JP2512471B2 - Imaging type position detector - Google Patents

Description

The present invention relates to an image pickup type position detecting device for detecting the position of a moving vehicle with respect to a grid-shaped frame installed on the ceiling side.

[Conventional technology]

In the image pickup type position detection device of this type, for example, a filter for air purification in a clean room is generally formed in a size of a predetermined area, and a large number of the filters are grid-like mounting frames installed on the ceiling side. The position of the moving vehicle with respect to the mounting frame is detected based on the image information obtained by capturing the mounting frame.

Conventionally, based on the difference in brightness from the image information obtained by imaging the lattice-shaped mounting frame installed on the ceiling side, the filter surface and the mounting frame that are the background are separated and identified, and the information of the identified mounting frame is used. The position of the moving vehicle was detected.

Then, an image is taken while illuminating the ceiling side with a predetermined brightness so that the brightness in the imaging visual field is constant (see Japanese Patent Application No. 61-230803).

[Problems to be solved by the invention]

However, in the above-described conventional configuration, the mounting frame is simply identified based on the difference in brightness rather than the imaging information. Therefore, when the difference in light reflectance between the mounting frame and the filter surface is small, the background In some cases, it may be difficult to accurately separate and identify the filter surface (ceiling surface) and the mounting frame, which may cause the position detection of the moving vehicle to be erroneous.

The present invention has been made in view of the above circumstances,
The purpose thereof is to make it possible to accurately detect the position of the moving vehicle with respect to the frame even when there is no difference in light reflectance between the ceiling surface and the frame.

[Means for solving problems]

The characteristic configuration of the image pickup type position detection device according to the present invention is that two orthogonal slit light beams are projected upward from the lower side position of the ceiling in a state in which the intersection point is directed to a position away from the intersection of the frame. Slit light projection means, imaging means for imaging the slit light projection location of the frame upward from the lower side position of the ceiling, based on the imaged image information of the imaging means, the interrupted portion in each of the slit light Extracting, each of the position detecting means for obtaining the position of the moving vehicle with respect to the frame based on the position information in the imaging screen of the extracted discontinuous portion, the moving vehicle,
The projection direction of the slit light projection means and the imaging direction of the imaging means are set so that the position of the interrupted portion in the imaging screen changes as the position and tilt of the moving vehicle with respect to the frame change. It is in the point that
The operation and effect are as follows.

[Action]

That is, the two orthogonal slit light is projected upward from the lower side position of the ceiling in a state where the intersection points are away from the intersection of the frame, and the slit light projection position of the frame is the ceiling. When the image is taken from the lower side position to the upper side, since the frame projects downward from the ceiling surface, the slit light is seen to be interrupted at each of the positions where both slit lights cross the frame (the fifth position). See figure).
Then, as the position and the inclination of the moving vehicle with respect to the frame change, the positions at which the slit light beams appear to be interrupted change in the imaging screen (see FIG. 6). It is possible to extract the discontinuous portion of the slit light and obtain the position of the moving vehicle with respect to the frame from the position information of the extracted discontinuous portion.

〔The invention's effect〕

Therefore, even when there is no difference in brightness between the grid-shaped frame and the ceiling surface, the position of the moving vehicle with respect to the grid-shaped frame on the ceiling side can be accurately detected. An embodiment in which the above is applied to a leak test mobile vehicle for automatically performing a leak test of an air purification filter in a clean room will be described with reference to the drawings.

As shown in FIG. 2 to FIG. 4, the moving vehicle (A) has a pair of left and right propulsion wheels (1L) and (1R) which are configured to be driven and stopped separately for the left and right sides, with the forward and backward center of the vehicle body as the center. It is provided in a state where it is positioned, and a pair of left and right caster type idler wheels (2) are provided at both front and rear ends of the vehicle body.
By driving the propulsion wheels (1L) and (1R) so that the rotational speeds of L) and (1R) are differentiated from each other, the steering wheel and the spin turn can be freely controlled.

