JP2511108B2 - Punching and punch electric discharge machining method - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a punching apparatus and a punching and punch electric discharge machining method which can be mounted on a punching apparatus.

[Prior Art] Conventionally, in the micro-hole processing for making fine holes in a thin sheet material, it is considered difficult to mechanically punch when the diameter of the hole is close to several tens of μM (micron). ing. The reason for this is that it is very difficult to manufacture punches and dies for fine hole processing itself, and relative positioning accuracy is ensured when the punches and dies are fixed to the pressing device after mounting. To do so is more difficult.

Therefore, the conventional fine hole drilling methods are generally electrical and chemical methods, which are not always suitable for mass production.

Japanese Patent Laid-Open No. 61-44536, "Method and Apparatus for Processing Micropores", and the article on the development content of the Institute of Industrial Science, University of Tokyo, published in the Nikkan Kogyo Shimbun dated October 9, 1986 It is an epoch-making thing about the fine hole processing method that enables punching.

According to these methods, a punch material and a die material are attached to an apparatus (hereinafter, referred to as a punching electric discharge machine) in which a punching machine and an electric discharge machine are integrally formed. Electrical discharge machining to form a punch, and then using this punch-shaped punch-shaped body as an electrode for electrical discharge machining, a hole is made in the die material by electrical discharge machining, and the punch and die are physically separated. We have proposed a micro-hole drilling method that guarantees the relative positional relationship between the two with high precision and allows mechanical punching.

Further, in the above-described punching electric discharge machining apparatus, when the punch or die is damaged or worn during the punching process, the punching process is interrupted while a new punch and die are manufactured by electric discharge machining. Must be done and the time loss is large. Therefore, a spare punch and a die are machined and stored in advance by the punching electric discharge machine described above, and when the punch or the like is damaged or worn, it is mounted on the punching electric discharge machine again to perform electric discharge machining. For the purpose of shortening the time loss required, a proposal is also made to guarantee the relative positional relationship between the punch and the die by axially supporting the punch and the die by means of a fluid bearing, and the averaging effect of the fluid bearing. Has been done.

[Problems to be Solved by the Invention] However, of punches and dies, punches are
When the punch is machined into a punch shape after being held by the punch machining apparatus, the punch can be formed so as to be rotatable with respect to the fluid bearing of the punch machining apparatus and movable in the axial direction of the fluid bearing. I have to do it. Further, when the punch is attached to the punching machine, there is a problem that the punching movement must be performed in the axial direction of the fluid bearing of the punching machine and the punching movement amount must be controlled. Atsuta

Therefore, the punching and punching electric discharge machining method of the present invention has been made in view of the above-mentioned problems, and the purpose thereof is to use a punching electric discharge machining apparatus that combines punching punching and punching electric discharge machining. When performing punch punching and punch electric discharge machining by punching, it is possible to perform electric discharge machining of the punch into a punch shape, and when punching using the punch, the movement and movement amount for punching operation are An object of the present invention is to provide a punching and punch electric discharge machining method that can be controlled.

[Means for Solving the Problem] In order to solve the above-mentioned problems and achieve the object, the present invention punches a fluid bearing provided in a punching electric discharge machining apparatus that performs both punching and punch electric discharge machining. A method of punch punching and punch electrical discharge machining in which punching and punch electrical discharge machining are performed with high precision by holding the die and the die interchangeably, and when performing the punch electrical discharge machining of the punch, the punch can be freely rotated with respect to the fluid bearing. The punch is fixed to the first support member that is movable in the axial direction of the fluid bearing, while the punching is performed, the movable portion of the linear actuator that performs the punching movement operation in the axial direction of the fluid bearing, The punch is fixed to the second support member provided with the means for detecting the amount of movement of the movable portion.

[Operation] After the punch is fixed to the first support member and held against the fluid bearing of the punch processing device, the punch is worked into a punch shape, and after the punch is fixed to the second support member. After holding the fluid bearing of the punching apparatus, the punching operation is performed by controlling the movement and the movement amount for the punching operation.

[Embodiment] A preferred embodiment to which the present invention is applied will be described below with reference to the drawings.

