JP2518446Y2 - Optical resonator adjustment device - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical resonator adjusting device applied to a Raman laser device.

[0002]

2. Description of the Related Art A conventional optical resonator will be described with reference to FIGS. In FIG. 10, 2A and 2B are a pair of concave mirrors, and laser light is incident through the hole 12 of the concave mirror 2A,
As shown in FIG. 11, the concave mirrors 2A and 2B multiple-reflect laser light repeatedly, and the laser light is emitted from the hole 13 of the concave mirror 2B. The concave mirrors 2A and 3B are shown in FIG.
Although the spots shown in 2 are lined up, the spots are observed through the observation windows 9A and 9B, and the concave mirror angle or the incident angle of the incident laser is adjusted so that the spots are arranged in a circular shape. 8A, 8B, incident mirror 15,1
It was adjusted manually with 6.

[0003]

[Problems to be Solved by the Invention] In an optical resonator,
The array of spots on the concave mirror often becomes elliptic instead of circular, but the cause is that the angle of the concave mirror is shifted or the incident angle is shifted due to the angle shift of the incident mirror. is there.

In the conventional apparatus, in order to arrange the spots in a circular shape on the concave mirror surface, it is necessary to adjust the concave mirror angle and the incident mirror angle by intuition, and it takes a long time for the adjustment, and it is difficult to experience. Required skill.

The present invention is intended to solve the above problems.

[0006]

SUMMARY OF THE INVENTION An optical resonator adjusting device of the present invention comprises a pair of opposed concave mirrors provided in a hermetically sealed container, and an angle adjuster around a horizontal rotation axis provided in each concave mirror. And an angle adjuster around a vertical rotation axis, an optical resonance provided with an entrance hole provided in the one concave mirror and an exit hole provided in the other concave mirror, and an incident mirror for introducing laser light into the entrance hole. In the image processing apparatus, an image processing apparatus for inputting an image from each of the one and the other concave mirrors and performing image processing, and an arithmetic processing for inputting an image signal from the image processing apparatus and performing an arithmetic operation to control each of the angle adjusters and the incident mirrors. It is characterized by having a device.

[0007]

In the above, when the image of each concave mirror surface is input to each image processing apparatus, the image processing apparatus performs image processing on the spot formed by the laser beam formed on the concave mirror surface to obtain each coordinate value. , Input to the arithmetic processing unit. The arithmetic processing device to which the coordinate values are input, forms an ellipse by connecting the spots, obtains the center point thereof, controls the incident mirror based on the logic input in advance, and sets the center point to a predetermined position. To do. Further, the arithmetic processing unit controls the angle adjuster in order to determine the deviation of the shape and make it into a predetermined circular shape. The above-mentioned operation is repeated to converge the circle formed by each spot into a predetermined position and a predetermined shape.

As described above, adjustment of the optical resonator can be performed in a short time without requiring skill, and automatic adjustment can be performed even if displacement occurs due to vibration from the outside, thereby increasing the operating rate of the apparatus. be able to.

[0009]

FIG. 1 shows an embodiment of the present invention. In this embodiment shown in FIG. 1, a pair of opposed concave mirrors 2A and 2B and a concave mirror 2 are provided in a closed container 1 having observation windows 9A and 9B.
Inner rings 3A and 3B and inner rings 3A and 3B, which are connected to A and 2B via vertical rotation shafts 5A and 5B, respectively.
To the outer rings 4A and 4B connected to the horizontal mirrors 6A and 6B, respectively, and the angle adjuster 8A that is coupled to the concave mirrors 2A and 2B and rotates the concave mirrors 2A and 2B about the vertical rotary shafts 5A and 5B. , 8B, which are respectively coupled to the inner rings 3A, 3B, and the inner ring 3
Angle adjusters 7A and 7B for rotating A and 3B about horizontal rotation axes 6A and 6B, an entrance hole 12 provided in the concave mirror 2A and an exit hole 1 provided in the concave mirror 2B.
3 and an optical resonator provided outside the container 1 and provided with incident mirrors 15 and 16 for introducing incident light into the incident hole 12, the concave mirror 2 from the observation windows 9A and 9B, respectively.
Image processing devices 10A and 10 for inputting images on the A and 2B sides
B and the image processing devices 10A and 10B to input and calculate image signals, and the angle adjusters 7A, 7B, 8A and 8 are calculated.
An arithmetic processing unit 11 for controlling B and the incident mirrors 15 and 16 is provided.

