JP2024011706A - duct fan unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a duct fan unit that can effectively use a large amount of exhaust air by generating power from the exhaust air.

SOLUTION: A duct fan unit (1) comprises: an intake port (3); an exhaust port (5); a fan motor (4) for rotating a wind turbine (6) by electric power, sucking air from the intake port (3), and exhausting it from the exhaust port (5); and a power generation unit (10) arranged in the exhaust port (5). The power generation unit (10) comprises: a wind turbine (11) to be rotated around a rotating shaft by exhaust air; a power generator (13) connected to the rotating shaft, and for generating power by rotation of the rotating shaft; and an adapter (14) for connecting the wind turbine and the power generator (13) to the exhaust port (5).

SELECTED DRAWING: Figure 1

COPYRIGHT: (C)2024,JPO&INPIT

Description

The present invention relates to a ducted fan unit.

In processing equipment that uses processing fluid to grind the workpiece, such as cutting equipment, grinding equipment, and polishing equipment used in the manufacturing process of semiconductor wafers, etc., the spray of processing fluid containing processing debris is scattered inside the processing chamber. are doing. In the processing apparatus of Patent Document 1 and Patent Document 2, a duct fan unit (mist collector) is connected to the processing chamber to suck the scattered spray, and a suction source sucks the scattered spray. ing.

Further, the dust collection processing device of Patent Document 3 is equipped with a cylindrical filter inside, and dust such as processing waste generated in the processing chamber is sucked by a suction source and collected by the filter to collect the dust. Is going.

Japanese Patent Application Publication No. 2010-17798 Japanese Patent Application Publication No. 2021-137909 JP2021-58830A

Such duct fan units and dust collection processing devices exhaust a large amount of air from the processing chamber per unit time, and there is a need to effectively utilize this large amount of exhaust air.

The present invention has been made in view of this point, and an object of the present invention is to generate electricity from exhaust gas and effectively utilize a large amount of exhaust gas.

One aspect of the present invention is a duct fan unit, which includes an intake port, an exhaust port, a fan motor that uses electric power to rotate a windmill, sucks air from the intake port, and exhausts air from the exhaust port, and the exhaust port. A power generation unit is arranged, and the power generation unit includes a windmill that rotates around a rotational shaft by exhaust gas, a generator that is connected to the rotational shaft and generates electricity by rotation of the rotational shaft, and the windmill and the generator. and an adapter for connecting the exhaust port to the exhaust port.

A duct fan unit according to one aspect of the present invention is characterized in that the adapter includes an escape port that is formed in the adapter and is exhausted from the exhaust port to release air whose flow is obstructed by the windmill.

According to the duct fan unit of the present invention, since electricity is generated from exhaust gas, a large amount of exhaust gas can be effectively utilized.

FIG. 2 is a cross-sectional view showing the configuration of a duct fan unit according to the present embodiment.

Hereinafter, a duct fan unit according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a cross-sectional view showing the configuration of a duct fan unit according to an embodiment.

As shown in FIG. 1, the duct fan unit 1 is connected to the machining chamber of the machining device, sucks in a spray of machining fluid containing machining waste generated in the machining chamber with a fan motor 4, and exhausts it from an exhaust port 5. are doing. At this time, a power generation unit 10 is connected to the exhaust port 5, and the power generation unit 10 generates power from the exhaust gas.

The fan motor 4 includes a windmill 6 that is rotationally driven by the motor. The fan motor 4 is operated by electric power supplied from the power source of the processing device. As the windmill 6 rotates, suction force is generated, and the duct fan unit 1 suctions the processing chamber. In the case of FIG. 1, an airflow is formed within the case 2 from the right direction to the left direction.

The intake port 3 communicates with a processing chamber of the processing device via a flow path, and is configured such that fluid sucked from the processing chamber flows into the duct fan unit 1. The fluid here refers to a gas or a gas including a spray (liquid).

In addition, in the flow path between the processing chamber and the intake port 3, there is a gas-liquid separation device that separates the air (gas) in the processing chamber as well as the spray of processing fluid (liquid) containing processing debris generated in the processing chamber. may be provided. As a result, in the fluid flowing into the duct fan unit 1, the spray of machining fluid (liquid) containing machining debris generated in the machining chamber is removed as much as possible, thereby preventing failure of the fan motor 4 due to the fluid. be able to.

The filter 7 is arranged between the air intake port 3 and the windmill 6. It is preferable to provide one or more filters 7; for example, in FIG. 1, four filters are provided. Processing waste and liquid are collected by the filter 7, and only gas passes through the filter and flows toward the wind turbine 6.

The gas that has flowed into the duct fan unit 1 is exhausted from the exhaust port 5. A power generation unit 10 is fixed to the exhaust port 5 by an adapter 14, and the air passes through the power generation unit 10 and is exhausted to the outside.

The power generation unit 10 includes a windmill 11 that rotates around a rotating shaft 12 by exhaust gas from the exhaust port 5 . In the power generation unit 10, an exhaust port 18 is provided to exhaust the exhaust gas that has passed through the windmill 11. The rotating shaft 12 is provided at the center of the exhaust port 18, and a generator 13 is further connected to the rotating shaft 12.

The generator 13 converts the rotational force generated by the rotation of the windmill 11 into electric power. As the generator 13, a well-known configuration can be adopted as appropriate.