And HEPA as an air purification filter installed over the entire ceiling of the downflow type clean room
A leak tester (12) (see FIG. 1) for performing a leak test on the installation location of the filter (3) is mounted.

The leak tester () is attached to the tip of a pole (6) that is detachably attached to an XY table (5) movably mounted in the front-rear, left-right, and horizontal directions relative to the vehicle body. A probe (4) connected to 12) for sucking in measurement air is attached with the measurement air suction port facing the ceiling side.

In addition, a slit light projector (slit light projector) as a slit light projection means for projecting two orthogonal slit lights (B ₁ ) and (B ₂ ) upward from a lower position of the ceiling onto the pole (6) ( 8) and the slit light projection location of the mounting frame (9) of the HEPA filter (3) from a direction different from the projection direction of each of the slit lights (B ₁ ) and (B ₂ ), that is, a position below the ceiling. Image sensors (7) are attached as image pickup means for picking up images from above.

Explaining the slit light projector (8), the two slit light beams (B ₁ ), ( B ₂ ) are formed. Then, in a state where the moving vehicle (A) is located near the proper position with respect to the mounting frame (9) and the XY table (5) is located at the set position, both slit lights (B ₁ ) and (B ₂ ) ) Is projected such that its intersection point is directed to a location away from the intersection of the mounting frame (9) and is vertical to the ceiling.

With regard to the image sensor (7),
As shown in FIGS. 2 to 4, the moving vehicle (A) is located at an appropriate position with respect to the mounting frame (9), and the XY table (5) is located at the set position. The intersection of the mounting frames (9) is positioned at the center of the imaging field of view of the image sensor (7), and the imaging field directions are set angles in the left, right, front, and rear directions with respect to the ceiling. It is tilted.

That is, since the mounting frame (9) projects downward from the filter (3), when the projection surface of the slit lights (B ₁ ) and (B ₂ ) is viewed from an oblique direction. As shown in FIG. 5, each of the slit lights (B ₁ ) and (B ₂ ) appears to be interrupted at a position where it crosses the mounting frame (9).

Then, as will be described later in detail, a moving vehicle (a) from the position of the portion (Ba), (Bb) where the slit lights (B ₁ ) and (B ₂ ) are interrupted to the intersection of the mounting frame (9) ( The position (A) is obtained and used as control information when scanning the probe (4) in the leak test or moving the moving vehicle (A) to the next measurement location.

However, the movement range of the XY table (5) is such that the vehicle body is directly below the center of one HEPA filter (3) surrounded by the lattice-shaped mounting frame (9) provided on the ceiling side. In the position, that is, in the state where the probe (4) is stopped at the proper position, the probe (4) is over the range in which the entire surface of one HEPA filter (3) can be scanned, and the image sensor (7) moves in the vehicle body. It is set so as to be equal to or more than a range in which each of the intersections of the mounting frames (9) located at two front and rear positions with respect to the direction can be imaged.

In the figure, (10) is a power cable for supplying electric power for operation to the moving vehicle (A) and the leak tester (12).

Then, the moving vehicle (A) having the above-described configuration is sequentially placed directly below each of the HEPA filters (3) arranged in a grid pattern at predetermined intervals using the mounting frame (9) as described later. While moving the XY table (5),
The probe (4) is automatically moved over the entire surface of each HEPA filter (3) partitioned by the mounting frame (9) by horizontally moving it in the front-rear direction and the left-right direction with respect to the vehicle body, thereby causing a leak. The test can be done automatically.

Next, the traveling control means (101) for controlling the traveling of the moving vehicle (A), and the entire surface of each HEPA filter (3) partitioned by the probe (4) by the mounting frame (9). The configuration of the scanning means for automatically scanning will be described.

