JP2024076639A - Standby Control Device - Google Patents

Abstract

[Problem] To provide a standby control device that can ensure the safety of an analytical device when a control device of the analytical device breaks down. [Solution] The standby control device (standby control device 1) includes a first control unit (first control unit 81) capable of executing a first control corresponding to a control executed by a vacuum control unit (vacuum control unit 52), and a second control unit (second control unit 82) capable of executing a second control corresponding to a control executed by a movement control unit (movement control unit 53). When the first control unit (first control unit 81) and a vacuum device (vacuum device 9) are connected by first control wiring (control wirings 71, 72), and the second control unit (second control unit 82) and a movement device (movement device 10) are connected by second control wiring (control wirings 73, 74), the first control unit (first control unit 81) can control the vacuum device (vacuum device 9) instead of the vacuum control unit (vacuum control unit 52), and the second control unit (second control unit 82) can control the movement device (movement device 10) instead of the movement control unit (movement control unit 53). [Selected Figure] FIG.

Description

The present invention relates to a standby control device.

In analytical instruments for analyzing samples, such as EPMA (Electron Probe Micro Analyzer), a stage for mounting the sample, an electron beam irradiation device, and a characteristic X-ray detector are installed in a vacuum chamber, and the sample to be analyzed is transported into the vacuum chamber by a sample transport device.

Such analytical equipment may analyze samples that require safety management, such as radioactive materials. In such cases, the analytical equipment, including the vacuum chamber and sample transport device, is installed in a controlled area where human access is restricted. On the other hand, the control device included in such analytical equipment is installed outside the controlled area to facilitate manual maintenance.

In analytical devices that analyze samples that require such safety management, it is necessary to ensure that safety management is maintained in the event of an emergency, such as when the control device breaks down.

Samples that require safety management are stored in a safe storage facility unless they are being analyzed by analytical equipment. If the control device of an analytical equipment breaks down, the vacuum control of the vacuum chamber and the transport control of the sample transport device cannot be performed normally, and there is a risk that a safe state will not be maintained, for example, samples will not be able to be removed from the vacuum chamber for a long period of time.

An analytical device capable of managing safety in an emergency is a magnetic resonance imaging device (MRI device) that is configured to have a backup power source, a switch means for switching between a main power supply path and a backup power supply circuit, a power failure detection means for detecting a power failure in the main power source, and the switch means operates to switch the power supply path depending on the detection result of the power failure detection means (Patent Document 1).

JP 2003-204948 A

However, conventional technologies such as those described in Patent Document 1 only switch the power supply path when a power outage is detected, and do not ensure the safety of the analytical device in the event of a failure of the control device.

This invention was made to solve this problem by providing a standby control device that can ensure the safety of the analytical device in the event that the control device of the analytical device fails.

A backup control device according to one aspect of the present invention is a backup control device connectable to an analytical device including a vacuum device that evacuates a space in which an electron beam is irradiated onto a sample to be analyzed, a drive device having a moving device that moves the sample between the inside and outside of the space, a moving control unit that controls the moving device, and a control device having a vacuum control unit that controls the vacuum device, and includes a first control unit capable of executing a first control corresponding to the control executed by the vacuum control unit, and a second control unit capable of executing a second control corresponding to the control executed by the moving control unit, and when the first control unit and the vacuum device are connected by a first control wiring and the second control unit and the moving device are connected by a second control wiring, the first control unit can control the vacuum device in place of the vacuum control unit, and the second control unit can control the moving device in place of the vacuum control unit.

When the first control unit and the vacuum device are connected by a first control wiring and the second control unit and the moving device are connected by a second control wiring, the first control unit can control the vacuum device instead of the vacuum control unit, and the second control unit can control the moving device instead of the moving control unit, thereby ensuring the safety of the analytical device in the event that the control device of the analytical device fails.

FIG. 2 is a plan view showing the arrangement of components in an area where an analysis device is provided. 3 is a cross-sectional view showing the internal configuration of a measurement chamber and a sample introduction chamber in the analysis device. FIG. FIG. 2 is a block diagram showing the relationship between a computer system and a control device. 4 is a block diagram showing the relationship between the control device and the drive device when the control device is not malfunctioning. FIG. FIG. 2 is a plan view showing the appearance of the standby control device. FIG. 4 is a block diagram showing the relationship between a standby control device and a drive device in the event that a control device fails.

Below, an embodiment of the present invention will be described in detail with reference to the drawings. Note that, below, the same or corresponding parts in the drawings will be given the same reference numerals, and in principle, their description will not be repeated. Below, several types of configurations will be described for the embodiment, but it is intended from the beginning of the application that each configuration will be appropriately combined.

In the following embodiment, a standby control device 1 (FIG. 1) that performs various controls when the control device 5 (FIG. 1) of the analysis device 3 (FIG. 1) fails will be described with reference to FIGS. 1 to 6. The standby control device 1 shown in FIG. 4 is a standby control device 1 (FIG. 4) that can be connected to an analysis device 3 (FIG. 4) that includes a vacuum device 9 (FIG. 4) that evacuates the space in which the sample 8 (FIG. 2) to be analyzed is irradiated with an electron beam, a driving device 7 (FIG. 4) having a moving device 10 (FIG. 4) that moves the sample between the inside and outside of the space, a vacuum control unit 52 (FIG. 4) that controls the vacuum device 9 (FIG. 4), and a moving control unit 53 (FIG. 4) that controls the moving device 10 (FIG. 4). When the control device 5 (FIG. 4) fails, the standby control device 1 (FIG. 4) controls the vacuum device 9 (FIG. 6) and the moving device 10 (FIG. 6) instead of the control device 5 (FIG. 6) as shown in FIG. 6.

