JP2023168795A - Measuring apparatus, measurement system, and measuring method - Google Patents

Abstract

To provide a measuring apparatus, a measurement system, and a measuring method capable of detecting a spatial position of an object positioned in a wide range with a simple configuration.SOLUTION: The measuring apparatus comprises: a detection part including a light source and a light receiving part; a reflector element reflecting light emitted from the light source around an optical axis of the detection part; a polarizing part arranged around the optical axis and polarizing the light reflected by the reflector element by reflection on an irradiated body; and a control part causing the light receiving part to receive the light reflected by the irradiated body through the polarizing part and the reflector element, and detecting a spatial position of the irradiated body from reciprocation time and emission direction of the light.SELECTED DRAWING: Figure 3

Description

The present disclosure relates to a measuring device, a measuring system, and a measuring method.

2. Description of the Related Art Measuring devices have conventionally been proposed that emit a beam of light into the surrounding environment and receive the reflected light to detect the position of an object within a detection area. For example, in the measurement device (LiDAR device) of Patent Document 1, a transmission system that transmits an emitted light signal and a reception system that receives a reflected light signal are rotated by a rotating component, and detects an object in the entire upper hemisphere. It is possible. The transmitting system also includes an optical transmitter array, and the receiving system includes an optical receiver array.

US Patent Application Publication No. 2021/0215804

However, the measuring device disclosed in Patent Document 1 rotates rotating components in order to move the scanning direction of the beam light in the horizontal direction. Further, this measuring device uses an optical transmitter array to change the scanning direction of the beam light to the vertical direction. Therefore, the configuration for driving the measuring device becomes complicated and large.

The present disclosure aims to provide a measuring device, a measuring system, and a measuring method that can measure the spatial position of objects located over a wide range with a simple configuration.

In order to achieve the above object, a measuring device according to the present disclosure includes: a detection section including a light source and a light receiving section; a reflection element that reflects light emitted from the light source around an optical axis of the detection section; a deflection section that is arranged around an optical axis and deflects the light reflected by the reflection element toward the irradiated object by reflection; and a deflection section that receives the light reflected from the irradiation object through the deflection section and the reflection element. and a control section that detects the spatial position of the irradiated object based on the round trip time and emission direction of the light.

In order to achieve the above object, a measurement system according to the present disclosure includes: a detection section including a light source and a light receiving section; a reflection element that reflects light emitted from the light source around an optical axis of the detection section; a deflection section that is arranged in an annular shape around an optical axis and deflects the light reflected by the reflection element toward the irradiated object by reflection; and a deflection section that deflects the light reflected from the irradiation object through the deflection section and the reflection element. and a control unit configured to detect the spatial position of the irradiated object from the round trip time and emission direction of the light by causing the light receiving unit to receive the light.

In order to achieve the above object, a measurement method according to the present disclosure includes a detection section including a light source and a light receiving section, a reflection element, a deflection section arranged annularly around the optical axis of the detection section, and a control section. A measurement method in a measurement system comprising: the reflection element reflects light emitted from the light source around the optical axis; and the deflection section directs the light reflected by the reflection element to a side of an irradiated object. The control section causes the light reflected from the irradiated object to be received by the light receiving section via the deflection section and the reflective element, and the control section causes the light reflected from the irradiated object to be received by the light receiving section to determine the irradiated object based on the round trip time and the emission direction of the light. Detecting the spatial position of the body.

According to the measuring device, measuring system, and measuring method according to the present disclosure that use the above means, the spatial position of an object located over a wide range can be detected with a simple configuration.

1 is an overall configuration diagram of a measurement system according to Embodiment 1. FIG. 1 is a control block diagram of a surveying device and a measuring device according to a first embodiment; FIG. 1 is a configuration diagram of a measuring device of Embodiment 1. FIG. 3 is a longitudinal aberration diagram of the free-form surface of Embodiment 1. FIG. FIG. 3 is a diagram showing an example of a scanning range by the measuring device of Embodiment 1. FIG. FIG. 2 is a configuration diagram of a measuring device according to a second embodiment. FIG. 6 is a longitudinal aberration diagram of a free-form surface in Embodiment 2. 7 is a diagram illustrating an example of a scanning range by the measuring device of Embodiment 2. FIG. FIG. 3 is a configuration diagram of a measuring device according to a third embodiment. FIG. 7 is a longitudinal aberration diagram of a free-form surface in Embodiment 3. 7 is a diagram illustrating an example of a scanning range by the measuring device of Embodiment 3. FIG. FIG. 4 is a configuration diagram of a measuring device according to a fourth embodiment. FIG. 7 is a configuration diagram of a projection system using the measurement system of Embodiment 5. FIG. 12 is a diagram showing an example of a projected image when the directivity imparting section of Embodiment 5 is a light source. FIG. 12 is a diagram showing an example of a projected image when the directivity imparting section of Embodiment 5 is a light source. FIG. 12 is a diagram showing an example in which a projection image is projected onto a wall surface when the directivity imparting unit of Embodiment 5 is a light source. FIG. 12 is a diagram showing an example of a projected image when the directivity imparting unit of Embodiment 5 is a measurement control unit.

(Embodiment 1)
Embodiment 1 of the present disclosure will be described below based on the drawings. FIG. 1 is an overall configuration diagram of a system 1 according to the first embodiment. The system 1 is a measurement system that includes a measurement device 100A (100), a surveying device 200, and a target 300 that is a known point set as a reference coordinate. In the following description, each device and its arrangement relationship are shown schematically for convenience of explanation, and may differ from the actual scale.

System 1 can be used outdoors or indoors. FIG. 1 shows an example in which a structure 4, which is a building under construction, is measured outdoors. The system 1 measures the coordinates of a target 300 using a surveying device 200. The measurement device 100A measures the structure 4 and the land around it in a group of points, and converts the coordinates of each point into absolute coordinates using the coordinates of the target 300 as reference coordinates. The structure 4 in FIG. 1 includes a building floor 41 and columns 42 . Since the measuring device 100A is easy to move and install, even if it is installed indoors in a building, the measuring device 100A can be easily moved and installed. Alternatively, each point in the interior can be determined in absolute coordinates based on the reference coordinates by performing point group measurement of installed objects such as electrical equipment or air conditioning equipment in the structure 4.

