JP2511370Y2 - Cleaner jig for blade damage detector - Google Patents

Description

[Detailed description of the device] [Industrial applications]

The present invention relates to a cleaner jig for cleaning an end portion of a detection member of a light emitting / receiving element for detecting a state of wear or damage of a blade for cutting or cutting a fragile material such as a semiconductor wafer.

[Prior art]

Generally, as a cutting device having a means for performing cutting or cutting with a blade of this kind, and for monitoring the state of the blade, the one disclosed in JP-A-62-53803 of the same applicant is well known. Is. It is also well known that cutting or cutting is performed while supplying cutting fluid or cooling water (coolant).
When the cutting or cutting is performed in this way, the coolant containing cutting chips is scattered around the blade and adheres as dirt to the end of the detection member composed of the light emitting / light receiving element which is the monitoring means, and the accurate monitoring or It cannot be detected.
Therefore, it is necessary to clean the end portion of the detection member from time to time. However, there is no special device or jig as this cleaning means, and the worker uses a cotton swab etc.
I try to wipe the dirt by hand.

[Problems to be solved by the device]

The conventional cleaning means using a cotton swab of the prior art is a narrow space where the mounting position of the detecting member is limited, and the gap between the end portions of the facing detecting members is narrow,
This is a time-consuming and extremely difficult task. Therefore, there is a problem that the workability of the cleaning means must be solved.

[Means for Solving the Problems]

As a concrete means for solving the above-mentioned problems of the prior art, the present invention provides a knob having a predetermined length on a base portion having a recess into which the tip portion of the spindle fits, and at least 1 by protruding in the circumferential direction of the base portion. Provided is a cleaner jig for a blade breakage detector, characterized in that a book arm is provided, and a cleaning member that comes into contact with a detection end of an optical system detection member that detects a state of a blade is provided at an end of the arm. If the knob is picked with a finger and the recess is fitted to the tip of the spindle, the cleaning member comes into contact with the detection end, and the finger can be reciprocally rotated while maintaining that state. Thus, both target detection ends can be cleaned simultaneously and easily. Further, the cleaning member is preferably made of a flexible material that can be impregnated with a liquid, and can be impregnated with a predetermined cleaning liquid (for example, trade name Rain X).

【Example】

Next, the present invention will be described in more detail with reference to the illustrated embodiment. 1 is a trapezoidal base, and a knob 2 having a predetermined length is provided on the base.
To provide. A recess 3 having a predetermined size is provided on the free end side of the base 2, and at least one arm 4 is provided on the peripheral side surface.
Is provided so as to project outward, and a cleaning member 5 is provided at the end of the arm 4. If possible, a plurality of arms 4 are arranged at symmetrical positions, and each arm 4 is detachably attached by a fixing member 6 such as a screw. The cleaning member 5 is made of a flexible material such as cotton, felt, non-woven fabric, paper material or sponge material that can be impregnated with the cleaning liquid, and the arm 4 can be freely attached by using an appropriate means such as bonding. It is attached to the end, that is, the tip. The cleaner jig having the above structure is used for cleaning the detection ends 11a, 12a of the blade monitoring means, that is, the optical system detecting means including the light emitting element 11 and the light receiving element 12. The detection ends 11a, 12a are located near the tip 13a of the spindle 13 to which the blade is attached, and are arranged so that they can move forward and backward in the spindle direction. When using this cleaner jig, the blade is removed from the tip of the spindle as shown in the figure, and the cleaner is applied with the hub wheel mount 14 remaining. That is, by picking the knob 2 of the cleaner jig with a finger, the base 1
The recess 3 is fitted into the tip 13a of the spindle 13 so that the cleaning member 5 of the arm 4 is located between the detection ends 11a and 12a, and the knob 2 is reciprocally rotated by a finger, whereby the cleaning member 5 is moved. Touches the detection end portions 11a and 12a so as to rub them and reciprocates to wipe off the dirt on both end portions at the same time. In this case, for example, when a plurality of arms 4 are provided, if one arm is engaged exclusively in removing stains, and the other arm is engaged in wiping off the finishes after removing stains, the target object is further enhanced. It can be cleanly cleaned. In any case, by fitting the concave portion 3 of the cleaner jig to the end portion 13a of the spindle 13 or by pressing it against the end surface 14a of the hub wheel mount 14, the arm 4 and the detection end portion to be cleaned are attached. The cleaning member 5 can be easily positioned, and by rotating the pick 2 back and forth with a finger,
The target position can be easily cleaned.

[Effect of device]

As described above, the blade damage detector cleaner jig according to the present invention is provided with a knob of a predetermined length on a base portion having a recess into which the tip portion of the spindle fits, and projecting in the circumferential direction of the base portion. At least one arm is provided, and a cleaning member that comes into contact with the detection end of the optical system detection member that detects the state of the blade is provided at the end of the arm. By fitting the to the tip of the spindle, the cleaning member comes into contact with the detection end, and by rotating it back and forth with your finger while maintaining that state, both detection ends facing each other in a narrow position can be detected. At the same time, the cleaning can be easily performed, and the workability of the cleaning is significantly improved, which is an excellent effect. In addition, the cleaning member is made of a flexible material that can be impregnated with a liquid, and if a predetermined cleaning liquid or a cleaning liquid is impregnated and the detection end portion is cleaned, the cleaning member can be more effectively cleaned. .

[Brief description of drawings]

FIG. 1 is a side view showing an essential part of a cleaner jig according to the present invention in cross section and an object to be cleaned shown in phantom line, and FIG. 2 is a schematic explanatory view for explaining a use mode. Is. DESCRIPTION OF SYMBOLS 1 ... Base part, 2 ... knob, 3 ... Recessed part, 4 ... Arm, 5 ... Cleaning member, 6 ... Fixing member, 11 ... Light emitting element, 12 ... Light receiving element 11a, 12a ... Detection end of optical system detecting means Part 13 ... Spindle, 13a ... End part 14 ... Hub wheel mount 14a ... End surface

Claims (2)

(57) [Scope of utility model registration request] 1. A knob having a predetermined length is provided on a base portion having a concave portion into which a tip portion of a spindle is fitted, and at least one arm is provided so as to project in a circumferential direction of the base portion, and an end portion of the arm is provided. A cleaning jig for a blade breakage detector, characterized in that a cleaning member that comes into contact with the detection end of an optical system detection member that detects the state of the blade is provided in the. 2. The cleaning tool for a blade breakage detector according to claim 1, wherein the cleaning member is made of a flexible material that can be impregnated with a liquid.