[Layout of components of analysis device 3]
Fig. 1 is a plan view showing the arrangement of components in an area where an analysis device 3 is provided. Fig. 2 is a cross-sectional view showing the internal configuration of a measurement chamber 11 and a sample introduction chamber 12 in the analysis device 3.

In this embodiment, an EPMA (Electron Probe Micro Analyzer) is shown as an example of the analytical device 3 that analyzes the sample, but the analytical device 3 may be other types of analytical devices such as a SEM (Scanning Electron Microscope)-EDS (Energy Dispersive x-ray Spectroscopy).

Referring to Figures 1 and 2, the main components of the analytical device 3 include a measurement chamber 11, a sample introduction chamber 12, a lid 13, a sample transport device 2, a sample holder 40, a stage 30, an electron gun 31, a detector 32, a gate door 15, a computer system 4, and a control device 5. The sample 8 to be analyzed by the analytical device 3 is a sample made of a radioactive material.

As shown in FIG. 1, a measurement chamber 11 and a sample introduction chamber 12 are provided inside an iron cell 6, which is a shielded facility whose internal space is isolated from the external space by walls that block radiation.

As shown in FIG. 1, a controlled area 100 is set up around the iron cell 6. Outside the controlled area 100, a certain area is set up as a semi-controlled area 101. Such controlled areas 100 and semi-controlled areas 101 are established to ensure that radiation from the sample 8 does not affect people.

The controlled area 100 is a facility surrounded by walls that shield against radiation, and is basically an area where people are prohibited from entering. The semi-controlled area 101 is an area where only authorized people can enter for a certain period of time, with prescribed radiation protection measures in place. The semi-controlled area 101 is a facility surrounded by walls that shield against radiation.

A control device 5 that controls the analytical device 3 is provided in the semi-managed area 101. The control device 5 contains various electronic components such as a computer and drivers in a rectangular housing. Outside the semi-managed area 101, a computer system 4 is provided that performs overall management processing of various controls in the analytical device 3 and various calculation processing such as elemental analysis processing.

A storage cabinet 66 is provided outside the iron cell 6, and has a configuration capable of safely storing the sample 8 while shielding it from radiation from the sample 8. The storage cabinet 66 has a configuration capable of safely holding the sample 8 even when a physical force is applied thereto, such as an earthquake, in addition to having a function of shielding radiation. On the side of the iron cell 6, at a position corresponding to the storage cabinet 66, a shutter device 65 is provided that can be opened and closed to remove the sample 8 from the storage cabinet 66 and bring it into the interior of the iron cell 6, or to remove the sample 8 from the interior of the iron cell 6 to the outside and store it in the storage cabinet 66.

A standby control device 1 is provided in the semi-managed area 101 so as to be movable. For example, the standby control device 1 can be moved by being carried by a person. The standby control device 1 is a device that performs some of the controls performed by the control device 5 as alternative control in place of the control device 5 when the control device 5 no longer operates normally due to a malfunction such as a breakdown. The standby control device 1 is placed on top of the control device 5, for example, as shown in FIG. 1. The standby control device 1 may be placed anywhere in the semi-managed area 101.

The control device 5 is connected by wiring to various devices included in the analysis device 3. The various devices to which the control device 5 is connected by wiring include a computer system 4, a vacuum device including a vacuum pump and a vacuum exhaust valve, a sample moving device including a sample transport device 2 and a stage 30, and a measuring device including an electron gun 31 and a detector 32.

[Internal configuration of measurement chamber 11 and sample introduction chamber 12]
2, a measurement chamber 11 and a sample introduction chamber 12 are provided adjacent to each other. The internal space of the measurement chamber 11 and the internal space of the sample introduction chamber 12 are in communication with each other via a transfer port 16. The transfer port 16 can be opened and closed by a gate door 15 driven by a driving source such as a motor. For example, the gate door 15 includes a door that moves horizontally when driven by a motor, and the door airtightly closes the transfer port 16 to close the transfer port 16, and releases the closed state to open the transfer port 16.

In the measurement chamber 11, an electron gun 31, a detector 32, and a stage 30 are provided. As shown in FIG. 1, a plurality of detectors 32 are arranged in a radially distributed manner around the stage 30. In the measurement chamber 11 and the sample introduction chamber 12, a sample transport device 2 is provided extending through a transport port 16.

The upper wall of the sample introduction chamber 12 is provided with an opening 17 that allows the introduction of sample 8 from the outside to the inside of the sample introduction chamber 12 and the withdrawal of sample 8 from the inside of the sample introduction chamber 12 to the outside. In the sample introduction chamber 12, a lid 13 is provided above the opening 17 to open or close the opening 17. The lid 13 is an airtight lid. When the lid 13 is attached to the top of the opening 17, the opening 17 is closed and ventilation between the inside and outside of the sample introduction chamber 12 is blocked.