The amount of power generated varies depending on the displacement of the duct fan unit 1, but by storing the generated power in a storage battery, it may be used as an emergency power source in response to a momentary power outage due to lightning or the like. Further, the electric power generated by the generator 13 may be boosted by a transformer and sent to a power transmission line or a power distribution line. Alternatively, the generator 13 may be provided with a USB output port to output power to a small electronic device. Examples of small electronic devices include mobile phones, LED lights, and mobile batteries.

The power generation unit 10 is connected to the exhaust port 5 by an adapter 14. The adapter 14 has a cylindrical shape as a whole, and includes a connecting part 15 provided at one end and connected to the exhaust port 5, an intermediate part 16 provided following the connecting part 15 and having an escape port 19, and a wind turbine 11. and a rear end portion 17 to which the generator 13 is attached.

The connecting portion 15 is fixed in accordance with the shape of the exhaust port 5, and is configured to connect the wind turbine 11 and the generator 13 to the exhaust port 5 in a state where they can appropriately generate electricity.

A plurality of escape ports 19 are arranged at intervals in the circumferential direction of the intermediate portion 16. Each escape port 19 passes through the inside and outside of the intermediate portion 16. The escape port 19 is configured to allow exhaust gas whose airflow is obstructed by the windmill 11 to escape.

The rear end portion 17 has a space for accommodating the wind turbine 11, and includes an exhaust port 18 at the rear end of the rear end portion 17. A generator 13 connected to the rotating shaft 12 is attached to the center of the exhaust port 18 .

Up to this point, the duct fan unit 1 according to the present embodiment has been described. Next, the operation of the duct fan unit 1 according to the present embodiment to generate electricity will be described using FIG. 1.

The fan motor 4 of the duct fan unit 1 operates and the windmill 6 rotates, thereby generating suction force. The suction force of the duct fan unit 1 sucks the spray of machining fluid containing machining waste generated in the machining chamber of the machining device.

The sucked spray passes through the flow path and flows into the duct fan unit 1 from the intake port 3. Processing debris and liquid from the inflowing spray are collected by the filter 7, and only gas passes through the filter, passes through the windmill 6 of the fan motor 4, and is exhausted from the exhaust port 5.

The gas exhausted from the exhaust port 5 rotates the windmill 11 of the power generation unit 10. As the windmill 11 rotates, the generator 13 converts rotational force into electric power. The exhaust gas that has passed through the windmill 11 is exhausted to the outside through the exhaust port 18. Electric power generated by the generator 13 is supplied to connected equipment depending on the purpose.

In this embodiment, a plurality of escape ports 19 are arranged at intervals in the circumferential direction of the intermediate portion 16. If the escape port 19 is not provided, the exhaust from the exhaust port 5 will hit the windmill 11, creating an airflow from the exhaust port 5 and an airflow that hits the windmill 11 and flows backwards, and these airflows will be mixed in front of the windmill 11. be done. If the stirred airflow remains in front of the wind turbine 11, stable exhaust may not be achieved, and the displacement of the duct fan unit 1 may decrease.

In this embodiment, the plurality of escape ports 19 allow the stirred airflow to escape to the outside, so that the airflow does not remain in front of the windmill 11. Therefore, the flow of exhaust air is not obstructed and the duct fan unit 1 can perform stable exhaust, so that the displacement of the duct fan unit 1 does not decrease. Moreover, the power generation unit 10 can generate power without obstructing exhaust from the exhaust port 5.

The duct fan unit 1 according to the present embodiment can effectively utilize a large amount of exhaust gas generated from the processing equipment and generate electricity from the exhaust gas through the configuration and series of operations described above.

The amount of power generated varies depending on the displacement of the duct fan unit 1, but by storing the generated power in a storage battery, it can be used as an emergency power source. Furthermore, the electric power generated by the generator 13 may be utilized in a configuration in which the voltage is stepped up by a transformer and then sent to a power transmission line or a power distribution line. Further, the generator 13 may be provided with a USB output port and utilized in a configuration that can output power to a small electronic device. Examples of small electronic devices include mobile phones, LED lights, and mobile batteries.

As explained above, the duct fan unit according to the present embodiment generates electricity from exhaust gas, so that a large amount of exhaust gas can be effectively utilized. In cutting devices, grinding devices, and polishing devices used in the manufacturing process of semiconductor wafers, etc., the present invention is particularly useful in the field of manufacturing semiconductors, etc., which includes a process of supplying a processing liquid to a workpiece to process it.

1: Duct fan unit 2: Case 3: Intake port 4: Fan motor 5: Exhaust port 6: Wind turbine 7: Filter 10: Power generation unit 11: Wind turbine 12: Rotating shaft 13: Generator 14: Adapter 15: Connection part 16: Intermediate portion 17: Rear end portion 18: Exhaust port 19: Escape port

Claims (2)

A duct fan unit,
comprising an intake port, an exhaust port, a fan motor that uses electric power to rotate a windmill to suck air from the intake port and exhaust it from the exhaust port, and a power generation unit disposed at the exhaust port,
The power generation unit includes a windmill that rotates around a rotating shaft by exhaust gas, a generator that is connected to the rotating shaft and generates electricity by rotation of the rotating shaft, and an adapter that connects the windmill and the generator to the exhaust port. A duct fan unit comprising: 2. The duct fan unit according to claim 1, further comprising an escape port formed in the adapter to release air that is exhausted from the exhaust port and whose flow is obstructed by the windmill.

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