JP2540614Y2 - Pre-cooling device for liquefied gas supply piping - Google Patents

Pre-cooling device for liquefied gas supply piping

Info

Publication number
JP2540614Y2
JP2540614Y2 JP1990107416U JP10741690U JP2540614Y2 JP 2540614 Y2 JP2540614 Y2 JP 2540614Y2 JP 1990107416 U JP1990107416 U JP 1990107416U JP 10741690 U JP10741690 U JP 10741690U JP 2540614 Y2 JP2540614 Y2 JP 2540614Y2
Authority
JP
Japan
Prior art keywords
liquefied gas
valve
supply pipe
cooling
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990107416U
Other languages
Japanese (ja)
Other versions
JPH0463899U (en
Inventor
正人 平田
孝 多原
Original Assignee
大陽東洋酸素株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大陽東洋酸素株式会社 filed Critical 大陽東洋酸素株式会社
Priority to JP1990107416U priority Critical patent/JP2540614Y2/en
Publication of JPH0463899U publication Critical patent/JPH0463899U/ja
Application granted granted Critical
Publication of JP2540614Y2 publication Critical patent/JP2540614Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は、窒素、酸素、アルゴン等の液化ガス供給配
管の予冷装置の改良に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial application field) The present invention relates to an improvement of a precooling device for a liquefied gas supply pipe such as nitrogen, oxygen, and argon.

(従来の技術) 従来の液化ガス供給設備は通常第3図に示す如く、液
化ガス貯槽や液化ガス圧力容器から成る液化ガス貯蔵設
備1、液化ガス供給配管2、予冷弁3、使用元弁4、予
冷ガス放出管5及び液化ガス使用設備6等から構成され
ており、使用元弁4を通して液化ガスのみを直接液化ガ
ス使用設備6へ供給するためには、供給配管2内の気化
ガスを排出すると共に、供給配管2を液化ガスの温度の
近傍にまで予冷してその内部に於ける液化ガスの気化を
少なくする必要がある。
(Prior Art) As shown in FIG. 3, a conventional liquefied gas supply facility usually includes a liquefied gas storage facility 1 comprising a liquefied gas storage tank and a liquefied gas pressure vessel, a liquefied gas supply pipe 2, a precooling valve 3, and a use valve 4. , A precooled gas discharge pipe 5 and a liquefied gas use facility 6. In order to directly supply only the liquefied gas to the liquefied gas use facility 6 through the use source valve 4, the vaporized gas in the supply pipe 2 is discharged. At the same time, it is necessary to pre-cool the supply pipe 2 to a temperature close to the temperature of the liquefied gas to reduce the vaporization of the liquefied gas therein.

そのため、液化ガスの供給に際しては、先ず使用元弁
4を閉鎖した状態で予冷弁3を開放し、液化ガスを供給
配管2内へ流してこれと熱交換をさせ、熱交換により生
じた気化ガスを放出管5を通して外部へ放散しつつ供給
配管2を冷却すると共に、放出ガスが気化ガスから液化
ガスに変化したことが確認できないまま、予冷ガス放出
管5の霜の付着等から予冷の完了を推察し、予冷弁3を
閉鎖するようにしていた。
Therefore, when supplying the liquefied gas, first, the precooling valve 3 is opened with the use valve 4 closed, and the liquefied gas flows into the supply pipe 2 to exchange heat therewith, and the vaporized gas generated by the heat exchange While the supply pipe 2 is cooled while dispersing the gas to the outside through the discharge pipe 5, and the completion of the pre-cooling is performed from the adhesion of frost on the pre-cooled gas discharge pipe 5 without confirming that the released gas has changed from the vaporized gas to the liquefied gas. Assuming that the pre-cooling valve 3 was closed.

また、従来の液化ガス供給設備では、液化ガス使用設
備6へ液化ガスを供給する毎に手動操作によって供給配
管2の予冷を行なわねばならず、多くの人手を要すると
共に液化ガス供給システム全体の自動化が計れないとい
う難点があった。
In addition, in the conventional liquefied gas supply equipment, the supply pipe 2 must be pre-cooled by manual operation every time the liquefied gas is supplied to the liquefied gas use equipment 6, requiring a lot of manpower and automation of the entire liquefied gas supply system. There was a disadvantage that it could not be measured.

