JP2511710B2 - Plate-shaped member transfer device - Google Patents

Description

The present invention relates to a device for transferring a flat plate-shaped member such as glass or resin used for sealing a semiconductor device to a predetermined position.

<Prior Art> A conventional transfer of a flat plate-shaped member will be described with reference to FIGS. 5 and 6.

Flat plate members 40 such as glass are housed side by side in a case 60, and a pen-type vacuum tweezer 62 (see FIG. 5 (a)) or tweezers 63 (see FIG. 5 (b)) having a collet 61 at the tip thereof. Are picked up and transferred to a predetermined position.

Further, the flat plate member 40 also includes a resin used in the molding process. The flat plate member 40 is aligned with the rail portion 71 by the parts feeder 70 as shown in FIG. 6, picked up by the collet 72 in sequence, and transferred to a predetermined position.

<Problems to be Solved by the Invention> However, the above-described conventional transfer has the following problems.

That is, if the orientation of the flat plate-shaped member such as glass housed in the case is not uniform, the work efficiency of the pickup is reduced and the edge portion is easily damaged or soiled.

Further, since the parts feeder is configured to apply vibrations to the flat plate-like members to align them, the edge portion is likely to be damaged.

That is, the conventional transfer hinders the reduction of the reliability of the semiconductor device and the improvement of the yield.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a transfer device for a flat plate-shaped member that does not cause the above-mentioned problems.

<Means for Solving the Problem> A transfer device for a flat plate member according to the present invention includes a stage to which a case for accommodating a plurality of flat plate members is mounted, and a stage tilting mechanism for tilting the stage.
An elevation device having a stage up-and-down moving mechanism for moving the stage up and down, a collet for removing the flat plate member from the case and moving it to a predetermined position, and a collet for sucking and holding the flat plate member. A collet moving mechanism for moving the collet, and a collet tilting mechanism for tilting the collet,
A handling device having a claw that contacts a flat plate-shaped member held by the collet, a head that receives the flat plate-shaped member from the collet, and has a concave groove into which the collet fits, and a head And a receiving device having a head up-and-down moving mechanism for moving up and down.

<Operation> A case accommodating a plurality of flat plate-shaped members is attached to the stage of the elevation apparatus, and the stage is tilted by a predetermined angle by the stage tilting mechanism. The flat plate-like member is sequentially removed from the case by the collet of the handling device. The stage is moved up and down by the stage up-and-down moving mechanism according to the extracting operation of the flat plate-shaped member.

The flat plate-shaped member sucked and held by the collet of the handling device is moved to a predetermined position, that is, above the head of the receiving device, while the position is corrected by the claw.

In the receiving device, the head receives the flat member and prepares for the next operation.

<Example> Hereinafter, an example according to the present invention will be described with reference to the drawings.

FIG. 1 is a schematic explanatory view showing a series of operations of a plate-shaped member transfer device according to an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of an elevation device, and FIG. 3 is a schematic of a handling device. FIG. 4 is a schematic configuration diagram of the receiving device.

The transfer device for the flat plate member according to the present embodiment is an elevation device 10, a handling device 20, and a receiving device 30,
The control unit controls each device.

First, the elevation device 10 will be described with reference to FIG.

The elevation device 10 includes a stage 11 to which a case 13 is attached and a stage up-and-down moving mechanism housed in a main body 14.
12 and a stage tilting mechanism 15 provided on the outer surface of the main body 14.

The case 13 attached to the stage 11 is formed with a groove (not shown) in which a plurality of flat plate-like members 40 can be stood up and stored.

The stage 11 is provided with a plurality of clampers 111 to which the case 13 is detachably attached.

The stage vertical movement mechanism 12 housed in the main body 14
A ball screw 122 that is driven to rotate by 121, a frame 123 screwed to the ball screw 122, and a connecting member 124 that connects the frame 123 to the stage 11. That is, the rotation of the motor 121 is transmitted to the ball screw 122 via the belt 125, and the frame 123 moves up and down.

Since the stage 11 is connected to the connecting member 124 by the pin 113, the stage 11 is rotatable about the pin 113 in the direction of arrow A shown in FIG. Then, the stage 11 is rotated in the arrow A direction by the cylinder that constitutes the stage tilting mechanism 15.

Next, the handling device 20 will be described with reference to FIG.

The handling device 20 is for extracting the flat plate-shaped members 40 one by one from the case 13 of the elevation device 10 and moving them to a predetermined position, and a collet 21 for holding the flat-plate-shaped member 40 by suction, and this collet. A collet moving mechanism 23 for moving 21; a collet tilting mechanism 24 for tilting the collet 21; and a flat plate-shaped member held by the collet 21.
It has a claw 22 that contacts 40.

A vacuum pump (not shown) or the like is connected to the collet 21 so as to suck and hold the flat plate member 40.

The collet moving mechanism 23 for moving the collet 21 has a vertical direction moving part 231 for vertically moving the collet 21,
Horizontal movement part 232 for moving the collet 21 in the horizontal direction
Is roughly divided into

The vertical movement unit 231 uses the cylinder 27 as a drive source, and vertically moves the inverted L-shaped arm 211 having the collet 21 attached to the tip thereof. The vertical movement unit 231 is provided on the tilt table 25 that is tilted by the collet tilt mechanism 24. In addition, the horizontal movement unit 232 that moves the arm 211 in the horizontal direction is
Is used as a drive source and is also provided on the tilt table 25.

On the other hand, the collet inclining mechanism 24, which inclines the collet 21 by inclining the inclining table 25 in the arrow B direction shown in FIG. 2 (a) around the fulcrum 251, uses the cylinder 26 as a drive source.