The surveying device 200 is, for example, a total station, is supported by legs such as a tripod, and has a function of measuring the angle and distance to the target 300 to perform surveying. Although details are not shown, the surveying device 200 includes a leveling section that is removably attached to the leg section and performs leveling, and a main body section that is leveled by the leveling section and is rotatable around a vertical axis. and a telescope section that is rotatably provided on the main body section around a horizontal axis. Therefore, the telescope section is provided so as to be rotatable around the horizontal and vertical axes with respect to the leveling section. Leveling may be performed manually by a worker (or operator) by adjusting a leveling section, or may be performed automatically. The surveying device 200 also includes a computer (not shown) for controlling the surveying device 2.

FIG. 2 is a control block diagram of the measuring device 100A and the surveying device 200. The surveying device 200 includes a surveying section 201, a surveying storage section 202, a surveying communication section 203, a surveying control section 204, and a display section 205.

The surveying device 200 measures the distance from the instrument station of the surveying device 200 to the object to be measured (target 300 in this embodiment) and the angle with respect to the reference direction to determine the spatial coordinates of the object to be measured. The surveying section 201 includes a distance measuring section 201a and an angle measuring section 201b. The distance measuring section 201a includes a light transmitting section that emits distance measuring light, and a light receiving section that receives reflected light that is irradiated with the distance measuring light from the light transmitting section and reflected by the target 300. The distance measuring unit 201a measures the distance (oblique distance) from the surveying device 200 to the target 300 by emitting distance measuring light, which is, for example, a pulsed laser beam, and receiving reflected light reflected by the target 300. Note that the distance measuring method is not limited to such a pulse method, and it is also possible to apply a well-known method such as a so-called phase difference method that measures distance based on the number of waves of a laser beam, for example.

The angle measurement unit 201b includes a horizontal angle detection unit (horizontal encoder) that detects the rotation angle in the horizontal direction (i.e., rotation angle around the vertical axis) of the main body of the surveying device 200, and a rotation angle in the vertical direction of the telescope unit. (that is, the rotation angle around the horizontal axis). The telescope section includes a telescope including an optical system capable of collimating the target 300. Further, the light reflected by the target 300 is guided along the collimation axis of the telescope, and is received by the ranging section 201a.

The surveying storage unit 202 stores various programs such as surveying programs, design information 202a, surveying information 202b (survey results with corresponding survey points and coordinates, etc.), GPS time, and the size of the surveying device 200 (height, width, depth, etc.). etc.), and is configured to be able to store various types of data.

The surveying communication unit 203 is configured to be able to communicate with an external device such as the measuring device 100A, and is, for example, a wireless communication means such as Bluetooth (registered trademark). Note that the survey communication section 203 may function as a wired communication means via a connection terminal.

The surveying control unit 204 has a function of controlling the main body of the surveying device 200 so as to be rotatable in the horizontal direction around a vertical axis, and a function of controlling the telescope portion of the surveying device 200 so as to be rotatable in the vertical direction around the horizontal axis. Has a function. The survey control unit 204 acquires various information such as angles (horizontal angle and vertical angle) detected by a horizontal angle detection unit and a vertical angle detection unit (not shown), a distance (oblique distance) measured by the distance measurement unit 201a, It performs storage, calculation, etc., and displays the obtained results and calculation results on the display unit 205, for example. Furthermore, the surveying control unit 204 performs drive control of each unit, etc. in accordance with operations on the operating unit or in accordance with calculation results.

The display unit 205 is provided, for example, at the rear of the main body of the surveying device 200. Additionally, the surveying device 200 has an operation section (not shown). The operation unit is an operation means that can input various operation instructions and settings. The operation instructions can include, for example, switching the power on or off, triggering to start surveying, switching the surveying mode, setting the surveying cycle, and the like. Further, the operation section may include any operation device or input device such as a switch, button, or dial. When the display section 205 is a touch panel, the display section 205 and the operation section may be formed integrally.

The target 300 shown in FIG. 1 is, for example, a corner cube prism that is removably attached to the pillar 42 of the structure 4. The target 300 has retroreflection characteristics and reflects the light irradiated from the surveying device 200 in the direction of the surveying device 200 in the direction opposite to the direction of incidence. Similarly, the target 300 reflects the light emitted from the measuring device 100A in the direction of the measuring device 100A, which is opposite to the direction of incidence.

Note that the target 300 may use other retroreflective members. For example, the target 300 may reflect light emitted from the surveying device 200 or the measuring device 100A and cause the surveying device 200 or the measuring device 100A to detect the reflected light. Other reflective members (for example, a reflective sheet or a target plate) that can reflect the light with a possible intensity may also be used. Furthermore, the target 300 may be a part of the structure 4 (for example, the floor 41 or the pillar 42) instead of a member such as a prism.

The measuring device 100A will be explained. FIG. 3 is a configuration diagram of the measuring device 100A. Note that the measuring device 100A in FIG. 3 is schematically shown in a vertical cross section cut along the upper and lower central axes, and a part of the measuring device 100A is shown as an end surface.

The measuring device 100A includes a short cylindrical main body 12 and a cover member 13 connected to the main body 12. The cover member 13 has translucency and is formed in a hemispherical shape. The main body section 12 is provided with a detection section 14, a reflection mirror 15A (15) having a free-form surface 151A (151) serving as a deflection section, and a measurement control section 104 (control section). The detection unit 14 includes a light source 141 (light transmitting unit) and a light receiving unit 142 inside. The detection unit 14 has a function of emitting light from the light source 141 to the outside and receiving light reflected from the irradiated object.

The cover member 13 has a reflective element 16 supported via a base 161 on the optical axis A of the light emitted from the detection unit 14 . The reflective element 16 is arranged on the optical axis A of the detection section 14. The reflective surface of the reflective element 16 is controlled by the measurement control unit 104 . The reflective surface of the reflective element 16 is controlled so that its inclination angle with respect to the optical axis A can be changed (or tilted) in two axial directions. In other words, the reflective element 16 tilts the reflective surface around a first axis perpendicular to the optical axis A, and tilts the reflective surface around a second axis perpendicular to the optical axis A and the first axis. Tilt controlled. Further, the reflective element 16 is configured to be capable of tilting in the two axial directions using, for example, MEMS (Micro Electro Mechanical Systems), or using a motor and MEMS or a galvano scanner. To exemplify a configuration using a motor, the reflective element 16 is rotated by the motor around the optical axis A to scan a first surface parallel to a plane (for example, a horizontal plane) perpendicular to the optical axis A. The second surface includes the optical axis A and is perpendicular to the first surface by rotating around an axis perpendicular to the first surface by a MEMS or galvano scanner. The reflective element 16 can reflect the light emitted from the light source 141 and guided through the opening 152 around the optical axis A of the detection section 14 .

