JP2527902B2 - Processing tank - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing tank used in a semiconductor manufacturing apparatus or the like for performing a predetermined processing on a wafer with a high temperature processing liquid.

[0002]

2. Description of the Related Art Conventionally, various types of treatment tanks of this type have been known. For example, as shown in FIGS. 4 to 6, the high temperature processing liquid that overflows beyond the upper end dam 51b of the processing tank main body 51a is discharged to the outside of the processing tank main body from the discharge port 53 adjacent to one side of the processing tank. After performing cleaning, concentration adjustment, etc., the gas is supplied again from the bottom supply port 51c of the processing tank main body 51a into the processing tank main body 51a. This processing tank is roughly composed of an upper casing 51 made of quartz and a lower casing 52 made of a resin such as fluororesin or polypropylene. The processing casing main body 51a is integrally connected to the upper casing 51. The upper casing 51 is mounted on and supported by the edge of the lower casing 52 via a seal member 56. In addition, 54 is a heater which is arranged outside the processing bath main body and heats the high temperature processing liquid held in the processing bath main body for heat retention, and 55 is outside the heater 54 and the processing bath main body 5
It is a heat insulating material that covers the outside of 1a. The processing tank main body 51a
The supply port portion at the bottom of the lower casing 52 is placed and supported on the opening portion at the bottom of the lower casing 52.

[0003]

However, in the case of the above structure, when the high temperature processing liquid overflowing from the processing tank main body 51a is discharged from the discharge port 53, air is not inadvertently sucked in, so that the processing tank is Body 51a
The overflow tank portion 51d around the weir portion 51b needs to be able to store the treatment liquid to some extent. Therefore, it is necessary to increase the height of the dam portion 51b, the upper casing 51 becomes large and its weight becomes large, the lower casing 52 is overloaded, and the lower casing 52 may be damaged. Therefore, an object of the present invention is to solve the above problems, and to provide a processing tank in which the height of the dam portion of the processing tank main body can be reduced without damaging the processing tank casing.

[0004]

In order to achieve the above object, the present invention is directed to forming a processing liquid reservoir near the outlet of an overflow tank around the processing tank main body to form a weir of the processing tank main body. Configure so that the height can be reduced. That is, an overflow tank is formed around the upper end weir of the processing tank main body for holding the processing liquid by providing heaters for keeping the processing liquid on the outer side surface and the outer bottom surface, respectively, and the processing solution drainage part is provided in the overflow tank part. When the processing liquid supplied to the processing tank main body overflows from the weir portion of the processing tank main body by forming an outlet, the overflowing processing liquid is discharged from the discharge port through the overflow tank portion to the outside of the processing tank main body. In the processing tank which is designed to discharge, the processing liquid reservoir is formed by denting the vicinity of the discharge port of the overflow tank. In the above configuration, a configuration is provided in which a support member that connects both outer side surfaces of the outer side surface of the processing tank body between the outer side surface facing the processing liquid storage section and the outer side surface of the processing liquid storage section is provided. You can also do it.

Further, in the above construction, the bottom surface of the overflow tank portion may be inclined downward toward the processing liquid reservoir portion. Further, in the above configuration, the treatment tank body and the treatment liquid reservoir are provided in the upper casing, the upper casing is supported by the lower casing, and the upper casing and the lower casing are vertically separated from each other. With two layers of insulation,
The lower heat insulating material is harder than the upper heat insulating material, and the lower heat insulating material supports the bottom outer surface of the processing tank body and the bottom outer surface of the processing liquid reservoir of the upper casing, respectively, and The upper heat insulating material may be configured to wrap the outer surface of the processing tank body and the outer surface of the processing liquid reservoir, respectively. Further, in the above-mentioned configuration, each outer side of the processing tank main body and the processing liquid reservoir of the upper casing is surrounded by the outer wall portion of the lower casing, and the edge portion of the upper casing is placed and The edge portion of the outer wall portion of the lower casing to be supported may be arranged above the dam portion of the processing tank body. Further, in the above configuration, at the bottom of the processing tank main body of the upper casing, a tubular portion that constitutes a processing liquid supply port projects downward from the bottom portion, while the lower casing into which the tubular portion is inserted. The bottom cylindrical portion may be formed so as to project upward.