The upper wall of the sample introduction chamber 12 is provided with an opening 17 that allows the introduction of sample 8 from the outside to the inside of the sample introduction chamber 12 and the withdrawal of sample 8 from the inside to the outside of the sample introduction chamber 12. In the sample introduction chamber 12, a cover 13 that can be attached and detached to the opening 17 is provided above the opening 17 to open or close the opening 17.

The lid 13 is an airtight lid, and is attached to or removed from the upper side of the opening 17 using a manipulator or a glove box provided outside the iron cell 6. When the lid 13 is attached to the upper side of the opening 17, the opening 17 is closed, and ventilation between the inside and outside of the sample introduction chamber 12 is blocked.

The sample transport device 2 is configured to transport the sample 8 between the internal space of the sample introduction chamber 12 and the internal space of the measurement chamber 11 by placing the sample 8 on a dish-shaped sample holder 40 provided on rails and moving the sample holder 40 along the rails. The sample transport device 2 transports the sample 8 placed on the sample holder 40 by the driving force of a transport motor provided in the sample introduction chamber 12.

One end of the sample transport device 2 is inside the sample introduction chamber 12, and the other end is inside the measurement chamber 11. When the sample holder 40 is inside the sample introduction chamber 12, it is possible to remove the lid 13 using a manipulator or a glove box, and place the sample 8 on the sample holder 40 through the opening 17. The sample 8 is placed on the sample holder 40 and transported to the inside of the measurement chamber 11. When the sample holder 40 reaches the other end of the sample transport device 2, the sample holder 40 on which the sample 8 is placed is placed on the stage 30. As a result, the sample 8 transported inside the measurement chamber 11 is moved in the X, Y, and Z directions (horizontal and vertical directions) by the stage 30.

The inside of the measurement chamber 11 is basically kept in a vacuum state. After the position of the sample 8 is adjusted by the stage 30, the sample 8 is irradiated with an electron beam from the electron gun 31 above. In response to the irradiation of the electron beam, the sample 8 emits characteristic X-rays. The characteristic X-rays emitted from the sample 8 are detected by the detector 32. Such irradiation of the electron beam and emission of the characteristic X-rays are performed while the inside of the measurement chamber 11 is in a vacuum state. The computer system 4 executes an analysis program and performs various analysis processes, such as elemental analysis process of the sample 8, based on the detection data of the characteristic X-rays by the detector 32.

[Operation flow of the analysis device 3 from sample introduction before sample analysis to sample extraction after sample analysis]
Next, an outline of the flow of operations of the analysis device 3 from the time of sample introduction before sample analysis to the time of sample discharge after sample analysis will be described with reference to FIG.

When analyzing the sample 8 using the analysis device 3, it is necessary to introduce the sample 8 from the outside into the sample introduction chamber 12. In this case, the gate door 15 is closed to close the transfer port 16, and the inside of the measurement chamber 11 is placed in a vacuum state by controlling the vacuum pump and the vacuum exhaust valve. The inside of the sample introduction chamber 12 is then vented so that the pressure is atmospheric. In this state, the lid 13 is removed to open the opening 17, and then the sample 8 is introduced from the outside into the sample introduction chamber 12 and placed on the sample holder 40. In this case, the inside of the sample introduction chamber 12 is at atmospheric pressure because the opening 17 is open.

Then, the lid 13 is attached to close the opening 17, and the sample introduction chamber 12 is placed in a vacuum state by controlling the vacuum pump and vacuum exhaust valve. The transfer port 16 is then opened by the gate door 15, and the sample transfer device 2 is driven to transfer the sample 8 placed on the sample holder 40 into the measurement chamber 11. With the measurement chamber 11 and the sample introduction chamber 12 in a vacuum state in this way, the vacuum state in the measurement chamber 11 is maintained even if the transfer port 16 is opened by the gate door 15.

The sample 8 transported into the sample introduction chamber 12 is placed on the sample holder 40 and set on the stage 30. Then, the position of the sample 8 is adjusted in response to the operation of the stage 30, after which the electron gun 31 irradiates the sample 8 with an electron beam, and the detector 32 detects the characteristic X-rays emitted from the sample 8.

When the analysis process based on the detection data of the detector 32 is completed, the sample 8 is transported from the measurement chamber 11 into the sample introduction chamber 12, and then discharged from the inside of the sample introduction chamber 12 to the outside, as follows:

With the sample 8 placed on the sample holder 40, it is moved from the stage 30 onto the sample transport device 2, and the gate door 15 is operated to open the transport port 16. When the analysis process based on the detection data of the detector 32 is completed, the measurement chamber 11 and the sample introduction chamber 12 are in a vacuum state, so even if the gate door 15 opens the transport port 16, the vacuum state in the measurement chamber 11 is maintained. Then, with the sample 8 placed on the sample holder 40, the sample 8 is transported from the measurement chamber 11 to the sample introduction chamber 12 by driving the sample transport device 2.