As shown in FIG. 1, a master controller (11) for controlling the operation of the entire moving vehicle measures the concentration of fine particles contained in the air sucked by the probe (4), and the measurement position and concentration are measured. A leak tester (12) configured to display and record, and to issue an alarm when a particle concentration higher than a set concentration is detected, and to process the imaging information of the image sensor (7) to process the mounting frame. An image processing device (13) as position detecting means (100) for detecting the position of the vehicle body with respect to (9), and image pickup information by the image sensor (7) and image information processed by the image processing device (13) are displayed. A monitor TV (14), a setting device (15) for setting various operation information for the moving vehicle (A),
Further, a traveling controller (16) for controlling the operation of the traveling motors (M ₄ ) and (M ₅ ) for the propulsion wheels (1L) and (1R) is provided, respectively.

Then, the master controller (11)
Encoders (PE attached to the horizontal movement motors (M ₁ ) and (M ₂ ) and pole lifting motors (M ₃ ) of the table (5)
₁ ), (PE ₂ ), (PE ₃ ) detection information, vehicle body position information with respect to the mounting frame (9) detected by the image processing device (13), and setting by the setting device (15) Based on the various information obtained, control commands to the traveling controller (16) and operation commands to the horizontal movement motors (M ₁ ) and (M ₂ ) and the pole lifting motor (M ₃ ) of the XY table (5). Are configured to be output.

In _{FIG., (PE 4), (PE} 5) , the traction motor (M _4), an encoder attached to (M _5), said traction motor (M _4), the (M ₅₎ By detecting the number of rotations, the traveling speed and the traveling distance are detected and fed back to the master controller (11) via the traveling controller (16). That is, in the master controller (11) and the traveling controller (16), based on the detection information of the position detecting means (100),
A travel control means (101) for controlling travel of the vehicle body is configured.

Next, the traveling control means (101) and the scanning means will be described in detail while controlling their control operations in detail.

First, an outline of the leak test of the HEPA filter (3) will be described. As shown in FIGS. 8 and 9, the vehicle body is positioned at the center of the HEPA filter (3) located at the end of the clean room (see FIG. 8). HEPA per row in the setting device (15) by positioning the
Set the number of filters (3), the total number of HEPA filters (3) to be measured, the distance between the left, right, front and back of adjacent HEPA filters (3), and the pass / fail judgment reference value for the leak test.

When the vehicle body is located at the measurement start position (a), the two slit light beams (B ₁ ) and (B ₂ ) projected from the slit light projector (8) are used as a reference for positioning the vehicle body,
It may be performed while watching the screen of the monitor television (14) displaying the image picked up by the image sensor (7).
However, this positioning operation of the vehicle body is performed at the measurement start position (a).
It is not necessary to do it only because it is automatically driven after that.

Next, by moving the XY table (5) back and forth, the probe (4) is scanned over the entire surface of one HEPA filter (3) to leak to one HEPA filter (3). By performing a test and comparing the number of leak tests that have been completed with the set number, it is determined whether or not the leak test of the set number has been completed, and the test of the set number has been completed. If yes, all processing is terminated.

If the test for the set number has not been completed, it is determined whether the test for one row has been completed. If the test for one row has not been completed, the next adjacent HEPA filter (in Fig. 8 , (The position shown in (b)) and when the test for one row is completed, the HEPA filter located at the end of the next row (the position shown in (e) in Fig. 8) Move the car body to. In addition, when moving the vehicle body to the HEPA filter located at the end of the adjacent row, in order to move the vehicle body so as to reduce the positional deviation, at the current position (the position shown by (d) in FIG. 8) , First, after making a 90 degree spin turn and orienting the car body toward the next row,
The car body is controlled so that it travels straight for the distance between one row and then spin-turns by 90 degrees so that the direction of the car body is directed in the advancing direction in the next row.

Then, by repeating the above-described processing for the set number of times, the leak test is automatically performed while automatically running between the HEPA filters (3) adjacent to each other.