(考案が解決しようとする課題) 本考案は従来の液化ガス供給設備に於ける上述の如き
問題、即ち(イ)液化ガスの使用毎に液化ガス供給配管
の予冷を手動で行なわねばならず、操作要員の削減が計
れないこと、(ロ)予冷装置が手動であるため、液化ガ
ス供給設備全体のシステム的な自動化が計れないこと及
び(ハ)予冷ガス放出管等の状態変化を基準にして予冷
の完了を判断しているため、作業員毎に判断にばらつき
が生じ易く、供給配管の予冷温度を一定値に保つことが
困難なこと等の問題を解決せんとするものであり、供給
配管を自動的にしかも一定の温度にまで正確に予冷でき
るようにした液化ガス供給配管の予冷装置を提供するも
のである。
(Problems to be Solved by the Invention) The present invention has the above-mentioned problems in the conventional liquefied gas supply equipment, that is, (a) the liquefied gas supply pipe must be manually precooled every time the liquefied gas is used, The reduction of the number of operating personnel cannot be measured, (b) the manual operation of the pre-cooling device makes it impossible to measure the systematic automation of the entire liquefied gas supply system, and (c) the change in the state of the pre-cooled gas discharge pipe etc. Since the completion of pre-cooling is determined, the determination tends to vary for each worker, and it is difficult to maintain the pre-cooling temperature of the supply pipe at a constant value. The present invention provides a liquefied gas supply pipe pre-cooling device that can automatically pre-cool liquefied gas to a certain temperature.

(課題を解決するための手段) 本考案は予冷弁の出口側に於いて供給配管の温度を直
接若しくは間接的に測定し、当該検出温度に基づいて予
冷弁等を自動開閉制御することを基本とするものであ
る。
(Means for Solving the Problems) The present invention basically measures the temperature of the supply pipe directly or indirectly at the outlet side of the precooling valve, and automatically controls opening and closing of the precooling valve and the like based on the detected temperature. It is assumed that.

すなわち、本考案は、液化ガス貯蔵設備1に連通する
液化ガス供給配管2の末端部に設けた自動開閉型の予冷
弁3と;液化ガス供給配管2からこれに並列状に接続さ
れた複数の液化ガス使用設備6へ各々供給する液化ガス
11を制御する自動開閉型の各使用元弁4と;予冷弁3の
近傍に配して液化ガス供給配管2に設けた温度センサー
7と;前記液化ガス使用設備6側からの液化ガス使用要
求信号9の入力により予冷弁3へ弁開放信号13aを発信
し、また温度センサー7からの入力温度14が設定温度以
下のときに予冷弁3へ弁閉鎖信号13bを発信すると共に
使用元弁4へ弁開放信号15を発信する予冷制御装置8
と;から構成した液化ガス供給配管の予冷装置を提供す
るものである。
That is, the present invention includes an automatic opening / closing type pre-cooling valve 3 provided at the end of a liquefied gas supply pipe 2 communicating with a liquefied gas storage facility 1; a plurality of liquefied gas supply pipes 2 connected in parallel to the liquefied gas supply pipe 2. Liquefied gas supplied to the liquefied gas use equipment 6
A self-opening / closing valve 4 for controlling 11; a temperature sensor 7 provided in the liquefied gas supply pipe 2 in the vicinity of the precooling valve 3; a liquefied gas use request from the liquefied gas use facility 6 side When the signal 9 is input, a valve opening signal 13a is transmitted to the pre-cooling valve 3, and when the input temperature 14 from the temperature sensor 7 is lower than the set temperature, a valve closing signal 13b is transmitted to the pre-cooling valve 3 and to the original valve 4. Pre-cooling control device 8 that sends valve opening signal 15
And a precooling device for a liquefied gas supply pipe composed of:

(作用) 液化ガス使用設備6側からの液化ガス使用要求信号9
が予冷制御装置8へ入力されることにより、予冷制御装
置8から予冷弁3へ弁開放信号13aが出力され、予冷弁
3が開放される。これにより、液化ガスが供給配管2内
を流れ、配管2を冷却すると共に順次気化し、予冷ガス
放出管5を通して外部へ放出される。
(Operation) Liquefied gas use request signal 9 from liquefied gas use facility 6
Is input to the pre-cooling control device 8, the pre-cooling control device 8 outputs a valve opening signal 13a to the pre-cooling valve 3, and the pre-cooling valve 3 is opened. As a result, the liquefied gas flows in the supply pipe 2, cools the pipe 2, sequentially evaporates, and is discharged to the outside through the pre-cooled gas discharge pipe 5.