The free-form surface 151A is formed axially symmetrically with respect to the optical axis A and has a convex curved shape when viewed in cross section as shown in FIG. The free-form surface 151A is formed, for example, in a spherical shape, an ellipsoidal shape, or another convex curved shape. Furthermore, the free-form surface 151A has an opening 152 extending vertically through the optical axis A, and is arranged annularly around the optical axis A. As shown in FIG. 3, the free-form surface 151A is arranged between the detection section 14 and the reflective element 16.

Furthermore, the free-form surface 151A of the reflecting mirror 15A reflects the light reflected by the reflecting element 16 toward the irradiated object (for example, the structure 4 shown in FIG. 1 or objects around the structure 4). In this embodiment, since the free-form surface 151A is formed in a convex curve shape toward the reflective element 16, the light emitted from the light source 141 passes through the reflective element 16, the free-form surface 151A, and the cover member 13 to the measuring device. The light is emitted to the outside to a substantially hemispherical radial region below 100A.

With reference to FIG. 2, a control block of the measuring device 100A will be described. The measurement device 100A includes a measurement section 101, a measurement storage section 102, a measurement communication section 103, a measurement control section 104, a detection section 14, and a reflection element 16.

The measuring device 100A measures the distance from the instrument station of the measuring device 100A to the irradiated object (for example, the target 300 or the structure 4, etc.) and the angle with respect to the reference direction to determine the spatial coordinates of the irradiated object. The measuring section 101 includes a distance measuring section 101a and an angle measuring section 101b. The distance measuring section 101a receives distance measuring light, which is a pulsed laser beam emitted by the light source 141, from the object to be irradiated, for example, by reflecting the reflected light from the object to be irradiated and receiving the reflected light by the light receiving section 142. Measure the distance to (slope distance). Note that the distance measuring method is not limited to such a pulse method, and it is also possible to apply a well-known method such as a so-called phase difference method that measures distance based on the number of waves of a laser beam, for example.

The angle measurement unit 101b detects the emission angle of the light emitted to the outside from the measuring device 100A (for example, the vertical angle θ, which will be described later) with respect to the optical axis A, from the inclination angle of the reflection element 16. The reflected light reflected by the irradiated object is guided along the optical path of the emitted light in a direction opposite to the direction in which it was emitted, and enters the light receiving section 142 . The angle measuring section 101b determines the emission angle of the light emitted from the measuring device 100A corresponding to the inclination angle of the reflective element 16 when the light receiving section 142 receives the light.

The measurement storage unit 102 stores various programs such as measurement programs, measurement information 102a (measurement results that correspond to measurement points and coordinates, etc.), GPS time, the size of the measurement device 100A (height, width, depth, etc.), etc. It is configured to be able to store various data.

The measurement communication unit 103 is configured to be able to communicate with an external device such as the surveying device 200, and is, for example, a wireless communication means such as Bluetooth (registered trademark). Note that the measurement communication section 103 may function as a wired communication means via a connection terminal.

The measurement control unit 104 has a function of tilting the reflective element 16 of the measuring device 100A in two axial directions with respect to the optical axis A, and a function of determining the spatial coordinates of the irradiated object. The measurement control unit 104 acquires, stores, and calculates various information such as the angle (horizontal angle and vertical angle) detected by the angle measurement unit 101b and the distance (oblique distance) measured by the distance measurement unit 101a. For example, the obtained results and calculation results are displayed on the measurement storage unit 102. In addition, the measurement control unit 104 receives an operation instruction from a terminal (not shown) via the measurement communication unit 103, and controls drive control of each part of the measurement device 100A in response to the operation instruction or in accordance with the calculation result. conduct.

FIG. 4 is a longitudinal aberration diagram of the free-form surface 151A. The vertical axis indicates the pupil diameter, which is the radial direction of the pupil. The origin of the vertical axis corresponds to the optical axis A of the free-form surface 151A in FIG. 3, and the positive and negative directions of the vertical axis are from the optical axis A of the free-form surface 151A to the right and left directions in FIG. Corresponds to each. Further, the horizontal axis indicates the image plane axis (optical axis that is the principal ray axis). The origin of the horizontal axis corresponds to a reference plane perpendicular to the optical axis A (for example, a plane including the intersection of the free-form surface 151A and the optical axis A, or a plane at a position between the free-form surface 151A and the reflective element 16). , the positive direction of the horizontal axis corresponds to the direction of the optical axis A from the reflective element 16 toward the light source 141 (upward in FIG. 3).

Since the light emitted from the optical axis A side of the free-form surface 151A has a large aberration, it is irradiated onto the irradiated object at a position on the optical axis A side, and is emitted from a position radially outward from the optical axis A of the free-form surface 151A. The light has small aberrations and is irradiated onto the irradiated object at a position radially outward from the optical axis A.

In addition, in this embodiment, the light ray imaging relationship is schematically expressed and shown using a longitudinal aberration diagram, but the shape of the free-form surface 151A is set appropriately and other measurement devices different from the measurement device 100A can be used. may be configured. For example, the free-form surface 151A may have a shape that has a uniform angle conversion rate over the entire pupil (the entire reflective surface), or a shape that has a uniform pitch (for example, the surface of the floor 41 shown in FIG. 1) on the projection surface (for example, the surface of the floor 41 shown in FIG. It is possible to freely set the angle conversion efficiency according to the use and purpose, such as changing the angle conversion efficiency so that Therefore, even if the tilting control of the reflective element 16 (for example, MEMS) is performed uniformly, the angle conversion rate (or angle conversion direction) of the light beam emitted from the measuring device 100A can be set arbitrarily. can.

Next, in the system 1 including the detection section 14 including the light source 141 and the light receiving section 142, the reflection element 16, the free-form surface 151A arranged annularly around the optical axis A of the detection section 14, and the measurement control section 104, An example of a measurement method (operation example) will be explained.

The measurement control unit 104 causes the light (scan light) to be emitted from the light source 141 of the measurement device 100A shown in FIG. Light emitted from the light source 141 is guided along the optical axis A from the detection section 14 through the opening 152 and toward the reflection element 16 . When the reflective element 16 reflects the light emitted from the light source 141 around the optical axis A, the free-form surface 151A reflects the light reflected by the reflective element 16 to the irradiated object side via the cover member 13.

