JP2530268B2 - Method for evaluating the degree of surface processing of a workpiece and apparatus used for this method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for evaluating the degree of surface processing performed on an industrial member such as a gear and an apparatus used for this evaluation method.

[0002]

Workpieces such as various gears (spur gears, helical gears) used as industrial members are subjected to surface processing such as shot peening in order to increase their fatigue strength. The surface-treated gears and the like are usually put to practical use immediately afterwards. Conventionally, when evaluating suitability as a product of a work piece subjected to such surface processing, in the case of the above shot peening, on one side of a flat plate of the same quality as the work piece under the same conditions as the work piece to be evaluated. The product was indirectly evaluated by performing shot peening and detecting the degree of warpage of the flat plate after the shot peening (Mr. Okada et al .; Automotive Science Lecture Preprint 5 (1989), p. 16).
3).

[0003]

However, such a conventional evaluation method is performed separately by using a flat plate as in the above example, and is far from the evaluation of the workpiece itself, that is, the surface processing apparatus for the workpiece. Could only be checked to see if it was working properly. Further, in the conventional evaluation method, not only the surface processing degree of the workpiece cannot be directly evaluated, but also the flat plate is used as described above.
There was also a problem that the evaluation of the times was extremely troublesome.

In view of the above circumstances, the present invention can directly and continuously evaluate the degree of surface processing on a surface-processed workpiece, and further, it can be passed as a product.
An object of the present invention is to provide a method and an apparatus for evaluating the degree of surface processing of a workpiece, which can select rejects.

[0005]

A method of evaluating the degree of surface machining of a workpiece according to the present invention irradiates an incident X-ray on the surface of the workpiece which has been subjected to the surface machining, and makes a double irradiation from the surface of the workpiece. The folding X-rays are measured, and the saddle point strength ratio between the measured saddle point strengths of the Kα ₁ line and the Kα ₂ line and the strength of the above Kα ₁ line is obtained, and the saddle point strength ratio and the surface processing degree of the above-mentioned workpiece are corresponded. It is carried out by comparing with the saddle point strength ratio which is obtained in advance.

Further, in the method for evaluating the surface working degree of the work according to the present invention, the following formula (1) is used based on the saddle point intensity ratio or the integral width of the double diffraction X-ray from the work surface. The plastic working parameter B is calculated, and the pass or fail of the above-mentioned workpiece as a product is selected based on the calculation result. B = (B _T −B _X ) / (B ₀ −B _X ) (1) where B _T is the measured value of the surface-treated workpiece, B _T
0 is the measured value of the work piece whose surface workability has passed, and B _X is the measured value of the work piece that has not been surface worked.

On the other hand, the apparatus used in the method of the present invention comprises a guide shaft for movably supporting a workpiece whose surface processing degree is to be measured in the longitudinal direction, and a plurality of guide shafts for holding the guide shafts so as to be detachable from each other. A holder, a transfer device including a plurality of actuators for moving the workpiece along the guide axis, a stop device for stopping the workpiece at a predetermined measurement position of the transfer device, and a position with respect to the surface of the workpiece. An X-ray measuring device provided with a displacement detector for adjusting and a plurality of actuators, and an evaluation device for evaluating the surface machining degree of the workpiece based on double-diffraction X-rays detected by the X-ray measuring device. , A sorting device for sorting the workpieces based on the evaluation of the degree of surface machining of the workpieces by the evaluation device, and automatically and continuously operating each of the devices according to a predetermined sequence. It comprises a control device.

[0008]

According to the present invention, first, in the apparatus of the present invention, the surface-treated workpiece mounted on one end of the guide shaft of the transfer device has a plurality of actuators and a plurality of guide shafts for the guide shafts. By the periodic operation of the holder, the guide shaft is sequentially transferred from the one end to the other end. Then, the workpiece is further stopped at a predetermined measuring position by the stop device. Next, the workpiece transferred to the measurement position is evaluated by the X-ray measurement device and the evaluation device for the degree of surface processing at the desired location where the surface processing has been performed, and based on this evaluation result, the workpiece is removed from the transfer device. The selected workpieces are sorted by the sorting device as acceptable products or rejected products. In this way, a direct evaluation of the degree of surface processing on the workpiece can be continuously and automatically performed.

