JP2505804B2 - Optical recording medium and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a read only memory (ROM) type for reading information recording bits with a laser beam, and a direct read after write capable of writing with a laser beam. The present invention relates to a (DRAW) type or an erasable / writable optical recording body and a method for manufacturing the same.

[Conventional technology]

An example of a conventional ROM type optical recording medium will be described with reference to FIG. 7. On the optical card 50, an information recording bit 53 composed of a low reflection portion 52 is formed so as to cover the light reflection portion 51.
In the optical card 50, a light reflection material 55 is formed as an information recording bit on a transparent substrate 54 by a photolithography method (photolithography method), and a substrate 58 on which a black printing layer 57 is previously formed by an adhesive 56 is formed. It is formed by adhering to.

An example of the ROM type shown in JP-B-58-48357 will be explained with reference to FIG. 8. A silver halide emulsion film 60 is formed on a substrate, and the film 60 is subjected to pattern exposure and By special development, the information recording bit 62 having a light reflectance different from that of the surrounding portion 61 is formed.

On the other hand, a conventional DRAW type optical recording medium will be described with reference to FIG. 9. One side of a photopolymer 71 is formed in an uneven shape, and a thin film of an optical recording material 72 such as Te is provided along the uneven surface. An optical recording body is formed by adhering it to a substrate 74 with an adhesive 73 and stacking a light-transmitting acrylic resin 75 or the like on the upper surface of the photopolymer 71. And the tenth
As shown in the figure, for example, by scanning the uneven portion of the optical recording material 72 with a single laser beam 76, for example after confirming the position by focusing on the convex portion, bit information on the convex portion of the optical recording material 72. I am writing.

In addition, the conventional D disclosed in Japanese Patent Publication No. 58-48357
A RAW type optical recording medium will be described with reference to FIG. 11. A silver halide emulsion film 80 is formed on a base material, and the film 80 is subjected to pattern exposure and special development to obtain a portion 81 and a portion having different light reflectances. 82 is formed, the position of the portion 81 is confirmed by the difference in light reflectance, and bit information is written on the portion 81.

[Problems to be solved by the invention]

However, in the optical recording body for forming information recording bits by the photoengraving method shown in FIG. 7, since the patterning of the reflective material is performed by wet etching with a strong acid or the like, the steps of washing with an etching solution and drying are complicated. Is.

It takes a long time to clean the etching solution, and if the cleaning is insufficient, the corrosion of the card progresses with time even after the completion of the card, which shortens the life of the card.

It is difficult to control the pH of the etching solution, and a foreign matter in the etching solution causes trouble.

Have problems such as.

Further, in the example shown in FIG. 8, since special development is performed, the process is complicated, management is difficult, and it is difficult to obtain the density of the black portion, and a specific photographic material such as a silver halide emulsion is required. However, there is a problem that the manufacturing cost increases.

Further, in the DRAW type optical recording medium in which the optical recording material is formed along the concave-convex surface shown in FIG. 9, since accuracy such as height and width is required in forming the convex surface, the control method thereof is However, the manufacturing process is complicated and the cost is increased.

Further, in the example shown in FIG. 11, the manufacturing is easier than that shown in FIG. 9 in that the accuracy of only the track width is required. Since it requires a specific photographic material, there is a problem that the manufacturing cost increases.

The present invention solves the above problems, and provides an optical recording body and a manufacturing method thereof, which can be manufactured by a simple manufacturing process and can reduce the manufacturing cost without being limited to a specific optical recording material. It is intended.

[Means for solving problems]

Therefore, the optical recording medium of the present invention is an optical recording medium formed by forming information recording patterns having different light reflectances with respect to the surroundings on the substrate, in which the substrate on which the colored layer is formed and the light transmissive substrate. A light-reflecting material layer or an optical recording material layer is formed between them.