However, in the leak test for the one HEPA filter (3), the XY table (5) is horizontally moved in a state where the vehicle body is located at the center of the one HEPA filter (3), and first, the mounting frame ( HE adjacent to 9)
After scanning the probe (4) along the outer circumference of the PA filter (3), the inside of the probe (4) is sequentially reciprocally scanned in the left-right direction from one end side to the other end side.
A leak test is conducted on the entire surface of the HEPA filter (3).

When scanning the probe (4) along the outer periphery of the HEPA filter (3) adjacent to the mounting frame (9), the probe (4) should not collide with the mounting frame (9). The pole (6) is lowered by a predetermined amount.

As described above, the leak test is performed while automatically moving the moving vehicle (A) and automatically scanning the probe (4), and the traveling control accuracy of the moving vehicle (A) and In order to improve the scanning control accuracy of the probe (4), the detection information of the position detecting means (100) will be used as described below.

That is, as shown in FIG. 6 and FIG. 10, when performing a leak test for the one HEPA filter (3), the image sensor (7) projects the two of the two projected toward the ceiling. The projection images of the slit lights (B ₁ ) and (B ₂ ) are captured, and, based on the captured image information, the intersection of the mounting frame (9) (mounting frame corner portion)
The current position (T ₁ ′) of the moving vehicle (A) with respect to
The XY table (5) so that the probe (4) can be properly scanned over the entire surface of the HEPA filter (3).
Corrects the movement direction and movement amount when moving the vehicle horizontally, and also corrects the traveling direction and travel distance of the vehicle body when moving to the next HEPA filter (3), so that the vehicle body Try to stop just below the center (T ₂ ).

Hereinafter, description will be added while the image pickup processing operation of the mounting frame (9) is described in detail.

That is, as shown in FIG. 6, the slit light projector (8) has the imaging field center at the intersection of each of the two mounting frames located on the left side of the center of the moving vehicle (A).
The projected images of the slit lights (B ₁ ) and (B ₂ ) projected from
Images are sequentially picked up by the image sensor (7).

Then, from the image pickup information of the image sensor (7), the discontinuity (B ₁ ) of each of the slit lights (B ₁ ) and (B ₂ )
a) and (Bb) are extracted, and from the position on the screen, the mounting frame (9) located in front of and behind the moving vehicle (A)
The position of each crossing point is calculated, and based on it, the positional deviation (x ₁ , y ₁ ) of the probe (4) with respect to the origin (0) of the scanning coordinate system and the inclination (θ) with respect to the mounting frame (9) are calculated. Is done.

From the image information captured by the image sensor (7),
The process of extracting the discontinuous portions (Ba) and (Bb) of the slit light beams (B ₁ ) and (B ₂ ) will be described. As shown in FIGS. 5 and 6, as described above, The discontinuous portions (Ba) and (Bb) are generated at the positions where the slit lights (B ₁ ) and (B ₂ ) respectively cross the mounting frame (9).

Then, the image information is scanned from the upper side to the lower side on the screen, and the lowermost straight line of the straight lines parallel to the x-axis is seen as a straight line extending in the vehicle front-rear direction. Extract as the discontinuous part (Ba) of ₁ ). Similarly, the image information is scanned from left to right on the screen, and the rightmost straight line of the straight lines parallel to the y-axis is seen as the straight line extending in the lateral direction of the vehicle body. It is extracted as the interrupted portion (Bb) of the slit light (B ₂ ).

However, as described above, since the image sensor (7) captures the projected images of the slit light beams (B ₁ ) and (B ₂ ) from an oblique direction, each of the interruptions extracted on the image is interrupted. The positions of the portions (Ba) and (Bb) are the same as those of the image sensor (7).
When the image processing is performed, the mounting height of the image sensor (7) with respect to the mounting frame (9) and The coordinate position is corrected according to the extracted position based on the tilt, the focal length of the optical system, and the like. Although not shown, the image sensor (7) is an optical device that passes only the light corresponding to the wavelengths of the slit lights (B ₁ ) and (B ₂ ) in order to remove the influence of external light. The filter is installed.