By the way, in this type of surface-processed work piece, since a compressive residual stress exists just below the surface of the work piece, fatigue and wear on the surface of the work piece can be suppressed by the residual stress. However, the position and magnitude of the peak of this residual stress differ depending on the specific processing conditions of the surface processing, but since it is located directly below the surface of the workpiece to a depth position of about 100 μm, such a peak is generally found. It is difficult to detect easily.

Therefore, the present inventor has found from a basic investigation that there is a unique correspondence between the degree of surface processing and the diffraction X-ray pattern from the surface of the workpiece. That is, in the method of the present invention, the surface of the workpiece is first irradiated with incident X-rays (Kα rays), whereby the double diffracted X-rays composed of Kα ₁ rays and Kα ₂ rays which are close to each other from the workpiece surface. Is obtained.
Since the crystal of the workpiece is subdivided into fine particles as the degree of plastic working on the surface of the workpiece increases, the double diffraction X
The line gradually widens. The present inventor then finds that the saddle point intensity ratio or the integral width, which simply estimates the extent of the width of the double-diffraction X-ray without separating the double-diffraction X-ray, has a direct relationship with the degree of surface processing. I found that there is.

Therefore, in the method of the present invention, the saddle point intensity ratio between the saddle point intensity in the Kα ₁ line and the Kα ₂ line measured by the X-ray measuring device and the intensity of the Kα ₁ line is obtained, and further in the evaluation device, the above By comparing the saddle point strength ratio thus obtained with the saddle point strength ratio previously obtained corresponding to the surface workability of the workpiece, the surface workability can be evaluated.

Further, according to the method of the present invention, the plastic working parameter B expressed by the equation (1) is calculated based on the saddle point intensity ratio or the integral width of the double diffraction X-ray from the work surface.
This parameter is a simple indicator of the degree of surface processing of the workpiece from the ratio of the width of the double-diffraction X-ray width spread due to plastic processing to the surface of the workpiece and that of acceptable products. is there. Therefore, based on such index value,
For example, it is possible to select whether the product is acceptable or not depending on whether the index value is 1 or more or 1 or less.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for evaluating the degree of surface machining of a work according to the present invention and an apparatus used in this method will be described below with reference to FIGS. First, in the present embodiment, the work piece whose surface processing degree is to be evaluated is, for example, the spur gear W shown in FIG. 8, and it is determined whether or not a predetermined surface processing is applied to the bottom portion of the spur gear W. In order to inspect, the apparatus directly and directly evaluates the degree of processing, determines whether the product is acceptable or not, and selects the product continuously and automatically.

In FIG. 1 showing the schematic overall structure of the device of the present invention, a plurality of spur gears W _a , W _b and W _c are movably carried in the longitudinal direction via a key 2 on one end 1a of a guide shaft 1. To be done. The guide shaft 1 is held by guide shaft holders 3 and 4 at two intermediate portions thereof via guide shaft attachments 3a and 4b, respectively. As shown in FIG. 2, the guide shaft holders 3 and 4 are slidably supported on a slide base 5 in a direction of an arrow A orthogonal to the axial direction of the guide shaft 1, respectively. 4 is driven by a pair of linear actuators 6 and 7 attached to both ends of the slide base 5, respectively.

Here, in the guide shaft 1 shown in FIG. 1, the left side portion of the guide shaft holder 3 is a region E ₁ , the portion between the guide shaft holder 3 and the guide shaft holder 4 is a region E ₂ , and the guide shaft _{1 is} a guide. The right part of the shaft holder 4 is designated as E ₃ . Then, the spur gears W _a , W _b , and W _c in the respective regions E ₁ , E ₂ , and E ₃ are respectively replaced by spur gears W ₁ , W
Displayed by ₂ and W ₃ .