When the analysis of the sample 8 by the analysis device 3 is completed, it is necessary to evacuate the sample 8 from inside the sample introduction chamber 12 to the outside. In this case, in order to maintain the vacuum state in the measurement chamber 11, the gate door 15 operates to close the transfer port 16. In this state, the pressure in the sample introduction chamber 12 is returned to atmospheric pressure, and then the lid 13 is removed. After the lid 13 is removed to open the opening 17, the sample 8 is evacuated from inside the sample introduction chamber 12 to the outside. The lid 13 is then attached, and the opening 17 is closed.

The sample 8 introduced from inside the sample introduction chamber 12 to the outside is introduced from inside the iron cell 6 to the outside by opening the shutter device 65 using a control device other than the control device 5 provided in the analysis device 3 or a manipulator provided outside the iron cell 6, and stored inside the storage 66. When the sample 8 is stored inside the storage 66, the shutter device 65 is closed.

[Relationship between computer system 4 and control device 5]
FIG. 3 is a block diagram showing the relationship between the computer system 4 and the control device 5.

Referring to FIG. 3, the computer system 4 includes a computer 41, an input unit 42, and a display unit 43. The computer 41 includes a CPU (Central Processing Unit) 41A, memory 41B (various storage devices including ROM (Read Only Memory), RAM (Random Access Memory, and non-volatile memory such as flash memory), and an input/output buffer (not shown) for inputting and outputting various signals.

The CPU 41A loads software programs stored in the ROM in the memory 41B into the RAM or the like and executes them. In the memory 41B, the ROM stores various programs, such as a program showing control procedures for various controls of the analysis device 3 by the CPU 41A and a program showing processing procedures related to analysis. The computer 41 operates according to such programs and executes various processes, such as various controls of the analysis device 3 and analysis processing based on detection data from the detector 32.

The control device 5 includes a control computer 51, a vacuum control unit 52, a movement control unit 53, an electron source control unit 55, an electron beam control unit 56, an electron beam scanning control unit 57, and a detector control unit 58.

The vacuum control unit 52 is a control circuit that controls the vacuum device 9, which includes a vacuum pump and a vacuum exhaust valve. The vacuum pump includes a vacuum pump for the measurement chamber 11 and a vacuum pump for the sample introduction chamber 12. The vacuum exhaust valve includes a vacuum exhaust valve for the measurement chamber 11 and a vacuum exhaust valve for the sample introduction chamber 12.

The movement control unit 53 is a control circuit that controls the movement device 10 for the sample 8, which includes the stage 30 and the sample transport device 2. The electron source control unit 55 is a control circuit that controls the electron source that generates electrons in the electron gun 31. The electron beam control unit 56 is a control circuit that controls the electron beam emitted from the electron gun 31, such as converging the electron beam produced by the electrons generated from the electron source. The electron beam scanning control unit 57 is a control circuit that controls the scanning of the electron beam emitted from the electron gun 31. The detector control unit 58 is a control circuit that controls the state of the detector 32.

The control computer 51 includes a CPU 51A, memory 51B (various storage devices including ROM, RAM, and non-volatile memory such as flash memory), and an input/output buffer (not shown) for inputting and outputting various signals. In the memory 51B, the ROM stores a program that describes the control procedures for the various controls of the analysis device 3 by the CPU 51A. The control computer 51 operates according to such a program.

The control computer 51 receives commands from the computer 41 and, in response to the received commands, sends control signals to the vacuum control unit 52, the movement control unit 53, the electron source control unit 55, the electron beam control unit 56, the electron beam scanning control unit 57, and the detector control unit 58, causing these control units to carry out various types of control.

[Relationship between the control device 5 and the drive device 7 when the control device 5 is not malfunctioning]
Fig. 4 is a block diagram showing the relationship between the control device 5 and the drive device 7 when the control device 5 is not broken. In Fig. 4, of the control devices shown in Fig. 3, the vacuum control device 52 and the movement control device 53 are shown as control devices included in the control device 5, and the other control devices are omitted from the illustration.

Referring to FIG. 4, when the control device 5 in the analysis device 3 is not malfunctioning, the control device 5 is connected to the various driving devices 7 by wiring as follows.

In the control device 5, the control computer 51 receives control commands, such as control commands related to vacuum control, from the computer system 4, and sends an operation command signal to the vacuum control unit 52 to execute control according to the control command.

The vacuum control unit 52 sends a drive signal to vacuum equipment such as the vacuum exhaust valve 61 (including the gate door 15 drive device) provided in the iron cell 6 via the relay panel 50 provided in the control device 5 and the relay panel 60 provided in the iron cell 6 in response to the operation command signal sent from the control computer 51. Furthermore, the vacuum control unit 52 sends a drive signal to the vacuum pump 90 provided outside the iron cell 6 via the relay panel 50 provided in the control device 5 in response to the control signal sent from the control computer 51. The vacuum control unit 52 supplies power to the vacuum pump 90 via the relay panel 50 provided in the control device 5. The vacuum equipment such as the vacuum exhaust valve 61 and the vacuum pump 90 constitute the vacuum device 9 that evacuates the space in which the sample to be analyzed is irradiated with the electron beam.

The vacuum device 9 also includes a sensor that detects the degree of vacuum (pressure) in the measurement chamber 11 and a sensor that detects the degree of vacuum (pressure) in the sample introduction chamber 12, and the detection signals of these sensors are input to the vacuum control unit 52 via the relay panel 60 and the relay panel 50. This allows the vacuum control unit 52 to recognize the degree of vacuum in the measurement chamber 11 and the degree of vacuum in the sample introduction chamber 12.