By the way, the two slit lights (B ₁ ) and (B ₂ ) are not displaced with respect to the center of the filter (3) surrounded by the mounting frame (9) and are not tilted. Since it crosses in the direction orthogonal to the mounting frame (9),
a), (Bb) midpoint position (Xp) in the length direction,
At (Yp), the intersection point of the straight line extending in the direction orthogonal to each of the discontinuous portions (Ba) and (Bb) is such that the inclination (θ) of the moving vehicle (A) with respect to the mounting frame (9) is zero. This corresponds to the coordinates of the intersection of the mounting frame (9) in the state.

That is, the position (Xp, Yp) of the center of each of the intersecting mounting frames (9) in the width direction is defined by the discontinuous portion (B
Obtained from the position coordinates on the corrected image of a) and (Bb),
As will be described later, from the difference between the midpoint positions of the discontinuous portions (Ba) and (Bb) in each of the captured images (P ₁ ) and (P ₂ ) captured at two locations before and after the moving vehicle (A). , The inclination (θ) with respect to the mounting frame (9) is obtained, and from these position information, in each of the imaged images (P ₁ ) and (P ₂ ) imaged at two positions before and after the moving vehicle (A). Positional deviation (x ₁ , y ₁ ) at the intersection of the mounting frame (9), (x ₂ ,
y ₂ ).

That is, as shown in FIG. 6, in the state where the vehicle body stops just below the center of one HEPA filter (3),
First, the image sensor (7) is placed at a position (-1) corresponding to half the distances (Px) and (Py) between the intersections of the mounting frame (9) with respect to the current center of the vehicle body (T ₁ ′). /
2Px, -1 / 2Py) so that the image sensor (7) is located almost directly below the intersection of the mounting frame (9) on the measurement start side of one HEPA filter (3). The image sensor (7) captures an image of a range including the intersection of the mounting frame (9) (indicated by (P ₁ ) in FIG. 6).

Next, the image sensor (7) is moved to the center of the vehicle body by a distance (P
x), a position corresponding to half of (Py) (+ 1 / 2Px, −1 / 2Py)
And the image sensor (7) is positioned substantially directly below the intersection point of the mounting frame (9) located on the measurement end side, that is, on the measurement start side of the next HEPA filter (3). The range including the intersection of the mounting frame (9) (indicated by (P ₂ ) in FIG. 6) is imaged.

The two slit light beams (B ₁ ) in each of the two pieces of image information (P ₁ ) and (P ₂ ) imaged at a distance corresponding to the distance (Px) between the intersection points in the mounting frame (9). in (B ₂₎ is interrupted portion (Ba), the position coordinates of each midpoint of (Bb), as exemplified in the case of an image (P ₁₎ in FIG. 11, the center of the screen (the image (P ₁₎ After obtaining the coordinate system whose origin is the origin (0) of the scanning coordinate system of the probe (4), the coordinate system having this screen center as the origin is translated in the x and y directions (at this time). The movement amount in each of the x direction and the y direction is Δx and Δy), and the midpoint position on the Ba side is x.
Represented by only the coordinates XP1 (image (P ₂₎ in XP2), the midpoint position of Bb side as the origin y coordinate YP1 (image (P ₂₎ in YP2) as represented by only (0 ') Convert to xy coordinate system. The distance between the screen centers (P ₁ ) and (P ₂ ) (P
From the difference between x) and y coordinates YP1 and YP2, the inclination (θ) with respect to the mounting frame (9) is calculated based on the following equation (i).
Next, in the case of the image (P ₁ ) in FIG. 11, the above (0 ′)
In the xy coordinate system with the origin as, the midpoint position on the Bb side (y coordinate
YP1, the x-coordinate is 0), the straight line of the above inclination (θ) that passes through the point, and the Ba-side midpoint position (x-coordinate XP
1, the y coordinate is 0), and the intersection (x ₁ ′,
y ₁ ′) ((x ₂ ′, y ₂ ′) in the image (P ₂ ))
i), and further, the coordinate value of the intersection represented by this xy coordinate system is converted into the coordinate value of the coordinate system having the screen center (0) as the origin (that is, each of the above movements in each of the x direction and the y direction). The coordinate axes are moved in parallel so as to return the amounts Δx and Δy), and
Position shift (x ₁ , y ₁ ) of the intersection of the mounting frame (9) with respect to the screen center in each of the _two images (P ₁ ) and (P ₂ ),
(X ₂ , y ₂ ) is calculated by the following equation (iii).