供給配管2が冷却され、温度センサー7からの入力温
度信号14が設定温度以下になると、予冷制御装置8から
予冷弁3へ弁開放信号13bが発信されると共に、使用元
弁4へ弁開放信号15が発信され、液化ガス使用設備6へ
液化ガスが供給される。
When the supply pipe 2 is cooled and the input temperature signal 14 from the temperature sensor 7 becomes equal to or lower than the set temperature, a valve opening signal 13b is transmitted from the precooling control device 8 to the precooling valve 3, and a valve opening signal is transmitted to the use source valve 4. 15 is transmitted, and the liquefied gas is supplied to the liquefied gas use equipment 6.

(実施例) 以下、図面に基づいて本件考案の実施例を説明する。(Embodiment) Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

第1図は本件考案に係る液化ガス供給配管の予冷装置
の全体系統図であり、第2図は本考案に係る予冷装置の
作動説明図である。
FIG. 1 is an overall system diagram of a precooling device for a liquefied gas supply pipe according to the present invention, and FIG. 2 is an operation explanatory diagram of the precooling device according to the present invention.

図に於いて、1は窒素、酸素、アルゴン等の液化ガス
貯槽や圧力容器から成る液化ガス貯蔵設備であり、2は
真空断熱配管等の液化ガス供給配管、3は超低温用電磁
弁や超低温用パイロット型制御弁等から成る自動開閉型
予冷弁、4は液化ガス供給配管2に分岐接続された複数
の分岐管2aに各々取付けた超低温用電磁弁等から成る自
動開閉型使用元弁、5は液化ガス供給配管2の末端部分
を構成する気化放出管、6は液化ガス供給配管2に各々
分岐管2aを介して並列状に接続された複数の液化ガス使
用設備、7は前記予冷弁3の出口側近傍に設けた温度セ
ンサー、8はリレー類やプログラマブルコントローラ等
を具備する制御装置、9は液化ガス使用設備等から発信
される液化ガス使用要求信号、10は供給元弁、11は液化
ガス、12は液化ガスが蒸発した放出ガスである。
In the figure, 1 is a liquefied gas storage facility comprising a liquefied gas storage tank and a pressure vessel for nitrogen, oxygen, argon, etc., 2 is a liquefied gas supply pipe such as a vacuum insulated pipe, 3 is an ultra-low temperature solenoid valve or an ultra-low temperature pipe. An automatic opening / closing type pre-cooling valve composed of a pilot type control valve and the like, 4 is an automatic opening / closing type main valve composed of an ultra-low temperature solenoid valve attached to each of a plurality of branch pipes 2a branched and connected to the liquefied gas supply pipe 2, and 5 is A vaporization discharge pipe constituting an end portion of the liquefied gas supply pipe 2, a plurality of liquefied gas use facilities 6 connected in parallel to the liquefied gas supply pipe 2 via branch pipes 2 a, respectively, A temperature sensor provided near the outlet side, 8 is a control device equipped with relays, a programmable controller, etc., 9 is a liquefied gas use request signal transmitted from a liquefied gas use facility, 10 is a supply valve, and 11 is a liquefied gas. , 12 is the liquefied gas The released gas.

前記液化ガス使用設備6に於いて液化ガス11の使用が
無い場合には、供給元弁10は常時開の状態に保持され、
予冷弁3及び使用元弁4は閉の状態に夫々保持されてい
る。
When the liquefied gas 11 is not used in the liquefied gas using equipment 6, the supply valve 10 is kept open at all times,
The pre-cooling valve 3 and the use source valve 4 are each maintained in a closed state.