The measurement control unit 104 causes the light receiving unit 142 to receive the light reflected from the irradiated object (return light) via the free-form surface 151A and the reflection element 16, and determines the space of the irradiated object from the round trip time and the emission direction of the light. Detect location. Furthermore, the measurement control unit 104 detects the reference coordinates of the target 300 by measuring the target 300, which is a known point provided as an irradiation object, and stores it in the measurement storage unit 102 as measurement information 102a. The measurement control unit 104 has a function of calculating the relative position between the reference coordinates and other irradiated objects to obtain the spatial coordinates of the other irradiated objects. For example, the measurement control unit 104 calculates relative coordinates (or position vectors) from the reference coordinates to measurement points of other irradiated objects, and calculates the absolute coordinates of any measurement point by adding the relative coordinates to the reference coordinates. be able to.

FIG. 5 is a diagram showing an example of a scanning range by the measuring device 100A. In FIG. 5, the floor 41 of the structure 4 is irradiated with light emitted from the measuring device 100A. The light emitted from the measuring device 100A is directed to a non-scannable area of a predetermined solid angle φ (corresponding to double the inclination angle of the emitted light with respect to the optical axis A) centered on the optical axis A corresponding to directly below the measuring device 100A. Although the beam 411 is not irradiated, it is possible to irradiate a scannable area 412 having a solid angle φ or more and a vertical angle θ=90 degrees or less from the optical axis A. FIG. 5 shows an irradiated area 412a that is irradiated with scanning light around a predetermined vertical angle θ and an unirradiated area 412b that is not irradiated with light.

In addition, in the measuring device 100A, the measurement control unit 104 scans the irradiation area 412a around the optical axis A (clockwise in a plan view of the floor 41 in FIG. 5) with the emitted light, while scanning the emitted light with respect to the optical axis A. It scans in the far and near directions. For example, the direction in which the light emitted by the measuring device 100A is emitted is controlled so that it scans from the minimum value of the vertical angle θ to the maximum value, and when the vertical angle θ reaches the maximum value, returns to the minimum value and repeats the process. .

As described above, in the system 1 of the first embodiment, since the free-form surface 151A is formed in a convex curved shape, even when the tilt angle of the reflective element 16 is small, the light emitted from the measuring device 100A can be emitted at a wide angle and the irradiated object can be illuminated. can be scanned. Since the free-form surface 151A has a convex reflective surface, the measuring device 100A cannot cover the optical axis A (that is, as shown in FIG. 5, the scannable area 412 including the unscannable area 411 is (formed in a donut shape), the scannable angular range (Scan range) is expanded. Therefore, the measuring device 100A can be easily configured and is useful even when measurement performance is not important. Therefore, the measuring device 100A can detect the spatial position of objects located over a wide range with a simple configuration.

(Embodiment 2)
Next, a second embodiment will be described. In this embodiment, an example will be described in which a measuring device 100B (100) is used instead of the measuring device 100A of the first embodiment. FIG. 6 is a configuration diagram of the measuring device 100B. The measuring device 100B in FIG. 6 schematically shows a vertical cross section cut along the upper and lower central axes, with some end faces shown. The measuring device 100B can also be applied to the system 1 shown in FIG. In addition, in the description of the measuring device 100B, the same components as the measuring device 100A are given the same reference numerals, and the description thereof will be omitted or simplified.

The measuring device 100B includes a reflecting mirror 15B (15) having a free-form surface 151B (151), which is a deflection section, instead of the above-mentioned reflecting mirror 15A having the free-form surface 151A.

The free-form surface 151B is formed axially symmetrically with respect to the optical axis A, and has a concave curved shape when viewed in cross section as shown in FIG. The free-form surface 151B is formed into an ellipsoidal shape. Furthermore, the free-form surface 151B has an opening 152 extending vertically through the optical axis A, and is arranged annularly around the optical axis A. The free-form surface 151B is arranged between the detection section 14 and the reflective element 16, as shown in FIG.

Furthermore, the free-form surface 151B of the reflecting mirror 15B reflects the light reflected by the reflecting element 16 toward the irradiated object (for example, the structure 4 shown in FIG. 1 or objects around the structure 4). In this embodiment, since the free-form surface 151B is formed in a concave curved shape toward the reflective element 16, the light emitted from the light source 141 passes through the reflective element 16, the free-form surface 151B, and the cover member 13 to the measuring device. The light is emitted to the outside toward the lower side of 100B.

FIG. 7 is a longitudinal aberration diagram of the free-form surface 151B. The vertical axis indicates the pupil diameter, which is the radial direction of the pupil. The origin of the vertical axis corresponds to the optical axis A of the free-form surface 151B in FIG. 6, and the positive and negative directions of the vertical axis are from the optical axis A of the free-form surface 151B to the right and left directions in FIG. Corresponds to each. Further, the horizontal axis indicates the image plane axis (optical axis that is the principal ray axis). The origin of the horizontal axis corresponds to a reference plane perpendicular to the optical axis A (for example, a plane including the intersection of the free-form surface 151B and the optical axis A, or a plane at a position between the free-form surface 151B and the reflective element 16). , the positive direction of the horizontal axis corresponds to the direction of the optical axis A from the reflective element 16 toward the light source 141 (upward in FIG. 7).

The free-form surface 151B of the measuring device 100B is formed into an ellipsoidal concave curved surface. In this embodiment, since the reflective element 16 is located at one focal point f1 of the free-form surface 151B, the light guided from the reflective element 16 and reflected at any position on the free-form surface 151B is not limited to the elliptical sphere. The light is focused on one focal point f2 (see FIG. 8). Therefore, as shown in FIG. 7, the aberration characteristic of the measuring device 100B is that the light is focused at a position -F2 corresponding to the focal point f2, regardless of the position of the pupil axis.

Note that the light emitted from the measuring device 100B is condensed at the focal point f2 and then widened (see FIG. 8). Light can be irradiated onto an irradiated object located within the solid angle φ range.

As described above, in the system 1 using the measuring device 100B of the second embodiment, the free-form surface 151B is formed into a concave curved shape. Therefore, the measuring device 100B can emit light to a region around the optical axis A including on the optical axis A, and can detect the spatial position of an object located in a wide range with a simple configuration.

