaction force of the spring 10. Move to. still,
In this embodiment, the slide stem 14 is pushed upward by the elastic force of the spring 10. However, the slide stem 14 may be pushed upward by the fluid pressure or the reaction force of the diaphragm 6. In this embodiment, the diaphragm 6 is directly pressed against the valve seat 4. However, a valve body may be provided below the diaphragm 6, and this may be pressed against the valve seat. The bonnet 11 is formed in a so-called cylindrical shape, and a lower hole to be inserted into the valve box 1 is formed to have a large diameter, thereby forming a receiving portion 11 a for the disk 9. The hole at the center of the bonnet 11 is formed to have a slightly smaller diameter, and forms the guide portion 11b of the slide stem 14. Further, the upper portion of the hole portion of the bonnet 11 is formed in a slightly larger diameter, connecting screw portion 11c which is screwed the second member 15 B of the rotary stem 15 described below is formed on the inner peripheral surface thereof. The bonnet 11 is inserted into the valve chamber 5 from above the valve box 1, and is tightly fixed to the valve box 1 by tightening the bonnet nut 12 as described above. A cylindrical indicator 18 is inserted into the outer peripheral surface of the bonnet 11 and is fixed by fixing screws 21. The slide stem 14 is formed in a hollow shape, and is slidably inserted into the stem guide portion 11 b of the bonnet 11 from above. On the inner peripheral surface of the hollow portion of the slide stem 14, an internal thread having a thread pitch P1 is provided to form a connection screw portion 14a. That is, a first member 15A of the rotating stem 15, which will be described later, is screwed into the connecting screw portion 14a. In this embodiment, the connection screw portion 1
4a is an internal thread having a screw diameter of 5 mmφ and a pitch P1 = 0.5 mm. A single guide groove 14b is formed in the outer peripheral surface of the slide stem 14 in a vertical direction, and the slide stem 14 is prevented from rotating by engaging the tip of the detent screw 19 into the guide groove 14b. ing. The rotating stem 15 is formed by integrating an inner first member 15A and an outer second member 15B by tightening a fixing nut 16, and a lower portion of the inner first member 15A. the outer periphery first coupling screw part 22 of thread pitch P1 consisting of external threads, also screw pitch P2 consisting of external threads in the lower portion outside circumference of the outside of the second member 15B
Are formed concentrically with each other. The rotating stem 15 is disposed above and above the slide stem 14 so as to be coaxial with the slide stem 14, and connects the inner first connection screw portion 22 to the connection screw portion 14a of the slide stem 14 and the outer second connection screw portion. The part 23 is attached to the bonnet 11 by screwing it to the connection screw part 11c of the bonnet 11, respectively. That is, the first member 15 A forming the rotating stem 15 has a first connecting screw portion (internal screw) 14 a screwed to a connecting screw portion (inner screw) 14 a of the slide stem 14 on the outer peripheral surface of a lower portion thereof.
An outer screw 22 is formed, and is screwed into the connection screw portion 14a from above. The upper portion of the first member 15A is inserted through the inside of a second member 15B, which will be described later, and protrudes upward. A step portion 24 is provided at an intermediate portion, and the fixing nut 22 is tightened. It is fixed to the member 15B. In the present embodiment, the first connection screw portion 22 is formed with a screw diameter of 5 mm and a screw pitch P1 = 0.5 mm. A second member 15 B forming the rotating stem 15 is formed in a hollow cylindrical shape, and is screwed to a connection screw portion (internal screw) 11 c of the bonnet 11 on an outer peripheral surface at a lower portion thereof. A second connection screw portion (outer screw) 23 is formed, and is screwed inward from above the bonnet 11. In the present embodiment, the second connection screw portion 23 is an internal screw having a screw diameter of 11 mm and a screw pitch P2 of 0.55 mm. Further, the second member 15B is connected to the first member 15A by the fixing nut 16 as described above, and the handle 17 is inserted and fixed to the upper portion thereof by the fixing screw 20. Further, the lower end of the handle 17 rotates and moves up and down along the outer surface of the indicator 18, whereby the valve opening and the flow rate adjustment are directly read. In the present embodiment, the first member 15A and the second member 15B are formed separately and connected and fixed by the fixing nut 16, but they are integrally formed. It may be. In this embodiment, the screw connection between the slide stem 14 and the rotation stem 15 is a screw connection of a structure in which the external screw 22 of the first member 15A is screwed into the screw 14a of the slide stem 14. However, conversely, a screw connection portion having an external thread on the slide stem 14 side and an internal thread on the first member 15A side may be used. Further, in this embodiment, a screw connection between the rotating stem 14 and the bonnet 11 is
The external screw 23 of the second member 15B of the rotating stem 14 is connected to the internal screw 11c of the bonnet 11.
Although the screw connection portion has a structure of being screwed into the inside, the screw connection portion may be a screw connection portion in which the second member 15B side is an internal screw and the bonnet 11 side is an external screw. In other words, the rotating stem 15 for driving the diaphragm according to the present invention is raised and lowered while being rotated by the second connecting screw portion 23 screwed with the bonnet 11 by being rotated, The slide stem 14 is moved up and down by the first connection screw portion 22 screwed to the slide stem 14. By rotating the handle 17 once, the screw pitch P2 of the second connection screw portion 23 and the first connection screw portion The slide stem 14 moves up and down by a difference from the screw pitch P1 of No. 22. Further, it is needless to say that the rotation driving of the rotating stem 15 may be performed by a motor or a solenoid. Next, the operation of the present invention will be described. When the handle 17 is turned, the turning stem 15 is turned, and the first connecting screw portion 22 screwed to the bonnet 11 is rotated.
The rotating stem 15 moves up and down while rotating via the. When the rotation stem 15 rotates, the first member 15A naturally rotates, and the slide stem 14 is fixed to the set screw 19 and the guide groove 1 by the first connection screw portion 22 screwed with the slide stem 14.
It is moved up and down while being prevented from rotating by 4b. The vertical movement distance of the slide stem 14 is the difference between the screw pitch P2 of the second connection screw portion 23 and the screw pitch P1 of the first connection screw portion per rotation of the handle 17. When the slide stem 14 moves up and down, the disk 9 and the diaphragm retainer 8 move up and down by the reaction force of the spring 10 and the lower end of the slide stem 14, whereby the diaphragm 6 comes into contact with and separates from the valve seat 5. . The amount of elevation of the slide stem 14 and the like are determined by the handle 17 on the indicator 18.
Is read directly from the lower end position of. According to the present invention, as described above, in the diaphragm type controller, the slide stem 14 having the connection screw portion 14a is prevented from rotating in the bonnet 11 provided with the connection screw portion 11c. The first connecting portion 22 is inserted so as to be able to move up and down and has a screw pitch P1.
And a second connecting screw part 23 having a screw pitch P2 and a second connecting screw part 23 are coaxially disposed above the slide stem 14, and the first connecting screw part 2 of the rotating stem 15 is provided.
2 is screwed into the connection screw portion 14a of the slide stem 14, and the second connection screw portion 23 of the rotating stem 15 is screwed into the connection screw portion 11c of the bonnet 11, respectively. The slide stem 14 is moved up and down by a screw pitch difference (P2-P1) with the portion 22. As a result, by appropriately setting the screw pitch difference (P2-P1), it is possible to extremely finely adjust the amount of movement of the slide stem 14 with respect to the rotation of the rotating stem 15, that is, the stroke of the valve element or the diaphragm. More precise fine flow rate adjustment can be performed. Further, in the present invention, since the rotating stem 15 is screwed to the bonnet 11 and the slide stem 14 inserted into the bonnet 11, respectively, the structure of the control valve itself is simplified and the assembly is also simplified, In addition, the height of the control valve can be shortened and the size can be significantly reduced. The present invention has excellent practical utility as described above.

