JP2536455B2 - Stamper lining method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stamper backing method, and more particularly to a stamper backing method in which the occurrence of defects is suppressed.

[0002]

2. Description of the Related Art In the conventional stamper lining method,
As shown by the symbol a in FIG. 2, a step of applying the adhesive 55 to the back surface of the stamper 53 to adhere the backing material 54, and as shown by the symbol b in FIG. Further, a step of separating the glass master disk 51 by using the separating jig 56, and a step of separating the resist 52 remaining on the information surface of the stamper 53 by oxygen plasma generated by the ashing electrode 57 as shown by the symbol c in FIG. , Symbol d in FIG.
2, the step of applying the clean coat 63 to the information surface of the stamper 53, and as shown by the symbol e in FIG. 2, the outer diameter and the inner diameter of the stamper 53 are cut together with the clean coat 63 into the required dimensions by the cutting tool 61. Process, symbol f in FIG.
As shown in FIG. 5, a method of sequentially performing the step of releasing the clean coat 63 with the release jig 62 has been adopted.

[0003]

In the conventional stamper lining method described above, when the inner and outer peripheries of the stamper 53 are cut, as shown by the symbol d in FIG. After applying the clean coat 63, the inner circumference and the outer circumference of the stamper 53 were cut by the cutting tool 61, as indicated by the symbol e in FIG.

However, since the coating film of the clean coat 63 is thin and soft, there is a disadvantage that the information surface of the stamper 53 is damaged when a foreign substance such as chips is caught during the cutting operation of the stamper 53.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to improve the disadvantages of the prior art, and particularly to provide a stamper backing method capable of effectively eliminating damage to the stamper information surface due to foreign matter such as cutting chips generated during the stamper cutting operation. The purpose is to provide.

[0006]

According to the present invention, a first step of applying an adhesive to a back surface of a stamper to adhere a backing material, a second step of separating a glass master after the adhesive is cured, and a stamper A third step of peeling off the resist remaining on the information surface, and a fourth step of applying an ultraviolet-curable resin to the information surface of the stamper and then mounting an ultraviolet-transparent plate and irradiating the ultraviolet rays to bond the ultraviolet-transparent plate. , Including a fifth step of cutting the outer diameter and the inner diameter of the stamper together with the ultraviolet ray transmitting plate to a required dimension, and a sixth step of releasing the ultraviolet ray transmitting plate and the ultraviolet ray curable resin from the stamper. There is. This aims to achieve the above-mentioned object.

[0007]

[Operation] When cutting the outer and inner diameters of the stamper to the required dimensions in the fifth step, chips and the like scatter around, but in the fourth step, the ultraviolet transmitting plate 8 is already attached to the information surface of the stamper. Since the is fixed, the adherence of cutting chips and the like to the information surface of the stamper is completely eliminated.

[0008]

An embodiment of the present invention will be described below with reference to FIG.

First, in FIG. 1, the symbol a indicates a first step of applying an adhesive 5 to the back surface of the stamper 3 to bond the backing material 4. In this first step, the stamper 3 is previously fixed on the glass master 1 through the resist 2.

Next, symbol b in FIG. 1 indicates a second step of separating the glass master 1 after the adhesive 5 is cured. In the second step, reference numeral 6 indicates a separating jig 6 for separating the glass master 1.

Subsequently, the symbol c in FIG. 1 shows a third step of peeling off the resist 2 remaining on the information surface of the stamper 3. In the third step, the remaining resist 2 is peeled off by the oxygen plasma generated in the ashing electrode 7.

Subsequently, the symbol d in FIG. 1 indicates that the ultraviolet ray-curable resin 9 is applied to the information surface of the stamper 3 and then the ultraviolet ray transmissive plate 8 is placed and irradiated with ultraviolet rays to bond the ultraviolet ray transmissive plate 8. The fourth step is shown. In the fourth step, the thickness of the ultraviolet ray transmitting plate 8 is set to be thicker than the thickness of the ultraviolet ray curable resin 9. Reference numeral 10 indicates a claw that temporarily holds the ultraviolet ray transmitting plate 8.

Subsequently, a symbol e in FIG. 1 shows a fifth step of cutting the outer diameter and the inner diameter of the stamper 3 together with the ultraviolet ray transmitting plate 8 into required dimensions.

The symbol f in FIG. 1 indicates the ultraviolet ray transmitting plate 8.
And a sixth step of releasing the ultraviolet curable resin 9 from the stamper 3.

In this sixth step, the ultraviolet transmitting plate 8
And the ultraviolet curable resin 9 is released by the release jig 12.

First, the function and effect of the above embodiment will be clarified based on a concrete example.

After the ultraviolet curable resin 9 is applied to the stamper 3 having a diameter of 205 mm, the ultraviolet transmissive plate 8 having a thickness of 1.2 mm is placed and the ultraviolet curable resin 9 is spread. Ultraviolet rays were irradiated for 70 seconds at a power of 14 [mW / cm ² ] to bond the ultraviolet ray transmitting plate 8 to the information surface of the stamper 3.

As a result, when the outer circumference and the inner circumference of the stamper 3 are cut, since the ultraviolet transmitting plate 8 is laminated on the information surface of the stamper 3 with the ultraviolet curable resin 9 interposed therebetween, the stamper due to the entrapment of foreign matter is formed. Could be completely prevented.

As described above, according to the present stamper lining method, after separating the glass master 1, the ultraviolet transparent plate 8 which is thicker and harder than the coating film formed by the clean coat 63 is adhered.
It is possible to completely prevent damage due to foreign matter being caught in the information surface of the stamper when processing the inside and outside diameters. Further, if 2P is formed using this backing stamper, the deterioration of the mechanical characteristics of the substrate can be prevented.

[0020]

Since the present invention is constructed and functions as described above, according to the present invention, when the outer diameter and the inner diameter of the stamper are cut into the required dimensions in the fifth step, the stamper has already been cut in the fourth step. Since the ultraviolet transmission plate 8 is fixed to the information surface of the stamper, almost completely the occurrence of damage accidents on the stamper information surface due to cutting chips or the like generated when cutting the outer diameter and the inner diameter of the stamper to the required dimensions. It is possible to provide an unprecedented excellent stamper lining method that can be eliminated.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a conventional example.

[Explanation of symbols]

 1 Glass Master 2 Resist 3 Stamper 4 Lining Material 5 Adhesive 7 Ashing Electrode 8 Ultraviolet Transmitting Plate 9 Ultraviolet Curable Resin

Claims (3)

(57) [Claims] 1. A first step of applying an adhesive to a back surface of a stamper to bond a backing material, a second step of separating a glass master after the adhesive is cured, and a resist remaining on an information surface of the stamper. A third step, and a fourth step of applying an ultraviolet-curable resin to the information surface of the stamper and then placing the ultraviolet-transparent plate on the stamper to irradiate the ultraviolet rays to bond the ultraviolet-transparent plate.
It is characterized by comprising a fifth step of cutting the outer diameter and the inner diameter of the stamper together with the ultraviolet ray transmitting plate to a required size, and a sixth step of releasing the ultraviolet ray transmitting plate and the ultraviolet ray curable resin from the stamper. Stamper lining method. 2. The resist remaining on the information surface of the stamper is peeled off by oxygen plasma generated at an ashing electrode in the third step.
The stamper lining method described. 3. The stamper lining method according to claim 1, wherein in the fourth step, the thickness of the ultraviolet ray transmitting plate is set to be thicker than the thickness of the ultraviolet ray curable resin.