The claw 22 comes into contact with the flat plate member 40 sucked and held by the collet 21 to correct the position of the flat plate member 40 in the collet 21, and uses the cylinder 29 as a drive source.
The claw 22 is composed of three claws 22a to 22c, and is in contact with the three sides of the flat plate member 40.

Next, the receiving device 30 will be described with reference to FIG.

The receiving device 30 receives the flat plate member 40 that has been moved to a predetermined position by the handling device 20, and includes a head 31 that sucks and holds the flat plate member 40, and a head vertical movement mechanism 32 that moves the head 31 up and down. And have. Further, it is assumed that the receiving device 30 is provided with an inspection device 35 for inspecting the appearance and the like of the flat plate member 40.

The head 31 is provided with a cross-shaped concave groove 312 and is provided with four protrusions 311.
And a small hole 311a for adsorbing and holding the flat plate-shaped member 40 is formed in the protrusion 311 (see FIG. 4 (b)). Further, the concave groove 312 is formed by the collet 21 and the claw 22.
Is a portion where the collet 21 and the claw 22 are fitted, and the depth dimension is set so that the collet 21 and the claw 22 can move in the vertical direction.

The head 31 is adapted to descend to above the inspection device 35 by a head vertical movement mechanism 32.

Next, the operation of the plate-shaped member transfer device including the above-described devices will be described with reference to FIG.

It is assumed that each device is controlled by a control unit (not shown).

The case 13 accommodating a plurality of flat plate-like members 40 is attached to the stage 11. The stage 11 is tilted by the stage tilting mechanism 15 (see FIG. 1 (a)).

The collet tilt mechanism 24 of the handling device 20 is
The collet 21 is tilted so as to have the same inclination angle as the flat plate member 40 housed in 13 (see FIG. 1A), and the collet 21 is moved by the horizontal moving unit 232.
It approaches slightly below 0 and comes into contact with the flat plate-like member 40 by the vertical movement part 231. The collet 21 is a flat plate member.
40 is adsorbed and held (see FIG. 1 (b)).

The flat member 40 sucked and held by the collet 21 includes a collet 21 having a collet moving mechanism 23 and a collet tilting mechanism.
After coming to a predetermined position by 24, the three claws 22a to 22c driven by the cylinder 29 come into contact with each other. By this contact, the flat plate member 40 is width-shifted and corrected to the correct position in the collet 21 (see FIGS. 1 (c) and (d)).

The collet 21 holding the flat plate member 40 by suction is moved to a predetermined position by the table 200 on which the handling device 20 is mounted, that is, to the position above the head 31 of the receiving device 30.

The collet 21 or the like holding the flat plate member 40 is a receiving device.
When fitted into the concave groove 312 of the head 31 of 30, the flat plate-shaped member 40
The four corners of the flat member 40 come into contact with the protrusion 311 and
It is adsorbed and held by 1 (see FIGS. 1 (e) and (f)).
Then, when the flat plate-shaped member 40 is suction-held by the head 31, the collet 21 and the claw 22 are prepared for the next extraction operation, with the head 31 coming out of the lateral direction (see FIG. 1 (g)).

The head 31 that holds the flat plate-shaped member 40 by suction descends by the head up-and-down moving mechanism 32, and the inspection device 35 provided below.
Inspects the edge portion of the flat plate member 40 for damage and the like.

When the head 31 receives the flat plate member 40, the handling device 20 performs the next work of extracting the flat plate member 40. That is, the stage up-and-down moving mechanism 12 of the elevation device 10 lowers the stage 11 by one step, the flat-plate member 40 at the lowermost step is pulled out by the collet 21, and the same work as described above is repeated.

<Effects of the Invention> According to the present invention, since the flat plate-shaped member is pulled out from the inclined case, there is no uneven orientation as in the conventional case. Therefore, the edge portion is not damaged when the flat plate member is extracted, and the reliability and quality of the semiconductor device can be improved.

Further, since the handling device performs the transfer to the receiving device provided with the inspection device and the like, the flat plate member is not contaminated as in the conventional case. This is suitable for manufacturing an image pickup device such as a CCD.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view showing a series of operations of a plate-shaped member transfer device according to an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of an elevation device, and FIG. 3 is a schematic of a handling device. 4 is a schematic block diagram of the receiving device, FIG.
FIG. 6 is an explanatory view showing a conventional method for transferring a flat plate-shaped member, and FIG. 6 is an explanatory view showing transfer of the flat plate-shaped member by a parts feeder. 10 ... Elevation device, 11 ... Stage, 12 ... Stage up / down mechanism, 13 ... Case, 15 ... Stage tilting mechanism, 20 ... Handling device, 21 ... Collet, 22 ...
… Claws, 23 …… Collet moving mechanism, 24 …… Collet tilting mechanism, 30 …… Receiving device, 31 …… Head, 312 …… Recessed groove, 32
...... Head up-and-down moving mechanism, 40 …… Plate-shaped member.

Claims (1)

(57) [Claims] 1. An elevation apparatus having a stage to which a case for accommodating a plurality of flat plate-like members is mounted, a stage tilting mechanism for tilting the stage, and a stage up-and-down moving mechanism for vertically moving the stage. A flat plate-shaped member is removed from the case and moved to a predetermined position, a collet that suction-holds the flat plate-shaped member, a collet moving mechanism that moves the collet, and a collet tilting mechanism that tilts the collet. A handling device having a claw that comes into contact with the flat plate member held by the collet, and a flat plate member received from the collet,
A head formed with a groove into which the collet fits;
A receiving device having a head up-and-down moving mechanism for moving the head up and down, and a transfer device for a flat plate-shaped member.