Further, in FIG. 1, a rectilinear actuator 8 is installed corresponding to the area E ₁ , and its rod 8a advances and retreats in parallel with the guide shaft 1 (arrow B) and is provided at the tip of the rod 8a. Rotating feed arm 8
b is adapted to be rotatable around the rod 8a.
Corresponding to the areas E ₂ and E _3, there are provided a rectilinear actuator 9 and a rectilinear actuator 10 having the same structure as the rectilinear actuator 8. Here, a transfer device for the spur gear W is configured by the above members.

The other end 1b of the guide shaft 1 is provided with a detector 11 for detecting the spur gear W ₃ transferred to the area E ₃ of the guide shaft 1, and the detector 11 and the linear actuator. 10 constitutes a stopping device that stops the spur gear W ₃ at a measurement position by an X-ray measuring device described later.

The other end 1b of the guide shaft 1 is also provided with an X-ray measuring device 12 capable of detecting diffracted X-rays from a desired position on the surface of the spur gear W ₃ stopped by the stopping device. . That is, the X-ray measuring apparatus 12 guides the X-ray measuring apparatus 12 based on a displacement detector (for example, a laser displacement sensor) 13 that detects a distance from the spur gear W ₃ and an output of the displacement detector 13. A linear actuator 15 that advances and retracts (see arrow D in FIG. 3) along a vertical axis 14 with respect to the central axis 1c of the shaft 1, and an X-ray tube 16 that irradiates a desired portion of the surface of the spur gear W ₃ with X-rays. A detector 17 for detecting diffracted X-rays from the irradiation location, and an X-ray measuring device 12
A rotary actuator 19 for rotating (see arrow E in FIG. 3) around the central axis 1c of the guide shaft 1 along the scan guide 18. Further, the X-ray measuring device 12 can be appropriately rotated around the vertical axis 14 by the rotary actuator 20 (see arrow F in FIG. 3), but the linear actuator 15, the rotary actuator 19 and the rotary actuator 19 are rotated. The actuator 20 is fixed on the bracket 21, and the X-ray measurement device 12
It is configured as an integral part of itself.

Diffraction X by the X-ray measuring device 12
The evaluation device 22 evaluates the degree of surface processing of the spur gear W based on the detection result of the line. Further, the spur gear W, the degree of surface processing of which is evaluated by the evaluation device 22, is selected by the selection device 23 shown in FIG. 4 in accordance with the evaluation result of pass / fail. That is, below the other end 1b of the guide shaft 1, there is provided a sorting plate 26 which is swung in the direction of arrow G about the pivot 25 by the actuator 24. By inclining to the side, the spur gear W is further classified as a passed product or a rejected product.

In the above case, each component of the above device is connected to the control device 28 via the interface 27 (see FIG. 1), so that the device of the present invention operates automatically and continuously according to a predetermined sequence. It is supposed to be done.

The apparatus for evaluating the degree of surface processing of a workpiece according to the present invention is constructed as described above. Next, a specific method for evaluating the degree of surface processing of a workpiece using the apparatus of the present invention will be described. First, as shown in FIG. 1, by aligning the key 2 of the guide shaft 1 with the key groove of the spur gear W, a plurality of spur gears W, in this example, spur gears W _a , W _b and W _c are guided. Axis 1
Region E ₁ of Next, the guide shaft holder 3 is opened to the left and right by the operation of the linear actuator 6, whereby the guide shaft attachment 3a is detached from the guide shaft 1. Then the rotation feed arm 8b of the linear actuator 8 is rotated 180 degrees from the state shown in FIG. 1, the rod 8a is extended, thereby rotating the feed arm 8b spur gear W to press the side surface of _a spur gear W _a , W _b
And W _c are transferred from the area E ₁ to the area E ₂ (position of the spur gear W ₂ ). In this case, the guide shaft 1 is held by the guide shaft holder 4. When the spur gear W ₁ is thus transferred to the area E ₂ of the guide shaft 1, the guide shaft attachment 3a is closed again by the operation of the rectilinear actuator 6, and the rod 8a and the rotary feed arm 8b of the rectilinear actuator 8 are moved to the position shown in FIG. Return to the state shown in.