Next, the actual scanning position (X, Y) of the XY table (5) for scanning the probe (4) is calculated by the following formula (i
Even if the center of the vehicle body (T ₁ ′) is misaligned with respect to the center (T ₁ ) of the HEPA filter (3) and is in an inclined state by automatically correcting based on v), The probe (4) is scanned in a state where the absolute position with respect to the preset HEPA filter (3) does not shift regardless of the shift or the tilt.

However, in the above formula (iv), (x, y) is such that the center (T ₁ ) of the HEPA filter (3) coincides with the center (T ₁ ′) of the vehicle body, and the inclination (θ) is zero. In order to scan the probe (4), the XY table (5)
Is a value to be substituted as the target movement position of.

Also, when the vehicle body is moved right below the center of the HEPA filter (3), the displacements (x ₁ , y ₁ ) and (x ₂ , Based on the information of y ₂ ), the left and right traveling motors (M ₄ ),
By controlling the operation of (M ₅ ), the center of the vehicle body is automatically stopped in a state where it is located right below the center of the next HEPA filter (3).

That is, as shown in FIG. 6, the actual vehicle body center with respect to the center (T ₁ ) of the HEPA filter (3) is displaced with respect to each intersection of the two mounting frames (9). (X ₁ , y ₁ ), (x ₂ , y ₂ ) and at a position (T ₁ ′) shifted corresponding to the inclination (θ), and predetermined in the extension direction of the mounting frame (9) When the vehicle is tilted by an angle (θ), the direction connecting the current position (T ₁ ′) of the vehicle body and the center (T ₂ ) of the next HEPA filter (3) is as shown in FIG. It is in a state of being inclined by a predetermined angle (θ ₂ ) with respect to the extension direction of each intersection point position located before and after the frame (9).

By the way, the actual vehicle body center position (T ₁ ′) is the origin (0) of the scanning coordinate system of the probe (4), which is half the distance (Px), (Py) between the intersection positions of the mounting frame (9). Since the position is equal to the position where the HEPA filter (3) is translated, the positional deviation (Xa, Ya) of the current center (T ₁ ) of the HEPA filter (3) with respect to the vehicle body center (T ₁ ′) is expressed by the above equation (iv). As the value (x, y) of the target drive position of the XY table (5) for scanning the probe (4), it corresponds to half of the distance (Px), (Py) between the intersection positions of the mounting frame (9). Value (1 / 2P
x, 1 / 2Py) is substituted into the above-mentioned mounting frame (9)
A value (1/2) corresponding to half the distance (Px, Py) between the intersection points of
It can be obtained by subtracting (Px, 1 / 2Py).

Also, the mounting frame (9) at the actual vehicle center (T ')
The inclination (θ ₁ ) of the vehicle body with respect to is the same as the inclination (θ) obtained by the above equation (i).