今、液化ガス使用設備6に於いて液化ガス11が必要に
なると、液化ガス使用設備6側に設けた各種センサー若
しくは押釦(図示省略)等から液化ガス使用要求信号9
が発信され、当該信号9が制御装置8へ入力される。
Now, when the liquefied gas usage equipment 6 requires the liquefied gas 11, a liquefied gas usage request signal 9 is sent from various sensors or push buttons (not shown) provided on the liquefied gas usage equipment 6 side.
Is transmitted, and the signal 9 is input to the control device 8.

制御装置8では第2図に示す如く、先ず液化ガス使用
要求信号9の存否が判別され(ステップA)信号9の入
力が確認されると、予冷弁3へ弁開放信号13aが発信さ
れて弁開放が行なわれる(ステップB)。これにより、
液化ガス貯蔵設備1から供給配管2内へ液化ガス11が流
れ込み、配管2との間で熱交換を行なって気化し、放出
ガス12として外部へ放出される(ステップC)。
As shown in FIG. 2, the controller 8 first determines the presence or absence of a liquefied gas use request signal 9 (step A). When the input of the signal 9 is confirmed, a valve opening signal 13a is transmitted to the pre-cooling valve 3 and the valve is opened. Opening is performed (step B). This allows
The liquefied gas 11 flows from the liquefied gas storage facility 1 into the supply pipe 2, undergoes heat exchange with the pipe 2, evaporates, and is discharged to the outside as a discharge gas 12 (step C).

一方、予冷弁3の出口側近傍に設けた温度センサー7
により、供給配管2の温度(若しくは放出ガス12の温
度)が検出され(ステップD)、検出された温度信号14
が制御装置8へ入力される。前記検出された供給配管2
の温度が設定温度(例えば、液化ガス11が窒素ガスのと
き、前記設定温度は−150℃〜−190℃とされる)以下で
あるか否かが判断され(ステップE)、供給配管2の検
出温度が設定温度以下であれば、自動開閉型予冷弁3へ
閉鎖信号13bが発信されてこれが閉鎖され(ステップ
F)、更に予冷の完了を示す弁開放信号15が自動開閉型
使用元弁4へ発信される(ステップG)。これにより、
液化ガス使用要求信号9を発信した液化ガス使用設備6
の使用元弁4が開放され、当該液化ガス使用設備6へ液
化ガス11が供給される。
On the other hand, the temperature sensor 7 provided near the outlet side of the pre-cooling valve 3
As a result, the temperature of the supply pipe 2 (or the temperature of the released gas 12) is detected (Step D), and the detected temperature signal 14
Is input to the control device 8. The detected supply pipe 2
Is determined to be equal to or lower than a set temperature (for example, when the liquefied gas 11 is nitrogen gas, the set temperature is -150 ° C. to -190 ° C.) (step E). If the detected temperature is equal to or lower than the set temperature, a closing signal 13b is transmitted to the automatic opening / closing type pre-cooling valve 3 to be closed (step F), and a valve opening signal 15 indicating completion of pre-cooling is sent to the automatic opening / closing type use valve 4 (Step G). This allows
Liquefied gas use equipment 6 that has transmitted the liquefied gas use request signal 9
Liquefied gas 11 is supplied to the liquefied gas use equipment 6.

尚、本実施例に於いては自動開閉型予冷弁3として直
動型の超低温用電磁弁を使用しているが、供給配管2が
1″を超える大口径の場合には、直動型電磁弁に替えて
所謂パイロット電磁弁を使用した空気圧制御弁を使用し
ても良い。
In this embodiment, a direct-acting ultra-low temperature solenoid valve is used as the automatic opening / closing type pre-cooling valve 3. However, when the supply pipe 2 has a large diameter exceeding 1 ″, the direct-acting electromagnetic valve is used. An air pressure control valve using a so-called pilot solenoid valve may be used instead of the valve.