[0006]

According to the structure of the present invention, since the processing liquid reservoir is formed by denting the vicinity of the outlet of the overflow tank around the dam of the processing tank main body, the dam is formed. Even if it is lowered, the treatment liquid can be reliably collected in the vicinity of the discharge port, air can be prevented from being sucked in, and as a result of lowering the weir portion, the treatment tank main body can be made smaller and lighter in weight. it can. In addition to providing the processing tank main body in the upper casing and providing the processing liquid reservoir, the dam portion can be lowered, and in addition to the weight reduction of the upper casing by the processing tank main body, If the upper casing is not directly supported by the lower casing but is supported by a heat insulating material, the lower casing will not be overloaded than the upper casing and damage to the lower casing will be effective. Can be prevented. Further, if a supporting member is provided between the processing liquid reservoir and the processing bath main body, the reinforcing between the processing bath main body and the processing liquid reservoir is achieved, and the processing liquid reservoir is opposed to the processing liquid reservoir. It is possible to reliably secure a space for providing the heater on the outer side surface. Therefore, since it is not possible to provide a heater on the outer side surface of the processing bath main body, this side surface acts as a heat dissipation plate, and it is possible to prevent a problem that the temperature control of the processing liquid becomes difficult. .

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments according to the present invention will be described below with reference to FIGS.
It will be described in detail based on. As shown in FIG. 1, the treatment tank according to the present embodiment has a substantially rectangular frame shape around the upper end dam portion 2b of the treatment tank main body 2a that holds a treatment liquid such as phosphoric acid at a high temperature of about 150 to 170 ° C., for example. Of the overflow tank 2e, and the processing solution discharge port 21 is formed in a part of the overflow tank 2e, while the processing solution supply port 20 is formed in the bottom of the processing tank body 2a. Two
The processing liquid overflowing from the weir portion 2b of a is discharged from the discharge port 21 through the overflow tank portion 2e, while the processing liquid is newly supplied into the processing tank main body from the supply port 20 and the overflow is caused. Tank part 2
The processing liquid reservoir 2f is formed by denting the vicinity of the outlet of e.

The processing tank main body 2a has a large number of wafers 9,
A support base 14 on which a carrier case 10 capable of accommodating 9, can be set and mounted is provided inside thereof, and is formed in a quadrangular pyramid shape that is tapered toward the bottom, and its upper end dam portion 2
2b has a large number of notches 2c, ..., 2c formed on its end surface, so that the processing liquid easily overflows from the processing bath main body 2a. A processing liquid supply port 20 is formed by forming a downwardly projecting tubular portion 2d around the bottom central opening of the processing bath main body 2a. The bottom surface of the processing tank main body 2a is also inclined downward toward the supply port 20 as shown in FIG. 3 so that the process liquid can be more easily extracted from the supply port 20. Further, heaters 11 are attached to the four outer surfaces and outer bottom surfaces of the processing tank body 2a,
The temperature of the treatment liquid held in the treatment tank main body 2a can be controlled by keeping it warm. The processing liquid reservoir 2f formed by denting the vicinity of the outlet of the overflow tank 2e is
Adjacent to the processing bath main body 2a, it has a depth substantially the same as the depth of the processing bath main body 2a, and has a width dimension substantially the same as the width dimension of the overflow bath portion 2e in FIG. A processing liquid discharge port 21 is formed by forming a downwardly projecting cylindrical portion 2g around the opening in the center of the bottom of the processing liquid reservoir 2f.
In addition, it is preferable that the bottom surface of the overflow tank 2e is inclined downward toward the processing liquid reservoir 2f in order to smoothly discharge the processing liquid in the overflow tank 2e.

The processing liquid reservoir 2f of the processing tank body 2a.
A supporting member 2j is provided between the outer side surface facing the outer side surface and the outer side surface 2h of the processing liquid reservoir 2f so as to connect both outer side surfaces. This support member 2j is the processing tank main body 2a in FIG.
It is composed of a plate material having the same width as the width. This reinforces the processing liquid reservoir 2f and the processing tank main body 2a, and
It is possible to secure a space for providing the heater 11 on the outer surface of the treatment tank main body 2a facing the treatment liquid reservoir 2f, and it is possible to further increase the support area of the upper casing 2 which will be described later, and to stabilize the treatment. The upper casing 2 can be supported by a heat insulating material 7, which will be described later. The processing tank body 2a and the processing liquid reservoir 2f are integrally provided in an upper casing 2a made of quartz or the like, and
The upper casing 2a is placed and supported on a lower casing 12 made of fluorine resin, polypropylene or the like. Inside the lower casing 12, upper and lower two layers of heat insulating materials 8 and 7 are provided. The lower heat insulating material 7 is harder than the upper heat insulating material 8, and the lower heat insulating material 7 is disposed on the bottom portion 12b of the lower casing 12 and is disposed in the processing tank of the upper casing 2. The bottom outer surface of the main body 2a and the bottom outer surface of the processing liquid reservoir 2f are supported. On the other hand, the upper heat insulating material 8 wraps the outer surface of the processing tank body 2a, the heaters 11, ..., 11 and the outer surface of the processing liquid reservoir 2f, respectively. As an example of such a lower heat insulating material 7, it is preferable to solidify long filaments of alumina. In addition, as an example of the upper heat insulating material 8, it is preferable to use a long fiber of alumina which is made into a cotton shape without being solidified.