The angle adjusters 8A and 8B rotate the concave mirrors 2A and 2B around the vertical rotation axes 5A and 5B, respectively, and the angle adjusters 7A and 7B are concave mirrors 2A and 2B, respectively.
Is rotated about horizontal rotation axes 6A and 6B. For this reason, the concave mirrors 2A and 2B have inner rings 3A and 3B, respectively.
To the outer rings 4A and 4B, and the inner rings 3A and 3B are mounted to the outer rings 4A and 4B together with the concave mirrors 2A and 2B via the horizontal shafts 6A and 6B, respectively. That is, the inner rings 3A and 3B and the outer rings 4A and 4B form gimbals, respectively, and the concave mirrors 2A and 2B have the vertical rotation shafts 5A and 5B and the horizontal rotation shaft 6 respectively.
It is rotatable around A and 6B. The angle adjusters 7A, 7B, 8A, 8B are composed of a motor and a screw. When the motor is turned, the screw advances, and the peripheral portions of the concave mirrors 2A, 2B or the inner rings 3A, 3B are pushed,
The angles of the concave mirrors 2A and 2B deteriorate.

In the above, the images on the surfaces of the concave mirrors 2A and 2B are respectively imaged through the observation windows 9A and 9B.
When the images are received by A and 10B, the image processing apparatus 10
A and 10B image-process the spots 20 of the concave mirrors 2A and 2B by the laser light to give coordinate values, and the arithmetic processing unit 11 which inputs the coordinate values of each spot 20 determines the center point of the ellipse connecting the spots 20. Ask. When this central point is obtained, the arithmetic processing unit 11 first adjusts the angles of the incident mirrors 15 and 16 so that the central point is located at the center of the concave mirror. However, as shown in FIGS. If there is a deviation, it is possible to theoretically analyze which direction and how much the angle should be corrected. Therefore, this theory is incorporated in the arithmetic processing unit 11 in advance, and the arithmetic result is given to the incident mirrors 15 and 16 for adjustment.

Next, when the spots 20 deviate from the circle as shown in FIGS. 4 to 7, theoretical processing is performed by the arithmetic processing unit 11 so that the spots 20 are arranged on the circle as shown in FIG. Adjust 7A, 7B, 8A, 8B. After adjusting the angle adjusters 7A, 7B, 8A, 8B, check the center point again. If the center point is off, readjust it. If the center point is adjusted, check the shape of the spot array again. If necessary, adjust the center point and spot array to predetermined positions,
Converge into an array.

2 shows the case where the optical resonator is in the correct adjustment state, FIG. 3 shows the case where the adjustment of the optical resonator is insufficient, and FIG. 4 and FIG. 5 show that the incident side concave mirror 2A has a horizontal rotation axis. 6 and 7 show cases where the exit side concave mirror 2B has an angle deviation about the horizontal rotation axis and an angle deviation about the vertical rotation axis, respectively. 8 and 9 show the case where the incident angles of the laser light are deviated in the horizontal plane and the vertical plane, respectively.

As described above, the adjustment of the optical resonator can be carried out in a short time without requiring skill, and it becomes possible to perform the automatic adjustment even if the positional deviation occurs due to the vibration from the outside, thereby increasing the operation rate of the apparatus. be able to.

