JP2024059243A - 蒸着マスクおよび有機発光素子の製造方法 - Google Patents

蒸着マスクおよび有機発光素子の製造方法 Download PDF

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Publication number
JP2024059243A
JP2024059243A JP2022166808A JP2022166808A JP2024059243A JP 2024059243 A JP2024059243 A JP 2024059243A JP 2022166808 A JP2022166808 A JP 2022166808A JP 2022166808 A JP2022166808 A JP 2022166808A JP 2024059243 A JP2024059243 A JP 2024059243A
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JP
Japan
Prior art keywords
deposition mask
emitting element
organic light
substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022166808A
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English (en)
Japanese (ja)
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JP2024059243A5 (https=
Inventor
真澄 板橋
Masumi Itabashi
悠行 望月
Hiroyuki Mochizuki
達朗 内田
Tatsuro Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2022166808A priority Critical patent/JP2024059243A/ja
Priority to US18/479,966 priority patent/US20240130211A1/en
Publication of JP2024059243A publication Critical patent/JP2024059243A/ja
Publication of JP2024059243A5 publication Critical patent/JP2024059243A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/88—Terminals, e.g. bond pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/302—Details of OLEDs of OLED structures

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2022166808A 2022-10-18 2022-10-18 蒸着マスクおよび有機発光素子の製造方法 Pending JP2024059243A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022166808A JP2024059243A (ja) 2022-10-18 2022-10-18 蒸着マスクおよび有機発光素子の製造方法
US18/479,966 US20240130211A1 (en) 2022-10-18 2023-10-03 Deposition mask, and method for producing organic light-emitting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022166808A JP2024059243A (ja) 2022-10-18 2022-10-18 蒸着マスクおよび有機発光素子の製造方法

Publications (2)

Publication Number Publication Date
JP2024059243A true JP2024059243A (ja) 2024-05-01
JP2024059243A5 JP2024059243A5 (https=) 2025-10-30

Family

ID=90626166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022166808A Pending JP2024059243A (ja) 2022-10-18 2022-10-18 蒸着マスクおよび有機発光素子の製造方法

Country Status (2)

Country Link
US (1) US20240130211A1 (https=)
JP (1) JP2024059243A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025263283A1 (ja) * 2024-06-17 2025-12-26 Ｔｏｐｐａｎホールディングス株式会社 蒸着マスク及び、電子デバイスの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006199998A (ja) * 2005-01-20 2006-08-03 Seiko Epson Corp 成膜装置、成膜方法
JP2006233286A (ja) * 2005-02-25 2006-09-07 Seiko Epson Corp マスク、マスクの製造方法、パターン形成装置、パターン形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025263283A1 (ja) * 2024-06-17 2025-12-26 Ｔｏｐｐａｎホールディングス株式会社 蒸着マスク及び、電子デバイスの製造方法
JP7823804B1 (ja) * 2024-06-17 2026-03-04 Ｔｏｐｐａｎホールディングス株式会社 蒸着マスク及び、電子デバイスの製造方法

Also Published As

Publication number Publication date
US20240130211A1 (en) 2024-04-18

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