Further, the method for producing an optical recording medium of the present invention is an optical recording medium in which an information recording pattern having different light reflectance with respect to the surroundings is formed on a substrate, and a substrate on which a colored layer is formed and an optical recording medium In a method for producing an optical recording body in which a light reflecting material layer or an optical recording material layer is formed between a transparent substrate and a substrate, a photoresist is applied on the equipment, and the information recording pattern is removed by mask exposure and development. After leaving the photoresist on the part, provide a light reflection material layer or an optical recording material layer on the entire surface,
Next, the light reflecting material layer or the optical recording material layer is removed together with a photoresist, and further, the light reflecting material layer or the optical recording material layer is provided on the base material, and the light reflecting material layer or the optical recording material is provided. A portion excluding the information recording pattern by applying a photoresist on the material layer, leaving the photoresist in the information recording pattern portion by mask exposure and development, and then exposing it to a glow discharge area by a corrosive gas. The light-reflecting material layer or the optical recording material layer is removed.

[Action]

In the present invention, for example, as shown in FIG. 4, when light is incident from the light-transmissive base material 10, for example, the light is strongly reflected in the high reflectance portion 13b and the low reflectance portion 13c.
In, the reflectance will decrease. And ROM
When manufacturing a type optical recording medium, by adopting a light-reflecting material as the layer 13, the low reflectance portion 13c can be formed into a first layer.
On the other hand, when the information recording bit 4 shown in the figure is formed and, on the other hand, when an optical recording body of DRAW type is manufactured, an optical recording material is adopted as the layer 13 so that the high reflectance portion 13b is shown in FIG. The optical recording track 8 is formed, and the guide track 9 is formed in the low reflectance portion 13c.

〔Example〕

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a ROM showing an embodiment of the optical recording medium of the present invention.
(A) is a plan view, (b) is a perspective view, and FIG. 2 is another embodiment of the optical recording medium of the present invention.
FIG. 3 is a diagram showing a DRAW type optical card, FIG. 3 is a diagram showing another embodiment of an optical card used in combination with a ROM type and a DRAW type, and FIG. 4 is one embodiment of a method for manufacturing an optical recording medium of the present invention. 5 is a diagram for explaining another embodiment of the method for manufacturing an optical recording medium of the present invention, and FIG. 6 is a diagram for explaining a writing method of the optical recording medium of the present invention. It is a figure.
In the figure, 1 is an optical card, 4 is an information recording bit, 8 is an optical recording track, 9 is a guide track, 10 is a light transmissive substrate, 11 is a photoresist layer, 12 is a photomask, 13 is a light reflecting material or An optical recording material, 13b is a high reflectance portion, 13c is a low reflectance portion, 14 is a black printing layer, and 15 is a substrate.

FIG. 1 is a view showing a ROM type optical card of an optical recording medium of the present invention, in which an information recording bit 4 consisting of a high reflection portion 2 and a low reflection portion 3 is formed on the optical card 1. There is. In the optical card 1, a light reflecting material 7b is formed between a transparent base material 5 and a substrate 6 having a black printed layer 7a, and information recording bits 4 formed of the black printed layer 7a are patterned.

FIG. 2 is a view showing a DRAW type optical card of the optical recording medium of the present invention, in which an optical recording track 8 in which a high reflectance portion is formed on the optical card 1 and which can be written by light, and a low reflectance A guide track 9 forming a part is formed. Although the optical recording tracks 8 and the guide tracks 9 are alternately formed in the above embodiment, the number of the guide tracks 9 can be reduced.

FIG. 3 is a diagram showing an optical card used in combination with the ROM type shown in FIG. 1, and FIG. 2 is a diagram showing an optical card used in combination with the DRAW type. And a guide track 9 is formed. The positions of the information recording bit 4 and the optical recording track 8 can be set arbitrarily.

4 and 5 show an embodiment of a method of manufacturing the ROM type or DRAM type optical recording body. In the figure, the high-reflectance portion 13b and the low-reflectance portion 13c are shown in a concavo-convex shape, but the difference between the concavities and convexities is about several μm, and in reality, they are formed to be substantially flat or flush. .