Next, the guide shaft holder 4 is opened left and right by the operation of the linear actuator 7, whereby the guide shaft attachment 4a is separated from the guide shaft 1. On the other hand, the rotary feed arm 9b of the linear actuator 9 rotates 180 degrees as shown in FIG.
a is extended, thereby rotating the feed arm 9b presses the side surface of the spur gear W _a spur gear W _a, W _b and W _c is caused to transfer from the region E ₂ to the region E ₃ (spur gear W ₃₎ . In this case, the guide shaft 1 is held by the guide shaft holder 3. When the spur gear W ₂ is transferred to the area E ₃ of the guide shaft 1, the guide shaft attachment 4a is closed again by the operation of the rectilinear actuator 7, and the rod 9a and the rotary feed arm 9b of the rectilinear actuator 9 are returned to their original positions. Return to.

Further, the rotary feed arm 10b of the linear actuator 10 rotates 180 degrees from the state shown in FIG. 1, and the rod 10a extends, whereby the rotary feed arm 10b presses the side surface of the spur gear W _a. The spur gear W ₃ is transferred to the other end 1b of the guide shaft 1. As described above, in the transfer device, the spur gear W is combined with the alternating opening / closing operation of the guide shaft attachments 3a and 4a and the sequential transfer operation of the plurality of rectilinear actuators 8, 9 and 10 so that the spur gear W has one end 1a of the guide shaft 1. A plurality of spur gears W mounted on the guide shaft 1 are continuously transferred to the other end 1b of the guide shaft 1.

Of the spur gear W ₃ transferred to the other end 1b of the guide shaft 1 as described above, the position of the spur gear W _c is detected by the detector 11, and the rotary feed arm 10b is detected by the detection signal of the detector 11. A stop signal is sent to the linear actuator 10 having the following, whereby the spur gear W ₃ is stopped at the measuring position for the X-ray measuring device 12.

Next, based on the output of the displacement detector 13 integrated with the X-ray measuring device 12, the linear actuator 15 is moved.
Is activated, and the X-ray measuring device 12 and the spur gear W are adjusted to have a set distance. That is, referring to FIG. 3, on the vertical shaft 14 connecting the center of the X-ray measuring device 12 and the central axis 1c of the guide shaft 1, the incident X-rays from the X-ray tube 16 and the spur gear W are transmitted. Since the double-diffraction X-rays coincide with each other, the X-ray measuring apparatus 12 is moved along the vertical axis 14 by the rectilinear actuator 15. On the other hand, the X-ray measurement device 12
Is rotated around the central axis 1c of the guide shaft 1 by the rotary actuator 19 and moves along the scan guide 18 around the spur gear W while maintaining an equal distance. At this time, as soon as the displacement detector 13 detects the bottom of the spur gear W, the X-ray measuring apparatus 1 using the rotary actuator 19 is immediately detected.
The rotation of No. 2 is stopped, and the linear actuator 15 is moved by the command of the displacement detector 13 to move the X-ray measuring device 12 and the spur gear W.
Adjust the distance from the root of the above to the set distance.

The diffracted X-rays of the incident X-rays emitted from the X-ray tube 16 to a desired position on the surface of the spur gear W are detected by the detector 1.
The X-ray is detected by the X-ray diffraction pattern ₇ and is obtained as a double-diffraction X-ray composed of Kα ₁ and Kα ₂ lines which are close to each other, as shown in FIG. Although FIG. 6A shows a case before the surface processing of the spur gear W is performed, it is clear that such double diffraction X is obtained as compared with the case after the surface processing (FIG. 6B). The line gradually widens. The extent of this width expansion is determined by the above Kα in double diffraction X-ray.
_It has a linear relationship with the saddle point intensity ratio of the _1st line and the Kα ₂ line.