(Embodiment 3)
Next, Embodiment 3 will be described. In this embodiment, an example will be described in which a measuring device 100C (100) is used instead of the measuring device 100A of the first embodiment. FIG. 9 is a configuration diagram of the measuring device 100C. The measuring device 100C in FIG. 9 schematically shows a vertical cross section cut along the upper and lower central axes, with some end faces shown. The measuring device 100C can also be applied to the system 1 shown in FIG. In addition, in the description of the measuring device 100C, the same components as the measuring device 100A are given the same reference numerals, and the description thereof will be omitted or simplified.

The measuring device 100C includes a reflecting mirror 15C (15) having a free-form surface 151C (151), which is a deflection section, instead of the above-mentioned reflecting mirror 15A having the free-form surface 151A.

The free-form surface 151C is formed axially symmetrically with respect to the optical axis A and has a concave curved shape when viewed in cross section as shown in FIG. Furthermore, the free-form surface 151C has an opening 152 extending vertically through the optical axis A, and is arranged in an annular shape around the optical axis A. The free-form surface 151C has a first reflection area 151-1 located on the optical axis A side with its normal line directed outward in the radial direction of the optical axis A, and a first reflection area 151-1 located on the radial outside of the optical axis A (first reflection area 151C). A second reflective region 151-2 (located outside the region 151-1) has a normal line directed inward in the radial direction of the optical axis. The free-form surface 151C is arranged between the detection section 14 and the reflective element 16, as shown in FIG.

Further, the free-form surface 151C of the reflecting mirror 15C reflects the light reflected by the reflecting element 16 toward the irradiated object (for example, the structure 4 shown in FIG. 1 or objects around the structure 4). In this embodiment, the free-form surface 151C is formed in a donut shape with a concave curved ring concave toward the reflective element 16, so that the light emitted from the light source 141 is transmitted to the reflective element 16, the free-form surface 151C, and the cover. The light is emitted to the outside via the member 13 toward the lower side of the measuring device 100C.

FIG. 10 is a longitudinal aberration diagram of the free-form surface 151C. The vertical axis indicates the pupil diameter, which is the radial direction of the pupil. The origin of the vertical axis corresponds to the optical axis A of the free-form surface 151C in FIG. 9, and the positive and negative directions of the vertical axis are from the optical axis A of the free-form surface 151C to the right and left directions in FIG. Corresponds to each. Further, the horizontal axis indicates the image plane axis (optical axis that is the principal ray axis). The origin of the horizontal axis corresponds to a reference plane perpendicular to the optical axis A (for example, a plane including the intersection of the free-form surface 151C and the optical axis A, or a plane at a position between the free-form surface 151C and the reflective element 16). , the positive direction of the horizontal axis corresponds to the direction of the optical axis A from the reflective element 16 toward the light source 141 (upward in FIG. 9).

The free-form surface 151C of the measuring device 100C is formed into an annular concave curved surface. In the free-form surface 151C of this embodiment, the first reflective area 151-1 reflects the light from the reflective element 16 in the radial direction outward from the optical axis A in the diffusive direction, and the second reflective area 151-2 reflects the light from the reflective element 16. The light is reflected from the optical axis A in the radially inner condensing direction.

FIG. 11 is a diagram showing an example of a scanning range by the measuring device 100C. The light emitted from the measuring device 100C is transmitted within a scannable region 412c having a predetermined solid angle φ1 or more and less than a solid angle φ2 centered on the optical axis A, and within a scannable region 412d and a solid angle less than a solid angle φ1. It is possible to irradiate a scannable region 412d and a scannable region 412e whose diameter is φ2 or more and whose vertical angle θ from the optical axis A is a predetermined angle or less (for example, about 90 degrees or less). That is, in FIG. 11, the measuring device 100C can continuously scan a wide range of scannable regions 412d, 412c, and 412e including the vicinity of the optical axis A.

In the measuring device 100C, the reflection element 16 converts the light L1 (see FIG. 9) incident from the light source 141 from the first reflection area 151-1 on the optical axis A side to the second reflection area 151-2 spaced apart from the optical axis A. When it is moved, the irradiation position moves in the first radial direction D1 from the outside in the radial direction to the inside with respect to the optical axis A, as shown in FIG. The light L1 passes over the optical axis A from a position spaced apart from the optical axis A along the first radial direction D1, and then moves away from the optical axis A again. Similarly, the light L2 passes along the second radial direction D2 from a position away from the optical axis A, passes over the optical axis A, and then moves away from the optical axis A again. Therefore, when the irradiation position of the light emitted from the measurement device 100C moves from the first reflection area 151-1 to the second reflection area 151-2 on the free-form surface 151C, it is emitted axially symmetrically with the light L2 in FIG. The light L2 overlaps the irradiation position of the light L2 in a dotted manner on the optical axis A, and then moves away from the optical axis A again in the second radial direction D2.

In the measurement device 100C, the measurement control unit 104 scans the irradiation area 412a around the optical axis A (clockwise in plan view of the floor 41 in FIG. 5) with the emitted light, and scans the emitted light in the far and near direction with respect to the optical axis A. is being scanned.

As described above, in the system 1 using the measuring device 100C of the third embodiment, the free-form surface 151C is formed into a donut shape with a concave curved annular depression. Therefore, the measuring device 100C can scan on and around the optical axis A, and can also scan a wider range. Therefore, the measuring device 100C can detect the spatial position of objects located over a wide range with a simple configuration. Furthermore, since the measuring device 100C has a condensing effect on the light flux (signal light) that is scattered and returned by the object to be measured, it is possible to measure a wide area while maintaining signal quality (or signal quality). I can do it.

(Embodiment 4)
Next, Embodiment 4 will be described. In this embodiment, an example will be described in which a measuring device 100D (100) is used instead of the measuring device 100A of the first embodiment. FIG. 12 is a configuration diagram of the measuring device 100D. The measuring device 100D in FIG. 12 schematically shows a vertical cross section cut along the upper and lower central axes, with some end faces shown. The measuring device 100D can also be applied to the system 1 shown in FIG. In addition, in the description of the measuring device 100D, the same components as the measuring device 100A are given the same reference numerals, and the description thereof will be omitted or simplified.

The measuring device 100D includes an optical fiber light guiding section 17 having a plurality of optical fibers 171 and a microlens array 18 instead of the reflecting mirror 15A having the free-form surface 151A described above. The optical fiber light guide section 17 functions as a deflection section that deflects the traveling direction of light in an arbitrary direction. Note that in FIG. 12, the optical fiber 171 is schematically shown.