Therefore, in order to stop the vehicle body in a direction parallel to the extension direction of the mounting frame (9) at the center (T ₂ ) of the next HEPA filter (3), each angle (θ ₁ ) , (Θ ₂ ) and 2 HEPA filters (3)
From the distance (Px) between the centers (T ₁ ) and (T ₂ ) of the frame, that is, the distance (Px) between the intersections of the mounting frame (9), the following formula (v),
Based on (vi), the actual moving distance (s) and the moving direction of the vehicle body are obtained and corrected.

Incidentally, Xa 'and Ya' in the above equations (v) and (vi) can be calculated from the position shift (Xa, Ya).

Explaining the procedure for moving the vehicle body from the current position (T ₁ ′) toward the center (T ₂ ) of the next HEPA filter (3), as shown in FIG. ₁ ′), the angle (θ ₁ ) deviated from the center (T ₁ ) of the current HEPA filter (3) and the angle (θ ₁ ) deviated from the center (T ₂ ) of the next HEPA filter (3) θ
₂ ) and the angle (θ ₁ + θ ₂ ) is added to the encoders (P) for the left and right traveling motors (M ₄ ) and (M ₅ ), respectively.
Based on the number of revolutions detected by E ₄ ) and (PE ₅ ), the left and right traveling motors (M ₄ ) and (M ₅ ) are rotated in reverse to cause a spin-turn, and the direction of the vehicle body is changed to the next HEPA. Aim toward the center (T ₂ ) of the filter. Next, the above formula (v)
The distance (s) obtained in Step 2 is calculated by the encoder (PE ₄ ), (P
After going straight on the basis of the rotation speed detected by E ₅ ), by spin-turning the angle (θ ₂ ) obtained by the above equation (vi), the center (T ₂ ) of the next HEPA filter is The vehicle body is stopped when the inclination is zero.

However, in the case where the orthogonal slit lights (B ₁ ) and (B ₂ ) are projected such that they are projected in a state of overlapping on the attachment frame (9) in the length direction thereof, ,
The slit lights (B ₁ ) and (B ₂ ) are attached to the mounting frame (9).
So that it does not traverse, the discontinuity (Ba), (Bb)
May occur and the position of the moving vehicle (A) may not be detected. In that case, the XY table (5) is moved by a set amount or the pole (6) is set. After rotating by a certain amount so that each of the interrupted portions (Ba) and (Bb) appears on the screen, the movement amount of the XY table (5) and the pole ( The rotation amount of 6) may be corrected.

Further, since the wall of the clean room is adjacent to the outside of the mounting frame (9) located on the outer periphery of the clean room, the image sensor (7) is mounted on the outer side of the mounting frame (9). When the XY table (5) is moved in parallel so as to move it to the position below the intersection point, the end of the XY table (5) and the slit light projector (8) may collide with a wall. When the mounting frame (9) located on the outer periphery of the clean room is imaged, the image sensor (7) and the slit light projector (8) are rotated by 90 degrees so as not to collide with the wall and the imaging is performed. By performing image processing by rotating the coordinates of the field of view by 90 degrees, the positional shift (x ₁ , y ₁ ) (x ₂ ,
y ₂ ) as well as the slope (θ) can be detected.

[Another embodiment]

In the above-mentioned embodiment, in order to obtain the inclination (θ) of the moving vehicle (A) with respect to the mounting frame (9), both sides in the image information obtained by imaging the intersections of the two mounting frames (9) in the front and rear with respect to the vehicle traveling direction. An example is given in which the slit light (B ₁ ) and (B ₂ ) are calculated from the position difference between the discontinuous portions (Ba) and (Bb), but one discontinuous portion (Ba) and (Bb)
It can be obtained from the position of b) only.

That is, since the both slit lights (B ₁ ) and (B ₂ ) are projected so as to cross the mounting frame (9) in the width direction thereof, the both slit lights (B ₁ ) and (B 2 ₂ )
The discontinuous portions (Ba) and (Bb) of the mounting frame (9) move in the horizontal and vertical directions on the image according to the amount of displacement with respect to the intersection of the mounting frame (9), and Their lengths will appear different depending on (θ) (see FIGS. 5 and 6).