That is, consider the saddle point intensity ratio expressed by the following equation (2). In addition, I _min is Kα ₁ line and Kα
The saddle strength of ₂ lines, I _max is the strength of the Kα ₁ line. Saddle point intensity ratio = (I _min −background) / (I _max −
(Background) (2) And Kα measured by the X-ray measuring device 12
The saddle point strength ratio between the saddle point strength of the _1st line and the Kα ₂ line and the strength of the Kα ₁ line is obtained, and the evaluation device 22 further evaluates the pass / fail of the surface working degree based on the saddle point intensity ratio obtained as described above. As shown in FIG.
2, the comparison control unit 22a determines the saddle point intensity ratio obtained from the double diffraction X-ray detected by the detector 17 according to the above equation (2) and the spur gear W stored in the storage unit 22b.
The pass / fail of the spur gear W as a product is determined by comparing the surface workability with the passing saddle point strength ratio (for example, as shown in FIG. 6, the case where the point is P or higher is passed). Then, the result is displayed on the display unit 22c.

Further, based on the judgment result of the evaluation device 22, as shown in FIG. 4, in the selection device 23, the actuator 24 tilts the selection plate 26 to the left and right to determine whether the spur gear W has passed or failed. Select. That is, when the degree of surface processing is acceptable, the selection plate 26 is tilted to the left, and at this time, the rotary feed arm 10b of the linear actuator 10 causes the spur gear W that is an acceptable product to rotate the other end 1b of the guide shaft 1. Is dropped onto the sorting plate 26 from the left side of the sorting device 23. On the other hand, when the degree of surface processing is unacceptable, the sorting plate 26 is inclined to the right contrary to the above case, and the spur gear W which is a rejected product is divided from the right side of the sorting device 23. In the above-described operation of the device of the present invention, since each component of the device is connected to the control device 28 via the interface 27 (see FIG. 1), the above-described operation is repeated, and therefore, the bottom of the spur gear W is removed. The direct pass / fail evaluation of the surface processing degree can be continuously and automatically performed.

By the way, when the workpiece whose surface processing degree is to be evaluated is, for example, a helical gear W'having a twist angle θ as shown in FIG. 9, the X-ray measuring apparatus 12 follows the command of the displacement detector 13. With the rotary actuator 20, FIG.
As shown in FIG. 4, the vertical axis 14 is rotated by an angle θ (arrow F), which irradiates the root of the helical gear W ′ with incident X-rays and double-diffracts X from the root. The line can be detected by the detector 17.

In addition, in the method for evaluating the surface workability of the work according to the present invention, not only the surface workability can be evaluated from the above-mentioned saddle point strength ratio, but also the work of the spur gear W or the helical gear W'and the like. The plastic working parameter B represented by the above formula (1) is calculated based on the measured value of the saddle point intensity ratio of double diffraction X-rays from the surface of the object or the integral width (integral intensity / peak value), and this calculation When the result is 1 or more or 1 or less, it is possible to select pass or fail as a product. That is, in the evaluation device 22, the comparison control unit 22a stores the plastic working parameter B obtained from the double diffraction X-ray detected by the detector 17 according to the above equation (1) and the flattening parameter stored in the storage unit 22b. By comparing the pass plastic working parameter of the degree of surface working on the gear W or the like, it is possible to judge the pass / fail of the product such as the spur gear W and display the result on the display unit 22c. This parameter B is a simple index for the degree of surface processing of the workpiece from the ratio of the width of the double-diffraction X-ray broadening due to plastic working to the surface of the workpiece and that of the acceptable product. Therefore, it is possible to select whether the product is acceptable or not depending on whether the index value is 1 or more or 1 or less.

Although one embodiment of the present invention has been described above, the present invention is not limited to the embodiment, and various effective modifications can be made based on the technical idea of the present invention. In the above embodiment, the spur gear W or the helical gear W'has been described as the workpiece for evaluating the degree of surface processing.
The method and apparatus of the present invention are not limited to such an embodiment, and it goes without saying that they can be effectively applied to the evaluation of the degree of surface processing of a workpiece of this type.