In FIG. 4 (a), the light-transmissive substrate 10 can be processed to a desired precision such as polymethylmethacrylate (PMMA), polycarbonate, polyester, epoxy, polyolefin, polystyrene, etc., and is corroded during the process. This light-transmissive base material is made of non-polymer material
A photoresist layer 11 is evenly coated on the substrate 10 by a rotary photoresist coating substrate to a thickness of 4000 to 15000Å. Next, using a mask aligning device, a photomask 12 formed according to the information recording pattern is superimposed on the photoresist layer 11, and then exposed. Next, as shown in FIG. 3B, when the photoresist layer 11 is developed, in the positive type resist, the photoresist where the ultraviolet rays are exposed flows away, and the resist where the ultraviolet rays are not exposed remains, and the photomask 12
Pattern is transferred onto a light-transmissive base material 10, whereby the photoresist layer 11 has a shape, for example, a width of the information recording bit 4 shown in FIG. 1 or the guide track 9 shown in FIG. It is formed with a pitch of 5μ and a pitch of 15μ.
Next, as shown in FIG. 3C, a thin film layer of a light reflecting material or an optical recording material 13 described later is formed by vapor deposition, sputtering, a scientific method or the like. Next, as shown in FIG. 3D, the remaining photoresist layer 11 is exposed from the lower side of the light transmissive substrate 10, and then the photoresist layer 11 is developed by development as shown in FIG. By removing and lifting off the light reflection material or the optical recording material 13 formed on the photoresist layer 11, the information recording pattern 13b is formed on the light transmissive base material 10. On the light-transmissive base material 10 thus formed, as shown in FIG.
The substrate 15 made of polyvinyl chloride or the like having the above is adhered to produce an optical recording body having a high reflectance portion 13b and a low reflectance portion 13c.

In this optical recording medium, when light is incident from the light-transmissive base material 10, for example, light is strongly reflected in the wide emissivity portion 13b, and the reflectance is reduced in the low reflectance portion 13c. Become. When a ROM type optical recording medium is manufactured, the information recording bit 4 shown in FIG. 1 is formed in the low reflectance portion 13c by adopting a light reflecting material as the layer 13, while the DRAW is used. When manufacturing a type of optical recording material, by adopting an optical recording material as the layer 13,
The optical recording track 8 shown in FIG. 2 is formed on the high reflectance portion 13b, and the guide track 9 is formed on the low reflectance portion 13c.

As the light-reflecting material used in the ROM type, any material can be used as long as the material has a different refractive index from the base material, for example, Al, Ti, Mn, Fe, Co, Ni, Cu, Zn, S.
Metals such as e, Mo, Ag, Cd, In, Sn, Sb, Te, Pt, Au and their alloys, compounds, and other oxides, nitrides, organic dye thin films represented by TiO ₂ , TiN, etc. Use a material with high light reflectance.

Examples of the optical recording material used for the DRAWR type include metal-based materials (TaBi, In, Al, C / Al, Cr / Al, Zn /
Al, Si, Ge, SmS, etc., Calgon system (Te, Te-As, Te-S
e, Te-Se-As, Te-CS 2, Te-C, Te composites, As-Se-
S-Ge, etc.), oxides (TeO _x , GeO _x , MoO _x , VO _2, etc.),
Organic substances (dye thin film + resin, Ag + polymer, thermoplastic resin, Cu-Pc / Te, etc.) are used.

As an optical recording material used for the erasable and writable type, for example, a material in which the ordered state between atoms forming the film is reversibly changed by light irradiation and the light reflectance between them is different, for example, , Te-As, Te-Se, Te-Se-As,
_{Te-CS 2, Te-C} , materials such as As-Se-S-Ge is used.

Further, as the photoresist 11, materials such as orthoquinone diazide / novolak type, azide / rubber type, p-diazodiphenylamine / paraformaldehyde condensation type, azido polymer type, polyvinyl cinnamate type, and polycinnamylidene vinyl acetate type are used. Used.