A drive signal is sent between the vacuum control unit 52 and vacuum equipment such as the vacuum exhaust valve 61 via control wiring 71. A drive signal is sent between the vacuum control unit 52 and the vacuum pump 90 via control wiring 72. As a result, a drive signal is sent between the vacuum control unit 52 and the vacuum device 9 (vacuum exhaust valve 61, vacuum pump 90) via the control wiring 71 and control wiring 72.

The sample transport device 2 and the stage 30 have in common that they are both moving devices 10 that move the sample 8. The sample transport device 2 and the stage 30 constitute the moving device 10 that moves the sample. The moving device 10 that moves the sample and the vacuum device 9 that includes the vacuum pump and vacuum exhaust valve described above are devices that are driven and controlled by the control device 5, and are called the driving device 7.

In the control device 5, the control computer 51 receives control commands from the computer system 4, such as control commands for controlling the sample transport device 2 (hereinafter referred to as transport control) and control commands for controlling the stage 30 (hereinafter referred to as stage control), and sends an operation command signal to the movement control unit 53 to execute control according to the control commands.

The movement control unit 53 sends a control signal to the motor driver 54 in response to the received operation command signal. The motor driver 54 sends drive signals to the stage motor 62 that drives the stage 30 and the transport motor 63 that drives the sample transport device 2 in response to the received control signal via the relay panel 50 and the relay panel 60.

A drive signal is sent between the movement control unit 53 (including the motor driver 54) and the stage 30 such as the stage motor 62 via the control wiring 73. A drive signal is sent between the movement control unit 53 and the sample transport device 2 such as the transport motor 63 via the control wiring 74. A drive signal is sent between the movement control unit 53 and the transport device 10 (sample transport device 2, stage 30) via the control wiring 73 and control wiring 74.

Electric power is supplied from the vacuum control unit 52 to the vacuum pump 90 via a power line 75 .
Fig. 4 shows the standby control device 1. The standby control device 1 is a standby control device that is connected to the analysis device 3 in the event of a failure of the control device 5, and is provided to control the vacuum device 9 (vacuum exhaust valve 61 and vacuum pump 90) in the drive device 7 and the movement device 10 (sample transport device 2, stage 30) in place of the control device 5. As shown in Fig. 4, when the control device 5 is not in failure, the standby control device 1 is not connected to the analysis device 3.

[Configuration of standby control device 1]
Fig. 5 is a plan view showing the external appearance of the standby control device 1. Fig. 5 shows a plan view of the surface of the standby control device 1 on which an operation unit 83 and a display unit 84 are provided.

The configuration of the standby control device 1 will be described below with reference to Figures 4 and 5. Referring to Figure 4, the standby control device 1 can operate by receiving power from a standby power source 92. The standby control device 1 includes a computer 80, a first control unit 81, a second control unit 82, an operation unit 83, and a display unit 84.

Referring to FIG. 5, the operation unit 83 includes a plurality of operation devices such as switches 85 that can be operated by a person, and is capable of performing operations related to the control that can be executed by the first control unit 81 and operations related to the control that can be executed by the second control unit 82. The display unit 84 is a display device that displays various information such as the status of various control parameters in the control executed by the first control unit 81 and the second control unit 82, and is configured, for example, by an image display device such as a liquid crystal display device.

The computer 80 includes a CPU 80A, memory 80B (various storage devices including ROM, RAM, and non-volatile memory such as flash memory), and an input/output buffer (not shown) for inputting and outputting various signals. In the memory 80B, the ROM stores a program that describes the control procedures for the various controls executed by the CPU 80A. The computer 80 operates according to such a program.

The first control unit 81 can execute a first control corresponding to the control executed by the vacuum control unit 52. Specifically, the first control unit 81 can execute a first control similar to that executed by the vacuum control unit 52 for a vacuum device including a vacuum pump 90 and a vacuum exhaust valve 61, etc. The second control unit 82 can execute a second control corresponding to the control executed by the movement control unit 53. Specifically, the second control unit 82 can execute a second control similar to that executed by the movement control unit 53 for a sample 8 movement device including a stage 30 and a sample transport device 2, etc.

When the operation unit 83 is operated, the computer 80 receives an operation signal from the operation unit 83, and is capable of executing the first control and the second control in response to the operation signal. When executing the first control and the second control, the computer 80 sends a display signal to the display unit 84, and is capable of executing display control that displays various information on the display unit 84, such as the status of various control parameters in the control being executed.

[Relationship between the standby control device 1 and the drive device 7 when the control device 5 fails]
FIG. 6 is a block diagram showing the relationship between the standby control device 1 and the drive device 7 when the control device 5 fails.

If a failure occurs in the control device 5 of the analysis device 3, for example in the electrical system, the various control units as shown in FIG. 3 will not operate normally. In that case, a problem may occur in which the sample 8 to be analyzed cannot be transported from inside the measurement chamber 11 to the outside.

In such a case, for example, someone would enter the semi-controlled area 101 to identify and repair the faulty part of the control device 5, and the sample 8 would be left inside the measurement chamber 11 and the sample introduction chamber 12 until the repair was completed.