The edge portion 2i of the upper casing 2 is not placed on the edge portion 12a of the lower casing 12, and a seal member 13 is interposed between both members. Further, the edge 12a of the lower casing 12 is the weir portion 2 of the processing tank body 2a.
The outer wall portion 12d of the lower casing 12 extends so as to be located above b. As a result, the upper casing 2 is housed in the lower casing 12, all the outside of the processing tank body 2a and the processing liquid reservoir 2f are surrounded by the lower casing 12, and both edges 2i and 12a are formed. Since the sealing material 13 is interposed therebetween, even if the processing liquid should be spilled from the processing tank main body 2a of the upper casing 2, it is possible to effectively prevent the processing liquid from entering between the lower casing 12 and the upper casing 2. In addition to this, the outer side surface and the entire bottom surface of the upper casing 2 can be covered with the heat insulating materials 7 and 8, and the heat retaining performance of the treatment liquid is improved. The cylindrical portion 2d constituting the supply port 20 at the bottom of the processing tank body 2a of the upper casing 2 projects downward from the bottom. On the other hand, the cylindrical portion 12c at the bottom of the lower casing 12 into which the cylindrical portion 2d is inserted is formed so as to project upward so that the upper end surface of the cylindrical portion 12c is higher than the lower end surface of the cylindrical portion 2d. To be located. The tubular portion 2d of the upper casing 2 and the tubular portion 12c of the lower casing 12 are connected by two connecting pipes 3 and 4 made of fluorine resin and sealing members 22 and 22 while sealing the both members. Therefore, by any chance, the tubular portion 2 of the upper casing 2
Even if a crack or the like is formed in d and the processing liquid leaks to the outer peripheral surface of the cylindrical portion, it is still in the cylindrical portion 12c of the lower casing 12,
The treatment liquid does not enter between the upper casing 2 and the lower casing 12. In addition, this lower casing 1
The cylindrical portion 12c of No. 2 has only the cylindrical portion 2d at the bottom of the processing tank body 2a of the upper casing 2 inserted therein.
Since the upper casing 2 is not supported by the tubular portion 12c, the tubular portion 12c is not overloaded by the upper casing 2.

Similarly, the cylindrical portion 2g forming the discharge port 21 at the bottom of the processing liquid reservoir 2f of the upper casing 2 projects downward from the bottom. On the other hand, the cylindrical portion 12e at the bottom of the lower casing 12 into which the cylindrical portion 2g is inserted is formed so as to project upward, and the upper end surface of the cylindrical portion 12e is positioned higher than the lower end surface of the cylindrical portion 2g. To be located. The tubular portion 2g of the upper casing 2 and the tubular portion 12e of the lower casing 12 are connected by two connecting pipes 5 and 6 made of fluorine resin and seal members 23, 23 while hermetically sealing the both members. Therefore, by any chance, the upper casing 2
Even if a crack or the like is caused in the cylindrical portion 2g of the lower casing 12 and the processing liquid leaks to the outer peripheral surface of the cylindrical portion, since it is in the cylindrical portion 12e of the lower casing 12, there is a gap between the upper casing 2 and the lower casing 12. The processing liquid does not enter. It should be noted that the tubular portion 12e of the lower casing 12 is configured such that the tubular portion 12e supports the upper casing 2 only by inserting the tubular portion 2g at the bottom of the treatment liquid reservoir 2f of the upper casing 2 inside the tubular portion 12e. Therefore, the upper casing 2 does not overload the cylindrical portion 12e.

According to the above construction, the processing liquid overflowing from the dam portion 2b of the processing tank main body 2a is stored in the processing liquid storage portion 2f through the overflow tank portion 2e to some extent and is processed from the discharge port 21. Drain the liquid. On the other hand, the processing liquid is newly supplied into the processing tank main body from the supply port 20 to circulate the processing liquid. According to the above embodiment, the processing liquid reservoir 2f is formed by recessing the vicinity of the outlet of the overflow tank 2e around the dam 2b of the processing tank main body 2a to form the processing liquid reservoir 2f. Even if the processing liquid can be reliably collected near the discharge port 21,
Air intake can be prevented, and as a result of lowering the weir portion 2b, the upper casing 2 can be downsized and the weight can be reduced. Also, the upper casing 2
In addition to reducing the weight of the upper casing 2, the upper casing 2 is not directly supported by the lower casing 12 but is supported via the heat insulating material 7, so that the lower casing 12 is overloaded by the upper casing 2. It is possible to effectively prevent the lower casing 12 from being damaged. Further, a support member 2j is provided between the processing liquid reservoir 2f and the processing bath main body 2a for reinforcement, and a heater 11 is provided on the outer surface of the processing bath main body 2a facing the processing liquid storage portion 2f. Since the space can be surely secured, the outside surface of the processing tank main body 2a cannot be provided with the heater 11, and this side surface acts as a heat dissipation plate, which makes it difficult to control the temperature of the processing liquid. It is possible to prevent a problem such as a problem. The present invention is not limited to the above embodiment, but can be implemented in various other modes.
For example, the treatment liquid may be supplied to the treatment tank body 2a from above the upper casing 2.