1 and 2 are central cross-sectional views showing a state of being set in the state of the electric discharge machining apparatus as an embodiment of the punching electric discharge machining apparatus, and showing how the punch 3 and the die 4 are provided. However, among these, FIG. 1 is a schematic configuration diagram of an electric discharge machining apparatus and a configuration diagram in which related parts are numbered in order to explain the configuration of a hydrostatic bearing. In FIG.
The base portion 7 and the base portion 1 which form the main body of the electric discharge machine are provided so that their relative positions are fixed via a coupling member (not shown). The punch 3 is fixed to the lower end of the punch holder 2 and the die 4 is fixed to the upper end of the die holder 5, and these holders are supported by a common hydrostatic bearing described later.

On the other hand, the electric discharge machining apparatus configured as described above is provided with various auxiliary devices, but the pressurized gas generation device 30 supplies pressurized gas to the static pressure bearing to accurately place the holder in the static pressure bearing. A power supply device 40 for axial support is provided for applying a high voltage to an electrode, which will be described later, for electrical discharge machining of the shape of the punch 3. Then, the machining liquid supply device 50 supplies a certain amount of pure water, which is a machining liquid at the time of electric discharge machining, to the work surface of the punch or die to accelerate electric discharge and prevent fusion of the work surface. To do. Further, the main controller 20 has a CPU (central processing unit), a storage means, a power source and the like as its constituent elements, and centrally controls the above-mentioned pressurized gas generator 30, discharge power source device 40 and machining liquid supply device 50. At the same time, drive control is performed to drive devices to be described later.

The pressurized gas generator 30 that is connected to the main controller 20 or can function even as a single unit is provided with pipes 30A, 30B, 30C, 30D and 30E shown by broken lines in the figure. , The gas bearings 31 and 32 in the hydrostatic coupling 24, which will be described later, and the base 1
Gas bearing 33 inside and gas bearing 3 that supports die holder 5
A pressurized gas is supplied to each of 4, 35 and 36. In this way, it functions as a hydrostatic bearing.

Next, the configuration of the power supply device for electric discharge machining will be described. The power supply device for discharge 40 connected to the main controller 20 described above.
An electric wire 41 and an electric wire 44 are wired to the
Of these, a brush 43 that contacts the outer peripheral surface of the chuck 2A holding the punch 3 is connected to the tip of the electric wire 41 so that current can be supplied to the punch 3 even when the punch is rotated. On the other hand, the electric wire 44 is branched via a switching switch 45 into an electric wire 46 connected to a terminal 49B of the punching device 29 described later and an electric wire 47 connected to a terminal 49A of the die holder 5. That is, when the punch 3 is subjected to electric discharge machining, the electric wire 44 is switched to the terminal 49A side so that electric discharge is generated between the electrode 29A and the punch 3.
By switching to the A side, electric discharge is generated between the punch 3 and the die 4.

Next, FIG. 2 is a configuration diagram in which related parts are numbered in order to explain the drive device and the machining liquid supply device.
In the figure, a first motor 21 connected to the main controller 20 and supplied with a drive current and a voltage is provided in the base 1. In order to move the punch holder 2 in the vertical direction, the first motor 21 is provided with a screw shaft 21A on the output shaft as shown in the figure, and a female screw body 24A that engages with the screw shaft 21A is integrated. The static pressure coupling 24, which is separately provided, is moved in the direction of arrow S. The static pressure coupling 24 is provided with a detecting portion of the first linear scale 27 connected to the main controller 20 in order to detect the amount of movement in the direction of the arrow S, and the main controller 20 detects the position. I try to send information. That is, the static pressure coupling 24 is configured to be servo-driven in the direction of arrow S.

The first support member 25, which is rotatably supported in the hydrostatic coupling 24, has a gear portion 25A and a flange portion 25B.
Is integrally provided, and the flange portion 25B is supported by the static pressure bearing in the static pressure coupling 24, and is provided on the base portion 1 and connected to the main controller 20. The gear 22A of the motor 22 and the gear portion 25A are configured to mesh with each other, and the punch holder 2 provided at the upper end of the first support member 25 with the bolt 26 is configured to be rotatable and vertically movable.

Further, the screw shaft 23A of the third motor 23 provided on the base 1 and connected to the main controller 20 moves the punching machine 29 in the direction of arrow T. A second linear scale 28 connected to the main controller 20 is provided, and is configured to servo-drive the punching device 29. A wire electrode 29A for electric discharge machining is provided on the side end of the punching machine 29 facing the punch 3.
And a terminal 49B are provided.