(考案の効果) 本考案に於いては、予冷弁3を自動開閉型超低温弁と
し、液化ガス使用設備6側からの使用要求信号により予
冷弁3を開放すると共に、その出口近傍に配設した温度
センサー7により予冷中の供給配管2の温度を検出し、
供給配管2の検出温度が設定値以下になると、予冷制御
装置8を介して予冷弁3を自動閉鎖し且つ使用元弁4を
自動開放するようにしている。
(Effects of the Invention) In the present invention, the pre-cooling valve 3 is an automatic opening / closing type ultra-low temperature valve, and the pre-cooling valve 3 is opened according to a use request signal from the liquefied gas use equipment 6 side, and is disposed near the outlet thereof. The temperature sensor 7 detects the temperature of the supply pipe 2 during pre-cooling,
When the detected temperature of the supply pipe 2 becomes equal to or lower than the set value, the pre-cooling valve 3 is automatically closed and the use valve 4 is automatically opened via the pre-cooling control device 8.

その結果、従来液化ガス使用設備6へ液化ガスを供給
する毎に手動操作によって行っていた供給配管2の予冷
を自動操作によって行なうことが出来、作業員の削減や
作業能率の向上を計り得る。
As a result, the pre-cooling of the supply pipe 2 which has been performed manually every time the liquefied gas is supplied to the liquefied gas using equipment 6 can be automatically performed, thereby reducing the number of workers and improving the work efficiency.

また、予冷中の供給配管2の温度を温度センサーで検
出するため、従前の気化ガスの放出状態の変化から予冷
の完了を推測する場合に比較して、より正確に予冷の完
了を確定することが出来る。
Further, since the temperature of the supply pipe 2 during the pre-cooling is detected by the temperature sensor, the completion of the pre-cooling is more accurately determined as compared to a case where the pre-cooling completion is estimated from a change in the state of the release of the vaporized gas. Can be done.

更に、予冷操作を自動化することにより、液化ガス供
給システム全体の自動化を図ることが可能となる。
Further, by automating the precooling operation, it is possible to automate the entire liquefied gas supply system.

上述の通り、本考案は優れた実用的効用を奏するもの
である。
As described above, the present invention has excellent practical utility.

【図面の簡単な説明】[Brief description of the drawings]

第1図は、本考案に係る予冷装置を設けた液化ガス供給
設備の全体系統図である。 第2図は、本考案に係る予冷装置の作動説明図である。 第3図は、従前の液化ガス供給設備の全体系統図であ
る。 1……液化ガス貯蔵設備 2……供給配管 3……自動開閉型予冷弁 4……自動開閉型使用元弁 5……予冷ガス放出管 6……液化ガス使用設備 7……温度センサー 8……予冷制御装置 9……液化ガス使用要求信号 10……供給元弁 11……液化ガス 12……放出ガス 13a……予冷弁開放信号 13b……予冷弁閉鎖信号 14……温度センサーからの入力温度信号 15……使用元弁開放信号
FIG. 1 is an overall system diagram of a liquefied gas supply facility provided with a precooling device according to the present invention. FIG. 2 is an operation explanatory view of the precooling device according to the present invention. FIG. 3 is an overall system diagram of a conventional liquefied gas supply facility. DESCRIPTION OF SYMBOLS 1 ... Liquefied gas storage equipment 2 ... Supply pipe 3 ... Automatic opening / closing type precooling valve 4 ... Automatic opening / closing type use valve 5 ... Precooled gas discharge pipe 6 ... Liquefied gas use equipment 7 ... Temperature sensor 8 ... … Pre-cooling control device 9… Liquefied gas use request signal 10… Supply valve 11… Liquefied gas 12… Released gas 13 a… Pre-cooling valve open signal 13 b… Pre-cooling valve close signal 14… Input from temperature sensor Temperature signal 15 ... Used valve open signal