Then, in the ROM-type optical recording body manufactured as described above, the information recording bit having a low reflectance is read by a line sensor such as a CCD line sensor or a laser beam. In the ROM type optical recording body, the guide track is not always necessary, and the information recording pit row can be used as the guide track.

Further, in the DRAW type optical recording medium manufactured as described above, as a result of measuring the light reflectance of the optical recording track 13b and the guide track 13c using a white light lamp of 400 to 700 nm, for example, optical recording The light reflectance of the track 13b was about 50%, and the light reflectance of the guide track 13c was about 10%. When writing bit information on an optical recording medium, 2 beams or 3 beams are used.
A beam is used, but in the example using three beams, the sixth beam is used.
As shown in the figure, the difference between the reflectances of the guide track 13c and the optical recording track 13b is detected by the beams A and C on both sides, so that the positions of the guide tracks 13c and 13c can be confirmed to prevent the guide tracks 13c and 13c from shifting to the left and right. , The bit information is written in the optical recording track 13b by the middle beam B, which is simpler than the one beam control method. The guide tracks 13c are not necessarily formed alternately with the optical recording tracks 13b, and the number of guide tracks may be thinned out. In this case, the bit information is written by calculating the distance of the guide track 13c to determine the position of the optical recording track 13b.

(Production Example) A PMMA base material having a thickness of 0.4 mm and a size of 100 × 100 mm was used, and a photoresist was applied to the surface of the base material under the following conditions.

Spinner coat: 3000 rpm, 20 sec Resist: Shipley Microposit 1400 Thickness: 5000 Å After application, prebaking was performed at 90 ° C for 20 minutes.

 Next, pattern exposure was performed under the following conditions.

Mask: Cr sputter mask Pattern: DRAW type Guide track width 5 μm Information track width 10 μm ROM type Information recording bit width 5 μm Length 5 to 20 μm Ultra-high pressure mercury lamp: 4 kw, 8 sec After exposure, development was performed under the following conditions.

Washing with a Shipley Microposite Developer for 60 sec. Next, a recording layer was formed under the following conditions.

Form a layer with a thickness of 500Å using a DC bipolar sputtering device.

DRAW type: Te sputtering ROM type: Al sputtering Next, the entire surface is exposed from the PMMA substrate side.

Ultra-high pressure mercury lamp: 4 kw, 1 minute development (lift-off) was performed under the following conditions.

2 minutes after washing with Shipley Microposite Developer, use a Toray high sole as an adhesive to bond the substrate and the substrate together. Laminate 0.3mm PVC of the substrate with the black printed layer on the substrate obtained above. Then, they were integrated and punched out into a card size to obtain an optical card as an example of the optical recording medium of the present invention.

In the above manufacturing example, when manufacturing a DRAW / ROM combined card, the DRAW and ROM are appropriately
Combine the steps.

Next, another embodiment of the method for manufacturing an optical recording medium of the present invention will be described with reference to FIG. In the figure, the same parts as those of the embodiment of FIG. 4 are designated by the same reference numerals, and detailed description thereof will be omitted.

First, as shown in FIG. 5 (a), a thin film layer of a light reflecting material or an optical recording material 13 having a film thickness of 5001000Å is vapor-deposited, sputtered or chemically formed on a light transmissive substrate 10 having a thickness of 400 μm. And the like. Next, as shown in FIG. 2B, a photoresist layer 11 is applied on the light reflection material or the optical recording material 13 by a rotary photoresist coating machine to form 4000 to 15 layers.
After being uniformly applied with a thickness of 000Å, a photomask 12 is superposed on the photoresist layer 11 using a mask aligning device, and then exposed. Next, as shown in FIG. 3C, when the photoresist layer 11 is developed, in the positive type resist, the photoresist where the ultraviolet rays are exposed flows away, and the resist where the ultraviolet rays are not exposed remains, and the photomask 12
Pattern is transferred to the photoresist layer 11
Apertures with a width of about 5μ and a pitch of about 15μ are formed. Insert the base material 10 thus formed between the parallel electrodes,
(D) As shown in the figure, a light-reflecting material or an optical recording material 13 is exposed on a light-transmissive substrate 10 by glow discharge in a carbon tetrachloride-containing gas and exposed without a photoresist. It is stripped from the light-transmissive base material 10 by dry etching.
As an example of etching conditions at this time, initial exhaust is 6
× 10 ^-2 _Torr , and the degree of vacuum is 2-3 × 10 ^-1 _Torr . Next, as shown in FIG. 7E, the photoresist layer 11 is removed,
An information recording pattern 13b is formed on a light transmissive base material 10. As shown in (f), the substrate 15 made of polyvinyl chloride or the like on which the printing layer 14 of black color or the like is formed is adhered to the light-transmitting substrate 10 thus formed, and the high reflectance portion 13b and the low reflectance portion 13b are formed. An optical recording body having the reflectance portion 13c is manufactured.