The optical fiber light guide section 17 is arranged so as to bundle a plurality of optical fibers 171. The optical fiber 171 of this embodiment allows the light emitted from the reflective element 16 to enter from one end 171a and exit from the other end 171b, thereby guiding the light to the microlens array 18 side. Light emitted from the lens array 18 side is made to enter from one end 171b and emitted from the other end 171a, thereby being guided to the reflective element 16 side. One end 171a (input/output end) of the optical fiber 171 on the side of the reflective element 16 is arranged in a one-dimensional direction (for example, in the left-right direction in FIG. 12 or in a circumferential shape (doughnut shape or annular shape) around the optical axis A). Arranged. Further, the other end 171b (input/output end) of the optical fiber 171 on the microlens array 18 side is arranged in a spherical shape in a two-dimensional direction.

The microlens array 18 has a positive lens power that guides the light emitted from the optical fiber light guide section 17 to the outside of the measurement device 100D, or guides the light incident from the outside to the optical fiber light guide section 17. A plurality of microlenses 181 are included. Each microlens 181 is formed into a circular shape when viewed in the optical axis direction, as shown in an enlarged view of section P when the cover member 13 of the measuring device 100D is viewed from the outside. Note that each microlens 181 is not limited to a circular shape when viewed in the optical axis direction, but may have another shape, for example, is formed in a honeycomb shape. The end 171b of the optical fiber 171 on the microlens array 18 side and the microlens array 18 are arranged in a spherical shape.

Here, the optical path of the measuring device 100D will be explained. The measurement control unit 104 emits light (scan light) from the light source 141 of the measurement device 100D shown in FIG. Light emitted from the light source 141 is guided along the optical axis A from the detection unit 14 toward the reflective element 16 above. The reflective element 16 reflects the light emitted from the light source 141 around the optical axis A. The reflective element 16 reflects the light guided from the detection unit 14 so that the light is sequentially incident on the end portions 171a of the optical fibers 171 arranged in a line in a one-dimensional direction. For example, the end portions 171a of the optical fiber 171 are oriented (arranged) in a circumferential manner, and the reflective element 16 can emit light around the optical axis A so that the light is sequentially incident on these end portions 171a. Note that the end portions 171a of the optical fibers 171 may be arranged in a two-dimensional direction (for example, in a spherical shape).

Light incident from the end 171a exits toward the microlens array 18 from the opposite end 171b. The light incident on each microlens 181 of the microlens array 18 is emitted to the outside of the measuring device 100D. The light emitted from the microlens array 18 to the outside is irradiated onto an irradiated object (not shown).

The measurement control unit 104 also directs the light reflected from the irradiated object (return light) to the light receiving unit 142 through the microlens array 18, the optical fiber 171, and the reflective element 16 along the opposite direction to the optical path at the time of emission. The spatial position of the object to be irradiated is detected from the round trip time and the direction of emission of the light. The return light reflected by the irradiated object is collected by each microlens 181 of the microlens array 18 and enters the end portion 171b of the optical fiber. Therefore, the returned light can be efficiently collected (combined) and guided to the light receiving section 142. Furthermore, the measurement control unit 104 detects the reference coordinates of the target 300, which is a known point provided as an irradiated object. The measuring device 100A can perform other operations for acquiring point cloud data in the same manner as the measuring device 100A described in the first embodiment.

As described above, the measuring device 100D of the fourth embodiment can guide the light emitted from the light source 141 side by the optical fiber light guiding section 17 so as to have a wider angle than the emission angle by the reflecting element 16. Therefore, the measuring device 100D can detect the spatial position of objects located over a wide range with a simple configuration.

In addition, in the first to fourth embodiments, the measurement devices 100A to 100D (100) have been described as having a control section that detects the spatial position of the irradiated object from the round trip time and the emission direction of the light. A device or device (for example, a device or device not shown that is communicably connected to the surveying device 200, the measuring device 100, or the surveying device 200) may include a control unit.

As described above, in Embodiments 1 to 4, the detection section 14 including the light source 141 and the light receiving section 142, the reflection element 16 that reflects the light emitted from the light source 141 around the optical axis A of the detection section 14, and the A deflection unit (151, 17) is arranged to deflect the light reflected by the reflection element 16 toward the irradiated object by reflection, and a deflection unit (151, 17) and the reflection element The system 1 and the measuring device 100 have been described, which include a control unit (104) that receives light by the light receiving unit 142 via the light receiving unit 16 and detects the spatial position of the irradiated object from the round trip time and emission direction of the light.

Further, the detection section 14 including the light source 141 and the light receiving section 142, the reflection element 16, the deflection section (151, 17) arranged in an annular shape around the optical axis A of the detection section 14, and the control section (104) are provided. A measuring method in a system 1 comprising: a reflective element 16 reflects light emitted from a light source 141 around an optical axis A, and a deflection section (151, 17) directs the light reflected by the reflective element 16 to the side of an irradiated object. The control unit (104) causes the light receiving unit 142 to receive the light reflected from the irradiated object via the deflection unit (151, 17) and the reflective element 16, and determines the round trip time and emission direction of the light. A measurement method for detecting the spatial position of an irradiated object has been explained.

The measuring devices 100A to 100D can emit light at an angle different from the angle at which the light is reflected by the reflective element 16 to perform point group measurements of the surrounding space. Therefore, according to the measuring devices 100A to 100D (100), system 1 (measuring system), and measuring method, by appropriately setting the configuration of the deflection section, the spatial position of an object located in a wide range in any direction can be determined with a simple configuration. can be detected with

Furthermore, in Embodiments 1 to 4, the light emitted from one light source 141 is emitted in a single stroke around the object to be measured in a substantially hemispherical scanning range. Therefore, the measuring device 100 can be configured simply and compactly.

(Embodiment 5)
Next, Embodiment 5 will be described. In this embodiment, a configuration will be described in which the measuring device 100A (100) described in Embodiment 1 functions as a projection device having a function of guiding a worker or the like. In addition, in the description of this embodiment, the same reference numerals are given to the same components as in other embodiments, and the description thereof will be omitted or simplified. Further, any of the other measuring devices 100B to 100D (100) may be provided with the configuration having the above-mentioned guidance function.

FIG. 13 is a configuration diagram of a projection system using system 1. The measuring device 100A includes a directivity imparting section that imparts directivity to the light L3 projected onto the irradiated object. The directivity imparting unit has a configuration that imparts directivity to the cross-sectional shape of the light beam emitted from the light source 141 (the cross-sectional shape may include a pattern or color of the light beam in addition to the contour shape), or , a configuration in which the measurement control unit 104 projects a directional projection image (also referred to as a "projection pattern") by multiple projections, or a combination thereof.