Because the sample 8 is a radioactive material, it needs to be stored in a safe storage facility 66 that is safely managed to prevent dangerous situations from occurring when analysis is not being performed by the analysis device 3. However, if the control device 5 breaks down, there is a risk that the sample 8 will be left inside the measurement chamber 11 for a long period of time, during which time the sample 8 will be in a dangerous state where it cannot be safely managed.

The standby control device 1 is provided for the purpose of shortening as much as possible the period during which a dangerous state in which the safety of the sample 8 cannot be managed due to a failure of the control device 5 continues. The main function of the standby control device 1 is to enable a person to reconnect the control wiring 71-74 from the control device 5 to the standby control device 1 in the event of a failure of the control device 5, and for the first control unit 81 to control the vacuum device 9 in place of the vacuum control unit 52, and for the second control unit 82 to control the movement device 10 in place of the movement control unit 53.

Referring to FIG. 6, if the control device 5 in the analysis device 3 fails, a person enters the managed area 100, removes the control wires 71-74 from the control device 5, and attaches the removed control wires 71-74 to the standby control device 1, thereby connecting the standby control device 1 and the drive device 7 via the control wires 71-74.

Specifically, the control wires 71 and 72 are connected to the first control unit 81. The control wires 73 and 74 are connected to the second control unit 82. This allows the first control unit 81 to transmit a drive signal for driving the vacuum exhaust valve 61, etc. to the vacuum exhaust valve 61, etc. via the control wire 71. The first control unit 81 can transmit a drive signal for driving the vacuum pump 90 to the vacuum pump 90 via the control wire 72.

In addition, a drive signal for driving the stage motor 62 can be transmitted from the second control unit 82 to the stage motor 62 via the control wiring 73. A drive signal for driving the transport motor 63, etc. can be transmitted from the second control unit 82 to the transport motor 63, etc. via the control wiring 72.

By removing the power line 75 from the control device 5 and connecting the removed power line 75 to the standby control device 1, the vacuum pump 90 can receive a portion of the power supplied from the standby power source 92 to the standby control device 1 via the power line 75, thereby enabling the vacuum pump 90 to operate using power supplied from the standby power source 92.

In this way, if the control device 5 fails, the control wiring 71 to 74 can be removed from the control device 5, and the connection target of the control wiring 71 to 74 can be changed so that the standby control device 1 and the drive device 7 are connected via the removed control wiring 71 to 74.

When a person operates the operation unit 83 to operate the vacuum device 9, manual control of the vacuum device 9 is performed in response to the operation. When a person operates the operation unit 83 to operate the moving device 10, manual control of the moving device 10 is performed in response to the operation. Regarding the control of the moving device 10, automatic control of the moving device 10 can be performed by operating the operation unit 83 to automatically operate the moving device 10. In this case, automatic control is a process of operating the moving device 10 according to a predetermined control sequence. Such manual control of the vacuum device 9 and manual control of the moving device 10 may be performed when maintenance of the analysis device 3 is performed.

[An example of manual control in the standby control device 1]
Next, a description will be given of an example of manual control in the standby control device 1. First, the switches 85 in the operation unit 83 include a plurality of switches for controlling the vacuum device 9 and a plurality of switches for controlling the moving device 10.

Switches for controlling the vacuum device 9 include a switch for opening and closing the vacuum exhaust valve 61, a switch for opening and closing the gate door 15, a switch for starting the vacuum pump 90, a switch for stopping the vacuum pump 90, and a switch for driving the gate door 15.

The switches for controlling the moving device 10 include a switch for causing the sample transport device 2 to transport the sample 8 from the sample introduction chamber 12 to the measurement chamber 11, a switch for causing the sample transport device 2 to transport the sample 8 from the measurement chamber 11 to the sample introduction chamber 12, a switch for changing the transport speed of the sample transport device 2, a switch for initializing the coordinate position of the sample 8 on the stage 30, and a switch for changing the position of the stage 30. Note that the switch for driving the gate door 15 may be provided as a switch for controlling the moving device 10.

The display unit 84 displays images for controlling the vacuum device 9, such as the open/closed state of the vacuum exhaust valve 61, the operating state of the vacuum pump 90, and an image showing the detected value of the degree of vacuum. The display unit 84 displays images for controlling the moving device 10, such as the operating state of the various switches used to control the moving device 10, the operating state of the sample transport device 2, the operating state of the stage 30, and an image showing the open/closed state of the gate door 15.

By a person operating the switch 85 in the operation unit 83 and visually checking the display on the display unit 84, the backup control device 1 can control the vacuum device 9 and the moving device 10.

For example, if the sample 8 is left in the measurement chamber 11 due to a failure of the control device 5, the following control is executed by the standby control device 1, making it possible to transport the sample 8 from the measurement chamber 11 into the sample introduction chamber 12, and to remove the sample 8 from the sample introduction chamber 12 and move it to the storage unit 66.

First, if the sample introduction chamber 12 is not in a vacuum state, a person operates the switch for controlling the vacuum device 9 so that the sample introduction chamber 12 is in a vacuum state by operating the vacuum pump 90 and the vacuum exhaust valve 61. Then, when a person confirms that a vacuum state has been achieved based on the detected vacuum level value displayed on the display unit 84, a person operates the switch for controlling the vacuum device 9 so that the gate door 15 is in an open state.

