JP2524231B2 - Pressure sensor - Google Patents

Description

TECHNICAL FIELD The present invention relates to a pressure sensor, and more particularly to a pressure sensor having a small hysteresis during step-up and step-down.

[Conventional technology and its problems]

Referring to FIG. 1, the diaphragm type pressure sensor divides the inside of the casing 1 into a pressure receiving chamber 2 and a backup chamber 3 by a diaphragm D, and connects the pressure detecting chamber 2 with an introduction pipe 4 for a pressure detection fluid a. The backup chamber 3 is provided with a ram 5 that is in contact with the center of the diaphragm D so as to be movable in the axial direction thereof, and a spring 6 that urges the ram toward the diaphragm D side. The deflection of the diaphragm D caused by the introduction pressure of a is converted into the movement of the ram 5, and the movement amount is detected by a differential transformer, an optical sensor, a laser sensor, or the like.

As the diaphragm D of the pressure sensor, the inventors of the present application have proposed US Pat. No. 241170, Japanese Patent Publication No.
Based on conventional techniques such as 47-15275 and JP-A-60-227141, Japanese Patent Application No. 1-12879 (JP-A-2-51664)
2) and 3), a corrugated cross section having a spiral ripple P is formed around the material plate center circle 10 from any point around the circle 10 and the spiral ripple P is the central circle. It was proposed to be inclined toward. The ripples P in the figure indicate the loci of valleys (the same applies hereinafter).

As shown by the solid line in FIG. 1, this diaphragm D was set with the convex outer surface as the pressure receiving chamber 2 side, and when a pressure-displacement curve was obtained, hysteresis at step-up and step-down, especially hysteresis at step-up start and step-down end were satisfied. It was not successful (see the conventional example in FIG. 4, broken line).

An object of the present invention is to reduce the above hysteresis.

[Means for solving the problem]

In order to solve the above-mentioned problems, in the present invention, in the diaphragm type pressure sensor, the diaphragm of the spiral ripple is provided in both chambers with the convex surface side at no load facing the backup chamber, and the ram. Is moved to reverse the disc spring, and the convex surface in the inverted state is the pressure receiving chamber side.

The inclination of the spiral ripple, that is, the ratio (h / l) of the inclination height h and the radial length l in FIG. 3 may be set to 1/5 or less. It is preferably 1/6 or less. When it becomes 1/5 or more, the molding pressure at the time of press molding is
This is because the outward slope and the inward slope are greatly different from each other and cannot be manufactured.

In addition, if concentric circular ripples and outer circular ripples are provided, when the ripples are pressed, the ridge-like distortion that occurs in the center is absorbed and dispersed in the concentric circular ripples, and the wrinkle-like distortion that occurs on the outer periphery is the outer circular ripples. Absorbed and dispersed. This absorption / dispersion becomes more effective if the beginning and end of the spiral ripple are merged into both circular ripples.

[Action]

In the pressure sensor configured in this way, in the same manner as in the past, the pressure detection fluid is introduced into the pressure receiving chamber, the deflection of the diaphragm due to the introduced pressure is converted into the movement of the ram, and the movement amount is converted into the differential transformer. , Optical sensor, laser sensor, etc.

At the time of this action, the diaphragm is inverted, and the deflection in the inverted state is detected, so that the hysteresis in step-up and step-down is small.

Example 1 First, the diaphragm D will be described.

In the diaphragm D of this embodiment, a hoop 34 mmφ of a stainless steel foil having a thickness of 0.015 mm is finished by press working and has an outer diameter of 25.4 mmφ.

The front view and the cross-sectional view are shown in FIGS. 2 and 3, in which the central circle 10 is 5 mmφ, the valley curvature r of the spiral ripple P shown in FIG. 2 is 1.5 mm, and the peak curvature r ′. Is 1.0 mm, and the spiral ripple P is formed adjacent to each other from the three quartiles of the central circle 10. The wave height t is 0.3 mm, the height difference T between the outer circumference and the center is 1.5 mm, and the curvature R is It was 100 mm.

Two pieces of this diaphragm D are manufactured, and each is the first
The pressure sensor was set on the pressure sensor shown in the figure. In the present invention, as shown by the chain line in the figure, first, the diaphragm D is provided with the convex surface side toward the backup chamber 3 when there is no load, and the adjustment screw 7 is screwed in to move the ram 5. The diaphragm D is inverted, and its convex surface is the pressure receiving chamber 2 side as shown by the solid line in the figure.

