JP2516404B2 - Damping support structure - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention receives a vibration such as a vibration caused by an earthquake or a slight vibration generated by an automobile or the like from a support such as a floor of a structure. , Vibration damping support configured to prevent vibration of the device mounting table that mounts the manufacturing device for manufacturing ultra-precision products such as semiconductors and printed circuit boards in LSI manufacturing factories and laser application product factories, etc. Regarding the structure.

<Prior art> In an LSI manufacturing factory, a laser application product factory, etc., it is necessary to suppress such vibrations because even small vibrations may cause product defects. Between the mounting table etc. and the support such as the floor of the structure,
A laminated rubber and a spring element such as an air spring are interposed, and the apparatus mounting base is elastically supported by these spring elements so as to absorb fine vibrations efficiently while absorbing shocks due to vibrations.

<Problems to be Solved by the Invention> However, although the vibration propagating to the apparatus mounting table can be alleviated, the vibration cannot be eliminated.

Therefore, in addition to providing an auxiliary mass, a damper such as a hydraulic cylinder is provided to prevent the device mounting table from vibrating, but there is a drawback that the device mounting table becomes large in size because the auxiliary mass and the damper are provided. Further, there is a drawback that the weight of the device mounting table is increased and the structure for elastically supporting them requires strength.

Further, since the damper adjusts the damping force by the viscosity of the oil, it has a large viscosity with minute vibrations, which causes a problem of degrading the vibration isolation performance of the device mounting table.

The present invention has been made in view of such circumstances, and vibrations caused by an earthquake, microvibrations generated by an automobile or the like propagate to a floor or a device mounting table mounted on the floor. That is, without increasing the size of the device mounting table,
Moreover, it is an object of the present invention to make it possible to extremely effectively suppress the weight of the equipment mounted on the apparatus mounting base, etc.

<Means for Solving the Problems> In order to achieve such an object, the vibration-damping support structure of the present invention suspends and supports a support base so as to be horizontally displaceable on a fixed portion, and the support base. An apparatus mounting base is provided via a plurality of supporting members, and an air spring is provided between the supporting base and the supporting member, between the supporting members, and between the supporting member and the device mounting base. A fixing mechanism that intervenes and that switches at least one of those air springs between an operating state and a non-operating state is provided, and the fixing portion and the device mounting table are provided in two directions that are perpendicular to each other in a horizontal direction and a vertical direction. It is interlockingly connected via linear motors that act in each direction, a vibration sensor is attached to the device mounting table, and linear vibration is used to cancel the vibration based on the detection result of the vibration sensor. It is configured by including a control device that operates the motor.

<Operation> According to the above configuration, when the fixed portion vibrates due to an earthquake, a slight vibration, or the like, in the horizontal direction, the vibration is propagated to the suspension-supported support base in a state in which the vibration of the fixed portion is delayed. Then, in the vertical direction, three or more air springs gradually absorb vibration while absorbing vibrations, and finally, these three or more air springs finally cause vibration of a long cycle to occur on the device mounting table. It is possible to suppress the propagation of the vibration to the apparatus mounting base by operating the linear motor based on the detected vibration by detecting the vibration of the long cycle by the vibration sensor.

Also, by changing the number of air springs to be actuated by the fixing mechanism, the rigidity in the horizontal and vertical directions and the natural frequency are adjusted respectively, and it is suitable for each depending on the weight of the equipment to be mounted on the equipment mounting table. Rigidity and natural frequency can be given.

<Example> Hereinafter, an example of the present invention is described in detail based on a drawing.

FIG. 1 is an overall plan view of an embodiment of a vibration damping support structure of the present invention, FIG. 2 is an overall side view of FIG. 1, and FIG. 3 is a view taken along the line III-III of FIG. FIG. 4 is a sectional view taken along the line IV-IV in FIG. 1, in which a base plate 1 as a fixed portion installed on the floor is horizontally movable through a suspending member 2 ... The first air tank 3a at the stage is suspended.

On the first air tank 3a, as shown in the cross-sectional view of FIG. 5 (cross-sectional view taken along the line VV of FIG. 1), the first air spring 4a of the first stage is provided and the first air tank 3a. 3a and 1st
The air spring 4a communicates with the air spring 4a through the orifice 5.