Then, in the measurement chamber 11, the sample holder 40 moves from the stage 30 to the sample transport device 2, and a person operates the switch for controlling the movement device 10 so that the sample transport device 2 transports the sample 8 from the measurement chamber 11 into the sample introduction chamber 12. After the sample 8 has been transported into the sample introduction chamber 12, a person operates the switch for controlling the vacuum device 9 so that the gate door 15 is in the closed state.

By performing such operations, if the control device 5 fails, it becomes possible to transport the sample 8 from the measurement chamber 11 into the sample introduction chamber 12, and after the pressure in the sample introduction chamber 12 is returned to atmospheric pressure, the sample 8 can be removed from the sample introduction chamber 12 using a manipulator or the like, and the sample 8 can be moved to the storage cabinet 66.

According to this embodiment, when the first control unit 81 and the vacuum device 9 are connected by the control wiring 71, 72, and the second control unit 82 and the moving device 10 are connected by the control wiring 73, 74, the first control unit 81 can control the vacuum device 9 in place of the vacuum control unit 52, and the second control unit 82 can control the moving device 10 in place of the moving control unit 53, so that the safety of the analyzing device 3 can be ensured in the event that the control device 5 of the analyzing device 3 fails.

[Modification of the embodiment]
(1) In the above embodiment, an example was shown in which the standby control device 1 is provided with a first control unit 81 capable of executing control corresponding to the vacuum control unit 52 and a second control unit 82 capable of executing control corresponding to the movement control unit 53, among the control units provided in the control device 5. However, this is not limited to the above, and the standby control device 1 may further be provided with a control unit capable of executing control corresponding to any of the electron source control unit 55, the electron beam control unit 56, the electron beam scanning control unit 57, and the detector control unit 58. In that case, it is preferable to provide in the standby control device 1 a control unit corresponding to a control unit required to ensure safety when the control device 5 fails.

(2) In the above embodiment, the sample transport device 2 has been described as being configured to move the sample holder 40 along a rail. However, the sample transport device 2 is not limited to this. The sample transport device 2 may be configured as a transport device having other configurations, such as a device that transports the sample 8 by placing the sample holder 40 on a belt and moving the belt, or a device that grasps and transports the sample 8 with an arm.

(3) In the above embodiment, the standby control device 1 is provided near the analysis device 3 by being placed on top of the control device 5. However, this is not limited to the above, and the standby control device 1 may be attached to the top of the control device 5 by screws so that if the control device 5 breaks down, the standby control device 1 can be separated from the control device 5 by a person by removing the screws.

(4) In the above embodiment, an example was shown in which an image display device was provided as the display unit 84 in the standby control device 1. However, this is not limited to the above, and the display unit 84 may be provided with an illuminant such as an LED (Light Emitting Diode). For example, the illuminant may indicate, by illuminating, the open/closed state of the vacuum exhaust valve 61, the operating state of the vacuum pump 90, etc., the operating state of the switch 85, or the degree of vacuum.

(5) In the backup control device 1 shown in the above embodiment, a handle structure may be attached to make it easier for people to carry it.

(6) In the preliminary control device 1 shown in the above embodiment, in order to enable the degree of vacuum detected by the sensors provided in the measurement chamber 11 and the sample introduction chamber 12 to be read by a tester provided outside the preliminary control device 1, an output terminal may be provided that can output the degree of vacuum detected by such sensors as an analog signal.

(7) In the standby control device 1 shown in the above embodiment, the operation unit 83 and the display unit 84 may be configured as a touch panel, and the various operations and information displays described above may be performed using the touch panel.

(8) In the above embodiment, the sample 8 to be analyzed by the analysis device 3 is described as being a radioactive material, but it may be a material other than a radioactive material.

[Additional Notes]
As described above, the present embodiment includes the following disclosure.

[Configuration 1]
a vacuum device (vacuum device 9 including a vacuum pump 90 and a vacuum exhaust valve 61) for evacuating a space (space within a measurement chamber 11) in which an electron beam is irradiated onto a sample to be analyzed; a drive device (drive device 7) having a moving device (moving device 10 including a sample transport device 2 and a stage 30) for moving the sample between the inside of the space and the outside of the space; and a control device (control device 5) having a vacuum control unit (vacuum control unit 52) for controlling the vacuum device (vacuum device 9) and a movement control unit (moving control unit 53) for controlling the movement device (moving device 10),
A first control unit (first control unit 81) capable of executing a first control corresponding to a control executed by the vacuum control unit (vacuum control unit 52);
A second control unit (second control unit 82) capable of executing a second control corresponding to the control executed by the movement control unit (movement control unit 53),
A standby control device (standby control device 1) in which, when the first control unit (first control unit 81) and the vacuum device (vacuum device 9) are connected by a first control wiring (control wirings 71, 72) and the second control unit (second control unit 82) and the moving device (moving device 10) are connected by a second control wiring (control wirings 73, 74), the first control unit (first control unit 81) is able to control the vacuum device (vacuum device 9) in place of the vacuum control unit (vacuum control unit 52), and the second control unit (second control unit 82) is able to control the moving device (moving device 10) in place of the moving control unit (moving control unit 53).