(Production Example) A PMMA base material having a thickness of 0.4 mm and a size of 100 × 100 mm was used, and then a recording layer was formed under the following conditions. Form a layer with a thickness of 500Å using a DC bipolar sputtering device.

DRAW type: Te sputtering ROM type: Al sputtering A photoresist was applied on the surface of a substrate under the following conditions.

Spinner coat: 2000 rpm, 20 sec Resist: Shipley Microposit 1400 Thickness: 1 μm After coating, prebaking was performed at 90 ° C. for 60 minutes.

 Next, pattern exposure was performed under the following conditions.

Mask: Cr sputter mask Pattern: DRAW type Guide track width 5 μm Information track width 10 μm ROM type Information recording bit width 5 μm Length 5 to 20 μm Ultra-high pressure mercury lamp: 4 kw, 8 sec After exposure, development was performed under the following conditions.

Rinse with water for 60 seconds on Shipley Microposit Developer, then insert between parallel electrodes of RF dry etching equipment to perform dry etching.

Initial exhaustion: 6 × 10 ^-2 _Torr carbon tetrachloride gas introduction Vacuum degree: 2 × 10 ^-1 _Torr The recording layer in the portion not covered with the resist is removed by glow discharge.

 Next, the entire surface is exposed from the PMMA substrate side.

Ultra high pressure mercury lamp: 4kw, 1 minute Development (resist removal) under the following conditions for Shipley Microposite Developer for 2 minutes, water washing Adhesion between substrate and substrate is Toray Hisol as an adhesive, black printing layer A 0.3 mm thick vinyl chloride film of the substrate provided with was laminated on the base material obtained above and integrated, and punched into a card size to obtain an optical card as an example of the optical recording medium of the present invention.

When manufacturing a ROM type optical recording medium, as in the embodiment of FIG. 4, by adopting a light reflecting material as the layer 13, the information shown in FIG. On the other hand, when the recording beat 4 is formed and, on the other hand, an optical recording material of DRAW type is manufactured, an optical recording material is adopted as the layer 13 so that the optical recording track 8 shown in FIG. And the guide track 9 is formed on the low reflectance portion 13c.

The present invention is not limited to the above embodiment, and it goes without saying that various modifications can be made. For example, in the above embodiment, the black print layer 14 is formed as the low reflectance portion 13c, but it is not limited to black and, for example, a print layer having a reflectance different from the reflectance of the high reflectance portion 13b such as white. I wish I had it.

The optical recording medium of the present invention is a flexible disk,
It can be used as a card, a tape, etc., and is applied to the following uses, for example.

(1) Financial distribution industry: cashing cards, credit cards, prepaid cards.

(2) Medical health industry: health certificate, medical chart, medical card,
Emergency card.

(3) Entertainment industry: software media, membership cards, admission tickets, game machine control media, video game media, karaoke media.

(4) Transport travel industry: traveler card, license, commuter pass,
passport.

(5) Publishing industry: Electronic publishing.

(6) Information processing industry: external recording devices for electronic machines, filing.

(7) Education industry: teaching material programs, grade management cards, library entry / exit management, and book management.

(8) Automotive industry: maintenance records, operation management.