A second stage second air tank 3b as a supporting member is supported on the first air spring 4a, and the second air tank
The second air spring 4b of the second stage is provided on 3b, and the second air tank 3b and the second air spring 4b are connected to each other through the orifice 5.

In addition, on the second air spring 4b, a support member 3
The third air tank 3c of the third stage is supported, the third air spring 4c of the third stage is provided on the third air tank 3c, and the third air tank 3c and the third air spring 4c form the orifice 5 Connected through the third air spring 4c
A device mounting table 6 is mounted and supported on the top.

First air tank 3a, second air tank 3b and third
Each of the air tanks 3c is formed in a cross shape in a plan view, and the first air tank 3a, the second air tank 3b, and the third air tank 3c each have an auxiliary air tank.
7a, 7b, 7c are connected for communication.

A support leg 8 is erected on the base plate 1, a vertical direction control linear motor 9 is provided on the support leg 8, and
A pair of horizontal direction control linear motors 10 and 11 are attached to the upper part of a predetermined support leg 8 such that the displacement directions thereof are orthogonal to each other.

The device mounting table 6 is formed in a quadrangular shape in a plan view, and the vertical direction control linear motor 9 and the horizontal direction control linear motors 10 and 11 and the device mounting table 6 are connected to a piano wire at each of four corners thereof. The linear motors 9, 10 and 11 are interlocked and coupled via 12 and are configured so that a control force in a three-dimensional direction can be applied to the device mounting table 6 to control the vibration.

A vertical sensor 13 for measuring the vertical vibration of the device mounting table 6 is attached to an interlocking connection portion between each of the vertical control linear motors 9 and the device mounting table 6, and a horizontal control linear motor 10, 11 Each and device stand 6
Horizontal sensors 14 and 15 for measuring vibrations of the device mounting table 6 in the horizontal direction (X and Y directions) are respectively attached near the interlocking connection position with.

The measurement values obtained by the vertical sensor 13 and the horizontal sensors 14 and 15 are input to a computer 16 constituting a control device via an amplifier 17 and an A / D converter 18, as shown in the schematic configuration diagram of FIG. Input those measured values into the preset relational expressions, and use the linear motors 9, 10, 11
The operation amount for each is calculated in real time, and the control output corresponding to the calculated operation amount is output to the D / A converter 1
9 and amplifier 17 to drive linear motors 9, 10 and 11 respectively, and drive them so that the measured value becomes zero.
Is configured to cancel the vibration of the.

Each of the linear motors 9, 10, 11 is a front view of FIG.
As shown in the side view of FIG. 8 and the partially cutaway front view of FIG. 9, a movable body in which a permanent magnet 21 is attached in a shield case 20 and a voice coil 22 is attached to the permanent magnet 21 so as to be displaceable therein. 23 is provided, the piano wire 12 is connected to a rod 24 as a movable shaft that is connected to the movable body 23, by adjusting the amount of current flowing to the voice coil 22 and changing the direction of the current. , Device mounting table 6
The control force is applied in a predetermined direction by a predetermined amount to control the vibration.

A bearing frame 25 is attached to the shield case 20, and the bearing frame 25 is cut to allow elastic deformation in the moving direction of the rod 24 as shown in the enlarged side view of FIG. A leaf spring 27 having a notch groove 26 ... Is attached, and the leaf spring 27 and the rod 24 are integrally connected,
The rod 24 is configured so that it can be smoothly displaced without being affected by frictional resistance.

A fixing bracket on the upper side of the first air tank 3a
28 is connected, and the fixing bracket 28 is connected to the lower side of the second air tank 3b so as to face the fixing bracket 28, and the fixing brackets 28, 28 are connected and fixed with a bolt 29. Thus, the first fixing mechanism 30a is configured to switch the first air spring 4a to the inoperative state.

In addition, a bracket 28 for fixing the second air tank 3b.
Is integrally connected to the upper side, and the fixing bracket 28 is connected to the lower side of the third air tank 3c so as to face the fixing bracket 28.
By connecting and fixing each other with the bolt 29, the second fixing mechanism 30b is switched so that the second air spring 4b is switched to the non-acting state.
Is configured.