With this configuration, when the first control unit and the vacuum device are connected by a first control wiring and the second control unit and the moving device are connected by a second control wiring, the first control unit can control the vacuum device instead of the vacuum control unit, and the second control unit can control the moving device instead of the moving control unit, thereby ensuring the safety of the analytical device in the event that the control device of the analytical device fails.

[Configuration 2]
When the control device (control device 5) is not malfunctioning, the vacuum control unit (vacuum control unit 52) and the vacuum device (vacuum device 9) are connected by the first control wiring (control wirings 71, 72), and the movement control unit (movement control unit 53) and the movement device (movement device 10) are connected by the second control wiring (control wirings 73, 74),
A standby control device (standby control device 1) as described in configuration 1, in which, in the event of a failure of the (vacuum device 9) control device (control device 5), it is possible to change the connection targets of the first control wiring (control wirings 71, 72) and the second control wiring (control wirings 73, 74) so that the first control unit (first control unit 81) and the vacuum device (vacuum device 9) are connected by the first control wiring (control wirings 71, 72) and the second control unit (second control unit 82) and the moving device (moving device 10) are connected by the second control wiring (control wirings 73, 74).

With this configuration, if the control device fails, it is possible to change the connection targets of the first control wiring and the second control wiring so that the first control unit and the vacuum device are connected by the first control wiring and the second control unit and the moving device are connected by the second control wiring. By changing the connection targets of the first control wiring and the second control wiring, the safety state of the analysis device in the event of a failure of the control device of the analysis device can be ensured by control by the first control unit and control by the second control unit.

[Configuration 3]
A standby control device (standby control device 1) described in configuration 1 or configuration 2, wherein the first control unit (first control unit 81) and the second control unit (second control unit 82) are provided within a housing formed separately from the analysis device (analysis device 3).

With this configuration, the first control unit and the second control unit are provided in a housing formed separately from the analysis device, so that the standby control device including the first control unit and the second control unit can be easily moved relative to the analysis device.

[Configuration 4]
an operation unit (operation unit 83) capable of performing an operation for executing the first control and the second control;
A standby control device (standby control device 1) according to any one of configurations 1 to 3, further comprising a display unit (display unit 84) capable of displaying a control state when the first control and the second control are executed.

With this configuration, it is possible to execute the first control and the second control in response to the operation of the operation unit, and the control state when executing the first control and the second control can be confirmed by the display unit.

[Configuration 5]
The standby control device (standby control device 1) of configuration 4, wherein the first control unit is capable of executing the first control only by manual control in response to operation of the operation unit (operation unit 83).

With this configuration, the first control that controls the vacuum device in response to the operation of the operating unit can be performed only by manual control, so that the control of the vacuum device can be reliably performed in response to the operation.

[Configuration 6]
A standby control device (standby control device 1) described in configuration 4 or configuration 5, wherein the second control unit is capable of performing the second control by automatic control or manual control in response to the operation of the operation unit (operation unit 83).

With this configuration, the second control that controls the moving device can be executed automatically or manually in response to the operation of the operating unit, so that the moving device can be controlled automatically or manually depending on the failure state of the control device.

The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims.

11 Measurement chamber, 90 Vacuum pump, 61 Vacuum exhaust valve, 2 Sample transport device, 30 Stage, 10 Movement device, 7 Drive device, 52 Vacuum control unit, 53 Movement control unit, 5 Control device, 3 Analysis device, 1 Backup control device, 81 First control unit, 82 Second control unit, 71-74 Control wiring, 83 Operation unit, 84 Display unit.

Claims (6)

A spare control device connectable to an analytical device including a vacuum device that evacuates a space in which an electron beam is irradiated onto a sample to be analyzed, a drive device having a movement device that moves the sample between the inside of the space and the outside of the space, a vacuum control unit that controls the vacuum device, and a control device having a movement control unit that controls the movement device,
A first control unit capable of executing a first control corresponding to the control executed by the vacuum control unit;
a second control unit capable of executing a second control corresponding to the control executed by the movement control unit;
A standby control device, wherein when the first control unit and the vacuum device are connected by a first control wiring and the second control unit and the moving device are connected by a second control wiring, the first control unit is capable of controlling the vacuum device in place of the vacuum control unit and the second control unit is capable of controlling the moving device in place of the moving control unit. When the control device is not malfunctioning, the vacuum control unit and the vacuum device are connected by the first control wiring, and the movement control unit and the movement device are connected by the second control wiring,
2. The standby control device according to claim 1, wherein, in the event of a failure of the control device, it is possible to change the connection targets of the first control wiring and the second control wiring so that the first control unit and the vacuum device are connected by the first control wiring, and the second control unit and the moving device are connected by the second control wiring. The standby control device according to claim 1 or 2, wherein the first control unit and the second control unit are provided in a housing formed separately from the analysis device. an operation unit capable of performing an operation for executing the first control and the second control;
3. The standby control device according to claim 1, further comprising a display unit capable of displaying a control state when the first control and the second control are executed. The auxiliary control device according to claim 4, wherein the first control unit is capable of performing the first control only by manual control in response to the operation of the operation unit. The standby control device according to claim 4 , wherein the second control unit is capable of performing the second control in an automatic control or a manual control in response to the operation of the operation unit.

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