Therefore, the inclination (θ) can be obtained from the length change amount with respect to the length of the discontinuous portions (Ba), (Bb) in the state where the inclination (θ) is zero (see FIG. 5), and The calculated inclination (θ) and the discontinuity (Ba),
From the position of (Bb) on the image, the displacement with respect to the position of the intersection of the mounting frame (9) can be obtained.

Further, in the above embodiment, the moving vehicle is exemplified as a moving vehicle for measurement for performing the leak test of the air purifying filter in the clean room, but, for example, in order to convey various articles in the clean room. It may be configured as a moving vehicle.

By the way, when the present invention is applied to a guidance facility for automatically moving a moving vehicle for article transportation in a clean room, for example, the number of intersection points of the mounting frame (9) of the filter (3) located on the transportation route and By sequentially counting the directions and the like, it is possible to form a travel route for a station in which the mobile vehicle (A) travels. The position detecting means (100) can also be used as means for automatically correcting the stop position of the moving vehicle (A) with respect to the station based on the detection information. Further, the specific configuration of each part of the moving vehicle (A) can be variously changed according to the configuration of the moving vehicle to which the present invention is applied.

It should be noted that reference numerals are added to the claims for convenience of comparison with the drawings, but the present invention is not limited to the structures of the accompanying drawings by the entry.

[Brief description of drawings]

1 is a block diagram showing the overall configuration of a control system, FIG. 2 is an overall perspective view of a moving vehicle, and FIG. 3 is a side view of the same. ,
4 is a front view of the same, FIG. 5 is an explanatory view of a captured image, FIG. 6 is an explanatory view showing a positional relationship between a vehicle body and a mounting frame, FIG. 7 is an explanatory view of displacement correction of the vehicle body, and FIG. Is an explanatory view showing the moving path of the moving vehicle and the scanning path of the probe, FIG. 9 is a flowchart showing the overall operation of the moving vehicle, FIG. 10 is a flowchart showing the deviation detection operation with respect to the mounting frame during the leak test, FIG. 11 is an explanatory diagram of the positional deviation detection in the captured image. (A) …… Mobile vehicle, (3) …… Air purification filter,
(7) ... image pickup means, (8) ... slit light projection means,
(9) …… Lattice-shaped frame, (B ₁ ), (B ₂ ) …… Two orthogonal slit lights, (Ba), (Bb) …… Discontinuous portion of slit light, (100) …… Position detection means.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP 60-211315 (JP, A) JP 60-210720 (JP, A) JP 63-111508 (JP, A) JP 59- 94005 (JP, A) Actual development Sho 60-159305 (JP, U)

Claims (1)

(57) [Claims] 1. An image pickup type position detecting device for detecting the position of a moving vehicle (A) with respect to a lattice-shaped frame (9) installed on the ceiling side, wherein two slit light beams (B ₁ ) are orthogonal to each other. , (B ₂ )
A slit light projecting means (8) for projecting upwards from the lower side position of the ceiling in a state where the intersection point is directed to a position away from the intersection of the frame (9), and the slit light projection of the frame (9). An image pickup means (7) for picking up an image from a lower side position of the ceiling upward, and based on image pickup image information of the image pickup means (7), a break in each of the slit lights (B ₁ ) and (B ₂ ) Extracted parts (Ba) and (Bb), and based on the position information of the extracted discontinuous parts (Ba) and (Bb) in the imaging screen, the frame (9) of the moving vehicle (A). ), Each of the position detection means (100) for obtaining the position with respect to the moving vehicle (A) is provided, and the projection direction of the slit light projection means (8) and the imaging direction of the imaging means (7) are the frame. As the position and inclination of the moving vehicle (A) with respect to (9) change, An imaging-type position detection device, which is set so that the positions of the interrupted portions (Ba) and (Bb) in the imaging screen change.