First, a case where the directivity imparting section is configured by the light source 141 will be described. The light source 141 configured as a directivity imparting section forms the beam cross-sectional shape of the emitted light asymmetrically. Asymmetry here refers to a state in which the projected image 413 has directionality when the light L3 is projected onto the projection target, and includes axial symmetry and point symmetry (n-fold symmetry that is visible to the operator) (n is an integer greater than 1)) may be included. The cross-sectional shape of the light L3 emitted from the light source 141 is an optical member such as a shutter, slit, filter, mesh, liquid crystal shutter, DMD (digital micromirror lens), etc. provided inside the light source 141 or on the optical path of the detection unit 14. It can be formed by blocking part of the light using the light adjusting section. This light adjusting section may be configured to be arbitrarily disposed on the optical path, or may not be disposed when performing the point cloud measurements described in Embodiments 1 to 4. Note that in a configuration in which the directivity imparting section imparts directivity to the cross-sectional shape of the light beam emitted from the light source 141, the projection Since the azimuth of the image always points in the radial direction and cannot be used to determine the azimuth or direction, the detection unit 14 is fixedly arranged in the space in which the measuring device 100A is installed.

The cross-sectional shape of the light is, for example, two-fold symmetrical so that two orthogonal axes can be visually distinguished. The light L3 emitted by the measuring device 100A shown in FIG. A projected image 413a (413) (also referred to as a "footprint") is projected (see also the projected image 413a in FIG. 14). Note that FIG. 13 shows an example in which the projected image 413a moves on a circular scanning path 414 around the optical axis A, and the measuring device 100A intermittently emits the light L3 to intermittently move the projected image 413a. can be displayed.

Since the projected image 413a has a long axis and a short axis, a worker or the like can visually distinguish between the two directions. Therefore, one direction (for example, the long axis direction) of the projected image 413a is set to face the north-south direction of the land, and the other direction (for example, the short axis direction) of the projected image 413a is set to face the east-west direction of the land. By setting this to , it is possible for workers etc. to easily grasp the direction.

Note that the projected image 413a is not limited to intermittent projection, and may be projected in an annular manner so as to be connected along the scanning path 414 (not shown). Even in this case, since the projected image 413a is projected onto the floor 41, which is the projection target, in a directional shape having an approximately elliptical outer diameter and inner diameter as a whole, it is easy for the operator etc. to direction).

Further, the projected image 413b (413) shown in FIG. 14 is an example in which a plurality of adjacent shapes of a circle and an equilateral triangle are combined to impart directivity to the entire projected image 413b. Further, the projected image 413c (413) shown in FIG. 15 is an example in which a plurality of adjacent circular shapes (or ellipsoidal shapes) of different sizes are combined to impart directivity to the projected image 413c as a whole. . The projected image 413b and the projected image 413c are both formed asymmetrically. Since the projected image 413b and the projected image 413c are formed asymmetrically, the direction in which they are directed (for example, in the case of the projected image 413b, the upward direction in FIG. 14 where the top of the equilateral triangle is located, or the projected image 413c) In this case, the operator or the like can easily grasp the direction (or direction) by using the reference direction (slightly downward to the right in FIG. 14, where the large circular shapes to the small circular shapes are arranged).

Further, a projected image 413d (413) shown in FIG. 15 shows an example in which characters (hiragana characters in this embodiment) are arranged within the frame of a regular rectangular figure to give directionality to the entire image. The projected image 413d is formed asymmetrically. Therefore, an operator or the like can easily grasp the direction (or direction) by using the direction in which the figure is oriented (for example, above the characters) as the reference direction. Note that the type of characters displayed on the projected image 413d may be other types than hiragana, or may be a combination of multiple types or the same type of characters. Further, a plurality of characters may be displayed on the projected image 413d.

FIG. 16 is a diagram showing an example in which a projection image 413d is projected onto a wall surface 415 when the directivity imparting section is the light source 141. FIG. 16 shows in what direction the projected image 413d is projected onto the wall surface 415 when the measuring device 100A is located in a space surrounded by walls, such as indoors of a building. Furthermore, an example is shown in which the wall surface 415 is formed in a cylindrical shape. The projected image 413d is vertically and horizontally reversed (in other words, rotated by 180 degrees) at opposing positions in a first direction D3 centered on the optical axis A and a second direction D4 perpendicular to the first direction D3. ) is projected. In the example of FIG. 16, the back in the first direction D3, which is the reference direction, is made to match the direction of the upper position of the character. Therefore, a worker or the like in the space of the wall surface 415 can easily grasp the direction (or direction) by checking the direction of any of the projected images 413d projected on the wall surface 415.

Note that although the projected images 413a to 411d in FIGS. 13 to 16 are shown enlarged for convenience of explanation, the actual size or shape ratio may be different from these.

Next, a case where the directivity imparting section is configured by the measurement control section 104 will be described. The measurement control unit 104 configured as a directivity imparting unit controls the measurement device 100A to emit light L3 around the optical axis A in a plan view of the floor 41 in FIG. While scanning also in the radial direction, a directional projection image 413e is projected by multiple projections. The projected image 413e of this embodiment is, for example, formed by a straight arrow and has directivity, as shown in FIG.

By scanning the light L3 multiple times to form a projected image, the projected image 413e can be projected in any size or shape regardless of the cross-sectional width or shape of the light L3.

In the fifth embodiment, an example in which the measurement device 100 functions as a projection device has been described, but the measurement device 100 may be configured as a projection device without the point cloud measurement function of the first to fourth embodiments.

Furthermore, the shapes of the projected images 413a to 411d are not limited to the modes described in this embodiment. For example, the projected image 413 may have directionality in color or pattern. The projected image 413 preferably has a shape that is asymmetrical with respect to two axes, the up-down direction and the left-right direction, but may be configured asymmetrically with respect to one axis in the up-down direction and the left-right direction.

As described above, in the fifth embodiment, the light source 141, the reflective element 16 that reflects the light emitted from the light source 141 around the optical axis A of the light source 141, and the reflective element 16 arranged around the optical axis A and reflected by the reflective element 16. A projection device (measuring device) comprising a deflecting section (151, 17) that deflects light toward the irradiated object by reflection, and a directivity imparting section (141, 104) that gives directionality to the light projected onto the irradiated object. The apparatus 100) has been described.