[0032]

As described above, according to the present invention, it is possible to accurately and directly determine whether a surface-processed workpiece is a pass or fail as a product, and accurately select it. it can. Therefore, it is acceptable as a product for the workpieces widely used as components of various machines and equipment.
Since the determination of rejection and the selection after determination can be continuously and automatically performed, it has an excellent advantage that it can be effectively used in various industries.

[Brief description of drawings]

FIG. 1 is a front view showing a schematic overall configuration of an embodiment of an apparatus for evaluating the degree of surface processing of a workpiece according to the present invention.

FIG. 2 is a side view of the device.

FIG. 3 is a side view of an X-ray measuring apparatus in the above apparatus.

FIG. 4 is a side view of a sorting device in the above device.

FIG. 5 is a block diagram showing a configuration of an evaluation device in the above device.

FIG. 6 is a graph showing the relationship between the saddle point intensity ratio obtained from double diffraction X-rays and the degree of surface processing.

FIG. 7 (a) is a diagram showing the intensity of double-diffraction X-rays before subjecting the workpiece to surface treatment, and FIG. 7 (b) is the intensity of double-diffraction X-rays after subjecting the work. FIG.

FIG. 8A is a side view of a spur gear that is an example of a work to which the method for evaluating the surface working degree of the work according to the present invention is applied, and FIG. 8B is a front view of the spur gear.

FIG. 9A is a side view of a helical gear, which is another example of the workpiece to which the method for evaluating the degree of surface machining of the workpiece according to the present invention is applied, and FIG. 9B is a front view of the helical gear. .

[Explanation of symbols]

 1 Guide Axis 3,4 Guide Axis Holder 6,7 Linear Actuator 8,9,10 Linear Actuator 11 Detector 12 X-ray Measuring Device 13 Displacement Detector 14 Vertical Axis 15 Linear Actuator 16 X-ray Tube 17 Detector 19,20 Rotating actuator 22 Evaluation device 23 Sorting device 24 Actuator 26 Sorting plate 27 Interface 28 Control device W Spur gear W'Hasper gear

Claims (3)

(57) [Claims] 1. A surface of a surface-treated workpiece is irradiated with incident X-rays, double-diffraction X-rays from the surface of the workpiece are measured, and the measured Kα ₁ line and Kα ₂ line are measured. The saddle point strength ratio between the saddle point strength and the strength of the Kα ₁ line is obtained, and the saddle point strength ratio is compared with the saddle point strength ratio previously obtained corresponding to the degree of surface processing of the workpiece to compare the above-mentioned work A method for evaluating the degree of surface processing of a workpiece, which is adapted to evaluate the degree of surface processing of a workpiece. 2. A plastic working parameter B represented by the following equation is calculated based on the saddle point intensity ratio or the integral width of the double-diffraction X-ray from the surface of the workpiece, and the plastic working parameter B is calculated based on this calculation result. The method for evaluating the degree of surface processing of a work piece according to claim 1, wherein a pass or a reject as a product of the work piece is selected. B = (B _T −B _X ) / (B ₀ −B _X ), where B _T is the measured value of the surface-treated workpiece, and B _T
0 is the measured value of the work piece whose surface workability has passed, and B _X is the measured value of the work piece that has not been surface worked. 3. A guide shaft for movably supporting a workpiece whose surface processing degree is to be measured in a longitudinal direction, a plurality of guide shaft holders for holding the guide shaft so as to be separable and contactable, and the guide shaft for supporting the workpiece. A transfer device having a plurality of actuators that move along the moving device, a stop device that stops the workpiece at a predetermined measurement position of the transfer device, a displacement detector for adjusting the position with respect to the workpiece surface, and a plurality of displacement detectors. X-ray measuring device equipped with the actuator, an evaluation device for evaluating the surface machining degree of the workpiece based on double-diffraction X-ray detected by the X-ray measuring device, and the workpiece by the evaluating device. A sorting device for sorting the workpieces based on the evaluation of the degree of surface processing, and a control device for automatically and continuously operating each device according to a predetermined sequence. Or device used to evaluate the method of surface processing of the workpiece according to claim 2.