[0015]

According to the optical resonator adjusting device of the present invention, the image processing device to which the image of each concave mirror surface is input outputs the image signal, and the arithmetic processing device to which each of the image signal is input causes the incident mirror. By outputting a control signal to each angle adjuster and controlling each one, adjustment of the optical resonator can be performed in a short time without requiring skill, and automatic adjustment is possible even if a position shift occurs due to external vibration. It is possible to increase the operating rate of the device.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of an embodiment of the present invention.

2A and 2B are explanatory views when the optical resonator is in a correct adjustment state, in which FIG. 2A is a laser light reflection state, FIG. 2B is a spot formation state on a concave concave mirror surface, and FIG. 2C is a concave concave mirror. The formation state of the spot on the surface is shown.

3A and 3B are explanatory views when the optical resonator is in an insufficiently adjusted state, in which FIG. 3A is a laser light reflection state, FIG. 3B is a spot formation state on a concave-side concave mirror surface, and FIG. 3C is emission. The formation state of the spot on the side concave mirror surface is shown.

4A and 4B are explanatory views in the case where an incident side concave mirror of an optical resonator is angularly displaced about a horizontal rotation axis, FIG. 4A shows an incident side concave mirror surface, and FIG. 4B shows an outgoing side concave mirror surface.

5A and 5B are explanatory views in the case where an incident side concave mirror of an optical resonator is angularly displaced about a vertical rotation axis, FIG. 5A shows an incident side concave mirror surface, and FIG. 5B shows an outgoing side concave mirror surface.

6A and 6B are explanatory views in the case where the exit side concave mirror of the optical resonator is angularly displaced about the horizontal rotation axis, FIG. 6A shows the entrance side concave mirror surface, and FIG. 6B shows the exit side concave mirror surface.

7A and 7B are explanatory views in the case where an output side concave mirror of the optical resonator is angularly displaced about a vertical rotation axis, FIG. 7A shows an incident side concave mirror surface, and FIG. 7B shows an output side concave mirror surface.

FIG. 8 is an explanatory diagram in the case where the incident angle of the laser light of the optical resonator is deviated in the horizontal plane, (a) is a concave mirror surface on the incident side,
(B) shows an exit side concave mirror surface.

FIG. 9 is an explanatory diagram in the case where the incident angle of the laser light of the optical resonator is deviated in a vertical plane, (a) is a concave concave mirror surface on the incident side,
(B) shows an exit side concave mirror surface.

FIG. 10 is an explanatory diagram of a conventional device.

FIG. 11 is an explanatory diagram of a reflection state of laser light according to a conventional device.

12A and 12B are explanatory views of a state of forming a spot on a concave mirror surface according to a conventional apparatus, in which FIG. 12A shows an incident side concave mirror surface and FIG. 12B shows an output side concave mirror surface.

[Explanation of symbols]

 1 Container 2A, 2B Concave Mirror 3A, 3B Inner Ring 4A, 4B Outer Ring 5A, 5B Vertical Rotation Shaft 6A, 6B Horizontal Rotation Shaft 7A, 7B, 8A, 8B Angle Adjuster 9A, 9B Observation Window 10A, 10B Image Processing Device 11 Processor 12 Entrance hole 13 Exit hole 15 and 16 Entrance mirror 20 Spot

Claims (1)

(57) [Scope of utility model registration request] 1. A pair of opposed concave mirrors provided in a closed container, an angle adjuster about a horizontal rotation axis and an angle adjuster about a vertical rotation axis provided on each of the concave mirrors, and one of the concave mirrors. In an optical resonator provided with an entrance hole provided and an exit hole provided on the other concave mirror and an entrance mirror for introducing laser light into the entrance hole, an image is input from each of the one and the other concave mirrors. And an image processing apparatus for performing image processing by an image processing apparatus, and an operation processing apparatus for inputting an image signal from the image processing apparatus and performing an operation to control each of the angle adjusters and incident mirrors described above. .