Next, the structure of the machining fluid supply device will be described. In FIG. 2, the machining fluid supply device 50 that is connected to the main controller 20 or can function as a single unit is indicated by a double line in the figure. The pipes 51, 56, 57 shown are arranged. Of these pipes, a nozzle 53 is connected to the tip of the pipe 51 so that the machining liquid at the time of electrical discharge machining can be poured onto the machining surface, while the pipe 56 and the pipe 57 collect the used machining liquid. To recover
It is provided on the bottom surface of the die holder 5 and the outer wall of the tray 58. Further, the cover 54 is attached to the die holder 5 so as to be integral therewith, and prevents the working fluid from entering the hydrostatic bearing.

In the electric discharge machine configured as described above, the shape of the punch 3 is electric discharge machined. To explain the operation briefly, first, the punch material is attached to the chuck 2A of the punch holder 2. Next, the punch holder 2 is pivotally supported on the gas bearing 33 of the base 1, and the main controller 20 is activated, so that the first motor 21 drives the punch holder 2 until the punch 3 has a predetermined outer size. While moving in parallel, the second motor 22 rotates the punch holder 2 to perform electric discharge machining.

Here, the shape of the punch 3 is the punch processing device described above.
It can also be formed by using a cutting tool instead of 29.

Next, FIG. 3 is a central cross-sectional view showing a state in which a punch is axially supported by a punching machine, and FIG. 4 is a plan view of FIG.

In FIG. 3 and FIG. 4, the punch holder 2 maintains the base 1 with a minute gap maintained between the punch holder 2 and the outer peripheral surface thereof.
A gas bearing 33 provided therein surrounds the outer peripheral surface and is axially supported via a pressurized gas generated by a pressurized gas supply device (not shown). In this way, the second support member 68 is fixedly provided on the upper end of the punch holder 2 which is axially supported by the punching device. A coil 61, which is a driving portion of the voice coil motor 70, is provided at a substantially central portion of the second support member 68, and a non-detecting body 62 of a non-contact type optical linear scale is provided.
And a plate for restricting the movement of the second support member 68 around the axis
63 and 63 are provided on the edge.

On the upper surface of the base 1, there are a detection head 67 for detecting the non-detection body 62 of the optical linear scale and a detent 65 for slidably guiding the plate 63 with a built-in hydrostatic bearing. Is provided at a predetermined position corresponding to the non-detection body 62 and the plate 63 that restricts the movement of the second support member 68 around the axis.

As described above, by mounting the punch holder 2 in the punching device, continuous fine hole drilling is performed. However, the movement for punching operation is performed by the voice coil motor 70 and the movement amount is detected. The punching operation is performed as described above with the detection head 67 for detecting the non-detection body 62 of the optical linear scale.

In the above description, only the example in which the static pressure gas bearing is made of a porous body is described, but other types of gas bearings such as an orifice diaphragm and a surface diaphragm may be applied.

In the above embodiment, the case where the punch holder 2 is moved in the vertical direction has been described, but the punching device may be horizontally arranged so that the punch moves in one direction.

[Effects of the Invention] As described above, according to the punching and punching electric discharge machining method of the present invention, punching punching and punching electric discharge machining are performed by using the punching electric discharge machining apparatus that combines punching punching and punching electric discharge machining. At this time, it is possible to perform electric discharge machining of the punch into a punch shape, and when punching using the punch, it is possible to control the movement for the punching operation and the amount of movement.

[Brief description of drawings]

1 and 2 are schematic configuration diagrams of an electric discharge machining apparatus, FIG. 3 is a central sectional view showing a state in which a punch is axially supported by a punching machining apparatus, and FIG. 4 is a plan view of FIG. . In the figure, 2 ... Punch holder, 3 ... Punch, 4 ... Die, 5 ... Die holder, 25 ... First support member, 68 ...
It is a second support member.

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Yasuo Horikoshi 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Hiroyuki Suzuki 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. Within the corporation

Claims (1)

(57) [Claims] 1. A punching die and a punching electric discharge machining are held with high accuracy by holding a punch and a die interchangeably with respect to a fluid bearing provided in a punching electric discharge machining apparatus which serves both punching and punch electric discharge machining. A punch punching and punch electric discharge machining method for performing the punch electric discharge machining method, comprising: a first support member that is rotatable with respect to the fluid bearing and movable in an axial direction of the fluid bearing. On the other hand, the punch is fixedly provided, while the punching process is provided with a movable part of the linear actuator that performs a punching movement operation in the axial direction of the fluid bearing, and a moving amount detecting means of the moving part. A punching and punching electric discharge machining method, characterized in that the punch is fixed to a second supporting member.