[Brief description of drawings]

FIG. 1 is a sectional side view of a processing tank according to an embodiment of the present invention.

FIG. 2 is a sectional front view of the processing tank of FIG.

3 is a plan view of the processing tank of FIG. 1. FIG.

FIG. 4 is a sectional side view of a conventional processing tank.

5 is a sectional front view of the processing tank of FIG.

FIG. 6 is a plan view of the processing tank of FIG.

[Explanation of symbols]

1 ... Processing tank, 2 ... Upper casing, 2a ... Processing tank main body,
2b ... Weir portion, 2c ... Notch, 2d, 2g ... Cylindrical portion, 2e ... Overflow tank portion, 2f ... Treatment liquid reservoir portion, 2h ... Treatment liquid reservoir outer surface, 2i ... Edge, 2j ... Support member, 3, 4 , 5, 6 ...
Connection pipe, 7 ... Lower heat insulating material, 8 ... Upper heat insulating material, 9 ... Wafer, 10 ... Carrier case, 11 ... Heater, 12 ... Lower casing, 12a ... Edge, 12b ... Bottom portion, 12c, 1
Reference numeral 2e ... Cylindrical portion, 12d ... Outer wall portion, 13, 22, 23 ... Seal member, 14 ... Support base, 20 ... Supply port, 21 ... Discharge port.

Claims (6)

(57) [Claims] 1. An overflow tank section (2e) is provided around an upper end dam section (2b) of a processing tank body (2a) for holding a processing solution by providing heaters (11) for keeping the processing solution on the outer side surface and the outer bottom surface, respectively. To form a processing liquid discharge port (21) in a part of the overflow tank portion (2e), and the processing liquid supplied to the processing tank main body (2a) is supplied to the processing tank main body (2).
When it overflows from the weir (2b) of (a), the overflowed processing liquid is used as the overflow tank (2).
In the processing tank which is configured to be discharged to the outside of the processing tank main body from the discharging port (21) via the e), the processing liquid reservoir (2f) is dented near the discharging port of the overflow tank section (2e). A treatment tank characterized by being formed. 2. An outer surface of the processing tank body (2a), which is opposed to the processing liquid reservoir (2f), and an outer surface of the processing liquid reservoir (2f). The processing tank according to claim 1, further comprising a supporting member (2j) to be connected. 3. The processing tank according to claim 1, wherein a bottom surface of the overflow tank portion (2e) is inclined downward toward the processing liquid reservoir portion (2f). 4. The upper casing (2) is provided with the treatment tank main body (2a) and the treatment liquid reservoir (2f), and the upper casing (2) is a lower casing (12).
Supported by the upper casing (2) and the lower casing (12) between the upper and lower two layers of heat insulating material (8,
7), the lower heat insulating material (7) is harder than the upper heat insulating material (8), and the lower heat insulating material (7) is the processing tank body (2a) of the upper casing (2). ) And the outer surface of the bottom of the processing liquid reservoir (2f) are respectively supported, and the upper heat insulating material (8) is provided on the outer surface of the processing tank body (2a) and the processing liquid reservoir (2f). The processing bath according to any one of claims 1 to 3, wherein the outer surface of the treatment tank is wrapped around the outer surface of the treatment tank. 5. The outer wall portion (12d) of the lower casing (12) is surrounded by the outer sides of the treatment tank body (2b) and the treatment liquid reservoir (2f) of the upper casing (2). The edge (2) of the upper casing (2)
The edge portion (12a) of the outer wall portion (12d) of the lower casing (12) on which i) is placed and supports the
The processing tank according to claim 4, wherein the processing tank main body (2a) is arranged at a position higher than a weir (2b). 6. A cylindrical portion (2d) constituting a processing liquid supply port (20) projects downward from the bottom of the processing tank body (2a) of the upper casing (2), while The processing tank according to any one of claims 1 to 5, wherein a cylindrical portion (12c) at the bottom of the lower casing (12) into which the cylindrical portion (2d) is inserted is formed so as to project upward.