On the other hand, as a conventional example, the diaphragm D was set from the beginning as indicated by the solid line (the convex surface side in the normal state is the pressure receiving chamber).

The pressure-displacement curves of this example and the conventional example are shown in FIG. In the figure, the solid line indicates the example, the broken line indicates the conventional example, ◯ indicates the step-up, and ● indicates the step-down. From now on, the example
It can be seen that the hysteresis at the time of step-up and step-down, especially at the start of step-up and the end of step-down is smaller than that of the conventional example.

Various shapes such as those shown in FIG. 5 can be considered as the shape of the diaphragm D. FIG. 5 shows that concentric circular ripples P ₁ are formed adjacent to each other around the central circle 10 and the outer circular ripples are concentric with the concentric circular ripples P ₁ and at a predetermined interval.
P ₂ is formed, and the spiral ripple P ₃ is formed between both circular ripples. Also in the embodiment of FIG. 2, the outer circular ripple P ₂ may be formed and the spiral ripple P ₂ may be merged with the ripple P ₂ .

In each example, the inclination height h of the spiral ripple P and the radial length l and the ratio h / l were set to 1/6 or less.

〔The invention's effect〕

Since the present invention is configured as described above, there is an effect that the hysteresis at the time of step-up and step-down, especially at the start of step-up and the end of step-down is reduced, and the detection accuracy of the initial state or the final state is improved.

Further, by forming inner and outer circular ripples and joining both ends of the spiral ripple to the both circular ripples, when the ripples are press-molded, wrinkle distortion is less likely to occur and the flexing action is smoothed.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of a pressure sensor according to the present invention, FIGS. 2 and 5 are schematic front views of respective examples of diaphragms, and FIG. 3 is a sectional view of the example of FIG. FIG. 4 is a pressure-displacement measurement diagram. 1 ... Casing, 2 ... Pressure receiving chamber, 3 ... Backup chamber, 4 ... Introducing pipe, 5 ... Ram, 6 ... Spring, 10
…… Center circle, P, P ₃ …… Swirl ripples, P ₁ , P ₂ …… Circular ripples, D …… Diaphragm.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Teruo Watanabe 2-3-1 Iwata-cho, Higashi-Osaka City, Osaka Prefecture Tatsuta Electric Wire Co., Ltd. (72) Inventor Kihachi Onishi 2-3-3 Iwata-cho, Higashi-Osaka City, Osaka Prefecture No. 1 within Tatsuta Electric Wire Co., Ltd. (56) Reference JP-A-60-227141 (JP, A) JP-A-60-237336 (JP, A) JP-B 47-15275 (JP, B1)

Claims (2)

(57) [Claims] 1. A casing 1 is divided into a pressure receiving chamber 2 and a backup chamber 3 by a diaphragm D, a pressure detecting fluid introducing pipe 4 is connected to the pressure receiving chamber 2, and the diaphragm is provided in the backup chamber 3. Ram 5 that touches the center of D
Is provided so as to be movable in its axial direction, and the ram 5
In the pressure sensor provided with the spring 6 for urging the diaphragm D toward the diaphragm D, the diaphragm D has a corrugated cross section that presents spiral ripples P and P ₃ around the material plate center circle 10 from any point around it. The spiral ripples P and P ₃ are formed by a disc spring inclining toward the central circle 10, and the disc spring is connected to the backup chamber 3 with the convex side at no load facing the backup chamber 3. A pressure sensor, wherein the pressure sensor is provided between the pressure receiving chamber 2 and the ram 5 to move the disc spring so as to invert the convex spring in the inverted state on the pressure receiving chamber 2 side. 2. A concentric circular ripple P ₁ is formed adjacently around the center circle 10 of the material plate, and an outer circular ripple P ₂ is formed concentrically with the concentric circular ripple P ₁ and at a predetermined interval. ,
Between both circular ripples P _1, P _2, claim 1, to form the spiral ripples P _3, both ends of the spiral wave P _3, characterized in that said are merged respectively circular ripples P _1, P ₂ The pressure sensor described.