【図面の簡単な説明】【図１】本考案に係る制御器の縦断面図である。【図２】第１図に於けるＡ−Ａ視断面図である。【図３】従前のダイヤフラム型制御器の一例を示す縦断面図である。【符号の説明】１は弁箱、２は流体入口、３は流体出口、４は弁座、５は弁室、６はダイヤフ
ラム、７は押えアタプター、９はディスク、１０はスプリング、１１はボンネッ
ト、１１ｃは連結ねじ部、１２はボンネットナット、１４はスライドステム、１
４ａは連結ねじ部、１４ｂはガイド溝、１５は回動ステム、１５Ａは第１部材、
１５Ｂは第２部材、１７はハンドル、１８はインディゲータ、２２は第１連結ね
じ部、２３は第２連結ねじ部、Ｐ１は第１連結ねじ部のねじピッチ、Ｐ２は第２
連結ねじ部のねじピッチ。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal sectional view of a controller according to the present invention. FIG. 2 is a sectional view taken along the line AA in FIG. FIG. 3 is a longitudinal sectional view showing an example of a conventional diaphragm type controller. [Description of Signs] 1 is a valve box, 2 is a fluid inlet, 3 is a fluid outlet, 4 is a valve seat, 5 is a valve chamber, 6 is a diaphragm, 7 is a holding adapter, 9 is a disk, 10 is a spring, 11 is a bonnet. , 11c is a connection thread, 12 is a bonnet nut, 14 is a slide stem, 1
4a is a connection screw portion, 14b is a guide groove, 15 is a rotating stem, 15A is a first member,
15B is a second member, 17 is a handle, 18 is an indicator, 22 is a first connection screw portion, 23 is a second connection screw portion, P1 is a screw pitch of the first connection screw portion, and P2 is a second connection screw portion.
The thread pitch of the connection thread.

Claims

[Claim 1] A diaphragm (6) is inserted into a valve box (1) having a fluid inlet (2), a fluid outlet (3), a valve seat (4), and a valve chamber (5). And the diaphragm (6) is lowered by lowering a stem, which is disposed so as to be movable up and down by inserting a bonnet (11) provided in the valve box (1), thereby closing a fluid passage. Bonnet (11) provided with a connecting screw portion (11c) on the inner peripheral surface in the diaphragm type control valve described above.
A hollow slide stem (14) having a connecting thread (14a) on the inner peripheral surface.
And with lifting and lowering freely be inserted while stopped around the first rod-shaped member having a first connecting screw portion of the screw pitch P ₁ on the outer peripheral surface (22) (15A), said first member (
Hollow cylindrical shape having a second coupling screw part outwardly at its outer peripheral surface and the gap on the outer peripheral surface arranged to coaxially of the screw pitch P ₁ larger than thread pitch P ₂ of 15A) (23)
The rotation stem (15) provided with the second member (15B) is connected to the slide stem (1).
4) The first member (15A) of the rotating stem (15) is arranged coaxially above
Connecting screw portion of the first coupling screw part (22) sliding stem (14) (14 a
) And the second connecting screw portion (23) of the second member (15B) of the rotating stem (15 ).
The hood (11) connecting screw portion engaged respectively threaded to (11c) of the slide stem (14) is moved up and down by the rotation of the rotating stem (15) of the slide stem
The bottom of (14) is an inverted dish-shaped gold with the central part bulging upward through the disk (9).
The diaphragm (6) made of metal sheet is pushed down in the valve closing direction, and the diaphragm (6) is pressed down.
) Is brought into direct contact with the valve seat (4) and the disk (9) is
Always slid by the bias of the spring (10) provided above the diaphragm (6)
A controller configured to push up a stem (14) in a valve opening direction .