JP2538079Y2 - Air ion generator - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air ion generator for removing static electricity used in a clean room of a semiconductor manufacturing plant.

[0002]

2. Description of the Related Art This type of apparatus pays attention to the fact that minute dust floating in the air tends to adhere to a charged object, and removes static electricity from the charged object by ionizing room air. Thereby, the adhesion rate of the dust is reduced.

Conventionally, this type of air ion generator includes a pair of discharge electrodes 1 each having a pointed cylindrical rod as shown in FIG. 6, for example, and the discharge electrodes 1 are attached to a ceiling of a room or the like. It is detachably held by a hole-shaped electrode holding portion 3 provided on a holding member 2 made of plastic.

[0006] Positive and negative voltages are applied to the pair of discharge electrodes 1 to continuously generate positive and negative ions. Alternatively, the applied voltage is pulsed to generate positive and negative ion groups alternately.

[0005]

In this conventional air ion generator, there is a slight gap between the discharge electrode 1 and the opening edge 4 of the electrode holder 3 into which the discharge electrode 1 is inserted. When fine floating dust in the air or fine decomposed dust due to the discharge of the discharge electrode is attracted to the discharge electrode due to charging or the like, it is easily adsorbed at the opening edge 4, and once adsorption starts, this is chained. There is a problem in that it grows up to a lump and eventually falls, and this falling dust may have an adverse effect.

Accordingly, an object of the present invention is to provide an air ion generator in which fine dust is prevented from adsorbing to an opening edge of an electrode holding portion.

[0007]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a discharge electrode comprising a rod-shaped base end and a pointed front end connected to the base end, and a base for the discharge electrode. In an air ion generating apparatus provided with an electrode holder having a hole for removably holding an end, an opening edge of the hole of the electrode holder is covered between a base end and a tip of the discharge electrode. Bottom
It is integrally formed a covering portion having a.

[0008]

According to this air ion generator, the discharge electrode is held by inserting its base end into the electrode holder. In this state, the opening edge of the electrode holding portion is covered with the cover portion and is not exposed. Therefore, it is possible to prevent a situation in which the fine dust enters the gap between the opening edge and the base end and is adsorbed.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An air ion generator according to an embodiment of the present invention will be described below with reference to the drawings.

In the embodiment shown in FIG. 1 and FIG.
Reference numeral 0 denotes a discharge electrode, for example, preferably made of a tungsten alloy, and a pair is provided. This discharge electrode 10
As shown in FIG. 3, comprises a cylindrical rod-shaped base end 11 and a pointed tip 12 continuous with the base end 11. The distal end portion 12 is formed in a conical shape, and the diameter of the bottom surface 12a is formed larger than the diameter of the proximal end portion 11.

More specifically, the discharge electrode 10 has a total length of about 13 mm, of which the tip 12 is about 5 mm. The diameter of the proximal end 11 is about 1.5 mm. The tip 12 has a bottom 12
The diameter of “a” is about 4 mm, and it is gently tapered so that the leading edge diameter is about 50 μm so as to obtain a uniform corona discharge. The bottom surface 12 a is configured as a cover 13 that covers an opening edge of an electrode holding portion described later formed between the base end portion 11 and the front end portion 12.

Reference numeral 20 denotes a hole-shaped electrode holding portion for holding the base end portion 11 of the discharge electrode 10 in a removable manner. The electrode holder 20 is formed of a conductive cylindrical socket, and is provided in a pair on a plastic holder 22. The diameter of the electrode holding portion 20 is such that the base end portion 11 of the discharge electrode 10 is fitted so that the discharge electrode 10 can be easily removed for replacement and cleaning.
The 0 opening edge 21 is covered by the cover 13 of the discharge electrode 10.

The holder 22 is fixed to the ceiling of a clean room by any means such as screwing. Reference numeral 23 denotes a wiring for applying a high voltage to the discharge electrode 10 via the electrode holding unit 20. The applied high voltage may be either AC or DC.

Therefore, according to the air ion generator according to this embodiment, the discharge electrode 10 is attached by inserting the base end 11 into the electrode holder 20. When a voltage is applied to the electrode holding unit 20, the tip 1
2, corona discharge is performed, and air near the tip 12 is ionized.

In this state, even if fine floating dust in the air or fine decomposed dust due to the discharge of the discharge electrode 10 is attracted to the discharge electrode 10 due to the charging of the dust itself, the opening edge 21 of the electrode holding portion 20 is not affected. Is not covered by the cover 13 of the distal end portion 12 and is not exposed, so that a situation in which fine dust enters the gap between the opening edge 21 and the base end portion 11 and is attracted is prevented.

As described above, since there is no adsorption of the fine dust, the dust does not grow as a lump and adhere to the portion, and the lump of the adhering dust falls into the clean room. Is also gone.

FIG. 4 is a perspective view showing a discharge electrode 30 according to another example. In this case, the tip portion 32 is formed in a quadrangular pyramid shape, and the bottom surface thereof is used as a cover portion 33. FIG. 5 is a perspective view showing a discharge electrode 40 according to another example. This is provided with a rod-shaped base portion 41 and a thinner tip portion 42, and a flange-shaped cover portion 43 is integrally formed between the base end portion 41 and the tip portion 42.

The shape of the cover is not limited to the one described above, but may be any shape. Further, in the above-described embodiment, a pair of discharge electrodes is provided. However, the present invention is not limited to this, and three or more discharge electrodes may be provided. In addition, the present discharge electrode can be formed by various methods such as a method in which positive and negative voltages are applied to the discharge electrode to continuously generate positive and negative ions, and a method in which the applied voltage is pulsed to generate positive and negative ions alternately. Of course, it can be applied to

[0019]

As described above, according to the air ion generator of the present invention, the opening edge of the electrode holder is covered with the cover of the discharge electrode and is not exposed, so that the opening edge and the base end of the discharge electrode are not exposed. A situation in which fine dust enters and is adsorbed in the gaps can be prevented. For this reason, the adsorbed fine dust is prevented from growing in a chain and dropping, and accordingly, dust prevention in a clean room or the like can be ensured.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an air ion generator according to an embodiment of the present invention.

FIG. 2 is a perspective view showing the air ion generator according to the embodiment of the present invention.

FIG. 3 is a perspective view showing a discharge electrode according to the embodiment of the present invention.

FIG. 4 is a perspective view showing another example of a discharge electrode.

FIG. 5 is a perspective view showing another example of a discharge electrode.

FIG. 6 is a sectional view showing an example of a conventional air ion generator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Discharge electrode 3 Electrode holding part 4 Opening edge 10 Discharge electrode 11 Base end part 12 Front end part 13 Covering part 20 Electrode holding part 21 Opening edge 22 Holder

Claims (1)

(57) [Scope of request for utility model registration] 1. An electrode holding portion having a rod-shaped base end and a pointed tip continuous with the base end, and a hole for holding the base end of the discharge electrode in a removable manner. In the air ion generator provided with, the bottom surface covering the opening edge of the hole of the electrode holding portion between the base end and the tip of the discharge electrode.
An air ion generator, wherein a cover portion is integrally formed.