With these configurations, either of the first fixing mechanism 30a and the second fixing mechanism 30b, or both of them are brought into the operating state, so that either the first air spring 4a or the second air spring 4b or their From the state in which the elastic support action by both is released and elastically supported by the first to third air springs 4a, 4b, 4c, the second air spring 4b, the third air spring 4c, and the first air spring 4c
Air spring 4a and third air spring 4c or third air spring
It is possible to switch to a state in which the weight of the device mounting table 6 and various devices mounted on the device mounting table 6 are elastically supported by only one of 4c.

Further, a fixing bracket 31 is connected to a predetermined position on the lower side of the first air tank 3a, while a fixing bracket 32 is connected to a position of the base plate 1 corresponding to the fixing bracket 31. First air tank by connecting and fixing 31,32 with bolts
3a is connected and fixed to the base plate 1, and the first air tank
3a is locked to the base plate 1 and can be switched to a state in which horizontal vibration is suppressed only by the first to third air springs 4a, 4b, 4c.

As the fixing mechanisms 30a and 30b as described above, the fixing brackets 28 are connected to the upper portions of the device mounting table 6 and the third air tank 3c at positions corresponding to each other, and the fixing brackets 28 and 28 are connected to each other by bolts 29. It is also possible to connect and fix with an appropriate fixing tool such as.

Further, the present invention may be configured by providing the air springs 4a ... In four or more stages.

<Effects of the Invention> According to the present invention, it is possible to suppress the propagation of vibration to the device mounting base without attaching an auxiliary mass to the device mounting base, and thus it is not necessary to increase the size of the device mounting base. It is possible to avoid an increase in weight, it is not necessary to use an air spring having a higher strength than necessary, and it is possible to satisfactorily suppress the vibration of the device mounting table while having an inexpensive structure as a whole.

Also, since the air springs are provided in multiple stages, not only can vibrations be satisfactorily damped, but also fine vibrations can be sequentially absorbed satisfactorily, and finally, the period of the vibrations propagated to the device mounting table can be controlled. With respect to the remaining vibration of a long cycle, the operation of the linear motor can drive the device mounting table so as to reduce the vibration to zero, and the vibration of the device mounting table can be suppressed well. It was

In addition, the fixed mechanism of three or more air springs is switched between the working state and the non-working state by the fixing mechanism, and the number of air springs to be actuated is changed to set the horizontal and vertical rigidity and natural frequency respectively. Therefore, it is possible to better suppress vibration by giving appropriate rigidity and natural frequency according to the weight of the equipment to be mounted on the device mounting table and the weight change due to the addition of attachments. It was

[Brief description of drawings]

The drawings show an embodiment of the vibration damping support structure according to the present invention. FIG. 1 is an overall plan view of the vibration damping support structure, FIG. 2 is an overall side view of FIG. 1, and FIG. The III-III line arrow view of FIG.
4 is a sectional view taken along line IV-IV in FIG. 1, FIG. 5 is a sectional view taken along line VV in FIG. 1, FIG. 6 is a schematic configuration diagram, FIG. 7 is a front view of a linear motor, 8 is a side view of FIG. 7, FIG. 9 is a partially cutaway front view of the linear motor, and FIG. 10 is an enlarged front view of the leaf spring. 1 ... Base plate 3a as fixed part ... 1st air tank 3b as support base ... 2nd air tank 3c as support member ... 3rd air tank 4a as support member ... 1st air spring 4b ... … Second air spring 4c …… Third air spring 6 …… Device mounting table 9 …… Vertical direction control linear motor 10,11 …… Horizontal direction control linear motor 13 …… Vertical sensor 14,15 …… Horizontal sensor 16: Computer as control device 30a: First fixing mechanism 30b: Second fixing mechanism

Claims (1)

(57) [Claims] 1. A support base is hung and supported on a fixed portion so as to be displaceable in a horizontal direction, and an apparatus mounting base is provided on the support base via a plurality of support members, and the support base and the support members are connected to each other. Fixing mechanism for interposing an air spring between the support members and between the support members and between the support member and the device mounting table, and switching at least one of the air springs between an operating state and a non-operating state. And, the fixed portion and the device mounting table are interlockingly connected via linear motors that act in two directions that are orthogonal to each other in the horizontal direction and in the vertical direction, and a vibration sensor is attached to the device mounting table. A vibration-damping support structure that is additionally provided with a control device that operates a linear motor so as to cancel vibration based on the detection result of the vibration sensor.