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】液化ガス貯蔵設備(1)に連通する液化ガ
ス供給配管(2)の末端部に設けた自動開閉型の予冷弁
(3)と; 液化ガス供給配管(2)からこれに並列状に接続された
複数の液化ガス使用設備(6)へ各々供給する液化ガス
(11)を制御する自動開閉型の各使用元弁(4)と; 予冷弁(3)の近傍に配して液化ガス供給配管(2)に
設けた温度センサー(7)と; 前記液化ガス使用設備(6)側からの液化ガス使用要求
信号(9)の入力により予冷弁(3)へ弁開放信号(13
a)を発信し、また温度センサー(7)からの入力温度
(14)が設定温度以下のときに予冷弁(3)へ弁閉鎖信
号(13b)を発信すると共に使用元弁(4)へ弁開放信
号(15)を発信する予冷制御装置(8)と; から構成した液化ガス供給配管の予冷装置。
An automatic opening / closing type precooling valve (3) provided at an end of a liquefied gas supply pipe (2) communicating with a liquefied gas storage facility (1); A self-opening / closing use source valve (4) for controlling a liquefied gas (11) to be supplied to each of a plurality of liquefied gas use facilities (6) connected in a line; and disposed near a pre-cooling valve (3). A temperature sensor (7) provided in the liquefied gas supply pipe (2); and a valve open signal (13) to the precooling valve (3) in response to the input of the liquefied gas use request signal (9) from the liquefied gas use facility (6).
a) is transmitted, and when the input temperature (14) from the temperature sensor (7) is lower than the set temperature, a valve closing signal (13b) is transmitted to the pre-cooling valve (3) and a valve is transmitted to the original valve (4). A precooling control device (8) for transmitting an open signal (15);
JP1990107416U 1990-10-12 1990-10-12 Pre-cooling device for liquefied gas supply piping Expired - Lifetime JP2540614Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990107416U JP2540614Y2 (en) 1990-10-12 1990-10-12 Pre-cooling device for liquefied gas supply piping

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990107416U JP2540614Y2 (en) 1990-10-12 1990-10-12 Pre-cooling device for liquefied gas supply piping

Publications (2)

Publication Number Publication Date
JPH0463899U JPH0463899U (en) 1992-05-29
JP2540614Y2 true JP2540614Y2 (en) 1997-07-09

Family

ID=31853927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990107416U Expired - Lifetime JP2540614Y2 (en) 1990-10-12 1990-10-12 Pre-cooling device for liquefied gas supply piping

Country Status (1)

Country Link
JP (1) JP2540614Y2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716350A (en) * 1980-07-04 1982-01-27 Chugoku Electric Power Co Ltd:The Flaw detection of high temperature vessel by ultrasonic wave
JPS57167598A (en) * 1981-04-07 1982-10-15 Toshiba Corp Transfer tube

Also Published As

Publication number Publication date
JPH0463899U (en) 1992-05-29

Similar Documents

Publication Publication Date Title
US5665898A (en) Method and apparatus for testing solenoids in a safety system by bypassing the solenoid operated pilot valve
JPS62200099A (en) Very low temperature liquid supply system
JP2540614Y2 (en) Pre-cooling device for liquefied gas supply piping
JP2514528Y2 (en) Pre-cooling device for liquefied gas supply piping
JP2514529Y2 (en) Liquefied gas supply device for low temperature liquefied gas container
CN208902694U (en) A kind of standard air pipe automatic switchover system
KR20130071366A (en) Apparatus and method for supplying liquefied gas
KR870001968B1 (en) Plant for production of propane-air gas
CN205618777U (en) Heat exchanger valve automatic control device
JPH067280Y2 (en) Cooling liquid automatic loading and collecting device for cryogenic liquid carrier
CN109865237A (en) A kind of intelligent building fire protection extinguishing device
US4060339A (en) Method and apparatus for controlling a gas-producing facility
US3400550A (en) Liquid carbon dioxide refrigeration control system
JP2003014197A (en) Receiving piping cooling down method for lng satellite equipment
Arnold et al. Challenges of parallel ESS cryoplants installation and commissioning activities
JP4318429B2 (en) Low temperature liquefied mixed gas filling apparatus and method
JPH0429197Y2 (en)
JPS62224987A (en) Cryogenic cooler
JPH06174381A (en) Controlling equipment of atmosphere of furnace
JPH07269792A (en) Liquid nitrogen automatically feeding device
JPS5846300A (en) Method of controlling gas flow in liquefied gas utilizing apparatus
JPS6133487Y2 (en)
KR960006763Y1 (en) Cool air generator
JP2691389B2 (en) Method and apparatus for recovering fluorine-based gas
Markley Lab 3 Cryogenic System 4 Cassette VLPC Test Cryostat I/O & Controls

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R323111

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term