(9) FA: Program recording medium such as MC, NC, robot, etc.

(10) Others: media for building controls, home controls, ID cards, vending machines.

〔The invention's effect〕

As described above, according to the present invention, in an optical recording body in which information recording patterns having different light reflectances with respect to the surroundings are formed on a base material, a substrate on which a colored layer is formed and a light transmissive base material. Since a light-reflecting material layer or an optical recording material layer is formed between and, it is possible to avoid complication of the process due to etching, etc., simplify the manufacturing process, and limit to a specific optical recording material. Therefore, the manufacturing cost can be reduced.

[Brief description of drawings]

FIG. 1 is a diagram showing an LOM type optical card which is one embodiment of the optical recording medium of the present invention. FIG. 1A is a plan view, FIG. 1B is a perspective view, and FIG. 2 is an optical recording medium of the present invention. Another example, DRAW
Type optical card, FIG. 3 is a diagram showing another embodiment of an optical card used in combination with LOM type and DRAW type, and FIG. 4 is one example of a method for manufacturing an optical recording medium of the present invention. FIG. 5 is a diagram for explaining, FIG. 5 is a diagram for explaining another embodiment of the method for manufacturing an optical recording medium of the present invention, and FIG. 6 is a diagram for explaining a writing system of the optical recording medium of the present invention. , FIG. 7 shows an example of a conventional optical card, (a) is a plan view, (b)
Is a sectional view, FIG. 8 is a perspective view showing another example of a conventional optical card, FIG. 9 is a sectional view showing another example of a conventional optical card, and FIG.
FIG. 11 is a diagram for explaining the writing method of FIG. 9, and FIG. 11 is a perspective view showing another example of a conventional optical recording medium. 1 ... Optical card, 4 ... Information recording bit, 8 ... Optical recording track, 9 ... Guide track, 10 ... Light transmissive substrate,
11 …… photoresist layer, 12 …… photomask, 13 ……
Light-reflecting material or optical recording material, 13b ... High reflectance portion, 1
3c …… Low reflectance part, 14 …… Colored printing layer, 15 …… Substrate.

Claims (6)

(57) [Claims] 1. An optical recording body comprising an information recording pattern having different light reflectance with respect to the surroundings formed on a base material, wherein light reflection is provided between a substrate on which a colored layer is formed and a light transmissive base material. An optical recording material comprising a material layer or an optical recording material layer. 2. The optical recording medium according to claim 1, wherein bit information is formed in the information recording pattern. 3. The optical recording medium according to claim 1, wherein a plurality of sets of optical recording tracks and guide tracks are formed on the information recording pattern. 4. The optical recording medium according to claim 1, wherein bit information and a plurality of sets of optical recording tracks and guide tracks are formed in the information recording pattern. 5. An optical recording body comprising an information recording pattern having a different light reflectance with respect to the surroundings formed on a base material, which is provided between a substrate on which a colored layer is formed and a light transmissive base material. In a method of manufacturing an optical recording body in which a light-reflecting material layer or an optical recording material layer is formed, a photoresist is applied on the base material, and the photoresist is left in a portion except the information recording pattern by mask exposure and development. After that, a light reflecting material layer or an optical recording material layer is provided on the entire surface, and then the light reflecting material layer or the optical recording material layer is removed together with a photoresist, thereby producing an optical recording material. 6. An optical recording body comprising an information recording pattern having a different light reflectance with respect to the surroundings formed on a base material, the space being provided between a substrate having a colored layer and a light transmissive base material. In the method for producing an optical recording body in which a light reflecting material layer or an optical recording material layer is formed, a light reflecting material layer or an optical recording material layer is provided on the substrate, and the light reflecting material layer or the optical recording material layer is provided. A photoresist is applied to the surface of the information recording pattern by mask exposure and development to leave the photoresist on the area of the information recording pattern, and then exposed to a glow discharge area by a corrosive gas to remove the information recording pattern. A method for producing an optical recording material, which comprises removing the layer or the optical recording material layer.