In addition, in the fifth embodiment, the light source 141, the reflective element 16, the deflection section (151, 17) arranged annularly around the optical axis A of the light emitted from the light source 141, and the directivity imparting section (141, 104) A projection method in a projection device (measuring device 100) comprising However, a projection method has been described in which the light reflected by the reflective element 16 is reflected toward the irradiated object, and the directivity imparting section (141, 104) imparts directionality to the light projected onto the irradiated object.

Thereby, the projection device (100) and the projection method can guide the worker to specific coordinates. Since the worker can easily visually confirm the approximate direction, the worker can grasp the current position or the direction to a specific work place, and can improve work efficiency. Further, the position or coordinates of piling may be displayed by transferring the drawing information alone or together with the projected image 413 to the space to be constructed.

This concludes the description of the embodiment of the present disclosure, but aspects of the present disclosure are not limited to this embodiment.

1 System 2 Surveying device 4 Structure 12 Main body 13 Cover member 14 Detection section 15 (15A to 15C) Reflection mirror 16 Reflection element 17 Optical fiber light guide 18 Microlens array 41 Floor 42 Pillar 100 (100A to 100D) Measuring device 101 Measuring section 101a Distance measuring section 101b Angle measuring section 102 Measurement storage section 102a Measurement information 103 Measurement communication section 104 Measurement control section 141 Light source 142 Light receiving section 151 (151A to 151C) Free-form surface 151-1 First reflective area 151-2 Second Reflection area 152 Opening 161 Base 171 Optical fiber 171a End 171b End 181 Microlens 200 Surveying device 201 Surveying section 201a Distance measuring section 201b Angle measuring section 202 Surveying storage section 202a Design information 202b Surveying information 203 Surveying communication section 204 Surveying control Section 205 Display section 300 Target 411 Unscannable area 412 Scannable area 412a Irradiated area 412b Unirradiated area 412c to 412e Scannable area 413 (413a to 413e) Projected image 414 Scanning path 415 Wall surface A Optical axis D1 First radial direction D2 Two radial directions D3 First direction D4 Second directions L1 to L3 Light f1 Focus f2 Focus θ Vertical angle φ, φ1, φ2 Solid angle

Claims (17)

a detection unit including a light source and a light receiving unit;
a reflective element that reflects the light emitted from the light source around the optical axis of the detection unit;
a deflection unit that is arranged around the optical axis and deflects the light reflected by the reflection element toward the irradiated object by reflection;
a control unit that causes the light receiving unit to receive the light reflected from the irradiated object via the deflection unit and the reflective element, and detects the spatial position of the irradiated object from the round trip time and emission direction of the light;
A measuring device comprising: a main body section provided with the detection section, a reflection mirror having a free-form surface that is the deflection section, and the control section;
a translucent cover member that supports the reflective element on the optical axis of light emitted from the detection section and is connected to the main body section;
The measuring device according to claim 1, comprising: The measuring device according to claim 1, wherein the control section has a function of detecting reference coordinates of a known point provided as an irradiated object and determining spatial coordinates of other irradiated objects. The measuring device according to claim 1, wherein the deflection section is arranged between the detection section and the reflection element. The measuring device according to claim 1, wherein the free-form surface that is the deflection section is formed axially symmetrically with respect to the optical axis. The measuring device according to claim 1, wherein the deflection section is a free-form surface formed in a convex curved shape when viewed in cross section. The measuring device according to claim 1, wherein the deflection section is a free-form surface formed in a concave curved shape when viewed in cross section. The free-form surface is
a first reflection area that reflects light from the reflection element radially outward from the optical axis;
having a second reflective area outside the first reflective area that reflects the light from the reflective element radially inward from the optical axis;
The measuring device according to claim 7. an optical fiber light guiding section that has a plurality of optical fibers and guides the light emitted from the reflective element;
a microlens array including a plurality of microlenses having positive lens power for guiding light emitted from an optical fiber light guiding section;
Equipped with
The end of the optical fiber on the microlens array side and the microlens array facing the end are arranged in a spherical shape.
The measuring device according to claim 1. The plurality of optical fibers have one input/output end on the reflective element side arranged in a one-dimensional direction, and the other one input/output end on the free-form surface side arranged in a two-dimensional direction. 9. The measuring device according to 9. a main body section provided with the detection section, a reflection mirror having a free-form surface that is the deflection section, and the control section;
a translucent cover member that supports the reflective element on the optical axis of light emitted from the detection section and is connected to the main body section;
Equipped with
The control unit has a function of detecting reference coordinates of a known point provided as an irradiated object and obtaining spatial coordinates of other irradiated objects,
The free-form surface is disposed between the detection section and the reflective element and is formed axially symmetrically with respect to the optical axis.
The measuring device according to claim 1. The measuring device according to claim 11, wherein the free-form surface is formed in a convex curved shape when viewed in cross section. The measuring device according to claim 11, wherein the free-form surface is formed in a concave curved shape when viewed in cross section. The free-form surface is
a first reflection area that reflects light from the reflection element radially outward from the optical axis;
having a second reflective area outside the first reflective area that reflects the light from the reflective element radially inward from the optical axis;
The measuring device according to claim 11. an optical fiber light guiding section that has a plurality of optical fibers and guides the light emitted from the reflective element;
a microlens array including a plurality of microlenses having positive lens power for guiding light emitted from an optical fiber light guiding section;
Equipped with
The end of the optical fiber on the microlens array side and the microlens array facing the end are arranged in a spherical shape.
The measuring device according to claim 11. a detection unit including a light source and a light receiving unit;
a reflective element that reflects the light emitted from the light source around the optical axis of the detection unit;
a deflection unit arranged annularly around the optical axis and deflecting the light reflected by the reflection element toward the irradiated object by reflection;
a control unit that causes the light receiving unit to receive the light reflected from the irradiated object via the deflection unit and the reflective element, and detects the spatial position of the irradiated object from the round trip time and emission direction of the light;
A measurement system equipped with. A measurement method in a measurement system comprising a detection section including a light source and a light receiving section, a reflection element, a deflection section arranged annularly around the optical axis of the detection section, and a control section,
the reflective element reflects the light emitted from the light source around the optical axis;
The deflection unit deflects the light reflected by the reflection element toward the irradiated object by reflection,
The control section causes the light receiving section to receive the light reflected from the irradiated object via the deflection section and the reflective element, and detects the spatial position of the irradiated object from the round trip time and the emission direction of the light. do,
Measuring method.

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